Semiconductor device manufacturing unit
    1.
    发明授权
    Semiconductor device manufacturing unit 失效
    半导体器件制造单元

    公开(公告)号:US4487161A

    公开(公告)日:1984-12-11

    申请号:US201115

    申请日:1980-10-28

    CPC分类号: C23C16/507

    摘要: A semiconductor device manufacturing unit in which plasma gas is maintained sealed in a quartz tube by a magnet disposed outside the quartz tube to make the density of plasma gas high and uniform thereby improving the quality of CVD films deposited with the gas and reducing the processing time for semiconductor wafers. A wafer holder is movably mounted in the quartz tube. A support bar is provided for moving the wafer holder with the support bar serving additionally as a ground electrode. An RF electrode and magnet are disposed outside the quartz tube. A heater may be disposed outside the RF electrode and magnet.

    摘要翻译: 一种半导体器件制造单元,其中通过设置在石英管外部的磁体将等离子体气体保持密封在石英管中,使得等离子体气体的密度高且均匀,从而提高了沉积在气体上的CVD膜的质量并缩短了处理时间 用于半导体晶片。 晶片保持器可移动地安装在石英管中。 提供支撑杆用于移动具有另外用作接地电极的支撑杆的晶片保持器。 RF电极和磁体设置在石英管的外部。 加热器可以设置在RF电极和磁体之外。

    Metal bellows accumulator
    2.
    发明授权
    Metal bellows accumulator 有权
    金属波纹管蓄电池

    公开(公告)号:US07628175B2

    公开(公告)日:2009-12-08

    申请号:US12223015

    申请日:2006-12-20

    IPC分类号: F16L55/04

    摘要: To prevent breakage by abnormal deformation when seal function of a seal section becomes ineffective to cause pressurized liquid remaining in the liquid chamber to be lost, a metallic bellows-type accumulator having a metal bellows, a bellows cap, an outer gas chamber and an inner liquid chamber, in a shell is structured to have a bellows constructed such that, when pressure in the liquid chamber (12) is further reduced after the bellows cap (31) is brought into contact with an oil port (4), surface contact sections (35) are formed on the metal bellows (3) and a curvature radius of U-shaped sections (3A) of crest portions (32) at the outer diameter side is reduced, and a curvature radius of U-shaped sections (3A) of root portions (33) at the inner diameter side is enlarged.

    摘要翻译: 为了防止密封部的密封功能无法使液体室内剩余的加压液体损失时异常变形的破损,具有金属波纹管,波纹管盖,外部气室和内部的金属波纹管式蓄能器 壳体中的液体室构造成具有波纹管,其构造成使得当波纹管盖(31)与油口(4)接触后,当液体室(12)中的压力进一步降低时,表面接触部分 (35)形成在金属波纹管(3)上,并且在外径侧的波峰部分(32)的U形部分(3A)的曲率半径减小,并且U形部分(3A)的曲率半径 在内径侧的根部部分(33)被扩大。

    Driving force transmission device
    3.
    发明授权
    Driving force transmission device 有权
    驱动力传动装置

    公开(公告)号:US08747279B2

    公开(公告)日:2014-06-10

    申请号:US13819425

    申请日:2011-07-26

    IPC分类号: B60W10/02

    摘要: A hybrid driving force transmission device is provided with a multiple-plate dry clutch, a piston, a piston arm, a return spring, bellows elastic seal components and an arm fixing plate. The return spring applies biasing force to the piston arm in the release direction of the clutch, during the release period of the multiple-plate dry clutch. The bellows elastic seal member is secured or maintained in a position on the side wall of a clutch drum and seals a through hole and arm distal end from the clutch chamber, and undergoes an elastic deformation following the stroke movement of the arm distal end. The arm fixing plate is integrally provided with the bellows elastic seal member, is fixed to the arm distal end, and when the multiple-plate dry clutch is engaged, is configured to contact the clutch plate for transferring the clutch engagement force.

