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1.发明授权Thin film magnetic disk having reactive element doped refractory metal seed layer 失效具有反应性元素掺杂难熔金属种子层的薄膜磁盘公开(公告)号：US06174582B1
公开(公告)日：2001-01-16
申请号：US09020151
申请日：1998-02-06
申请人： Xiaoping Bian , Shanlin Duan , Jinshan Li , Mohammad Mirzamaani
发明人： Xiaoping Bian , Shanlin Duan , Jinshan Li , Mohammad Mirzamaani
IPC分类号： G11B566
CPC分类号： G11B5/732 , G11B5/7325 , G11B5/8404 , Y10S428/90 , Y10T428/12465 , Y10T428/265
摘要： A method of fabricating a thin film magnetic disk including depositing a seed layer of a refractory metal such as tantalum, Cr, Nb, W, V, or Mo and a reactive element such as N or O; depositing a nonmagnetic underlayer onto the seed layer; and depositing a magnetic layer is disclosed. Also disclosed is a thin film magnetic disk having a substrate; a seed layer comprising tantalum and at least about 1 atomic-% of nitrogen or oxygen; an underlayer comprising Cr or an alloy of chromium deposited onto the seed layer, the underlayer preferably having a preferred orientation of [200]; and a magnetic layer deposited onto the underlayer, the magnetic layer preferably having a preferred orientation of [11{overscore (2)}0]. Also disclosed is a disk drive using the thin film magnetic disk of the invention.
摘要翻译： 一种制造薄膜磁盘的方法，包括沉积诸如钽，Cr，Nb，W，V或Mo的难熔金属种子层和诸如N或O的反应性元件; 将非磁性底层沉积到种子层上; 并且公开了沉积磁性层。 还公开了具有基板的薄膜磁盘; 包含钽和至少约1原子％的氮或氧的种子层; 包含Cr或沉积在种子层上的铬的合金的底层，底层优选具有[200]的优选取向; 和沉积在底层上的磁性层，磁性层优选地具有优选取向为[11（超芯（2）} 0]。 还公开了使用本发明的薄膜磁盘的磁盘驱动器。
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2.发明授权Seed layer and underlayer with high and low oxygen concentration portions for hand disk magnetic recording medium on a glass substrate 失效在玻璃基板上的手盘磁记录介质的种子层和具有高和低氧浓度部分的底层公开(公告)号：US06413608B1
公开(公告)日：2002-07-02
申请号：US09336641
申请日：1999-06-18
IPC分类号： G11B566
CPC分类号： G11B5/732 , C23C14/185 , G11B5/7325 , Y10S428/90 , Y10T428/24942 , Y10T428/265
摘要： The thin film magnetic disk of the present invention includes a non-metallic substrate having a seed layer deposited on the substrate, an underlayer deposited upon the seed layer composed of a chromium alloy having a relatively high oxygen concentration portion of from 2,000 ppm to 20,000 ppm and preferably approximately 4,000 ppm to 12,000 ppm, followed by a relatively low oxygen concentration portion of from 0-2,000 ppm, and preferably from 500 ppm to 1,500 ppm and a magnetic layer that is deposited upon the underlayer. The underlayer total thickness is in the range of from approximately 250 Å to approximately 700 Å with a preferred thickness of approximately 450 Å, wherein approximately half of the underlayer thickness is the high oxygen concentration portion and half is the low oxygen concentration portion.
