公开(公告)号：US20110054683A1

公开(公告)日：2011-03-03

申请号：US12990731

申请日：2009-04-27

Applicant: Yasuhiko Hashimoto ,  Toshiaki Yoshida ,  Tetsuya Yoshida

Inventor： Yasuhiko Hashimoto ,  Toshiaki Yoshida ,  Tetsuya Yoshida

IPC: B25J9/00

CPC classification number: B25J19/0025 ,  H01L21/67766 ,  H02G11/00

Abstract: An article carrier robot includes: a horizontal base; a horizontally movable unit supported by the horizontal base so as to be movable in a horizontal direction; a robot main body supported by the horizontally movable unit; at least one of wiring and piping introduced into the robot main body from the horizontal base; and a restriction unit supported by the horizontally movable unit so as to be swayable about a pivot provided to the horizontally movable unit. The restriction unit is configured to restrict deformation of a part of the at least one of wiring and piping.

Abstract translation: 物品载体机器人包括：水平底座; 水平移动单元，其由水平基座支撑，以便能够在水平方向上移动; 由水平移动单元支撑的机器人主体; 从水平底座引入机器人主体的布线和管道中的至少一个; 以及由水平移动单元支撑的限制单元，以便围绕设置在水平移动单元的枢轴摆动。 限制单元被配置为限制布线和管道中的至少一个的一部分的变形。

公开(公告)号：US09254566B2

公开(公告)日：2016-02-09

申请号：US12656358

申请日：2010-01-27

Applicant: Yasuhiko Hashimoto ,  Tetsuya Yoshida

Inventor： Yasuhiko Hashimoto ,  Tetsuya Yoshida

IPC: B25J15/00 ,  B25J9/04 ,  B25J9/10 ,  H01L21/677

CPC classification number: B25J15/0014 ,  B25J9/042 ,  B25J9/10 ,  B25J11/0095 ,  B25J15/0052 ,  B25J15/0616 ,  H01L21/67742 ,  H01L21/68707 ,  Y10S414/137 ,  Y10S414/141 ,  Y10T74/20305

Abstract: The present invention relates to an end effector including: blade members for holding substrates, each configured to hold the substrate, and configured such that each interval between the blade members can be changed; a blade support unit configured to support the blade members, the blade support unit being configured to be driven integrally with the blade members by the robot; and blade drive means configured to change the interval between the blade members by moving at least one of the blade members relative to another blade member.

Abstract translation: 本发明涉及一种端部执行器，其包括：用于保持基板的叶片构件，每个构件用于保持基板，并且构造成可以改变叶片构件之间的每个间隔; 构造成支撑叶片构件的叶片支撑单元，叶片支撑单元构造成由机器人与叶片构件一体地驱动; 以及叶片驱动装置，其构造成通过相对于另一个叶片构件移动至少一个叶片构件来改变叶片构件之间的间隔。

公开(公告)号：US09260241B2

公开(公告)日：2016-02-16

申请号：US13805164

申请日：2011-06-10

Applicant: Yasuhiko Hashimoto ,  Tetsuya Yoshida

Inventor： Yasuhiko Hashimoto ,  Tetsuya Yoshida

IPC: B65G65/00 ,  B65G1/04 ,  B65G49/06 ,  H01L21/677

CPC classification number: B65G1/04 ,  B65G49/062 ,  B65G49/063 ,  B65G49/067 ,  B65G49/068 ,  H01L21/67718 ,  H01L21/67736 ,  H01L21/67769

Abstract: A stocker facility includes a rack configured to store glass plates in a standing state such that the glass plates are arranged in a front-rear direction and a stocker configured to cause the glass plate to move in a left-right direction to transfer the glass plate to and from the rack. Thus, the present invention provides a plate-shaped member transfer facility capable of carrying the plate-shaped member in between two spaced-apart plate-shaped members between which a storage pitch is short and carrying any one of a plurality of plate-shaped members out from the rack without inserting an end effect in a substrate storage portion of the rack.