    摘要翻译: 混合驱动力传递装置设置有多板干式离合器,活塞,活塞臂,复位弹簧,波纹管弹性密封部件和臂固定板。 在多板干式离合器的释放期间,复位弹簧在离合器的释放方向上向活塞臂施加偏压力。 波纹管弹性密封构件被固定或保持在离合器鼓的侧壁上的位置,并将通孔和臂远端与离合器室密封,并且在臂远端的行程运动之后经历弹性变形。 臂固定板一体地设置有波纹管弹性密封构件,固定在臂的前端,当多板干式离合器接合时,构成为与离合器板接触,用于传递离合器接合力。

    Accumulator
    4.
    发明授权
    Accumulator 有权
    累加器

    公开(公告)号:US07810522B1

    公开(公告)日:2010-10-12

    申请号:US12767078

    申请日:2010-04-26

    IPC分类号: F16L55/04

    CPC分类号: F16L55/053 F15B1/103

    摘要: To prevent abnormal deformation of a bellows, an accumulator has a regulation mechanism for reducing a pressure difference generated when liquid sealed in a liquid chamber and charged gas are thermally expanded at a zero-down time, a seal plate is arranged in an inner peripheral side of a bellows floating end, an elastically deformable thin plate is bonded to the seal plate, an outer peripheral portion of the thin plate is bonded to the bellows floating end, the seal plate is away from a seal at a time of a steady operation, the seal plate contacts with the seal at a zero-down time, and the thin plate is elastically deformed to make liquid pressure balance with gas pressure while the seal plate being kept in contact with the seal when the liquid and gas are thermally expanded.

    摘要翻译: 为了防止波纹管的异常变形,蓄压器具有调节机构,用于减少液体密封在液体室中而产生的压力差,并且带电气体在零下降时间内热膨胀,密封板布置在内周侧 的波纹管浮动端,可弹性变形的薄板接合到密封板,薄板的外周部分结合到波纹管浮动端,密封板在稳定操作时远离密封, 密封板在零下降时间与密封件接触,并且薄板弹性变形以使气压与气体压力平衡,同时当液体和气体热膨胀时,密封板与密封件保持接触。

    Thermal conductivity gas sensor for measuring fuel vapor content
    5.
    发明授权
    Thermal conductivity gas sensor for measuring fuel vapor content 失效
    用于测量燃料蒸气含量的导热气体传感器

    公开(公告)号:US5535614A

    公开(公告)日:1996-07-16

    申请号:US336223

    申请日:1994-11-07

    IPC分类号: G01N27/18

    CPC分类号: G01N27/185 F02D2200/0611

    摘要: A gas sensor of the thermal conductivity type suitable for the quantitative analysis of the fuel vapor content of a fuel-air mixture. The gas sensor (10) comprises a sensing element (28) and a compensating element (30), each of which includes an electrically-heated hot member (38) incorporated into a Wheatstone bridge circuit powered by a constant current supply circuit (70). The constant current supply circuit (70) is adjusted and regulated such that the hot member (38) of the sensing element (28) is heated with an electric current of such an intensity that corresponds to a point of transition (Y) at which, at the interface of the hot member (38) and the mixture, the predominant mode of heat transfer changes from thermal conduction to natural convection.

    摘要翻译: 适用于定量分析燃料 - 空气混合物的燃料蒸汽含量的导热型气体传感器。 气体传感器(10)包括感测元件(28)和补偿元件(30),每个元件包括并入由恒流供应电路(70)供电的惠斯登电桥电路中的电加热的热元件(38) 。 恒流供给电路(70)被调节和调节,使得感测元件(28)的热部件(38)以对应于转变点(Y)的强度的电流被加热, 在热构件(38)和混合物的界面处,热传导的主要模式从热传导变为自然对流。