摘要翻译： 本发明的薄膜磁盘包括具有沉积在基板上的种子层的非金属基板，沉积在由具有2000ppm至20,000ppm的较高氧浓度部分的铬合金构成的种子层的底层 优选为约4,000ppm〜12,000ppm，其次为相对较低的氧浓度部分为0〜2,000ppm，优选为500ppm〜1500ppm，以及沉积在底层上的磁性层。 底层总厚度在约250至约700的范围内，优选的厚度约为450，其中下层厚度的大约一半是高氧浓度部分，一半是低氧浓度部分。
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公开(公告)号：US6143388A
公开(公告)日：2000-11-07
申请号：US976565
申请日：1997-11-24
CPC分类号： G11B5/732 , G11B5/656 , G11B5/66 , G11B5/7325 , Y10S428/90 , Y10T428/265
摘要： A thin film disk and a disk drive using the thin film disk are described. The disk has an onset layer between the underlayer and the boron containing magnetic layer, for example. The onset layer of the invention is useful because the boron containing magnetic layer material resists being deposited with the C-axis in plane. The onset layer material is selected to promote an in-plane C-axis orientation. When a boron containing magnetic layer is deposited on the onset layer the resulting in-plane PO is improved. The preferred onset layer is of hexagonal closed pack structured material which may be magnetic or nonmagnetic. Materials which are usable for the onset layer include a wide range of pure elements and cobalt alloys such as CoCr, CoPtCr, CoPtCrTa and CoCrB. The onset layer is particularly useful in allowing a ferromagnetic cobalt (Co) alloy containing a relatively high chromium and boron content to be deposited on nonmetallic substrates with the C-axis in the plane of disk without the need for negative bias during the sputtering of the underlayer.
摘要翻译： 描述使用薄膜盘的薄膜盘和磁盘驱动器。 例如，盘在底层和含硼磁性层之间具有起始层。 本发明的起始层是有用的，因为含硼磁性层材料抵抗C平面上的沉积。 选择起始层材料以促进面内C轴取向。 当含硼磁性层沉积在起始层上时，所得到的面内PO得到改善。 优选的起始层是可以是磁性或非磁性的六边形封闭包装结构材料。 可用于起始层的材料包括宽范围的纯元素和钴合金，例如CoCr，CoPtCr，CoPtCrTa和CoCrB。 起始层特别适用于允许含有相对较高的铬和硼含量的铁磁性钴（Co）合金沉积在非金属基体上，其中C轴在盘平面中，而不需要在溅射期间的负偏压 底层
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公开(公告)号：US20070292721A1
公开(公告)日：2007-12-20
申请号：US11789891
申请日：2007-04-25
申请人： Andreas Berger , Xiaoping Bian , Qing Dai , Hoa Do , Eric Fullerton , Bernd Heinz , Yoshihiro Ikeda , David Margulies , Mary Minardi , Mohammad Mirzamaani , Hal Rosen , Natacha Supper , Kentaro Takano , Min Xiao
发明人： Andreas Berger , Xiaoping Bian , Qing Dai , Hoa Do , Eric Fullerton , Bernd Heinz , Yoshihiro Ikeda , David Margulies , Mary Minardi , Mohammad Mirzamaani , Hal Rosen , Natacha Supper , Kentaro Takano , Min Xiao
CPC分类号： G11B5/66 , G11B5/65 , G11B5/7325 , G11B5/851
摘要： A perpendicular magnetic recording medium including improvements to the recording layer (RL), exchange break layer (EBL), soft underlayer (SUL), overcoat (OC), adhesion layer (AL) and the combination of the layers. Advances in the RL include a cap layer. Improvements in the EBL include a multiple layer EBL.
