公开(公告)号：US5656812A

公开(公告)日：1997-08-12

申请号：US684448

申请日：1996-07-19

申请人： Hideyuki Takahashi

发明人： Hideyuki Takahashi

IPC分类号： H01J37/256

CPC分类号： H01J37/256 ,  H01J2237/24425 ,  H01J2237/2561

摘要： An electron probe microanalyzer is capable of easily carrying out a precise x-ray analysis of a specimen whose surface is not flat or smooth, by satisfying the focusing conditions. A region to be analyzed on the specimen surface is divided into a given number of subregions by division lines. The heights, or z-coordinates, of the intersections of the division lines are measured. The z-coordinates are stored in a memory, together with their x- and y-coordinates. A unit plane approximating each subregion is determined from the x-, y-, and z-coordinates of the intersections. A plurality of analysis points are established in each determined unit plane. The heights of the analysis points are calculated, using a mathematical formula which defines the positions of the analysis points and the unit planes. In making an x-ray analysis of each analysis point, heights of the specimen are determined from the calculated z-coordinates.

摘要翻译： 通过满足聚焦条件，电子探针微量分析仪能够容易地进行表面不平坦或光滑的试样的精确X射线分析。 在样品表面上要分析的区域通过划分线划分为给定数量的子区域。 测量划分线的交点的高度或z坐标。 z坐标与x坐标和y坐标一起存储在存储器中。 从交点的x，y和z坐标确定近似每个子区域的单位面积。 在每个确定的单位平面中建立多个分析点。 使用定义分析点和单位平面位置的数学公式计算分析点的高度。 在对每个分析点进行X射线分析时，从计算的z坐标确定样本的高度。

公开(公告)号：US20140117231A1

公开(公告)日：2014-05-01

申请号：US13662072

申请日：2012-10-26

申请人： FEI Company

发明人： Michael James Owen ,  Michael Buhot

IPC分类号： G01N23/225 ,  H01J37/256

CPC分类号： G01N23/2252 ,  G01N2223/418 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/2442 ,  H01J2237/24425 ,  H01J2237/2804 ,  H01J2237/2807

摘要： The present invention discloses a combination of two existing approaches for mineral analysis and makes use of the Similarity Metric Invention, that allows mineral definitions to be described in theoretical compositional terms, meaning that users are not required to find examples of each mineral, or adjust rules. This system allows untrained operators to use it, as opposed to previous systems, which required extensive training and expertise.

摘要翻译： 本发明公开了两种现有的矿物分析方法的组合，并且使用了相似性度量发明，其允许以理论组成术语描述矿物定义，这意味着用户不需要找到每种矿物的实例，或调整规则 。 该系统允许未经训练的运营商使用它，而不是以前的系统，需要广泛的培训和专业知识。

公开(公告)号：US07928400B1

公开(公告)日：2011-04-19

申请号：US12185565

申请日：2008-08-04

申请人： Yacouba Diawara ,  Roger D. Durst ,  Sergei A. Medved ,  Vladislav N. Sedov ,  Donald P. Lesher

发明人： Yacouba Diawara ,  Roger D. Durst ,  Sergei A. Medved ,  Vladislav N. Sedov ,  Donald P. Lesher

IPC分类号： H01L27/146 ,  H01L31/09

CPC分类号： H01L31/107 ,  G01T1/366 ,  H01J37/244 ,  H01J37/252 ,  H01J2237/2442 ,  H01J2237/24425

摘要： A detection system for wavelength-dispersive and energy-dispersive spectrometry comprises an X-ray detector formed from a solid-state avalanche photodiode with a thin entrance window electrode that permits the efficient detection of X-rays scattered from “light” elements. The detector can be tilted relative to the incident X-rays in order to increase the detection efficiency for X-rays scattered from “heavy” elements. The entrance window may be continuous conductive layer with a thickness in the range of 5 to 10 nanometers or may be a pattern of conductive lines with “windowless” areas between the lines. A signal processing circuit for the avalanche photodiode detector includes an ultra-low noise amplifier, a dual channel discriminator, a scaler and a digital counter. A linear array of avalanche photodiode detectors is used to increase the count rate of the detection system.

摘要翻译： 用于波长色散和能量色散光谱的检测系统包括由具有薄入口窗电极的固态雪崩光电二极管形成的X射线检测器，其允许有效检测从“轻”元件散射的X射线。 检测器可以相对于入射的X射线倾斜，以增加从“重”元件散射的X射线的检测效率。 入口窗口可以是厚度在5至10纳米范围内的连续导电层，或者可以是线之间具有“无窗”区域的导电线图案。 用于雪崩光电二极管检测器的信号处理电路包括超低噪声放大器，双通道鉴频器，定标器和数字计数器。 雪崩光电二极管检测器的线性阵列用于增加检测系统的计数率。

公开(公告)号：US3514599A

公开(公告)日：1970-05-26

申请号：US3514599D

申请日：1968-02-16

申请人： CAMBRIDGE INSTR CO LTD

发明人： CAMPBELL ALISTAIR JOHN

IPC分类号： G01N23/207 ,  G01N23/225 ,  H01J37/28 ,  G01N23/20

CPC分类号： G01N23/2076 ,  G01N23/225 ,  H01J2237/24425 ,  H01J2237/2561

公开(公告)号：US09188552B2

公开(公告)日：2015-11-17

申请号：US14225718

申请日：2014-03-26

申请人： JEOL Ltd.

