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    System and method of using a side-mounted interferometer to acquire position information
    1.
    发明申请
    System and method of using a side-mounted interferometer to acquire position information 失效
    使用侧面安装的干涉仪获取位置信息的系统和方法

    公开(公告)号：US20050185193A1

    公开(公告)日：2005-08-25

    申请号：US10783199

    申请日：2004-02-20

    申请人： William Schluchter ,  Louis Mueller ,  Douglas Woolverton ,  Jeffrey Young ,  Alan Ray ,  David Chu

    发明人： William Schluchter ,  Louis Mueller ,  Douglas Woolverton ,  Jeffrey Young ,  Alan Ray ,  David Chu

    IPC分类号： G01B11/00 ,  G03F7/20 ,  H01L21/027 ,  G01B9/02

    CPC分类号： G03F7/70775

    摘要： A system and method for acquiring position information of a movable apparatus relevant to a specific axis is disclosed. In one embodiment, an interferometer generates first and second beams and various beam-steering members are located to define beam path segments for the two beams, but no beam path segment varies in length in unity with displacements of the movable apparatus along the specific axis. In another or the same embodiment, each beam path segment in which the first beam either impinges or has been reflected from the movable apparatus is symmetrical to a corresponding beam path segment of the second beam. The movable apparatus may be a wafer stage in which the “specific axis” is the exposure axis of a projection lens, but with all optical members which cooperate with the stage being located beyond the ranges of the wafer stage in directions perpendicular to the lithographic exposure axis.

    摘要翻译： 公开了一种用于获取与特定轴相关的可移动装置的位置信息的系统和方法。 在一个实施例中，干涉仪产生第一和第二光束，并且定位各种光束转向构件以限定用于两个光束的光束路径段，但是没有光束路径段随着可移动装置沿特定轴线的位移而在长度上变化。 在另一个或相同的实施例中，其中第一光束撞击或已经从可移动装置反射的每个光束路径段与第二光束的相应光束路径段对称。 可移动装置可以是其中“特定轴线”是投影透镜的曝光轴线的晶片台，但是与垂直于光刻曝光的方向的晶片台的位置超出晶片台的范围的所有光学构件 轴。

    Littrow interferometer
    3.
    发明申请
    Littrow interferometer 失效
    Littrow干涉仪

    公开(公告)号：US20070146722A1

    公开(公告)日：2007-06-28

    申请号：US11316855

    申请日：2005-12-23

    申请人： William Trutna ,  Geraint Owen ,  Alan Ray ,  James Prince ,  Eric Johnstone ,  Miao Zhu ,  Leonard Cutler

    发明人： William Trutna ,  Geraint Owen ,  Alan Ray ,  James Prince ,  Eric Johnstone ,  Miao Zhu ,  Leonard Cutler

    IPC分类号： G01B9/02

    CPC分类号： G01D5/266 ,  G01D5/38

    摘要： An apparatus and method for measuring displacement includes a light beam directed to an interferometer core that splits the light beam into first and second component beams. The first component beam is directed to a diffraction grating at approximately a Littrow angle. A diffraction is received by the interferometer core and is combined with the second component beam. The combination of the first and second component beams is measured to determine displacement of the diffraction grating.

    摘要翻译： 用于测量位移的装置和方法包括指向干涉仪芯的光束，其将光束分成第一和第二分量光束。 第一分量光束以大约Littrow角度被引导到衍射光栅。 衍射由干涉仪芯接收并与第二分量光束组合。 测量第一和第二分量光束的组合以确定衍射光栅的位移。

    Monolithic displacement measuring interferometer
    5.
    发明申请
    Monolithic displacement measuring interferometer 有权
    单片位移测量干涉仪

    公开(公告)号：US20070115478A1

    公开(公告)日：2007-05-24

    申请号：US11286817

    申请日：2005-11-23

    申请人： Alan Ray

    发明人： Alan Ray

    IPC分类号： G01B9/02

    CPC分类号： G01B9/02067 ,  G01B9/02007 ,  G01B9/02051 ,  G01B2290/70

    摘要： An interferometer and corresponding system are provided having several aspects. In a first aspect, there is provided an interferometer adapted to receive separate first and second beams f1 and f2 therein, the interferometer comprising substantially equivalent and separate first and second optical pathways for the first and second beams f1 and f2. In a second aspect, there is provided an interferometer adapted to receive as separate inputs therein first and second beams f1 and f2, where such beams are not mixed or combined until just prior to being output by the interferometer. In a third aspect, an interferometer is provided having one or more beam blockers for intercepting extraneous or undesired light, and keeping such light from contaminating or interfering with separate beams f1 and f2.

    摘要翻译： 提供了具有几个方面的干涉仪和相应的系统。 在第一方面，提供了一种适于在其中接收分离的第一和第二波束f 1和f 2 2的干涉仪，所述干涉仪包括基本上等同且分离的第一和第二光学 第一和第二光束f 1和f 2 2的通路。 在第二方面，提供一种适于在第一和第二光束f 1和f 2 2中接收作为单独输入的干涉仪，其中这种光束不混合或组合直到 就在干涉仪输出之前。 在第三方面，提供一种干涉仪，其具有一个或多个光束阻挡器，用于拦截外来或不期望的光，并且保持这样的光免于污染或干扰单独的光束f 1和f 2， SUB>。