公开(公告)号：US20050137809A1

公开(公告)日：2005-06-23

申请号：US11030735

申请日：2005-01-06

申请人： Yia Chang ,  Hanyou Chu ,  Jon Opsal

发明人： Yia Chang ,  Hanyou Chu ,  Jon Opsal

IPC分类号： G01B11/00 ,  G01N21/47 ,  G01N31/00

CPC分类号： G01N21/4788

摘要： A method for modeling optical scattering includes an initial step of defining a zero-th order structure (an idealized representation) for a subject including a perturbation domain and a background material. A Green's function and a zero-th order wave function are obtained for the zero-th order structure using rigorous coupled wave analysis (RCWA). A Lippmann-Schwinger equation is constructed including the Green's function, zero-th order wave function and a perturbation function. The Lippmann-Schwinger equation is then evaluated over a selected set of mesh points within the perturbation domain. The resulting linear equations are solved to compute one or more reflection coefficients for the subject.

摘要翻译： 一种用于模拟光学散射的方法包括为包括扰动域和背景材料的对象定义零级结构（理想化表示）的初始步骤。 使用严格的耦合波分析（RCWA）为零阶结构获得了绿色函数和零阶波函数。 构建了包括绿色函数，零阶波函数和扰动函数的Lippmann-Schwinger方程。 然后在扰动域内的选定的一组网格点上评估Lippmann-Schwinger方程。 求出所得到的线性方程，以计算被摄体的一个或多个反射系数。

公开(公告)号：US20050251350A1

公开(公告)日：2005-11-10

申请号：US11177699

申请日：2005-07-08

申请人： Jon Opsal ,  Hanyou Chu

发明人： Jon Opsal ,  Hanyou Chu

IPC分类号： G01B11/02 ,  G01B11/24 ,  G01N21/21 ,  G01N21/27 ,  G03F7/20 ,  G06F17/00 ,  H01L21/027 ,  H01L21/66

CPC分类号： G03F7/70616 ,  G01B11/24 ,  G01N21/211 ,  G03F7/705 ,  G03F7/70625

摘要： A system for characterizing geometric structures formed on a sample on a real time basis is disclosed. A multi-parameter measurement module generates output signals as a function of either wavelength or angle of incidence. The output signals are supplied to a parallel processor. The processor creates an initial theoretical model and then calculates the theoretical optical response of that sample. The calculated optical response is compared to measured values. Based on the comparison, the model configuration is modified to be closer to the actual measured structure. The processor recalculates the optical response of the modified model and compares the result to the measured data. This process is repeated in an iterative manner until a best fit is achieved. The steps of calculating the optical response of the model is distributed to the processors as a function of wavelength or angle of incidence so these calculations can be performed in parallel.

摘要翻译： 公开了一种在实时基础上表征样品上形成的几何结构的系统。 多参数测量模块产生作为波长或入射角的函数的输出信号。 输出信号被提供给并行处理器。 处理器创建初始理论模型，然后计算该样本的理论光学响应。 将计算出的光学响应与测量值进行比较。 基于比较，模型配置被修改为更接近实际的测量结构。 处理器重新计算修改模型的光学响应，并将结果与​​测量数据进行比较。 以迭代的方式重复该过程，直到达到最佳拟合。 计算模型的光学响应的​​步骤作为波长或入射角分布到处理器，因此可以并行执行这些计算。

公开(公告)号：US06867866B1

公开(公告)日：2005-03-15

申请号：US10212385

申请日：2002-08-05

申请人： Yia Chung Chang ,  Hanyou Chu ,  Jon Opsal

发明人： Yia Chung Chang ,  Hanyou Chu ,  Jon Opsal

IPC分类号： G01B11/00 ,  G01N21/47 ,  G01N31/00

CPC分类号： G01N21/4788

摘要： A method for modeling optical scattering includes an initial step of defining a zero-th order structure (an idealized representation) for a subject including a perturbation domain and a background material. A Green's function and a zero-th order wave function are obtained for the zero-th order structure using rigorous coupled wave analysis (RCWA). A Lippmann-Schwinger equation is constructed including the Green's function, zero-th order wave function and a perturbation function. The Lippmann-Schwinger equation is then evaluated over a selected set of mesh points within the perturbation domain. The resulting linear equations are solved to compute one or more reflection coefficients for the subject.

