公开(公告)号：US20140123810A1

公开(公告)日：2014-05-08

申请号：US14115597

申请日：2012-01-31

申请人： Won Kyu Yoon ,  Seung Ho Yang ,  Gil Su Hong ,  Hong Sik Kim ,  Dong Han Kang

发明人： Won Kyu Yoon ,  Seung Ho Yang ,  Gil Su Hong ,  Hong Sik Kim ,  Dong Han Kang

IPC分类号： B22F9/16

CPC分类号： B22F9/16 ,  B22F9/14 ,  B22F2009/001 ,  B22F2998/10 ,  B22F2999/00 ,  C22C1/0466 ,  Y02P10/24 ,  B22F1/0085 ,  B22F2201/013 ,  B22F1/0088 ,  B22F2201/03 ,  B22F9/04

摘要： The present invention is related to a manufacturing method of high purity and refined Ru (Ruthenium) powder produced by using a waste Ru target. Yield of the target and physical properties of a thin film are improved by producing tremendously refined in which oxygen content of the target is decreased, and a crystal particle size is reduced.In order to obtain these merits, powder having a hollow inside is produced by applying plasma to a waste Ru target. Carbon impurities are selectively removed through a atmospheric heat process and Ru powder is oxidized. Thereby, Ru oxide (RuOx) powder is produced. High purity and refined Ru powder is acquired through a hydrogen atmospheric heat process after pulverizing the produced Ru oxide (RuOx) powder into refined shape.

摘要翻译： 本发明涉及通过使用废Ru靶产生的高纯度和精制的Ru（钌）粉末的制造方法。 通过生产目标的氧含量降低，并且晶粒尺寸减小的极好的精炼来提高目标的产率和薄膜的物理性能。 为了获得这些优点，通过向废物Ru靶施加等离子体来制造具有中空的粉末。 通过大气热处理选择性去除碳杂质，并且Ru粉末被氧化。 由此，生成Ru氧化物（RuOx）粉末。 将生成的Ru氧化物（RuOx）粉末粉碎成精炼形状后，通过氢气大气热处理获得高纯度和精制的Ru粉末。

公开(公告)号：US20140105777A1

公开(公告)日：2014-04-17

申请号：US14113746

申请日：2012-01-31

申请人： Won Kyu Yoon ,  Seung Ho Yang ,  Gil Su Hong

发明人： Won Kyu Yoon ,  Seung Ho Yang ,  Gil Su Hong

IPC分类号： B22F3/12

CPC分类号： B22F3/12 ,  B22F9/04 ,  B22F2009/001 ,  B22F2998/10 ,  B22F2999/00 ,  C23C14/3414 ,  Y02P10/24 ,  B22F1/0088 ,  B22F1/0085 ,  B22F3/14 ,  B22F2003/247 ,  B22F3/15 ,  B22F3/105 ,  B22F2202/13

摘要： The present invention is related to a method for manufacturing Ru powder and a target which are frequently used in a seed layer for forming a magnetic layer. When producing Ru powder and a target by using a conventional wet method, it takes terribly much time to produce powder and to perform dissolution of a waste target and it also required much expensive cost. Further, since large quantity of chemical products were used, an environmental pollution problem such as disposal of waste water was generated. Thus, the present invention is devised to solve such a drawback.In order to improve this problem, the present invention is characterized in that it simply removes surface pollutants and foreign substances on a surface of a waste Ru target by using a chemical method or a mechanical method, Ru is produced by using plasma, refined High purity Ru powder is produced through a heat process and pulverization, and a Ru target of high density by sintering is acquired.

摘要翻译： 本发明涉及一种在用于形成磁性层的籽晶层中经常使用的Ru粉末和靶材的制造方法。 通过使用常规的湿法制造Ru粉末和靶材时，生产粉末和进行废物目标的溶解花费相当多的时间，并且还需要昂贵的成本。 此外，由于使用了大量的化学产品，所以产生废水处理等环境污染问题。 因此，本发明旨在解决这样的缺陷。 为了改善这个问题，本发明的特征在于，通过使用化学方法或机械方法简单地除去Ru Ru靶表面的表面污染物和异物，Ru是通过使用等离子体制造的，精制高纯度 通过热处理和粉碎来制造Ru粉末，通过烧结获得高密度的Ru靶。