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    Method of manufacturing monolithic ink-jet printhead
    1.
    发明授权
    Method of manufacturing monolithic ink-jet printhead 失效
    单片喷墨打印头的制造方法

    公开(公告)号：US06806108B2

    公开(公告)日：2004-10-19

    申请号：US10246622

    申请日：2002-09-19

    申请人： Yong-shik Park ,  Sang-wook Lee ,  Jae-sik Min ,  Seo-hyun Cho ,  Keon Kuk

    发明人： Yong-shik Park ,  Sang-wook Lee ,  Jae-sik Min ,  Seo-hyun Cho ,  Keon Kuk

    IPC分类号： H01L2100

    CPC分类号： B41J2/1642 ,  B41J2/14137 ,  B41J2/1601 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2002/1437

    摘要： A method of manufacturing a monolithic ink-jet printhead includes preparing a silicon substrate, forming an ink passage comprising a manifold supplying ink, an ink chamber filled with ink supplied from the manifold, an ink channel connecting the ink chamber to the manifold, and a nozzle through which the ink is ejected from the ink chamber, on the silicon substrate, and reprocessing a wall of the ink passage by passing XeF2 gas through the ink passage and dry etching the wall of the ink passage. In the reprocessing of the wall of the ink passage using XeF2 gas, the wall of the ink passage is smoothed, and a size of the ink passage can be more precisely adjusted to a design dimension, thereby improving a printing performance of the ink-jet printhead.

    摘要翻译： 一种制造单片式喷墨打印头的方法包括：制备硅基片，形成一个墨水通道，该墨水通道包括一个供应墨水的歧管，一个填充有从该歧管供应的墨水的墨水室，一个将该墨水室连接到歧管的墨水通道，以及一个 喷嘴，油墨从油墨室喷射到硅基板上，并且通过使XeF2气体通过油墨通道并对油墨通道的壁进行干蚀刻来再处理油墨通道的壁。 在使用XeF2气体对油墨通道的壁进行后处理时，油墨通道的壁被平滑化，并且可以将油墨通道的尺寸更精确地调节到设计尺寸，从而提高喷墨打印性能 打印头。

    Ink-jet print head and method thereof
    2.
    发明授权
    Ink-jet print head and method thereof 失效
    喷墨打印头及其方法

    公开(公告)号：US06561626B1

    公开(公告)日：2003-05-13

    申请号：US10121723

    申请日：2002-04-15

    申请人： Jae-sik Min ,  Seo-hyun Cho ,  Sang-wook Lee ,  Jun-hyub Park ,  Yong-shik Park ,  Kyong-il Kim

    发明人： Jae-sik Min ,  Seo-hyun Cho ,  Sang-wook Lee ,  Jun-hyub Park ,  Yong-shik Park ,  Kyong-il Kim

    IPC分类号： B41J214

    CPC分类号： B41J2/14137 ,  B41J2/14129 ,  B41J2002/1437 ,  Y10T29/49083 ,  Y10T29/49401

    摘要： An ink-jet print head preventing thermal accumulation on a nozzle plate includes a substrate, a channel formed in the substrate to supply ink, a nozzle plate connected to the substrate and including a nozzle corresponding to the channel, a heat element formed in the nozzle plate to surround the nozzle, a thermal conduction layer formed on an upper side of the heat element formed between the thermal conduction layer and the heat element, and a thermal shunt spaced-apart from the heat element by a predetermined distance not to overlap the heat element in a direction parallel to the nozzle plate and connecting the thermal conduction layer to the substrate. Redundant heat generated from the heat element is not accumulated on a membrane of the nozzle plate but is rapidly absorbed into an inorganic thermal conduction layer formed in the membrane and is transferred to the bulk silicon substrate through a metallic thermal bridge, such as the thermal shunt.

    摘要翻译： 防止喷嘴板上的热积聚的喷墨打印头包括基板，形成在基板中以供应墨水的通道，连接到基板并包括与通道对应的喷嘴的喷嘴板，形成在喷嘴中的热元件 围绕所述喷嘴的板，形成在所述热传导层和所述加热元件之间的所述加热元件的上侧上的导热层，以及与所述加热元件间隔开预定距离而不与所述热量重叠的热分流器 元件在平行于喷嘴板的方向上并将导热层连接到基板。 从加热元件产生的冗余热量不会积聚在喷嘴板的膜上，而是迅速地被吸收到形成在膜中的无机导热层中，并通过金属热桥转移到体硅衬底，例如热分流 。

    Ink-jet print head and method thereof
    3.
    发明授权
    Ink-jet print head and method thereof 失效

