Optical scanning system
    1.
    发明授权
    Optical scanning system 失效
    光学扫描系统

    公开(公告)号:US5543955A

    公开(公告)日:1996-08-06

    申请号:US360947

    申请日:1994-12-21

    摘要: An optical scanning system has an image reading scanning system for emitting a first scanning beam of light to read an image of an object, an image forming scanning system for emitting a second scanning beam of light to form an image on a light receiving surface, and a light receiving element. Each of the first and second scanning beams is incident on the light receiving element when each of the first and second scanning beams is located at an end portion of a scanning area, and the first scanning beam and the second scanning beam have different optical characteristics. The optical scanning system also has a circuit for generating a horizontal synchronous signal for the image reading optical system and the image forming optical system, respectively, in accordance with light received by the light receiving element.

    摘要翻译: 光学扫描系统具有用于发射第一扫描光束以读取物体的图像的图像读取扫描系统,用于发射第二扫描光束以在光接收表面上形成图像的图像形成扫描系统,以及 光接收元件。 当第一和第二扫描光束中的每一个位于扫描区域的端部时,第一和第二扫描光束中的每一个入射在光接收元件上,并且第一扫描光束和第二扫描光束具有不同的光学特性。 光学扫描系统还具有根据光接收元件接收的光分别产生用于图像读取光学系统和图像形成光学系统的水平同步信号的电路。

    Scanning optical system having image forming optical system and reading
optical system with at least one common optical component
    2.
    发明授权
    Scanning optical system having image forming optical system and reading optical system with at least one common optical component 失效
    具有成像光学系统和具有至少一个共同的光学部件的读取光学系统的扫描光学系统

    公开(公告)号:US5596424A

    公开(公告)日:1997-01-21

    申请号:US183810

    申请日:1994-01-21

    摘要: A scanning optical system having an image forming optical system for emitting a scanning beam modulated in accordance with image information onto a destination surface. The scanning optical system further includes a reading optical system for receiving light reflected from an object surface to obtain image information from the object surface. Both systems make use of at least one common optical component, for example, a polygonal mirror, a cylindrical mirror, a common optical path or a toric lens.

    摘要翻译: 一种扫描光学系统,具有用于发射根据图像信息被调制到目的地表面上的扫描光束的图像形成光学系统。 扫描光学系统还包括读取光学系统,用于接收从物体表面反射的光以从物体表面获得图像信息。 两个系统都使用至少一个共同的光学部件,例如多面镜,圆柱形镜,公共光路或复曲面透镜。

    Imaging optical system for compensating change of temperature
    3.
    发明授权
    Imaging optical system for compensating change of temperature 失效
    用于补偿温度变化的成像光学系统

    公开(公告)号:US5412510A

    公开(公告)日:1995-05-02

    申请号:US975128

    申请日:1992-11-12

    摘要: An imaging optical system for compensating for changes of temperature according to the present invention corrects a focal point for an entire optical system due to temperature change by changing a relative distance between a lens and a light receiving element. To this end, a correcting member, which expands and contracts due to temperature change, is disposed between the lens and the light receiving element. Moreover, the coefficient of thermal expansion is set to such a value so as to be able to substantially correct for the focal point change. According to another aspect of the present invention, the optical system includes a lens system which has at least a positive lens and a negative lens in order to offset the effect of the temperature change.

    摘要翻译: 根据本发明的用于补偿温度变化的成像光学系统通过改变透镜和光接收元件之间的相对距离来校正由于温度变化而导致的整个光学系统的焦点。 为此,在透镜和光接收元件之间设置由于温度变化而膨胀和收缩的校正构件。 此外,将热膨胀系数设定为这样的值,以便能够基本上校正焦点变化。 根据本发明的另一方面,光学系统包括透镜系统,其至少具有正透镜和负透镜,以抵消温度变化的影响。

    Lens barrier opening/closing device of a movable lens barrel
    5.
    再颁专利
    Lens barrier opening/closing device of a movable lens barrel 有权
    可移动透镜镜筒的透镜屏障打开/关闭装置

    公开(公告)号:USRE39752E1

    公开(公告)日:2007-07-31

    申请号:US11059702

    申请日:2005-02-17

    IPC分类号: G03B17/00 G03B17/04

    CPC分类号: G02B7/10

    摘要: A lens barrier opening/closing device of a movable lens barrel includes a barrier blade which is driven to open and close a photographic aperture; a barrier drive ring driven to rotate about an optical axis; a first biasing device which biases the barrier drive ring in a rotational direction; a rotational barrel which rotates about the optical axis; a receiving surface formed on the barrier drive ring to extend parallel to the optical axis; and a transmission surface, formed on the rotational barrel, extending parallel to the optical axis. The receiving surface and the transmission surface are engaged with each other to rotate the barrier drive ring together with the rotational barrel about the optical axis in a direction against a biasing force of the first biasing device when the movable lens barrel moves from either the photographing position to the accommodation position or vise versa.

