公开(公告)号：US20170167012A1

公开(公告)日：2017-06-15

申请号：US14963636

申请日：2015-12-09

Applicant: Wisconsin Alumni Research Foundation

Inventor： Chang-Beom Eom ,  Jacob P. Podkaminer ,  Jacob J. Patzner

IPC: C23C14/35 ,  H01J37/34 ,  C23C14/34 ,  C23C14/54

CPC classification number: H01J37/3452 ,  C23C14/088 ,  C23C14/225 ,  C23C14/352 ,  C23C14/545 ,  H01J37/32935 ,  H01J37/3405 ,  H01J37/3473

Abstract: Thin film deposition systems with in situ, real-time RHEED monitoring of films deposited via off-axis magnetron sputtering are provided. Also provided are methods of using the systems to grow the films and methods to monitor their growth in real-time. Using the deposition systems, thin films of a sputtered material are grown and monitored in a single vacuum sputtering chamber that houses components of both the magnetron sputtering system and the RHEED system arranged about the substrate onto which the film is grown.