    公开(公告)号：US06663226B2

    公开(公告)日：2003-12-16

    申请号：US10309122

    申请日：2002-12-04

    申请人： Jae-sik Min ,  Seo-hyun Cho ,  Sang-wook Lee ,  Jun-hyub Park ,  Yong-shik Park ,  Kyong-il Kim

    发明人： Jae-sik Min ,  Seo-hyun Cho ,  Sang-wook Lee ,  Jun-hyub Park ,  Yong-shik Park ,  Kyong-il Kim

    IPC分类号： B41J205

    CPC分类号： B41J2/14137 ,  B41J2/14129 ,  B41J2002/1437 ,  Y10T29/49083 ,  Y10T29/49401

    摘要： An ink-jet print head preventing thermal accumulation on a nozzle plate includes a substrate, a channel formed in the substrate to supply ink, a nozzle plate connected to the substrate and including a nozzle corresponding to the channel, a heat element formed in the nozzle plate to surround the nozzle, a thermal conduction layer formed on an upper side of the heat element formed between the thermal conduction layer and the heat element, and a thermal shunt spaced-apart from the heat element by a predetermined distance not to overlap the heat element in a direction parallel to the nozzle plate and connecting the thermal conduction layer to the substrate. Redundant heat generated from the heat element is not accumulated on a membrane of the nozzle plate but is rapidly absorbed into an inorganic thermal conduction layer formed in the membrane and is transferred to the bulk silicon substrate through a metallic thermal bridge, such as the thermal shunt.

    Ink-jet printhead and method of manufacturing the same
    5.
    发明授权
    Ink-jet printhead and method of manufacturing the same 失效
    喷墨打印头及其制造方法

    公开(公告)号：US06880919B2

    公开(公告)日：2005-04-19

    申请号：US10404423

    申请日：2003-04-02

    申请人： Jae-sik Min ,  Seo-hyun Cho ,  Byung-ha Park ,  Myung-jong Kwon ,  Kyong-il Kim ,  Yong-shik Park

    发明人： Jae-sik Min ,  Seo-hyun Cho ,  Byung-ha Park ,  Myung-jong Kwon ,  Kyong-il Kim ,  Yong-shik Park

    IPC分类号： B41J2/05 ,  B41J2/135 ,  B41J2/14 ,  B41J2/16 ,  B41J2/315

    CPC分类号： B41J2/1645 ,  B41J2/14137 ,  B41J2/1601 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1646 ,  B41J2002/1437

    摘要： An ink-jet printhead includes a substrate on which an ink chamber is formed, and a nozzle plate to cover the ink chamber, having a nozzle through which ink droplets are ejected from the ink chamber, and formed of a stack of a multi-layer insulating layer. The ink-jet printhead also includes a heater buried in the nozzle plate to surround the nozzle, an interconnection layer buried in the nozzle plate to electrically connect to the heater, and a coating layer formed of photoresist on the nozzle plate and having a through hole-type droplet guide connected to the nozzle of the nozzle plate. The droplet guide is formed through the coating layer, which has a sufficient thickness, and enables a meniscus of ink to be rapidly restored and stabilized, and ink droplets to be ejected at a high speed and high frequency. Also, the ink-jet printhead has improved resistance to abrasion and chemicals.

    摘要翻译： 喷墨打印头包括其上形成有墨水室的基板和用于覆盖墨水室的喷嘴板，具有喷嘴，墨滴通过喷嘴从墨水室喷出，并且由多层 绝缘层。 喷墨打印头还包括埋在喷嘴板中以围绕喷嘴的加热器，埋在喷嘴板中以电连接到加热器的互连层，以及在喷嘴板上由光致抗蚀剂形成的涂层，并且具有通孔 型液滴引导件连接到喷嘴板的喷嘴。 液滴引导件通过具有足够厚度的涂层形成，并且能够快速恢复和稳定墨水的弯液面，并且以高速和高频喷射墨滴。 此外，喷墨打印头具有改善的耐磨性和耐化学性。

    Ink-jet printhead and method for manufacturing the same
    6.
    发明授权
    Ink-jet printhead and method for manufacturing the same 失效
    喷墨打印头及其制造方法

    公开(公告)号：US07153633B2

    公开(公告)日：2006-12-26

    申请号：US11088985

    申请日：2005-03-24

    申请人： Jae-sik Min ,  Seo-hyun Cho ,  Byung-ha Park ,  Myung-jong Kwon ,  Kyong-il Kim ,  Yong-shik Park

    发明人： Jae-sik Min ,  Seo-hyun Cho ,  Byung-ha Park ,  Myung-jong Kwon ,  Kyong-il Kim ,  Yong-shik Park

