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公开(公告)号：US4464455A
公开(公告)日：1984-08-07
申请号：US385887
申请日：1982-06-07
CPC分类号： G03F7/094 , G03F7/038 , G03F7/0755 , G03F7/36 , Y10S430/143
摘要： A dry-developing negative resist composition consisting of (a) a polymer of a monomer of the following formula I or II or a copolymer of a monomer of the following formula I with a monomer of the following formula II, ##STR1## in which R represents alkyl of 1 to 6 carbon atoms, benzyl, phenyl, or cyclohexyl and (b) 1% to 70% by weight, based on the weight of the composition, of a silicone compound. A negative resist pattern can be formed on a substrate by a process comprising coating the substrate with the resist composition, exposing the resist layer to an ionizing radiation, subjecting the resist layer to a relief treatment, and developing a resist pattern on the substrate by treatment with gas plasma.
摘要翻译： 由（a）下式I或II的单体的聚合物或下式I的单体的共聚物与下式II的单体组成的干显影负性抗蚀剂组合物， > II，其中R表示1至6个碳原子的烷基，苄基，苯基或环己基，和（b）1重量％至70重量％，基于组合物的重量，硅氧烷化合物。 可以通过包括用抗蚀剂组合物涂覆基板，将抗蚀剂层暴露于电离辐射，使抗蚀剂层进行浮雕处理，以及通过处理在基板上显影抗蚀剂图案的方法，在基板上形成负的抗蚀剂图案 与气体等离子体。
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公开(公告)号：US4267258A
公开(公告)日：1981-05-12
申请号：US101688
申请日：1979-12-10
IPC分类号： G03F7/20 , G03F7/038 , H01L21/027 , G03C1/68
CPC分类号： G03F7/038 , G03F7/0388
摘要： A negative type resist is provided for deep ultraviolet light lithography. This resist comprises a polymer of a diallyl ester of a dicarboxylic acid having a degree of dispersion of 3 or less, which is given by the ratio of a weight-average molecular weight Mw to a number-average molecular weight Mn. This deep UV resist can produce a fine detail resist pattern having a high resolution, and it has a high sensitivity to irradiating the coated film of the polymer on a substrate with deep UV light followed by development.
摘要翻译： 为深紫外光光刻提供负型抗蚀剂。 该抗蚀剂包含通过重均分子量Mw与数均分子量Mn的比率给出的分散度为3以下的二羧酸的二烯丙基酯的聚合物。 这种深紫外线抗蚀剂可以产生具有高分辨率的精细细节抗蚀剂图案，并且对具有深紫外光的基板上的聚合物的涂覆膜进行照射，然后显影，具有高灵敏度。
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公开(公告)号：US4481279A
公开(公告)日：1984-11-06
申请号：US385886
申请日：1982-06-07
申请人： Jiro Naito , Yasuhiro Yoneda , Kenroh Kitamura
发明人： Jiro Naito , Yasuhiro Yoneda , Kenroh Kitamura
IPC分类号： C08F290/00 , C08F299/00 , G03F7/004 , G03F7/038 , G03F7/039 , G03F7/11 , G03F7/30 , G03F7/36 , G03C1/72 , G03F7/26
摘要： A dry-developing positive resist composition consisting of (a) a polymeric material containing, in the molecular structure, unsaturated hydrocarbon bonds inclusive of vinyl, allyl, cinnamoyl, or acryl double bonds or epoxy groups or halogen atoms and (b) 1% to 70% by weight, based on the weight of the composition, of a silicon compound. A positive resist pattern is formed on a substrate by a process comprising coating the substrate with said resist composition, exposing the resist layer to radiation, and developing a resist pattern on the substrate by treatment with gas plasma.
摘要翻译： 一种干发展正性抗蚀剂组合物，其由（a）在分子结构中含有不饱和烃键（包括乙烯基，烯丙基，肉桂酰基或丙烯酸双键或环氧基或卤素原子）的聚合物材料组成，和（b）1％ 70重量％，基于组合物的重量，硅化合物。 通过包括用所述抗蚀剂组合物涂覆基材，将抗蚀剂层暴露于辐射以及通过用等离子体处理在基板上显影抗蚀剂图案的方法，在基板上形成正的抗蚀剂图案。
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公开(公告)号：US5060185A
公开(公告)日：1991-10-22
申请号：US316272
申请日：1989-02-27
申请人： Jiro Naito , Fumio Ito
发明人： Jiro Naito , Fumio Ito
CPC分类号： G06F11/1458 , G06F11/1456 , G06F11/1464 , G06F11/1466 , G06Q20/20 , G06Q20/203 , G07G1/14 , G06F11/1469 , G06F11/1662 , G06F11/2094 , G06F11/2097 , Y10S707/99952 , Y10S707/99953
摘要： A file backup system for POS data includes a master terminal and a backup terminal along with a master file and a backup file, all of which are coupled to a plurality of satellite terminals. A file controller is provided for each of the files. When one of the files is down, the master file is capable of copying the contents of the down file while simultaneously responding to a request from any terminal and controlling the transfer of data without stopping the operation of the system.
摘要翻译： 用于POS数据的文件备份系统包括主终端和备用终端以及主文件和备份文件，所有主文件和备份文件都耦合到多个卫星终端。 为每个文件提供文件控制器。 当其中一个文件关闭时，主文件能够复制下载文件的内容，同时响应任何终端的请求并控制数据传输，而不停止系统的操作。
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公开(公告)号：US5127058A
公开(公告)日：1992-06-30
申请号：US454030
申请日：1989-12-20
申请人： Hidenori Yamasaki , Jiro Naito
发明人： Hidenori Yamasaki , Jiro Naito
CPC分类号： H03G9/02
摘要： An improved gain controller for use in an audio equipment for controlling a gain of an audio signal without causing any clipping distortion and keeping a good S/N ratio. The gain controller in accordance with this invention comprises a tone controller for setting a frequency characteristic for attaining a preferable tone, a first electronic volume controller arranged at the front stage of the tone controller for attenuating an input signal, a second electronic volume controller arranged at the rare stage of the tone controller for attenuating the signal therefrom and a microprocessor for controlling the first electronic volume controller, the second electronic volume controller and the tone controller in a cooperative manner, thereby the amount of attenuation at the first electronic volume controller is determined by the microprocessor in response to the selected frequency characteristic in the tone controller and the amount of attenuation at the second electronic volume controller is determined by the microprocessor in response to the total attenuation in the whole system.
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