公开(公告)号：US07286242B2

公开(公告)日：2007-10-23

申请号：US10489108

申请日：2002-09-23

申请人： Yeong Ryeol Kim ,  Ji Jong Park ,  Jin Yong Kim ,  Joong Whan Lee

发明人： Yeong Ryeol Kim ,  Ji Jong Park ,  Jin Yong Kim ,  Joong Whan Lee

IPC分类号： G01B9/02

CPC分类号： G01B11/0625

摘要： The present invention relates to a non-contact, non-destructive measuring apparatus that measures thickness profile and refractive index distribution of a single or multiple layers of thin films by means of the principle of reflectometry. According to the present invention, by employing more than one narrow band-pass optical filters and a two-dimensional array of CCD sensors, and by finding an optimal solution for the nonlinear functional relationship between the thickness of said thin film or thin films and the corresponding refractive indexes by using an iterative numerical computation method, said apparatus simultaneously measures local area-wise thickness profile and refractive index distribution among others of said a single layer or multiple layers of thin films on a substrate.

摘要翻译： 本发明涉及通过反射测量原理测量单层或多层薄膜的厚度分布和折射率分布的非接触，非破坏性测量装置。 根据本发明，通过采用多于一个窄带通滤光器和CCD传感器的二维阵列，并且通过找到用于所述薄膜或薄膜的厚度与所述薄膜之间的非线性函数关系的最佳解 通过使用迭代数值计算方法对应的折射率，所述装置同时测量衬底上所述单层或多层薄膜的局部区域厚度分布和折射率分布。

公开(公告)号：US06447908B2

公开(公告)日：2002-09-10

申请号：US08995537

申请日：1997-12-22

申请人： Sun Jin Yun ,  Joong Whan Lee

发明人： Sun Jin Yun ,  Joong Whan Lee

IPC分类号： B32B516

CPC分类号： H01J31/127 ,  H01J2329/30 ,  Y10T428/2991 ,  Y10T428/2993

摘要： A method for forming a cathodoluminescent screen by forming cathodoluminescent films on the inner surface of screen panel for a field emission display by a screen printing, a spray, or an electrodeposition process. The field emission display cathodoluminescent particles for improving a luminescent emission efficiency, wherein the improved cathodoluminescent particles are formed by coating a uniform phosphor material on the surfaces of cathodoluminescent particles by an atomic layer deposition.

摘要翻译： 用于通过丝网印刷，喷涂或电沉积工艺在屏幕面板的内表面上形成阴极发光膜进行场发射显示的阴极发光屏的形成方法。 用于提高发光效率的场发射显示阴极发光粒子，其中通过原子层沉积在阴极发光粒子的表面上涂覆均匀的荧光材料形成改进的阴极发光粒子。

公开(公告)号：US08004677B2

公开(公告)日：2011-08-23

申请号：US12308662

申请日：2007-06-20

申请人： Joong Whan Lee ,  Young June Ko ,  Young Sun Park ,  Yoon Jong Park ,  Chi Woon Jeong ,  Sang Heon Ye ,  Yong Jai Cho ,  Hyun Mo Cho ,  Won Chegal

发明人： Joong Whan Lee ,  Young June Ko ,  Young Sun Park ,  Yoon Jong Park ,  Chi Woon Jeong ,  Sang Heon Ye ,  Yong Jai Cho ,  Hyun Mo Cho ,  Won Chegal

IPC分类号： G01J4/00

CPC分类号： G01N21/211

摘要： The present invention relates to an ellipsometer, and more particularly, to an ellipsometer to find out the optical properties of the sample by analyzing the variation of the polarization of a light which has specific polarisation then reflected on a surface of the sample.

摘要翻译： 本发明涉及一种椭偏仪，更具体地说，涉及通过分析具有特定偏振光然后在样品表面反射的光的偏振变化来找出样品的光学特性的椭偏仪。

公开(公告)号：US20100045985A1

公开(公告)日：2010-02-25

申请号：US12308662

申请日：2007-06-20

申请人： Joong Whan Lee ,  Young June Ko ,  Young Sun Park ,  Yoon Jong Park ,  Chi Woon Jeong ,  Sang Heon Ye ,  Yong Jai Cho ,  Hyun Mo Cho ,  Won Chegal

发明人： Joong Whan Lee ,  Young June Ko ,  Young Sun Park ,  Yoon Jong Park ,  Chi Woon Jeong ,  Sang Heon Ye ,  Yong Jai Cho ,  Hyun Mo Cho ,  Won Chegal

IPC分类号： G01J4/00

CPC分类号： G01N21/211

摘要： The present invention relates to an ellipsometer, and more particularly, to an ellipsometer to find out the optical properties of the sample by analyzing the variation of the polarization of a light which has specific polarisation then reflected on a surface of the sample.

摘要翻译： 本发明涉及一种椭偏仪，更具体地说，涉及通过分析具有特定偏振光然后在样品表面反射的光的偏振变化来找出样品的光学特性的椭偏仪。