发明人： Genki Kinugasa

IPC分类号： G01N23/223 ,  G01N23/207 ,  G01T1/24 ,  G01T1/17

CPC分类号： G01N23/2076 ,  G01N23/223 ,  G01T1/17 ,  G01T1/247 ,  H01J2237/24425

摘要： An X-ray spectrometer (100) capable of reducing the effects of noises includes: an X-ray detector (110) outputting a staircase waveform (S110); a first differential filter (120) converting the staircase waveform (S110) into a first pulsed signal (S120); an event detection portion (140) detecting whether the first pulsed signal (S120) has exceeded a threshold value; a noise event detection portion (150) determining whether the first pulsed signal (S120) in excess of the threshold value is shorter than a given time; a second differential filter (160) converting the staircase waveform (S110) into a second pulsed signal (S160) having peaks whose heights correspond to the heights of the steps of the staircase waveform; a maximum value detection portion (170) detecting pulsed signal (S160) if the first pulsed signal (S120) exceeds a threshold value; and a decision portion (180) making a decision based on the noise event detection portion (150).

摘要翻译： 能够减少噪声影响的X射线光谱仪（100）包括：输出阶梯波形的X射线检测器（110）（S110）; 将所述阶梯波形（S110）转换为第一脉冲信号的第一差分滤波器（120）; 检测第一脉冲信号（S120）是否超过阈值的事件检测部分（140）; 确定超过阈值的第一脉冲信号（S120）是否短于给定时间的噪声事件检测部分（150） 将阶梯波形（S110）转换成具有峰值的第二脉冲信号（S160）的第二差分滤波器（160），其高度对应于阶梯波形的台阶的高度; 如果第一脉冲信号（S120）超过阈值，则检测脉冲信号（S160）的最大值检测部分（170） 以及基于噪声事件检测部分（150）进行判定的判定部分（180）。

公开(公告)号：US08421007B2

公开(公告)日：2013-04-16

申请号：US13110214

申请日：2011-05-18

申请人： Masami Terauchi ,  Takanori Murano ,  Nobuo Handa ,  Hideyuki Takahashi

发明人： Masami Terauchi ,  Takanori Murano ,  Nobuo Handa ,  Hideyuki Takahashi

IPC分类号： H01J40/00

CPC分类号： G01N23/2252 ,  H01J37/244 ,  H01J2237/24425 ,  H01J2237/28 ,  H01J2237/2807 ,  H01J2237/2808

摘要： An X-ray detection system has an electron beam irradiation portion, a diffraction grating, a splitter for distributing the direction of propagation of the diffracted X-rays such that an imaging plane for the diffracted X-rays is assigned to plural positions spaced apart in a direction perpendicular to the direction of energy dispersion of the diffracted X-rays, and image sensors different in energy sensitivity disposed respectively at the positions to which the imaging plane is assigned.

摘要翻译： X射线检测系统具有电子束照射部分，衍射光栅，用于分散衍射X射线的传播方向的分离器，使得衍射X射线的成像面被分配到多个间隔开的位置 垂直于衍射X射线的能量分散方向的方向以及能量敏感度不同的图像传感器分别设置在分配成像平面的位置。

公开(公告)号：US20120292508A1

公开(公告)日：2012-11-22

申请号：US13110214

申请日：2011-05-18

申请人： Masami Terauchi ,  Takanori Murano ,  Nobuo Handa ,  Hideyuki Takahashi

发明人： Masami Terauchi ,  Takanori Murano ,  Nobuo Handa ,  Hideyuki Takahashi

IPC分类号： G01N23/00

CPC分类号： G01N23/2252 ,  H01J37/244 ,  H01J2237/24425 ,  H01J2237/28 ,  H01J2237/2807 ,  H01J2237/2808

摘要： An X-ray detection system has an electron beam irradiation portion, a diffraction grating, a splitter for distributing the direction of propagation of the diffracted X-rays such that an imaging plane for the diffracted X-rays is assigned to plural positions spaced apart in a direction perpendicular to the direction of energy dispersion of the diffracted X-rays, and image sensors different in energy sensitivity disposed respectively at the positions to which the imaging plane is assigned.

