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公开(公告)号：US06512206B1
公开(公告)日：2003-01-28
申请号：US10032444
申请日：2002-01-02
IPC分类号： F27D1100
CPC分类号： F27B9/063 , F27B9/084 , F27D11/02 , H01L21/67109
摘要： The present invention provides a furnace which heat treats substrates. The furnace includes a heating section and working components. The heating section includes heating coils having spacers disposed within the heating coils where a mass of the heating coils and a mass of the spacers contributes to a mass of the heating section. The working components include a processing chamber and a transport mechanism. The processing chambers facilitates passage of a substrate through the heating section. The transport mechanism transports the substrate through the heating section and into the exit assembly. The heating section mass exceeds a combined mass of the processing chamber, the transport mechanism and the substrate within the heating section.
摘要翻译： 本发明提供一种热处理基板的炉。 该炉包括加热部分和工作部件。 加热部分包括具有设置在加热线圈内的间隔物的加热线圈，其中加热线圈的质量和间隔物的质量贡献于加热部分的质量。 工作部件包括处理室和输送机构。 处理室便于衬底通过加热部分。 输送机构将基板输送通过加热部分并进入出口组件。 加热部质量超过加热部内的处理室，输送机构和基板的组合质量。
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公开(公告)号：US06956489B2
公开(公告)日：2005-10-18
申请号：US10196160
申请日：2002-07-17
CPC分类号： H05B1/0233 , G01N17/00 , H05B1/0291
摘要： A method for monitoring the condition of an electric current-carrying heating element involving installing the heating element in a location and setting the initial composition Ci of the material as a reference baseline at an initial time Ti corresponding to said installation of the heating element. Data is then collected reflecting the subsequent composition Cs of the heating element material after a subsequent time Ts at the installed location and any change in the material composition of the heating element between Ti and Ts is monitored. An alarm is sent when the change reaches a threshold value indicating a possible failure condition. According to one embodiment, an impedance monitor is provided that calculates and compares impedance at the required levels of accuracy to determine changes in material composition. The impedance monitor, or portions thereof may be embedded within a microcontroller for increased portability and functionality.
摘要翻译： 一种用于监视载流加热元件的状态的方法，包括将加热元件安装在一个位置，并将材料的初始组成C i i i N在初始时间T i 对应于所述加热元件的安装。 然后在安装的位置的随后的时间T s之后收集反映加热元件材料的后续组成C'S的数据，并且加热元件的材料组成的任何变化 在T＆lt; I＆gt;和T SUB之间进行监视。 当变化达到指示可能的故障条件的阈值时发送报警。 根据一个实施例，提供阻抗监视器，其计算并比较所需精度水平处的阻抗以确定材料组成的变化。 阻抗监视器或其部分可以嵌入在微控制器内以增加便携性和功能性。
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公开(公告)号：US07293986B2
公开(公告)日：2007-11-13
申请号：US10429834
申请日：2003-05-06
申请人： Kevin B. Peck , Mike D. Soliday , Jim Sanches
发明人： Kevin B. Peck , Mike D. Soliday , Jim Sanches
IPC分类号： F27D15/02
CPC分类号： H01L21/67109 , F27B17/0025 , F27D9/00
摘要： The present invention provides a heat treating process chamber having a housing with a flow passage in communication with a vestibule assembly. The vestibule assembly includes an outer ring with a first groove and an inner ring with a second groove. The first groove is formed in an axially inwardly facing surface of the outer ring. The first groove has a portion open in a radially outer direction and an axially inner direction. The second groove opens in an axially inner direction and is formed in an axially outwardly facing surface of the inner ring. The first and second grooves form a passageway when they are in an axially superimposed relationship. The first groove forms a radially outwardly open end and the second groove forms an axially inwardly facing end of the passageway. The passageway communicates with the flow passage thereby allowing passage of a temperature adjusting medium.