    SEAL STRUCTURE
    6.
    发明申请
    SEAL STRUCTURE 审中-公开
    密封结构

    公开(公告)号:US20140252722A1

    公开(公告)日:2014-09-11

    申请号:US14349889

    申请日:2012-03-13

    IPC分类号: F16J15/08

    摘要: In order to prevent gaps from occurring in corner sections in a section where three surfaces are joined together, comprising the combination of a housing, grommet and cover, or the like, thereby improve sealing, a seal structure, which is provided with a housing in which a notch-shaped grommet-mounting section is disposed, a grommet, a cover and a metal substrate gasket, is provided, wherein the grommet is provided with a seal projection, and the seal projection forms a protruding section due to a portion of the seal projection protruding toward the metal substrate gasket when the seal projection makes intimate contact with the inner surface of the grommet-mounting section. The metal substrate gasket is provided with two seal lines and a groove-shaped recess between the seal lines. When nipped, the protruding section of the seal projection is tightly compressed inside the groove-shaped recess in the metal substrate gasket.

    摘要翻译: 为了防止在三个表面连接在一起的部分中的角部中发生间隙,包括壳体,索环和盖等的组合,从而改善密封,密封结构设置有壳体 设置有凹口形的索环安装部,设置有索环,盖和金属基板垫圈,其中,索环设置有密封突起,并且密封突起形成突出部,由于部分 当所述密封突起与所述垫圈安装部的内表面紧密接触时,所述密封突起朝向所述金属基板垫圈突出。 金属基板垫片在密封线之间设置有两条密封线和一个凹槽形凹槽。 当夹持时,密封突起的突出部分紧密地压在金属基底垫片的槽形凹槽内。

    Accumulator
    7.
    发明授权
    Accumulator 有权
    累加器

    公开(公告)号:US08371336B2

    公开(公告)日:2013-02-12

    申请号:US12672660

    申请日:2008-09-16

    IPC分类号: F16L55/04

    摘要: An outer gas type or inner gas type accumulator has a mechanism for reducing a pressure difference generated when liquid in a liquid chamber and gas expand thermally at a zero-down time, the pressure difference between the inside and outside of a bellows is reduced to suppress abnormal deformation of the bellows, a movable plate supported by a spring is provided at the bellows cap side of an oil port, the movable plate is supported by the spring and away from a seal in normal operation, the movable plate is pushed by the bellows cap and contacts with the seal while elastically deforming the spring, in a zero-down state, and when the liquid and the gas expand thermally in the zero-down state, the bellows cap moves to a position where the liquid pressure and the gas pressure balance, while the movable plate keeps contact with the seal.

    摘要翻译: 外部气体型或内部气体型蓄能器具有用于减少在液体室中的液体和气体在零下降时间热膨胀时产生的压力差的机构,波纹管的内部和外部之间的压力差减小以抑制 波纹管的异常变形,由弹簧支撑的可动板设置在油口的波纹管盖侧,可动板由弹簧支撑,并在正常操作中远离密封,可动板被波纹管推动 盖子并与密封件接触,同时在零下拉状态下使弹簧弹性变形,并且当液体和气体在零下拉状态下热膨胀时,波纹管盖移动到液体压力和气体压力 而可动板与密封件保持接触。

    Accumulator
    8.
    发明授权
    Accumulator 有权
    累加器

    公开(公告)号:US08096324B2

    公开(公告)日:2012-01-17

    申请号:US12679860

    申请日:2008-08-07

    IPC分类号: F16L55/04

    摘要: To restrain abnormal deformation of a bellows due to a pressure difference between the inside and outside thereof, an outside gas type accumulator includes a pressure difference regulation mechanism (21) having a movable plate (22) supported by a coil spring (23) on the oil port (4) side of a bellows cap (8), the plate (22) moves together with the cap (8) in a state of being supported by the spring (23), during normal operation, the plate (22) moves together with the cap (8) to be brought into contact with a seal (13) at zero-down time, and the plate (22) keeps contact with the seal (13) and the cap (8) moves to a position where liquid pressure and gas pressure balances while compressing the spring (23) when the liquid and the charged gas expand thermally.

