Temperature-Measuring Device
    1.
    发明申请
    Temperature-Measuring Device 有权
    温度测量装置

    公开(公告)号:US20090193887A1

    公开(公告)日:2009-08-06

    申请号:US12348713

    申请日:2009-01-05

    IPC分类号: G01F1/68

    CPC分类号: G01K13/02

    摘要: A temperature-measuring device with a sensing head and a pipe piece is disclosed. The sensing head is embedded in the pipe piece. The pipe piece is provided for conducting a medium whose temperature is detected by the sensing head.

    摘要翻译: 公开了一种具有感测头和管件的温度测量装置。 感测头嵌入管件中。 管件被设置用于传导由感测头检测温度的介质。

    Probe
    3.
    发明授权
    Probe 有权
    探测

    公开(公告)号:US07985021B2

    公开(公告)日:2011-07-26

    申请号:US12279417

    申请日:2007-02-14

    IPC分类号: G01K13/02 G01K1/00 G01K7/00

    CPC分类号: G01K13/02 G01K3/06

    摘要: A probe includes a sensing element and a carrier for the sensing element. The carrier has an integrated device for guiding an air stream to the sensing element, and a long axis perpendicular to a plane defined by the flow direction of the air stream. The probe is substantially symmetric with respect to the plane.

    摘要翻译: 探针包括用于感测元件的感测元件和载体。 载体具有用于将空气流引导到感测元件的集成装置,以及垂直于由气流的流动方向限定的平面的长轴。 探针相对于该平面基本对称。

    PIEZORESISTIVE PRESSURE SENSOR AND PROCESS FOR PRODUCING A PIEZORESISTIVE PRESSURE SENSOR
    4.
    发明申请
    PIEZORESISTIVE PRESSURE SENSOR AND PROCESS FOR PRODUCING A PIEZORESISTIVE PRESSURE SENSOR 审中-公开
    PIEZORESISTIVE压力传感器和制造压力传感器的方法

    公开(公告)号:US20130015537A1

    公开(公告)日:2013-01-17

    申请号:US13514260

    申请日:2010-12-14

    IPC分类号: H01L29/84 H01L21/02

    摘要: A pressure sensor (1) is provided which has a piezoresistive membrane (2) which can be deformed by the action of the pressure of a medium. The membrane (2) is arranged on a carrier substrate (3) and extends over an opening (32) in the carrier substrate (3). The pressure sensor (1) has a protective layer (4) to protect the membrane (2) from direct contact with a medium. The protective layer (4) covers the membrane (2) both in a first region (28) inside the opening (32) and in a second region (29) outside the opening (32). Furthermore, a process for producing a pressure sensor (1) is provided in which the protective layer (4) forms an etch stop for an etching process.

    摘要翻译: 提供压力传感器(1),其具有能够通过介质压力的作用而变形的压阻膜(2)。 膜(2)布置在载体基板(3)上并且在载体基板(3)中的开口(32)上延伸。 压力传感器(1)具有用于保护膜(2)不与介质直接接触的保护层(4)。 保护层(4)在开口(32)内部的第一区域(28)和开口(32)外部的第二区域(29)中都覆盖膜(2)。 此外,提供了一种制造压力传感器(1)的方法,其中保护层(4)形成用于蚀刻工艺的蚀刻停止。

    Probe
    5.
    发明申请
    Probe 有权
    探测

    公开(公告)号:US20090207878A1

    公开(公告)日:2009-08-20

    申请号:US12279417

    申请日:2007-02-14

    IPC分类号: G01K3/00 G01K1/00

    CPC分类号: G01K13/02 G01K3/06

    摘要: A probe includes a sensing element and a carrier for the sensing element. The carrier has an integrated device for guiding an air stream to the sensing element, and a long axis perpendicular to a plane defined by the flow direction of the air stream. The probe is substantially symmetric with respect to the plane.

    摘要翻译: 探针包括用于感测元件的感测元件和载体。 载体具有用于将空气流引导到感测元件的集成装置,以及垂直于由气流的流动方向限定的平面的长轴。 探针相对于该平面基本对称。