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公开(公告)号:US12180610B2
公开(公告)日:2024-12-31
申请号:US18151550
申请日:2023-01-09
Applicant: Wisconsin Alumni Research Foundation
Inventor: Chang-Beom Eom , Jungwoo Lee , Jieun Kim
Abstract: Apparatus and methods for growing films of complex layered metal oxides with high stoichiometries and high crystal qualities are provided. The layered complex metal oxides include two or more metals and oxygen and have a layered structure. The methods, which are referred to as hybrid pulsed laser deposition (hybrid PLD), synergistically combine the advantages of molecular beam epitaxy (MBE) and pulsed laser deposition (PLD) to grow complex metal oxide films that include metals with very different vapor pressures.
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2.
公开(公告)号:US20240229292A1
公开(公告)日:2024-07-11
申请号:US18151550
申请日:2023-01-09
Applicant: Wisconsin Alumni Research Foundation
Inventor: Chang-Beom Eom , Jungwoo Lee , Jieun Kim
Abstract: Apparatus and methods for growing films of complex layered metal oxides with high stoichiometries and high crystal qualities are provided. The layered complex metal oxides include two or more metals and oxygen and have a layered structure. The methods, which are referred to as hybrid pulsed laser deposition (hybrid PLD), synergistically combine the advantages of molecular beam epitaxy (MBE) and pulsed laser deposition (PLD) to grow complex metal oxide films that include metals with very different vapor pressures.
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