摘要翻译： 本发明提供一种具有壳体的热处理处理室，该壳体具有与前庭组件连通的流动通道。 前庭组件包括具有第一凹槽的外环和具有第二凹槽的内环。 第一槽形成在外环的轴向向内的表面中。 第一凹槽具有在径向外侧方向和轴向内部方向上敞开的部分。 第二凹槽在轴向内部方向上开口并且形成在内圈的轴向向外的表面中。 当它们处于轴向重叠的关系中时，第一和第二槽形成通道。 第一凹槽形成径向向外开口的端部，第二凹槽形成通道的轴向向内的端部。 通道与流路连通，从而允许温度调节介质通过。
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公开(公告)号：US20070290692A1
公开(公告)日：2007-12-20
申请号：US11454922
申请日：2006-06-19
IPC分类号： G01R31/08
CPC分类号： G01R27/08
摘要： Methods to determine an instantaneous resistance value of an electric circuit and a measurement system to determine an instantaneous resistance value of an electric circuit are disclosed. Exemplary embodiments of the method measure an in-situ instantaneous voltage of the circuit and an in-situ instantaneous current of the circuit and calculate the instantaneous resistance. Optional temperature measurement can be included in the method and the calculated instantaneous resistance related to the measured temperature. The method can be applied to phase angle fired loads and to zero-cross (time proportioned) loads.
摘要翻译： 公开了确定电路的瞬时电阻值和确定电路的瞬时电阻值的测量系统的方法。 该方法的示例性实施例测量电路的原位瞬时电压和电路的原位瞬时电流并计算瞬时电阻。 方法中可以包括可选的温度测量和与测量温度相关的计算的瞬时电阻。 该方法可应用于相角点火负载和零交叉（时间成比例）负载。
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公开(公告)号：US07012538B2
公开(公告)日：2006-03-14
申请号：US10619561
申请日：2003-07-16
IPC分类号： B60Q1/00
CPC分类号： H05B1/0233 , G01N17/00 , H05B1/0291
摘要： A method for monitoring the condition of a heating element involving installing the heating element in a location and setting the initial composition Ci of the material as a reference baseline at an initial time Ti corresponding to said installation of the heating element. Data is then collected reflecting the subsequent composition Cs of the heating element material after a subsequent time Ts at the installed location and any change in the material composition of the heating element between Ti and Ts is monitored. An alarm is sent when the change reaches a threshold value indicating a possible failure condition. According to one embodiment, an impedance monitor is provided that calculates and compares impedance at the required levels of accuracy to determine changes in material composition. The impedance monitor, or portions thereof can be embedded within a microcontroller for increased portability and functionality.
摘要翻译： 一种用于监测加热元件的状态的方法，包括将加热元件安装在位置，并将材料的初始组成C i i i i i在初始时间T i i / SUB>对应于加热元件的所述安装。 然后在安装的位置的随后的时间T s之后收集反映加热元件材料的后续组成C'S的数据，并且加热元件的材料组成的任何变化 在T＆lt; I＆gt;和T SUB之间进行监视。 当变化达到指示可能的故障条件的阈值时发送报警。 根据一个实施例，提供阻抗监视器，其计算并比较所需精度水平处的阻抗以确定材料组成的变化。 阻抗监视器或其部分可以嵌入在微控制器内以增加便携性和功能性。
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公开(公告)号：US5517001A
公开(公告)日：1996-05-14
申请号：US429799
申请日：1995-04-27
IPC分类号： F27D1/00 , C30B31/10 , F27B5/04 , F27B5/14 , F27D7/06 , F27D21/00 , H01L21/00 , H01L21/22 , H01L21/31 , F27B5/16
CPC分类号： H01L21/67115 , C30B31/10
摘要： Performance of a high temperature diffusion furnace is enhanced by an improved multi-furnace module design. The furnace is constructed of materials suitable for clean room environments with an adjustable leveling frame assembly. A slide out assembly and heating element alignment mechanism of individual furnace tube modules with a heating element hoist mechanism allows for enhanced maintainability. Heat treatment performance is improved by a sealed heating element with individual furnace module cooling system. Improved thermocouple positioning and composition has also enhanced heat treatment process control and heating element maintainability.
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公开(公告)号：US08785825B2
公开(公告)日：2014-07-22
申请号：US13168662
申请日：2011-06-24
申请人： Kevin B. Peck
发明人： Kevin B. Peck
CPC分类号： H05B3/66
摘要： Spacer for a vertical support structure of a heating element coil includes a mating feature including complimentary components on first opposing sides of the spacer, a cavity, open to second opposing sides of the spacer, and an extension offset from an axis intersecting the mating features, the extension including a pocket sized to fit an individual loop of the heating element coil. The spacer can be incorporated into a support structure for a heating element coil interlocking adjacent loops of the coil so that they are retained in a collinear and concentric arrangement while allowing the loops of the coil to move freely inward and outward from the central axis in unison.