摘要翻译： 包括对记录层（RL），交换破坏层（EBL），软底层（SUL），外涂层（OC），粘合层（AL）以及这些层的组合的改进的垂直磁记录介质。 RL的进步包括盖层。 EBL的改进包括多层EBL。
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5.发明授权Magnetic recording disk with antiferromagnetically coupled master layer including copper 失效具有反铁磁耦合主磁层（包括铜）的磁记录盘公开(公告)号：US07419730B2
公开(公告)日：2008-09-02
申请号：US10931642
申请日：2004-08-31
申请人： Xiaoping Bian , Mary Frances Doerner , Tetsuya Kanbe , Mark Mercado , Mohammad Mirzamaani , Adam Polcyn , Kai Tang
发明人： Xiaoping Bian , Mary Frances Doerner , Tetsuya Kanbe , Mark Mercado , Mohammad Mirzamaani , Adam Polcyn , Kai Tang
IPC分类号： G11B5/66
CPC分类号： G11B5/732 , G11B5/656 , G11B5/66 , G11B5/7325
摘要： An antiferromagnetically coupled (AFC) magnetic recording medium with an AFC master layer comprising at least two magnetic layers with the top magnetic layer including copper is described. The slave layer is separated from the master layer structure by a nonmagnetic spacer layer selected to antiferromagnetically couple the layers. The master layer structure according to the invention includes a bottom and top layer of distinct ferromagnetic materials. Preferably, the top layer of the master layer is a cobalt alloy including from 1 to 5 at. % copper with an example being CoPt13Cr20B8Cu2. The AFC magnetic layer structure can be used with a variety of substrates including circumferentially textured glass and NiP/AlMg.
摘要翻译： 描述了具有包括至少两个具有顶部磁性层包括铜的磁性层的AFC主层的反铁磁耦合（AFC）磁记录介质。 通过选择用于反铁磁耦合层的非磁性间隔层将从属层与主层结构分离。 根据本发明的主层结构包括不同铁磁材料的底层和顶层。 优选地，主层的顶层是包括1至5个的钴合金。 ％铜，例如CoPt 13 C 20 20 B 2 Cu 2。 AFC磁性层结构可以与各种基材一起使用，包括圆周纹理玻璃和NiP / AlMg。
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6.发明申请Magnetic thin film media with an underlayer of CrMoZr, CrMoNb or CrMoMn 有权具有CrMoZr，CrMoNb或CrMoMn底层的磁性薄膜介质公开(公告)号：US20060093866A1
公开(公告)日：2006-05-04
申请号：US10976557
申请日：2004-10-29
IPC分类号： G11B5/66
CPC分类号： G11B5/7325 , G11B5/66
摘要： A thin film disk for use in magnetic recording with an underlayer structure that includes a layer of CrMoZr, CrMoNb or CrMoMn is described. The preferred embodiment includes a circumferentially textured glass substrate, a pre-seed layer, a B2 seed layer, an underlayer structure and a magnetic layer stack with a plurality of layers. The preferred underlayer structure has a first underlayer of CrTi followed by a second underlayer of CrMoZr. The preferred B2 seed layer material is RuAl. The preferred pre-seed layer is CrTiAl. The preferred magnetic layer stack is CoCr/CoPtCrB/CoPtCrBCu. The preferred embodiment is useful for longitudinal magnetic recording. The in-plane crystallographic orientation, the Mrt orientation ratio and the media SNR are improved by the inclusion of the CrMoZr, CrMoNb or CrMoMn according to the invention.
摘要翻译： 描述了用于具有包括CrMoZr，CrMoNb或CrMoMn层的底层结构的磁记录的薄膜盘。 优选实施例包括周向纹理化的玻璃基板，预种子层，B2种子层，下层结构和具有多个层的磁性层堆叠。 优选的底层结构具有CrTi的第一底层，之后是CrMoZr的第二底层。 优选的B2种子层材料是RuAl。 优选的种子前层是CrTiAl。 优选的磁性层堆叠是CoCr / CoPtCrB / CoPtCrBCu。 优选实施例对于纵向磁记录是有用的。 通过包括根据本发明的CrMoZr，CrMoNb或CrMoMn，提高了面内晶体取向，Mrt取向比和介质SNR。
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公开(公告)号：US20050048328A1
公开(公告)日：2005-03-03
申请号：US10651634
申请日：2003-08-29
申请人： Xiaoping Bian , Mary Doerner , Mohammad Mirzamaani , Adam Polcyn , Qi-Fan Xiao
发明人： Xiaoping Bian , Mary Doerner , Mohammad Mirzamaani , Adam Polcyn , Qi-Fan Xiao
CPC分类号： G11B5/7325 , Y10S428/90 , Y10T428/12465 , Y10T428/12854 , Y10T428/12861 , Y10T428/12986
摘要： A thin film magnetic media structure with a bi-layer structure of amorphous chromium titanium (CrTi) followed by an amorphous layer of nickel phosphorus (NiP) is disclosed. After the NiP has been deposited it is exposed to oxygen to form an oxidized surface. Preferably the underlayer is deposited directly onto the oxidized NiP surface. The bi-layer structure of CrTi/NiP promotes excellent in-plane crystallographic orientation in the cobalt alloy magnetic layer(s) and allows: an ultra-thin chromium underlayer to be used which provides better control over grain size and distribution. When the CrTi/NiP bi-layer structure is combined with a circumferentially textured substrate, preferably glass, a high Mrt orientation ratio (OR) results.