公开(公告)号：US06704661B1

公开(公告)日：2004-03-09

申请号：US09906290

申请日：2001-07-16

申请人： Jon Opsal ,  Hanyou Chu

发明人： Jon Opsal ,  Hanyou Chu

IPC分类号： G06F1700

CPC分类号： G03F7/70616 ,  G01B11/24 ,  G01N21/211 ,  G03F7/705 ,  G03F7/70625

摘要： A system for characterizing periodic structures formed on a sample on a real time basis is disclosed. A multi-parameter measurement module generates output signals as a function of either wavelength or angle of incidence. The output signals are supplied to a parallel processor. The processor creates an initial theoretical model and then calculates the theoretical optical response of that sample. The calculated optical response is compared to measured values. Based on the comparison, the model configuration is modified to be closer to the actual measured structure. The processor recalculates the optical response of the modified model and compares the result to the measured data. This process is repeated in an iterative manner until a best fit is achieved. The steps of calculating the optical response of the model is distributed to the processors as a function of wavelength or angle of incidence so these calculations can be performed in parallel.

公开(公告)号：US07145664B2

公开(公告)日：2006-12-05

申请号：US10784619

申请日：2004-02-23

申请人： Jon Opsal ,  Hanyou Chu ,  Xuelong Cao ,  Youxian Wen

发明人： Jon Opsal ,  Hanyou Chu ,  Xuelong Cao ,  Youxian Wen

IPC分类号： G01B11/00 ,  G06F17/00

CPC分类号： G01N21/4788

摘要： A method for modeling samples includes the use of control points to define lines profiles and other geometric shapes. Each control point used within a model influences a shape within the model. Typically, the control points are used in a connect-the-dots fashion where a set of dots defines the outline or profile of a shape. The layers within the sample are typically modeled independently of the shape defined using the control points. The overall result is to minimize the number of parameters used to model shapes while maintaining the accuracy of the resulting scatterometry models.

公开(公告)号：US06931361B2

公开(公告)日：2005-08-16

申请号：US10877397

申请日：2004-06-25

申请人： Jon Opsal ,  Hanyou Chu

发明人： Jon Opsal ,  Hanyou Chu

IPC分类号： G01B11/02 ,  G01B11/24 ,  G01N21/21 ,  G01N21/27 ,  G03F7/20 ,  G06F17/00 ,  H01L21/027 ,  H01L21/66

CPC分类号： G03F7/70616 ,  G01B11/24 ,  G01N21/211 ,  G03F7/705 ,  G03F7/70625

摘要： A system for characterizing periodic structures formed on a sample on a real time basis is disclosed. A spectroscopic measurement module generates output signals as a function of wavelength. The output signals are supplied to a processor for evaluation, which creates an initial theoretical model having a rectangular structure. The processor calculates the theoretical optical response of that sample, which is compared to normalized measured values at each of a plurality of wavelengths. The model configuration is then modified to be closer to the actual measured structure. The processor recalculates the optical response and compares the result to the normalized data. This process is repeated in an iterative manner until a best fit rectangular shape is obtained. Thereafter, the complexity of the model is iteratively increased, and model is iteratively fit to the data until a best fit model is obtained which is similar to the periodic structure.

摘要翻译： 公开了一种用于表征实时地在样品上形成的周期性结构的系统。 光谱测量模块产生作为波长的函数的输出信号。 将输出信号提供给用于评估的处理器，这产生具有矩形结构的初始理论模型。 处理器计算该样本的理论光学响应，其与多个波长中的每个波长处的归一化测量值进行比较。 然后将模型配置修改为更接近实际测量结构。 处理器重新计算光学响应，并将结果与​​归一化数据进行比较。 以迭代的方式重复该过程，直到获得最佳拟合的矩形形状。 此后，模型的复杂性被迭代地增加，并且模型迭代地适合数据，直到获得类似于周期性结构的最佳拟合模型。

公开(公告)号：US07233390B2

公开(公告)日：2007-06-19

申请号：US10795915

申请日：2004-03-08

申请人： Yia-Chung Chang ,  Hanyou Chu ,  Jon Opsal

发明人： Yia-Chung Chang ,  Hanyou Chu ,  Jon Opsal

IPC分类号： G01N21/00

CPC分类号： G01N21/95607

摘要： A method for simulating the optical properties of samples having non-uniform line edges includes creating a model for the sample being analyzed. To simulate roughness, lines within the model are represented as combinations of three dimensional objects, such as circular or elliptical mesas. The three-dimensional objects are arranged in a partially overlapping linear fashion. The objects, when spaced closely together resemble a line with edge roughness that corresponds to the object size and pitch. A second method allows lines within the model to vary in width over their lengths. The model is evaluated using a suitable three-dimensional technique to simulate the optical properties of the sample being analyzed.