摘要翻译： 用于加热元件线圈的垂直支撑结构的间隔件包括配合特征，其包括在间隔件的第一相对侧上的互补部件，间隔开口至第二相对侧的腔，以及从与配合特征相交的轴线的延伸部偏移， 所述延伸部包括尺寸适合于加热元件线圈的单独回路的口袋。 间隔件可以结合到用于使线圈的相邻环互锁的加热元件线圈的支撑结构中，使得它们保持在共线和同心配置中，同时允许线圈的环从中心轴线一致地自由地向内和向外移动 。
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公开(公告)号：US08539974B2
公开(公告)日：2013-09-24
申请号：US13084968
申请日：2011-04-12
申请人： Kevin B. Peck
发明人： Kevin B. Peck
CPC分类号： F27D7/04 , Y10T137/0318 , Y10T137/5544 , Y10T137/86027 , Y10T137/87788
摘要： A forced fluid switch including a first plenum in communication with a first port; a second plenum in communication with a second port; a third plenum in switched communication with the first plenum and the second plenum and in communication with a third port; a fourth plenum in switched communication with the first plenum and the second plenum and in communication with a fourth port; and wherein the forced fluid switch has at least a first forced fluid path and a second forced fluid path, wherein in the first forced fluid path, the third plenum is in communication with the first plenum and the fourth plenum is in communication with the second plenum, and wherein in the second forced fluid path, the third plenum is in communication with the second plenum and the fourth plenum is in communication with the first plenum. A method is provided for switching forced fluid.
摘要翻译： 强制流体开关，包括与第一端口连通的第一增压室; 与第二个港口通信的第二次全会; 第三次全会与第一次全会和第二次全会交换沟通，并与第三个港口通信; 第四次全会与第一次全会和第二次全会交换沟通，并与第四个港口通信; 并且其中所述强制流体开关具有至少第一强制流体路径和第二强制流体路径，其中在所述第一强制流体路径中，所述第三压力通道与所述第一增压室连通，并且所述第四增压室与所述第二增压室连通 ，并且其中在所述第二强制流体路径中，所述第三集气室与所述第二增压室连通，并且所述第四增压室与所述第一增压室连通。 提供了一种用于切换强制流体的方法。
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公开(公告)号：US07825672B2
公开(公告)日：2010-11-02
申请号：US11454922
申请日：2006-06-19
CPC分类号： G01R27/08
摘要： Methods to determine an instantaneous resistance value of an electric circuit and a measurement system to determine an instantaneous resistance value of an electric circuit are disclosed. Exemplary embodiments of the method measure an in-situ instantaneous voltage of the circuit and an in-situ instantaneous current of the circuit and calculate the instantaneous resistance. Optional temperature measurement can be included in the method and the calculated instantaneous resistance related to the measured temperature. The method can be applied to phase angle fired loads and to zero-cross (time proportioned) loads.
摘要翻译： 公开了确定电路的瞬时电阻值和确定电路的瞬时电阻值的测量系统的方法。 该方法的示例性实施例测量电路的原位瞬时电压和电路的原位瞬时电流并计算瞬时电阻。 方法中可以包括可选的温度测量和与测量温度相关的计算的瞬时电阻。 该方法可应用于相角点火负载和零交叉（时间成比例）负载。
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公开(公告)号：US20100193505A1
公开(公告)日：2010-08-05
申请号：US12697719
申请日：2010-02-01
申请人： Kevin B. Peck
发明人： Kevin B. Peck
CPC分类号： H05B3/62 , Y10T29/49083
摘要： A heating element includes a continuous planar strip and a plurality of mounting members. A path of the continuous strip from a first end to a second end is circuitous and includes a plurality of repeating cycles, each of which includes a plurality of first straight segments, a plurality of second straight segments and a plurality of radiused segments. A length of the first straight segment is greater than a length of the second straight segment and an angular sum of a single cycle of the circuitous path is greater than 360 degrees. The heating element can be incorporated into a heating assembly for, as an example, semiconductor processing equipment.
摘要翻译： 加热元件包括连续的平面条和多个安装构件。 连续带从第一端到第二端的路径是迂回的并且包括多个重复循环，每个重复循环包括多个第一直段，多个第二直段和多个圆弧段。 第一直段的长度大于第二直段的长度，并且迂回路径的单个周期的角度和大于360度。 作为示例，加热元件可以结合到加热组件中，半导体加工设备。
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