公开(公告)号：US20030202735A1

公开(公告)日：2003-10-30

申请号：US10136683

申请日：2002-04-30

Applicant: Xerox Corporation

Inventor： John L. Dunec ,  Eric Peeters ,  Armin R. Volkel ,  Michel A. Rosa ,  Dirk DeBruyker ,  Thomas Hantschel

IPC: H02N010/00 ,  G02B006/26 ,  G02B006/42

CPC classification number: B81B3/0008 ,  B81B3/0021 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0118 ,  B81B2203/058 ,  G02B26/0841 ,  H02N1/002

Abstract: A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode moves too close to the fixed electrode. By repositioning the fixed electrode from being directly underneath the moving electrode, a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.

Abstract translation: 一种MEMS系统，包括可在宽范围的运动中控制的固定电极和悬挂的可移动电极。 在固定电极位于可动电极下方的传统系统中，由于支撑可移动电极的支撑结构在可移动电极移动得太靠近固定电极时，运动范围受到限制。 通过将固定电极重新定位在移动电极的正下方，可以实现更宽范围的可控运动。 宽范围的可控运动在光交换应用中尤其重要。

公开(公告)号：US20030183525A1

公开(公告)日：2003-10-02

申请号：US10115336

申请日：2002-04-01

Applicant: Xerox Corporation

Inventor： Scott A. Elrod ,  Eric Peeters ,  Francisco E. Torres ,  David K. Biegelsen ,  John L. Dunec ,  Alan G. Bell

IPC: G01N027/26 ,  G01N027/447

CPC classification number: B01F13/0071 ,  B01F5/0085 ,  B01F13/0076 ,  B01J2219/0036 ,  B01J2219/00527 ,  B01J2219/00653 ,  B01L3/502792 ,  B01L2300/089 ,  B01L2400/0415 ,  B01L2400/0427 ,  C40B60/14 ,  G02B26/005

Abstract: A device for effecting motion of liquid droplets on a surface through the use of electrostatic field force includes a single substrate on which are disposed a plurality of spaced-apart electrodes. A dielectric material surrounds the electrodes on the substrate. The surface on which the liquid droplets are deposited is fabricated from a material that facilitates motion of the liquid droplets.

Abstract translation: 用于通过使用静电场力来实现液滴在表面上的运动的装置包括单个基板，多个间隔开的电极在其上设置单个基板。 电介质材料围绕衬底上的电极。 液滴沉积在其上的表面由促进液滴运动的材料制成。

公开(公告)号：US20030202738A1

公开(公告)日：2003-10-30

申请号：US10136684

申请日：2002-04-30

Applicant: Xerox Corporation

Inventor： John L. Dunec ,  Eric Peeters ,  Armin R. Volkel ,  Michel A. Rosa ,  Dirk DeBruyker ,  Thomas Hantschel

IPC: G02B006/35

CPC classification number: G02B6/352 ,  G02B6/3556 ,  G02B6/357 ,  G02B6/3584

Abstract: A MEMS system including a fixed electrode and a suspended moveable electrode that is controllable over a wide range of motion. In traditional systems where an fixed electrode is positioned under the moveable electrode, the range of motion is limited because the support structure supporting the moveable electrode becomes unstable when the moveable electrode moves too close to the fixed electrode. By repositioning the fixed electrode from being directly underneath the moving electrode, a much wider range of controllable motion is achievable. Wide ranges of controllable motion are particularly important in optical switching applications.

Abstract translation: 一种MEMS系统，包括可在宽范围的运动中控制的固定电极和悬挂的可移动电极。 在固定电极位于可动电极下方的传统系统中，由于支撑可移动电极的支撑结构在可移动电极移动得太靠近固定电极时，运动范围受到限制。 通过将固定电极重新定位在移动电极的正下方，可以实现更宽范围的可控运动。 宽范围的可控运动在光交换应用中尤其重要。