摘要:
A process for producing a strip removes photoresist and extraneous deposits of polymer residue on the top surface and sidewalls of a post-metal etch wafer. The photoresist and residue are processed simultaneously by a chemical mechanism comprising reactive species derived from a microwave-excited fluorine-containing downstream gas, and a physical mechanism comprising ion bombardment that results from a radio frequency excited plasma and accompanying wafer self bias. A vacuum pump draws stripped photoresist and residues from the surface of the wafer and exhausts them from the chamber.
摘要:
A process for producing a strip removes photoresist and extraneous deposits of polymer residue on the top surface and sidewalls of a post-metal etch wafer. The photoresist and residue are processed simultaneously by a chemical mechanism comprising reactive species derived from a microwave-excited fluorine-containing downstream gas, and a physical mechanism comprising ion bombardment that results from a radio frequency excited plasma and accompanying wafer self bias. A vacuum pump draws stripped photoresist and residues from the surface of the wafer and exhausts them from the chamber.
摘要:
A wafer handling robot system (10) operates in a wafer chamber (40) and comprises two independent robot blades, an upper blade (18) surmounting a lower blade (26). A pair of wafers (28, 32) are supported and positioned at the outer ends (78) of the upper and lower blades (18, 26). The upper robot blade (18) keeps an upper wafer (28) at a level just above the level at which the lower robot blade (26) keeps a lower wafer (32). Because the wafers are virtually at the same level, the same wafer lift mechanism can be used in the wafer chamber to lift and remove or replace the wafers on the two blades. By offsetting the height of the wafers by minimal amounts, the throughput of the system can be increased by up to a factor of two over a single robot blade system, particularly if the robot is the limiting factor on throughput. This throughput enhancement represents a substantial gain with a relatively simple and inexpensive addition to the equipment.
摘要:
A roofing safety line engagement assembly includes a plate that has a top side, a bottom side and a perimeter edge. The perimeter edge includes a front edge, a rear edge, a first lateral edge and a second lateral edge. The first lateral edge has a plurality of slots therein. Each of the slots engages a nail extended into a roof. The slots are angled toward the front edge such that an angle between each of the slots and the first lateral edge is less than 60°. A catch is attached to and extends upwardly from the plate. The catch is positioned adjacent to the rear edge and releasably engages a safety line.
摘要:
Disclosed herein is a portable baseball backstop mounted on a vehicle trailer and includes a 3 section fencing unit, with optional fourth section placed above the center portion of the 3 section unit. The backstop is permanently attached or mounted to the trailer and easily placed at the desired location for set up and use by players. The backstop is lifted with the help of a winch/pulley system out of the trailer and set up on the ground with the trailer serving as support system for the backstop. Each of the sections of the 3 section unit are secured in the ground for safe use of the backstop and to eliminate any falling of the backstop during play. The backstop is also secured sufficiently to withstand baseball speeds of about 90+ miles per hour.In particular disclosed herein is a first and second planar fence sections. The first planar fence section is attached to a movable shaft. The movable shaft is pivotally connected to a first end of a trailer. The second planar fence section is attached to the first planar fence section, and the second planar fence section is movable with respect to the first planar fence section. A winch is fixed on a second end of the trailer for lifting the movable shaft from a first position to a second position. A pulley system is attached at the first end of the trailer. A cable wound over the winch is secured to the shaft through the pulley system. The portable baseball backstop assembly is easily transported with the trailer, and assembled for use at a variety of locations. The trailer serves to both secure the backstop and transport it to desired locations.
摘要:
Methods, apparatus, and computer program products for providing interactive services used with a time sensitive interactive application are provided. A request is received for interactive services that corresponds to a program. A program identification (ID) for the program is determined. An interactive application that corresponds to the program is determined based on the program ID, where the interactive application has a corresponding interactive application ID. The interactive application ID that corresponds to the interactive application for the program is provided.
摘要:
A method of adding refrigerant to an air conditioning system. The method includes measuring a first pressure inside of the air conditioning system and a second pressure inside of a container that holds refrigerant being added to the air conditioning system. The method also includes comparing the difference between the two measured pressures to empirical data in order to determine how long to pulse additional refrigerant into the air conditioning system. In addition, an apparatus configured to add refrigerant to an air conditioning system.
摘要:
A refrigerant recovery unit is provided that can recover and recharge refrigerant. The unit is further configured with a pair of service hoses and a refrigerant control circuit operable to receive and transport the refrigerant between the hoses and the storage vessel and to process the refrigerant to substantially remove contaminants from the refrigerant. A fluid connector is provided in fluid communication with the hoses to enable the refrigerant to flow between the hoses and to establish a closed loop through the refrigerant control circuit, and a controller is operatively connected to the refrigerant control circuit and configured to control a flow of the refrigerant through the refrigerant control circuit and through the fluid connector.
摘要:
A method of charging or recharging an air conditioning wherein an initial amount of refrigerant is introduced, followed by additional introductions of refrigerant during injection pulses. The pulse periods are adjusted dynamically during the charging/recharging process based on feedback obtained after each pulse related to how much refrigerant was transferred during the previous pulse. Also, a system for implementing the above-mentioned method.