    IPC分类号： B41J2/16

    CPC分类号： B41J2/1645 ,  B41J2/14137 ,  B41J2/1601 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1646 ,  B41J2002/1437

    摘要： An ink-jet printhead includes a substrate on which an ink chamber is formed, and a nozzle plate to cover the ink chamber, having a nozzle through which ink droplets are ejected from the ink chamber, and formed of a stack of a multi-layer insulating layer. The ink-jet printhead also includes a heater buried in the nozzle plate to surround the nozzle, an interconnection layer buried in the nozzle plate to electrically connect to the heater, and a coating layer formed of photoresist on the nozzle plate and having a through hole-type droplet guide connected to the nozzle of the nozzle plate. The droplet guide is formed through the coating layer, which has a sufficient thickness, and enables a meniscus of ink to be rapidly restored and stabilized, and ink droplets to be ejected at a high speed and high frequency. Also, the ink-jet printhead has improved resistance to abrasion and chemicals.

    摘要翻译： 喷墨打印头包括其上形成有墨水室的基板和用于覆盖墨水室的喷嘴板，具有喷嘴，墨滴通过喷嘴从墨水室喷出，并且由多层 绝缘层。 喷墨打印头还包括埋在喷嘴板中以围绕喷嘴的加热器，埋在喷嘴板中以电连接到加热器的互连层，以及在喷嘴板上由光致抗蚀剂形成的涂层，并且具有通孔 型液滴引导件连接到喷嘴板的喷嘴。 液滴引导件通过具有足够厚度的涂层形成，并且能够快速恢复和稳定墨水的弯液面，并且以高速和高频喷射墨滴。 此外，喷墨打印头具有改善的耐磨性和耐化学性。

    Ink-jet printhead with droplet ejecting portion provided in a hydrophobic layer
    8.
    发明授权
    Ink-jet printhead with droplet ejecting portion provided in a hydrophobic layer 失效
    具有设置在疏水层中的液滴喷射部的喷墨打印头

    公开(公告)号：US07175257B2

    公开(公告)日：2007-02-13

    申请号：US11280225

    申请日：2005-11-17

    申请人： Byung-ha Park ,  Seo-hyun Cho ,  Myung-jong Kwon ,  Yong-shik Park ,  Kyong-il Kim ,  Jae-sik Min

    发明人： Byung-ha Park ,  Seo-hyun Cho ,  Myung-jong Kwon ,  Yong-shik Park ,  Kyong-il Kim ,  Jae-sik Min

    IPC分类号： B41J2/135

    CPC分类号： B41J2/14137 ,  B41J2/1601 ,  B41J2/1606 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/1437

    摘要： An ink-jet printhead and a manufacturing method thereof include a substrate on which an ink chamber having a predetermined volume is formed, a passage for supplying ink to the ink chamber which is formed on a bottom of the ink chamber, a nozzle plate which includes a nozzle corresponding to a center of the ink chamber and at least two insulating layers formed on the substrate, a bubble guide formed inside the nozzle plate and extending from the nozzle into the ink chamber, and a heater which surrounds the nozzle and is disposed between the two insulating layers. A hydrophobic coating layer is formed on a surface of a uppermost layer of the nozzle plate, and a droplet ejecting portion that has a diameter smaller than that of the nozzle of the nozzle plate and is disposed on the same axis as the nozzle, is formed in the hydrophobic coating layer. The nozzle plate is prevented from becoming wet due to ink, stability of an ink spray and a consecutive spray performance are improved, and thus a printing quality and a printing performance of the ink-jet printhead are generally improved.

    摘要翻译： 喷墨打印头及其制造方法包括其上形成有预定体积的墨室的基板，用于向形成在墨室底部的墨室供墨的通道，喷嘴板包括 对应于墨水腔的中心的喷嘴和形成在基板上的至少两个绝缘层，形成在喷嘴板内部并从喷嘴延伸到墨室中的气泡引导件，以及围绕喷嘴并设置在喷墨头之间的加热器 两个绝缘层。 在喷嘴板的最上层的表面上形成疏水性涂层，并且形成直径小于喷嘴板的喷嘴直径且与喷嘴相同的轴线的液滴喷射部 在疏水涂层中。 由于墨水防止喷嘴板变湿，墨喷射的稳定性和连续喷射性能得到改善，因此喷墨打印头的打印质量和打印性能通常得到改善。

    Head of inkjet printer and method of manufacturing the same
    9.
    发明授权
    Head of inkjet printer and method of manufacturing the same 失效
    喷墨打印机头及其制造方法