Abstract translation: 贮存器设备包括：搁架，其被构造成将处于玻璃板的前后方向上的玻璃板保持在立起状态的玻璃板，以及储存器，其构造成使玻璃板沿左右方向移动以将玻璃板 往返于机架。 因此，本发明提供一种板状构件传递装置，其能够将板状构件承载在两个间隔开的板状构件之间，在该两个间隔开的板状构件之间存储间距短，并且承载多个板状构件中的任一个 在机架的基板存储部分中没有插入端部效应。

公开(公告)号：US20130202393A1

公开(公告)日：2013-08-08

申请号：US13805164

申请日：2011-06-10

Applicant: Yasuhiko Hashimoto ,  Tetsuya Yoshida

Inventor： Yasuhiko Hashimoto ,  Tetsuya Yoshida

IPC: B65G1/04

CPC classification number: B65G1/04 ,  B65G49/062 ,  B65G49/063 ,  B65G49/067 ,  B65G49/068 ,  H01L21/67718 ,  H01L21/67736 ,  H01L21/67769

Abstract: A stocker facility includes a rack configured to store glass plates in a standing state such that the glass plates are arranged in a front-rear direction and a stocker configured to cause the glass plate to move in a left-right direction to transfer the glass plate to and from the rack. Thus, the present invention provides a plate-shaped member transfer facility capable of carrying the plate-shaped member in between two spaced-apart plate-shaped members between which a storage pitch is short and carrying any one of a plurality of plate-shaped members out from the rack without inserting an end effect in a substrate storage portion of the rack.

Abstract translation: 贮存器设备包括：搁架，其被构造成将处于玻璃板的前后方向上的玻璃板保持在立起状态的玻璃板，以及储存器，其构造成使得玻璃板沿左右方向移动以将玻璃板 往返于机架。 因此，本发明提供一种板状构件传递装置，其能够将板状构件承载在两个间隔开的板状构件之间，在该两个间隔开的板状构件之间存储间距短，并且承载多个板状构件中的任一个 在机架的基板存储部分中没有插入端部效应。

公开(公告)号：US08121732B2

公开(公告)日：2012-02-21

申请号：US12232441

申请日：2008-09-17

Applicant: Yasuhiko Hashimoto ,  Nobuyasu Shimomura ,  Takao Yamaguchi ,  Tetsuya Yoshida

Inventor： Yasuhiko Hashimoto ,  Nobuyasu Shimomura ,  Takao Yamaguchi ,  Tetsuya Yoshida

IPC: G05B19/00

CPC classification number: H01L21/67778 ,  B25J9/1692 ,  G05B2219/37411 ,  G05B2219/39013 ,  G05B2219/39041 ,  G05B2219/39413 ,  H01L21/67259 ,  H01L21/67766 ,  H01L21/68

Abstract: A target position detection apparatus for a robot includes: a robot including an arm configured to be freely moved in at least two directions of X and Y axes, the arm having a wrist axis provided at a distal end of the arm and configured to be freely moved in a horizontal direction, and the wrist axis being provided with an end effector; and a control unit adapted for driving a memory to store a teaching point therein and controlling an operation of the robot such that the end effector will be moved toward the teaching point stored in the memory. The control unit is further adapted for changing a pressing force of the end effector against a target by changing a control loop gain, and bringing the end effector into contact with the target, while setting the control loop gain of the wrist axis lower than a predetermined value at least from a position adjacent to the teaching point at which the target is located, so as to capture a position in a state in which the end effector is in contact with the target, thereby detecting the position of the target.

Abstract translation: 一种用于机器人的目标位置检测装置，包括：机器人，其包括构造成能够在X轴和Y轴的至少两个方向上自由移动的臂，所述臂具有设置在所述臂的前端的手腕轴， 沿水平方向移动，腕轴设置有端部执行器; 以及控制单元，适于驱动存储器以存储其中的教导点，并且控制机器人的操作，使得末端执行器将朝向存储在存储器中的教学点移动。 控制单元还适于通过改变控制环增益来改变端部执行器对目标的按压力，并且使端部执行器与目标接触，同时将手腕轴的控制环增益设置为低于预定值 至少从与目标所在的教导点相邻的位置获得值，以便捕获末端执行器与目标物接触的状态下的位置，从而检测目标的位置。

公开(公告)号：US20090093908A1

公开(公告)日：2009-04-09

申请号：US12232441

申请日：2008-09-17

Applicant: Yasuhiko Hashimoto ,  Nobuyasu Shimomura ,  Takao Yamaguchi ,  Tetsuya Yoshida