摘要翻译： 公开了一种具有非晶态铬钛（CrTi）双层结构，随后是镍磷（NiP）非晶层的薄膜磁介质结构。 NiP沉积后，暴露于氧气以形成氧化表面。 优选地，底层直接沉积在氧化的NiP表面上。 CrTi / NiP的双层结构促进钴合金磁性层中的优异的面内晶体取向，并且允许：使用超薄铬底层，其提供对晶粒尺寸和分布的更好控制。 当CrTi / NiP双层结构与周向织构化的基底（优选玻璃）组合时，得到高的Mrt取向比（OR）。
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8.发明授权Magnetic thin film media with an underlayer of CrMoZr, CrMoNb or CrMoMn 有权具有CrMoZr，CrMoNb或CrMoMn底层的磁性薄膜介质公开(公告)号：US07300713B2
公开(公告)日：2007-11-27
申请号：US10976557
申请日：2004-10-29
CPC分类号： G11B5/7325 , G11B5/66
摘要： A thin film disk for use in magnetic recording with an underlayer structure that includes a layer of CrMoZr, CrMoNb or CrMoMn is described. The preferred embodiment includes a circumferentially textured glass substrate, a pre-seed layer, a B2 seed layer, an underlayer structure and a magnetic layer stack with a plurality of layers. The preferred underlayer structure has a first underlayer of CrTi followed by a second underlayer of CrMoZr. The preferred B2 seed layer material is RuAl. The preferred pre-seed layer is CrTiAl. The preferred magnetic layer stack is CoCr/CoPtCrB/CoPtCrBCu. The preferred embodiment is useful for longitudinal magnetic recording. The in-plane crystallographic orientation, the Mrt orientation ratio and the media SNR are improved by the inclusion of the CrMoZr, CrMoNb or CrMoMn according to the invention.
摘要翻译： 描述了用于具有包括CrMoZr，CrMoNb或CrMoMn层的底层结构的磁记录的薄膜盘。 优选实施例包括周向纹理化的玻璃基板，预种子层，B2种子层，下层结构和具有多个层的磁性层堆叠。 优选的底层结构具有CrTi的第一底层，之后是CrMoZr的第二底层。 优选的B2种子层材料是RuAl。 优选的种子前层是CrTiAl。 优选的磁性层堆叠是CoCr / CoPtCrB / CoPtCrBCu。 优选实施例对于纵向磁记录是有用的。 通过包括根据本发明的CrMoZr，CrMoNb或CrMoMn，提高了面内晶体取向，Mrt取向比和介质SNR。
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9.发明申请Magnetic recording disk with antiferromagnetically coupled master layer including copper 失效具有反铁磁耦合主磁层（包括铜）的磁记录盘公开(公告)号：US20060046102A1
公开(公告)日：2006-03-02
申请号：US10931642
申请日：2004-08-31
申请人： Xiaoping Bian , Mary Doerner , Tetsuya Kanbe , Mark Mercado , Mohammad Mirzamaani , Adam Polcyn , Kai Tang
发明人： Xiaoping Bian , Mary Doerner , Tetsuya Kanbe , Mark Mercado , Mohammad Mirzamaani , Adam Polcyn , Kai Tang
IPC分类号： G11B5/66
CPC分类号： G11B5/732 , G11B5/656 , G11B5/66 , G11B5/7325
摘要： An antiferromagnetically coupled (AFC) magnetic recording medium with an AFC master layer comprising at least two magnetic layers with the top magnetic layer including copper is described. The slave layer is separated from the master layer structure by a nonmagnetic spacer layer selected to antiferromagnetically couple the layers. The master layer structure according to the invention includes a bottom and top layer of distinct ferromagnetic materials. Preferably, the top layer of the master layer is a cobalt alloy including from 1 to 5 at. % copper with an example being CoPt13Cr20B8Cu2. The AFC magnetic layer structure can be used with a variety of substrates including circumferentially textured glass and NiP/AlMg.