    摘要翻译: 可移动透镜镜筒的透镜屏障打开/关闭装置包括被驱动以打开和关闭照相孔的屏障刮板; 驱动围绕光轴旋转的阻挡驱动环; 第一偏置装置,其沿阻力传动环沿旋转方向偏置; 围绕光轴旋转的旋转筒; 所述接收表面形成在所述阻挡驱动环上以平行于所述光轴延伸; 以及形成在旋转筒上的传播表面,其平行于光轴延伸。 接收表面和传输表面彼此接合,以便当可移动透镜镜筒从拍摄位置移动时,抵抗第一偏压装置的偏压力的方向使阻挡驱动环与旋转筒一起围绕光轴旋转 到住宿位置或反之亦然。

    Lens barrel having a lens barrier mechanism
    6.
    发明授权
    Lens barrel having a lens barrier mechanism 有权
    透镜镜筒具有透镜屏障机构

    公开(公告)号:US07088524B2

    公开(公告)日:2006-08-08

    申请号:US10827256

    申请日:2004-04-20

    IPC分类号: G02B15/14 G02B7/02

    CPC分类号: G02B7/102

    摘要: A lens barrel includes a guide barrel, an outer ring, an inner ring, a cam ring and a movable lens frame, arranged in that order from outermost side, wherein the axes thereof coincide with a common optical axis, the outer ring being guided linearly in the optical axis direction by the stationary barrel, the inner ring being linearly guided in the optical axis direction by the outer ring, and the cam ring being rotatable to move the movable lens frame in the optical axis direction; and a lens barrier mechanism having an aperture positioned in front of the movable lens frame, the lens barrier mechanism being provided on a front opening of the inner ring, for opening and closing the aperture.

    摘要翻译: 镜筒包括从最外侧按顺序布置的引导筒,外圈,内环,凸轮环和可移动透镜框,其中轴与公共光轴重合,外圈被线性引导 通过固定筒在光轴方向上,内环通过外圈在光轴方向上线性地引导,并且凸轮环可旋转以使可动透镜框在光轴方向上移动; 以及透镜屏障机构,其具有定位在可移动透镜框架前面的孔,透镜屏障机构设置在内圈的前开口上,用于打开和关闭孔。

    Prediction apparatus and method for a plasma processing apparatus
    7.
    发明申请
    Prediction apparatus and method for a plasma processing apparatus 有权
    一种等离子体处理装置的预测装置及方法

    公开(公告)号:US20050004683A1

    公开(公告)日:2005-01-06

    申请号:US10841570

    申请日:2004-05-10

    CPC分类号: G05B13/026

    摘要: Data used for prediction is selected based on multivariate analysis, and thereby, prediction accuracy is improved. Operation data obtained every wafer processing and processing result data such as thickness of top electrode are stored (collected) in operation data storage sections 202 and a processing result data storage sections and 204, respectively. An analysis processing section 208 makes multivariate analysis with respect to the collected operation data, and thereafter, data used for prediction is selected based on the multivariate analysis. A correlation between the selected operation data and processing result data is found. Based on the correlation, a condition of the plasma processing apparatus or state of an object to be processed as the processing result using operation data when processing wafers other than wafers used for obtaining the correlation.

    摘要翻译: 基于多变量分析选择用于预测的数据,从而提高预测精度。 将每个晶片处理获得的操作数据和诸如顶部电极的厚度的处理结果数据分别存储(收集)在操作数据存储部分202和处理结果数据存储部分和204中。 分析处理部分208针对收集的操作数据进行多变量分析,此后,基于多变量分析来选择用于预测的数据。 找到所选择的操作数据和处理结果数据之间的相关性。 基于相关性,等离子体处理装置的状态或待处理对象的状态作为处理结果,当处理除用于获得相关性的晶片之外的晶片时,使用操作数据。

    Lens drive system
    8.
    发明授权
    Lens drive system 失效
    镜头驱动系统

    公开(公告)号:US06813441B2

    公开(公告)日:2004-11-02

    申请号:US10325958

    申请日:2002-12-23

    IPC分类号: G03B1700

    CPC分类号: G02B7/04 G03B17/00

    摘要: A lens drive system includes a lens frame having a lens element; a nut member secured to the lens frame, and which are both movable in an optical axis direction without rotating; a feed screw shaft having a male thread portion and a non-threaded portion, the male thread portion being engaged with a screw hole of the nut member; a motor for rotating the feed screw shaft; and a biasing member for biasing the nut member in a first direction toward the male thread portion. When the feed screw shaft is rotated to move the nut member and the lens frame in a second direction toward the non-thread portion, the female thread portion is disengaged from the male thread portion to move onto the non-threaded portion before the lens frame or the nut member abuts against an element of the lens drive system and stops thereby.