Inventor： Yasuhiko Hashimoto ,  Nobuyasu Shimomura ,  Takao Yamaguchi ,  Tetsuya Yoshida

IPC: G05B19/408 ,  G06F19/00

CPC classification number: H01L21/67778 ,  B25J9/1692 ,  G05B2219/37411 ,  G05B2219/39013 ,  G05B2219/39041 ,  G05B2219/39413 ,  H01L21/67259 ,  H01L21/67766 ,  H01L21/68

Abstract: A target position detection apparatus for a robot includes: a robot including an arm configured to be freely moved in at least two directions of X and Y axes, the arm having a wrist axis provided at a distal end of the arm and configured to be freely moved in a horizontal direction, and the wrist axis being provided with an end effector; and a control unit adapted for driving a memory to store a teaching point therein and controlling an operation of the robot such that the end effector will be moved toward the teaching point stored in the memory. The control unit is further adapted for changing a pressing force of the end effector against a target by changing a control loop gain, and bringing the end effector into contact with the target, while setting the control loop gain of the wrist axis lower than a predetermined value at least from a position adjacent to the teaching point at which the target is located, so as to capture a position in a state in which the end effector is in contact with the target, thereby detecting the position of the target.

Abstract translation: 一种用于机器人的目标位置检测装置，包括：机器人，其包括构造成能够在X轴和Y轴的至少两个方向上自由移动的臂，所述臂具有设置在所述臂的前端的手腕轴， 沿水平方向移动，腕轴设置有端部执行器; 以及控制单元，适于驱动存储器以存储其中的教导点，并且控制机器人的操作，使得末端执行器将朝向存储在存储器中的教学点移动。 控制单元还适于通过改变控制环增益来改变端部执行器对目标的按压力，并且使端部执行器与目标接触，同时将手腕轴的控制环增益设置为低于预定值 至少从与目标所在的教导点相邻的位置获得值，以便捕获末端执行器与目标物接触的状态下的位置，从而检测目标的位置。

公开(公告)号：US08746631B2

公开(公告)日：2014-06-10

申请号：US12990731

申请日：2009-04-27

Applicant: Yasuhiko Hashimoto ,  Toshiaki Yoshida ,  Tetsuya Yoshida

Inventor： Yasuhiko Hashimoto ,  Toshiaki Yoshida ,  Tetsuya Yoshida

IPC: H02G11/00

CPC classification number: B25J19/0025 ,  H01L21/67766 ,  H02G11/00

Abstract: An article carrier robot includes: a horizontal base; a horizontally movable unit supported by the horizontal base so as to be movable in a horizontal direction; a robot main body supported by the horizontally movable unit; at least one of wiring and piping introduced into the robot main body from the horizontal base; and a restriction unit supported by the horizontally movable unit so as to be swayable about a pivot provided to the horizontally movable unit. The restriction unit is configured to restrict deformation of a part of the at least one of wiring and piping.

Abstract translation: 物品载体机器人包括：水平底座; 水平移动单元，其由水平基座支撑，以便能够在水平方向上移动; 由水平移动单元支撑的机器人主体; 从水平底座引入机器人主体的布线和管道中的至少一个; 以及由水平移动单元支撑的限制单元，以便围绕设置在水平移动单元的枢轴摆动。 限制单元被配置为限制布线和管道中的至少一个的一部分的变形。

公开(公告)号：US20100290886A1

公开(公告)日：2010-11-18

申请号：US12656358

申请日：2010-01-27

Applicant: Yasuhiko Hashimoto ,  Tetsuya Yoshida

Inventor： Yasuhiko Hashimoto ,  Tetsuya Yoshida

IPC: H01L21/683 ,  B25J15/00 ,  B25J18/00

CPC classification number: B25J15/0014 ,  B25J9/042 ,  B25J9/10 ,  B25J11/0095 ,  B25J15/0052 ,  B25J15/0616 ,  H01L21/67742 ,  H01L21/68707 ,  Y10S414/137 ,  Y10S414/141 ,  Y10T74/20305

Abstract: The present invention relates to an end effector including: blade members for holding substrates, each configured to hold the substrate, and configured such that each interval between the blade members can be changed; a blade support unit configured to support the blade members, the blade support unit being configured to be driven integrally with the blade members by the robot; and blade drive means configured to change the interval between the blade members by moving at least one of the blade members relative to another blade member.

