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公开(公告)号:US20140203707A1
公开(公告)日:2014-07-24
申请号:US14235380
申请日:2012-07-26
摘要: Provided herein are electron emission devices and device components for optical, electronic and optoelectronic devices, including cantilever-based MEMS and NEMS instrumentation. Devices of certain aspects of the invention integrate a dielectric, pyroelectric, piezoelectric or ferroelectric film on the receiving surface of a substrate having an integrated actuator, such as a temperature controller or mechanical actuator, optionally in the form of a cantilever device having an integrated heater-thermometer. Also provided are methods of making and using electron emission devices for a range of applications including sensing and imaging technology.
摘要翻译: 本文提供了用于光学,电子和光电子器件的电子发射器件和器件部件,包括基于悬臂的MEMS和NEMS仪器。 本发明的某些方面的装置将介质,热释电,压电或铁电薄膜集成在具有集成致动器(例如温度控制器或机械致动器)的基板的接收表面上,任选地呈悬臂装置的形式,其具有集成的加热器 -温度计。 还提供了制造和使用电子发射装置用于一系列应用的方法,包括感测和成像技术。
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公开(公告)号:US09685295B2
公开(公告)日:2017-06-20
申请号:US14235380
申请日:2012-07-26
摘要: Provided herein are electron emission devices and device components for optical, electronic and optoelectronic devices, including cantilever-based MEMS and NEMS instrumentation. Devices of certain aspects of the invention integrate a dielectric, pyroelectric, piezoelectric or ferroelectric film on the receiving surface of a substrate having an integrated actuator, such as a temperature controller or mechanical actuator, optionally in the form of a cantilever device having an integrated heater-thermometer. Also provided are methods of making and using electron emission devices for a range of applications including sensing and imaging technology.
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