公开(公告)号：US07928400B1

公开(公告)日：2011-04-19

申请号：US12185565

申请日：2008-08-04

申请人： Yacouba Diawara ,  Roger D. Durst ,  Sergei A. Medved ,  Vladislav N. Sedov ,  Donald P. Lesher

发明人： Yacouba Diawara ,  Roger D. Durst ,  Sergei A. Medved ,  Vladislav N. Sedov ,  Donald P. Lesher

IPC分类号： H01L27/146 ,  H01L31/09

CPC分类号： H01L31/107 ,  G01T1/366 ,  H01J37/244 ,  H01J37/252 ,  H01J2237/2442 ,  H01J2237/24425

摘要： A detection system for wavelength-dispersive and energy-dispersive spectrometry comprises an X-ray detector formed from a solid-state avalanche photodiode with a thin entrance window electrode that permits the efficient detection of X-rays scattered from “light” elements. The detector can be tilted relative to the incident X-rays in order to increase the detection efficiency for X-rays scattered from “heavy” elements. The entrance window may be continuous conductive layer with a thickness in the range of 5 to 10 nanometers or may be a pattern of conductive lines with “windowless” areas between the lines. A signal processing circuit for the avalanche photodiode detector includes an ultra-low noise amplifier, a dual channel discriminator, a scaler and a digital counter. A linear array of avalanche photodiode detectors is used to increase the count rate of the detection system.

摘要翻译： 用于波长色散和能量色散光谱的检测系统包括由具有薄入口窗电极的固态雪崩光电二极管形成的X射线检测器，其允许有效检测从“轻”元件散射的X射线。 检测器可以相对于入射的X射线倾斜，以增加从“重”元件散射的X射线的检测效率。 入口窗口可以是厚度在5至10纳米范围内的连续导电层，或者可以是线之间具有“无窗”区域的导电线图案。 用于雪崩光电二极管检测器的信号处理电路包括超低噪声放大器，双通道鉴频器，定标器和数字计数器。 雪崩光电二极管检测器的线性阵列用于增加检测系统的计数率。