摘要翻译： 用于模拟具有不均匀线边缘的样品的光学性质的方法包括为正在分析的样品创建模型。 为了模拟粗糙度，模型中的线被表示为三维对象的组合，例如圆形或椭圆形台面。 三维物体以部分重叠的线性方式排列。 当物体间隔紧密的时候，物体的边缘粗糙度对应于物体的大小和间距。 第二种方法允许模型内的线宽度在其长度上变化。 使用合适的三维技术评估该模型，以模拟正在分析的样品的光学性质。

公开(公告)号：US20070040852A1

公开(公告)日：2007-02-22

申请号：US11542806

申请日：2006-10-04

申请人： Jon Opsal ,  Hanyou Chu ,  Xuelong Cao ,  Youxian Wen

发明人： Jon Opsal ,  Hanyou Chu ,  Xuelong Cao ,  Youxian Wen

IPC分类号： G09G5/00

CPC分类号： G01N21/4788

摘要： A method for modeling samples includes the use of control points to define lines profiles and other geometric shapes. Each control point used within a model influences a shape within the model. Typically, the control points are used in a connect-the-dots fashion where a set of dots defines the outline or profile of a shape. The layers within the sample are typically modeled independently of the shape defined using the control points. The overall result is to minimize the number of parameters used to model shapes while maintaining the accuracy of the resulting scatterometry models.

摘要翻译： 用于建模样本的方法包括使用控制点来定义线轮廓和其他几何形状。 模型中使用的每个控制点影响模型内的形状。 通常，控制点以连接点的方式使用，其中一组点定义形状的轮廓或轮廓。 样品中的层通常被模拟，独立于使用控制点定义的形状。 总体结果是最小化用于建模形状的参数数量，同时保持得到的散射测量模型的准确性。

公开(公告)号：US07038850B2

公开(公告)日：2006-05-02

申请号：US11030735

申请日：2005-01-06

申请人： Yia Chung Chang ,  Hanyou Chu ,  Jon Opsal

发明人： Yia Chung Chang ,  Hanyou Chu ,  Jon Opsal

IPC分类号： G01B11/00

CPC分类号： G01N21/4788

摘要： A method for modeling optical scattering includes an initial step of defining a zero-th order structure (an idealized representation) for a subject including a perturbation domain and a background material. A Green's function and a zero-th order wave function are obtained for the zero-th order structure using rigorous coupled wave analysis (RCWA). A Lippmann-Schwinger equation is constructed including the Green's function, zero-th order wave function and a perturbation function. The Lippmann-Schwinger equation is then evaluated over a selected set of mesh points within the perturbation domain. The resulting linear equations are solved to compute one or more reflection coefficients for the subject.

摘要翻译： 一种用于模拟光学散射的方法包括为包括扰动域和背景材料的对象定义零级结构（理想化表示）的初始步骤。 使用严格的耦合波分析（RCWA）为零阶结构获得了绿色函数和零阶波函数。 构建了包括绿色函数，零阶波函数和扰动函数的Lippmann-Schwinger方程。 然后在扰动域内的选定的一组网格点上评估Lippmann-Schwinger方程。 求出所得到的线性方程，以计算被摄体的一个或多个反射系数。

公开(公告)号：US06778911B2

公开(公告)日：2004-08-17

申请号：US10405541

申请日：2003-04-02

申请人： Jon Opsal ,  Hanyou Chu

发明人： Jon Opsal ,  Hanyou Chu

IPC分类号： G06F1700

CPC分类号： G03F7/70616 ,  G01B11/24 ,  G01N21/211 ,  G03F7/705 ,  G03F7/70625

摘要： A system for characterizing periodic structures on a real time basis is disclosed. A multi-parameter measurement module generates output signals as a function of wavelength or angle of incidence. The output signals are supplied to a parallel processor, which creates an initial theoretical model and calculates the theoretical optical response. The calculated optical response is compared to measured values. Based on the comparison, the model configuration is modified to be closer to the actual measured structure. Thereafter, the complexity of the model is iteratively increased, by dividing the model into layers each having an associated width and height. The model is fit to the data in an iterative manner until a best fit model is obtained which is similar in structure to the periodic structure.

摘要翻译： 公开了一种用于实时表征周期性结构的系统。 多参数测量模块产生作为波长或入射角的函数的输出信号。 输出信号被提供给并行处理器，其产生初始理论模型并计算理论光学响应。 将计算出的光学响应与测量值进行比较。 基于比较，模型配置被修改为更接近实际的测量结构。 此后，通过将模型分为各自具有相关联的宽度和高度的层，迭代地增加了模型的复杂性。 该模型以迭代方式适合于数据，直到获得与结构相似的周期结构相似的最佳拟合模型。