    摘要翻译: 为了抑制波纹管的内外压差引起的波纹管的异常变形,外部气体型蓄能器包括压差调节机构(21),该压力差调节机构(21)具有由螺旋弹簧(23)支撑的可动板(22) 波纹管盖(8)的油口(4)侧,板(22)在由弹簧(23)支撑的状态下与盖(8)一起移动,在正常操作期间,板(22)移动 与盖(8)一起在零关闭时与密封件(13)接触,并且板(22)与密封件(13)保持接触,并且盖(8)移动到液体 压力和气体压力平衡,同时当液体和带电气体热膨胀时压缩弹簧(23)。

    Accumulator
    9.
    发明授权
    Accumulator 有权
    累加器

    公开(公告)号:US07770599B2

    公开(公告)日:2010-08-10

    申请号:US12612217

    申请日:2009-11-04

    IPC分类号: F16L55/04

    摘要: To prevent plastic deformation of a bellows due to a pressure difference between inner and outer sides of the bellows in an outside gas type or inside gas type accumulator, a disc-like gasket is held in a floatable state to a surface close to a stay in a bellows cap by a gasket holder, so that, the disc-like gasket moves together with the bellows cap at a steady operation time, the disc-like gasket moves together with the bellows cap to contact with an end surface portion of the stay, thereby closing the liquid chamber at a zero-down time, and the bellow cap moves toward a position where liquid pressure and gas pressure balance while the disc-like gasket keeps contacting with the stay due to a difference of pressure receiving areas in both the surfaces when the liquid in the liquid chamber is thermally expanded at a zero-down time.

    摘要翻译: 为了防止由于外部气体型或内部气体型蓄能器中的波纹管的内侧和外侧之间的压力差引起的波纹管的塑性变形,盘状垫圈保持在可浮动状态下,接近于停留在 通过垫圈保持器的波纹管盖,使得盘状垫片在稳定的操作时间与波纹管盖一起移动,盘形垫圈与波纹管盖一起移动以与支架的端面部分接触, 从而在零关闭时关闭液体室,并且波纹管帽朝向液体压力和气体压力平衡的位置移动,同时盘状垫圈与两个表面中的压力接收区域的差异保持与停留接触 当液体室中的液体在零下降时间热膨胀时。

    ACCUMULATOR
    10.
    发明申请
    ACCUMULATOR 有权
    累加器

    公开(公告)号:US20100108168A1

    公开(公告)日:2010-05-06

    申请号:US12612217

    申请日:2009-11-04

    IPC分类号: F16L55/04

    摘要: To prevent plastic deformation of a bellows due to a pressure difference between inner and outer sides of the bellows in an outside gas type or inside gas type accumulator, a disc-like gasket is held in a float able state to a surface close to a stay in a bellows cap by a gasket holder, so that, the disc-like gasket moves together with the bellows cap at a steady operation time, the disc-like gasket moves together with the bellows cap to contact with an end surface portion of the stay, thereby closing the liquid chamber at a zero-down time, and the bellow cap moves toward a position where liquid pressure and gas pressure balance while the disc-like gasket keeps contacting with the stay due to a difference of pressure receiving areas in both the surfaces when the liquid in the liquid chamber is thermally expanded at a zero-down time.

    摘要翻译: 为了防止由于外部气体型或内部气体型蓄能器中的波纹管的内侧和外侧之间的压力差引起的波纹管的塑性变形,盘形垫圈保持在浮动状态下,靠近停留点的表面 在垫圈保持器的波纹管盖中,使得盘状衬垫在稳定的操作时间与波纹管盖一起移动,盘形垫圈与波纹管盖一起移动以与停留的端面部分接触 ,从而在零关闭时关闭液体室,并且波纹管帽朝向液体压力和气体压力平衡的位置移动,同时盘状垫圈与支撑件保持接触,由于两者中的压力接收面积的差异 当液体室中的液体在零下降时间热膨胀时,表面。