利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

16 条记录 (耗时 0.026 秒)

    Acrylate derivatives, alcohol derivatives, and method for producing them
    7.
    发明授权
    Acrylate derivatives, alcohol derivatives, and method for producing them 有权
    丙烯酸酯衍生物，醇衍生物及其制备方法

    公开(公告)号：US08188299B2

    公开(公告)日：2012-05-29

    申请号：US12884677

    申请日：2010-09-17

    申请人： Kazuya Shimizu ,  Masayoshi Yamanaka ,  Tatsuhiko Hayashibara ,  Hideharu Iwasaki

    发明人： Kazuya Shimizu ,  Masayoshi Yamanaka ,  Tatsuhiko Hayashibara ,  Hideharu Iwasaki

    IPC分类号： C07D209/56

    CPC分类号： C07D209/02 ,  C07D491/18

    摘要： Provided are an acrylate derivative useful as a raw material of a polymer compound for resist compositions capable of giving resist patterns which are excellent in lithographic performance and have a good shape, an intermediate thereof (alcohol derivative) and production processes for them. To be specific, it is an acrylate derivative represented by a formula shown below: (wherein R1 represents a hydrogen atom, methyl or trifluoromethyl; R2, R3, R5, R7, R8, R9 and R10 each represent independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, a cycloalkyl group having 3 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms; R4 and R6 each represent independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, a cycloalkyl group having 3 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms, or both of R4 and R6 are combined to represent an alkylene group having 1 to 3 carbon atoms, —O— or —S—; and R11 represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 10 carbon atoms).

    摘要翻译： 提供可用作抗蚀剂组合物的聚合物化合物的原料的丙烯酸酯衍生物，其能够提供平版印刷性能优异且形状良好的抗蚀剂图案，其中间体（醇衍生物）及其制备方法。 具体来说，它是由下式表示的丙烯酸酯衍生物：其中R1表示氢原子，甲基或三氟甲基; R2，R3，R5，R7，R8，R9和R10各自独立地表示氢原子，烷基 具有1至6个碳原子的基团，具有3至6个碳原子的环烷基或具有1至6个碳原子的烷氧基; R 4和R 6各自独立地表示氢原子，具有1至6个碳原子的烷基，环烷基 具有3至6个碳原子的烷基或具有1至6个碳原子的烷氧基，或者R 4和R 6都被结合以表示具有1至3个碳原子的亚烷基，-O-或-S-; R 11表示 氢原子，碳原子数1〜6的烷基或碳原子数3〜10的环状烃基）。