摘要翻译： 描述了具有包括至少两个具有顶部磁性层包括铜的磁性层的AFC主层的反铁磁耦合（AFC）磁记录介质。 通过选择用于反铁磁耦合层的非磁性间隔层将从属层与主层结构分离。 根据本发明的主层结构包括不同铁磁材料的底层和顶层。 优选地，主层的顶层是包括1至5个的钴合金。 ％铜，例如CoPt 13 C 20 20 B 2 Cu 2。 AFC磁性层结构可以与各种基材一起使用，包括圆周纹理玻璃和NiP / AlMg。
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公开(公告)号：US20050031909A1
公开(公告)日：2005-02-10
申请号：US10903064
申请日：2004-07-29
申请人： Xiaoping Bian , Mary Doerner , James Hagan , Tim Minvielle , Mohammad Mirzamaani , Adam Polcyn , Kai Tang
发明人： Xiaoping Bian , Mary Doerner , James Hagan , Tim Minvielle , Mohammad Mirzamaani , Adam Polcyn , Kai Tang
CPC分类号： B82Y25/00 , G11B5/7379 , H01F10/30 , H01F10/32 , Y10S428/90 , Y10T428/12472 , Y10T428/12681 , Y10T428/265
摘要： The applicants disclose a thin film magnetic media structure with a pre-seed layer of CrTi. The CrTi pre-seed layer presents an amorphous or nanocrystalline structure. The preferred seed layer is RuAl for use with the CrTi pre-seed layer. The use of the CrTi/RuAl bilayer structure provides superior adhesion to the substrate and resistance to scratching, as well as, excellent coercivity and signal-to-noise ratio (SNR) and reduced cost over the prior art. One embodiment of the invention sputter-deposits a CrTi pre-seed layer and a RuAl seed layer followed by an underlayer and at least one magnetic layer on a circumferentially polished substrate structure to achieve an Mrt orientation ratio greater than one. Two methods according to the invention allow the Mrt orientation ratio of the disk to be adjusted or maximized by varying the thickness of the RuAl seed layer and/or altering the atomic percentage of titanium in the pre-seed layer.
摘要翻译： 申请人公开了具有CrTi预种子层的薄膜磁性介质结构。 CrTi预种子层呈现无定形或纳米晶体结构。 优选的种子层是用于CrTi预种子层的RuAl。 CrTi / RuAl双层结构的使用提供了优异的与基板的粘附性和耐划伤性，以及优于现有技术的矫顽力和信噪比（SNR）以及降低的成本。 本发明的一个实施方案溅射沉积CrTi预种子层和RuAl种子层，接着是底层和在周向抛光的衬底结构上的至少一个磁性层，以实现大于1的Mrt取向比。 根据本发明的两种方法允许通过改变RuAl种子层的厚度和/或改变预种子层中钛的原子百分比来调节或最大化盘的Mrt取向比。
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