    摘要翻译: 透镜驱动系统包括具有透镜元件的透镜框架; 固定在透镜框上的螺母构件,既可以在光轴方向上移动而不旋转; 具有阳螺纹部分和非螺纹部分的进给螺杆轴,阳螺纹部分与螺母构件的螺纹孔接合; 用于旋转进给螺杆轴的马达; 以及偏压构件,用于朝着阳螺纹部分朝第一方向偏置螺母构件。 当进给螺杆轴旋转以使螺母构件和透镜框架朝向非螺纹部分的第二方向移动时,内螺纹部分与外螺纹部分脱离以在透镜框架之前移动到非螺纹部分 或螺母构件抵靠透镜驱动系统的元件并由此停止。

    Lens barrel having a lens barrier mechanism
    9.
    发明授权
    Lens barrel having a lens barrier mechanism 有权
    透镜镜筒具有透镜屏障机构

    公开(公告)号:US06788475B2

    公开(公告)日:2004-09-07

    申请号:US10101727

    申请日:2002-03-21

    IPC分类号: G02B1514

    CPC分类号: G02B7/102

    摘要: A lens barrel includes a stationary barrel, an outer ring, an inner ring, a cam ring and a movable lens frame, arranged in that order from outermost side, wherein the axes thereof coincide with a common optical axis, the outer ring being guided linearly in the optical axis direction by the stationary barrel, the inner ring being linearly guided in the optical axis direction by the outer ring, and the cam ring being rotatable to move the movable lens frame in the optical axis direction; and a lens barrier mechanism having an aperture positioned in front of the movable lens frame, the lens barrier mechanism being provided on a front opening of the inner ring, for opening and closing the aperture.

    摘要翻译: 镜筒包括从最外侧按顺序布置的固定镜筒,外圈,内圈,凸轮环和可移动透镜框,其中轴与公共光轴重合,外圈被线性引导 通过固定筒在光轴方向上,内环通过外圈在光轴方向上线性地引导,并且凸轮环可旋转以使可动透镜框在光轴方向上移动; 以及透镜屏障机构,其具有定位在可移动透镜框架前面的孔,透镜屏障机构设置在内圈的前开口上,用于打开和关闭孔。

    Lens drive system
    10.
    发明授权
    Lens drive system 失效
    镜头驱动系统

    公开(公告)号:US06714357B2

    公开(公告)日:2004-03-30

    申请号:US10325960

    申请日:2002-12-23

    IPC分类号: G02B1514

    CPC分类号: G02B7/08

    摘要: A lens drive system includes a lens frame having a lens element; a nut member secured to the lens frame; a feed screw shaft having a male thread portion and a non-threaded portion, the male thread portion engaged with a screw hole of the nut member; an engagement portion formed on the nut member and having a deformable screw-engaging portion engaged with the male thread portion; and a motor for rotating the feed screw shaft. The screw-engaging portion is disengaged from the male thread portion when a large force is applied to the engagement portion in an axial direction. When the linear movement of the lens frame and the nut member is restricted during rotation of the feed screw shaft, the engagement portion remains on the male thread portion of the feed screw shaft while the female thread portion is moved onto the non-thread portion.

    摘要翻译: 透镜驱动系统包括具有透镜元件的透镜框架; 固定在透镜框上的螺母构件; 具有阳螺纹部分和非螺纹部分的进给螺杆轴,阳螺纹部分与螺母构件的螺纹孔接合; 接合部,形成在所述螺母构件上,并且具有与所述阳螺纹部接合的可变形的螺纹接合部; 以及用于旋转进给丝杠轴的马达。 当在轴向上对接合部施加大的力时,螺纹接合部从外螺纹部脱离。 当进给螺杆轴旋转期间,透镜框架和螺母构件的直线运动受到限制,当内螺纹部分移动到非螺纹部分上时,接合部分保持在进给螺杆轴的外螺纹部分上。