    公开(公告)号：US06974208B2

    公开(公告)日：2005-12-13

    申请号：US10321574

    申请日：2002-12-18

    申请人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-chul Koh ,  Jae-sik Min ,  Tae-kyun Kim ,  Myung-song Jung

    发明人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-chul Koh ,  Jae-sik Min ,  Tae-kyun Kim ,  Myung-song Jung

    IPC分类号： B41J2/05 ,  B41J2/14 ,  B41J2/16

    CPC分类号： B41J2/1603 ,  B41J2/14129 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1642

    摘要： A head of an inkjet printer is formed by bonding of a heater substrate and a nozzle plate. In order to bond the heater substrate where a heater thin film and a protecting film are vapor-deposited, and the nozzle plate where a nozzle is formed, an intermediate layer is formed by forming a thin film of glass on the heater substrate by vapor-depositing, and the nozzle plate is installed on the heater substrate. SiO2 is formed at an interface between the nozzle plate and the heater thin film due to heating and application of an electric field, and thus the nozzle plate and the heater substrate are bonded with an electrostatic force of SiO2. The nozzle plate and the heater substrate are bonded by using the intermediate layer made of the thin film of glass instead of a general polymer as the bonding layer, thereby preventing swelling of the polymer and isolation of layers of the head occurring due to ink penetration into interfaces of the layers. Moreover, a bonding process is performed in wafer units to improve mass productivity.

    摘要翻译： 喷墨打印机的头部通过加热衬底和喷嘴板的结合而形成。 为了将加热器薄膜和保护膜气相沉积的加热器基板和形成喷嘴的喷嘴板接合，通过在加热器基板上形成玻璃薄膜而形成中间层， 沉积，并且喷嘴板安装在加热器基板上。 SiO 2由于加热和施加电场而在喷嘴板和加热器薄膜之间的界面处形成，因此喷嘴板和加热器基板以静电力的SiO 2 。 喷嘴板和加热器基板通过使用由玻璃薄膜代替一般聚合物作为粘结层而形成的中间层而粘合，从而防止聚合物溶胀并且由于墨渗入而发生头部的隔离 层的界面。 此外，在晶片单元中进行接合处理以提高批量生产率。

    Head of inkjet printer and method of manufacturing the same
    10.
    发明授权
    Head of inkjet printer and method of manufacturing the same 有权
    喷墨打印机头及其制造方法

    公开(公告)号：US07533971B2

    公开(公告)日：2009-05-19

    申请号：US11237713

    申请日：2005-09-29

    申请人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-chul Koh ,  Jae-sik Min ,  Tae-kyun Kim ,  Myung-song Jung

    发明人： Sung-joon Park ,  Seo-hyun Cho ,  Sang-chul Koh ,  Jae-sik Min ,  Tae-kyun Kim ,  Myung-song Jung

    IPC分类号： B41J2/05

    CPC分类号： B41J2/1603 ,  B41J2/14129 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1642

    摘要： A head of an inkjet printer is formed by bonding of a heater substrate and a nozzle plate. In order to bond the heater substrate where a heater thin film and a protecting film are vapor-deposited, and the nozzle plate where a nozzle is formed, an intermediate layer is formed by forming a thin film of glass on the heater substrate by vapor-depositing, and the nozzle plate is installed on the heater substrate. SiO2 is formed at an interface between the nozzle plate and the heater thin film due to heating and application of an electric field, and thus the nozzle plate and the heater substrate are bonded with an electrostatic force of SiO2. The nozzle plate and the heater substrate are bonded by using the intermediate layer made of the thin film of glass instead of a general polymer as the bonding layer, thereby preventing swelling of the polymer and isolation of layers of the head occurring due to ink penetration into interfaces of the layers. Moreover, a bonding process is performed in wafer units to improve mass productivity.

    摘要翻译： 喷墨打印机的头部通过加热衬底和喷嘴板的结合而形成。 为了将加热器薄膜和保护膜气相沉积的加热器基板和形成喷嘴的喷嘴板接合，通过在加热器基板上形成玻璃薄膜而形成中间层， 沉积，并且喷嘴板安装在加热器基板上。 由于加热和施加电场而在喷嘴板和加热器薄膜之间的界面处形成SiO 2，因此喷嘴板和加热器基板以SiO 2的静电力结合。 喷嘴板和加热器基板通过使用由玻璃薄膜代替一般聚合物作为粘结层而形成的中间层而粘合，从而防止聚合物溶胀并且由于墨渗入而发生头部的隔离 层的界面。 此外，在晶片单元中进行接合处理以提高批量生产率。