摘要翻译： X射线检测系统具有电子束照射部分，衍射光栅，用于分散衍射X射线的传播方向的分离器，使得衍射X射线的成像面被分配到多个间隔开的位置 垂直于衍射X射线的能量分散方向的方向以及能量敏感度不同的图像传感器分别设置在分配成像平面的位置。

公开(公告)号：US20100284513A1

公开(公告)日：2010-11-11

申请号：US11514689

申请日：2006-09-01

申请人： Kazuyasu Kawabe

发明人： Kazuyasu Kawabe

IPC分类号： G01T1/36

CPC分类号： H01J37/252 ,  G01N23/2252 ,  G21K1/06 ,  G21K2201/062 ,  G21K2201/064 ,  G21K2201/067 ,  H01J37/244 ,  H01J2237/24425

摘要： An X-ray spectrometer which uses at least one curved analyzing crystal and which provides improved wavelength resolution of characteristic X-rays used for analysis and improved ratio of characteristic X-rays to background intensity by using only effective diffractive regions of the analyzing crystal. X-ray blocking plates upstand from an end of a crystal support member supporting the analyzing crystal in the direction of angular dispersion of the crystal toward the inside of a Rowland circle. Incident X-rays going from the point X-ray source toward the crystal and X-rays diffracted by the crystal toward an X-ray detector are partially blocked by the X-ray blocking plates. The shielded regions vary according to the incident angle θ of the incident X-rays. Optimum or nearly optimum effective regions of the surface of the crystal can be used at all times.

摘要翻译： 使用至少一个弯曲分析晶体的X射线光谱仪，其通过仅使用分析晶体的有效衍射区域提供用于分析的特征X射线的改进的波长分辨率和特征X射线与背景强度的比率。 X射线阻挡板从支撑分析晶体的晶体支撑构件的端部朝向Rowland圆的内部朝向晶体的角度分散方向立起。 从X射线源向晶体射出X射线，X射线检测器衍射的X射线被X射线阻挡板部分遮挡。 屏蔽区域根据入射角度而变化; 的事件X射线。 可以随时使用晶体表面的最佳或接近最佳的有效区域。

公开(公告)号：US20080067379A1

公开(公告)日：2008-03-20

申请号：US11784686

申请日：2007-04-09

申请人： Satoshi Notoya

发明人： Satoshi Notoya

IPC分类号： G21K7/00

CPC分类号： H01J37/256 ,  G01N23/22 ,  H01J2237/2442 ,  H01J2237/24425 ,  H01J2237/2445 ,  H01J2237/2485 ,  H01J2237/2561

摘要： An electron probe X-ray analyzer capable of automatically setting appropriate analytical conditions if there are unknown compounds by performing analysis under the analytical conditions adapted for analysis points having different compositions in a case where the numerous analysis points having the plural compositions are analyzed by WDS (wavelength-dispersive X-ray spectrometer). At each analysis point, the analyzer performs quantitative analysis using EDS (energy-dispersive X-ray spectrometer) permitting easy and quick analysis. Based on the results, chemical compounds are identified. If the results indicate that there is any new compound, analytical conditions adapted for the new compound are selected. If the new compound is already registered in a database, the analytical conditions are read from the database. Then, quantitative analysis is performed using WDS.

摘要翻译： 一种电子探针X射线分析仪，其能够通过在具有多种组成的多个分析点的情况下通过对具有不同组成的分析点进行分析的分析条件进行分析来自动设定适当的分析条件， 波长色散X射线光谱仪）。 在每个分析点，分析仪使用EDS（能量色散X射线光谱仪）进行定量分析，可以方便快捷的分析。 根据结果​​，确定了化合物。 如果结果表明存在任何新化合物，则选择适合新化合物的分析条件。 如果新的化合物已经在数据库中注册，则从数据库中读取分析条件。 然后，使用WDS进行定量分析。

公开(公告)号：US20190006146A1

公开(公告)日：2019-01-03

申请号：US15991034

申请日：2018-05-29

申请人： Shimadzu Corporation

发明人： Hiroshi SAKAMAE

IPC分类号： H01J37/256 ,  G01N23/2252

CPC分类号： H01J37/256 ,  G01N23/2252 ,  G01N2223/402 ,  G01N2223/418 ,  G01N2223/605 ,  H01J2237/2442 ,  H01J2237/24425 ,  H01J2237/24571 ,  H01J2237/2485 ,  H01J2237/2561

摘要： An EDS 5 acquires first spectrum data by detecting an X-ray generated from a sample. A WDS 6 acquires second spectrum data by detecting the X-ray generated from the sample. A phase distribution map generation processing unit 11 generates a phase distribution map of a substance of the sample in a measurement region, on the basis of the first spectrum data acquired with respect to each pixel in the measurement region on a sample surface. A composition information acquisition processing unit 13 acquires element composition information of each phase, on the basis of the second spectrum data acquired with respect to a position on the sample corresponding to a representative pixel in the measurement region corresponding to each of the phases of the phase distribution map.