Abstract translation: 本发明涉及一种端部执行器，其包括：用于保持基板的叶片构件，每个构件用于保持基板，并且构造成可以改变叶片构件之间的每个间隔; 构造成支撑叶片构件的叶片支撑单元，叶片支撑单元构造成由机器人与叶片构件一体地驱动; 以及叶片驱动装置，其构造成通过相对于另一个叶片构件移动至少一个叶片构件来改变叶片构件之间的间隔。

公开(公告)号：US20110166704A1

公开(公告)日：2011-07-07

申请号：US13062426

申请日：2008-09-30

Applicant: Yasuhiko Hashimoto

Inventor： Yasuhiko Hashimoto

IPC: B25J13/08 ,  B25J15/06

CPC classification number: B25J15/0616 ,  B25J13/087 ,  B25J15/0052 ,  B25J19/0095 ,  B65G47/917 ,  B65G47/918 ,  B66C1/0218 ,  B66C1/0243

Abstract: The invention is a monitoring apparatus for monitoring a condition of an end-effector of a robot having a vacuum absorption pad to hold an article. The pad is elastically supported by the end-effector. The apparatus includes a pad receiving part having a front surface and a through hole, the pad receiving part being movable in a direction perpendicular to the front surface; an elastically supporting unit for elastically supporting the pad receiving part in a direction perpendicular to the front surface; a movement detection unit for detecting a movement of the pad receiving part; a vacuum sensor connected to the through hole; and a judging unit for judging conditions of an elastic support of the pad and a vacuum absorption of the pad based on detection results of the movement detection unit and the vacuum sensor.

Abstract translation: 本发明是一种监测装置，用于监测具有真空吸附垫的机器人的末端执行器的状态以保持物品。 该垫由末端执行器弹性支撑。 该装置包括具有前表面和通孔的焊盘接收部分，该焊盘接收部分可在垂直于前表面的方向上移动; 弹性支撑单元，用于沿垂直于所述前表面的方向弹性地支撑所述垫接收部; 移动检测单元，用于检测所述垫接收部的移动; 连接到通孔的真空传感器; 以及判断单元，用于基于移动检测单元和真空传感器的检测结果来判断垫的弹性支撑的状态和垫的真空吸收。

公开(公告)号：US20070286711A1

公开(公告)日：2007-12-13

申请号：US11808358

申请日：2007-06-08

Applicant: Yasuhiko Hashimoto ,  Masao Takatori ,  Yasuo Hirooka

Inventor： Yasuhiko Hashimoto ,  Masao Takatori ,  Yasuo Hirooka

IPC: H01L21/677

CPC classification number: H01L21/67772 ,  H01L21/67766 ,  H01L21/67775

Abstract: In the present invention, a base 43 of a robot 27 is fixed to a fixing portion 53 of a frame divided body 50. The base 43 allows force exerted from a robot main body 27A to be transmitted to the fixing portion 53 of the frame divided body 50. Contrary, the fixing portion 53 of the frame divided body 50 has rigidity which can prevent the force exerted from the base 43 of the robot 27 from being transmitted to a main body constituting member 51. Accordingly, the base 43 of the robot 27 has only to possess a function for connecting the robot main body 27A and the frame divided body 50. Therefore, even though reducing its rigidity, transmission of vibration to the wafer processing apparatus can be prevented, as well as occurrence of malfunctioning in the substrate processing work can be prevented. In addition, increasing the rigidity of the frame divided body 50 can be achieved easier with a simpler construction and more effective than increasing the rigidity of the robot. Accordingly, more secured wafer processing can be provided.

Abstract translation: 在本发明中，机器人27的基座43固定在框架分割体50的固定部53上。 底座43允许从机器人主体部件27A施加的力传递到框架分割体50的固定部分53。 相反，框架分割体50的固定部分53具有能够防止从机器人27的基座43施加的力传递到主体构成构件51的刚性。 因此，机器人27的基座43仅具有连接机器人主体部27A和框架分割体50的功能。 因此，即使降低其刚性，也能够防止向晶片加工装置的振动传递，并且能够防止基板处理作业发生故障。 此外，通过更简单的构造可以更容易地实现框架分割体50的刚性的提高，并且比增加机器人的刚性更有效。 因此，可以提供更加牢固的晶片处理。