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公开(公告)号：US06616270B1
公开(公告)日：2003-09-09
申请号：US09696010
申请日：2000-10-26
IPC分类号： B41J2045
CPC分类号： B41J2/1623 , B41J2/14233 , B41J2/161 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , B41J2202/03
摘要： An ink jet recording head comprises a nozzle forming member provided with a plurality of nozzle orifices for jetting ink, a channel forming substrate provided with a plurality of pressure generating chambers communicated with the associated nozzle orifices, one face of which is bonded to the nozzle forming member, a plurality of piezoelectric elements provided on an face of the channel forming substrate which is opposed to the face bonded to the nozzle forming substrate for causing pressure change to occur in the associated pressure generating chambers, and a reservoir forming member bonded to the face of the channel forming substrate on which the piezoelectric elements are provided, the reservoir forming member having a reservoir section forming at least a part of a reservoir communicated with the pressure generating chambers for supplying ink thereto and a piezoelectric element holding section for defining a space in an area facing the piezoelectric elements such an extent that motion of the respective piezoelectric elements is exhibited while sealing the space hermetically.
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公开(公告)号：US06966635B2
公开(公告)日：2005-11-22
申请号：US10441080
申请日：2003-05-20
CPC分类号： B41J2/1623 , B41J2/14233 , B41J2/161 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , B41J2202/03
摘要： An ink jet recording head comprises a nozzle forming member provided with a plurality of nozzle orifices for jetting ink, a channel forming substrate provided with a plurality of pressure generating chambers communicated with the associated nozzle orifices, one face of which is bonded to the nozzle forming member, a plurality of piezoelectric elements provided on an face of the channel forming substrate which is opposed to the face bonded to the nozzle forming substrate for causing pressure change to occur in the associated pressure generating chambers, and a reservoir forming member bonded to the face of the channel forming substrate on which the piezoelectric elements are provided, the reservoir forming member having a reservoir section forming at least a part of a reservoir communicated with the pressure generating chambers for supplying ink thereto and a piezoelectric element holding section for defining a space in an area facing the piezoelectric elements such an extent that motion of the respective piezoelectric elements is exhibited while sealing the space hermetically.
摘要翻译： 一种喷墨记录头，包括一个喷嘴形成部件，该喷嘴形成部件设有多个用于喷射墨水的喷嘴孔，一个通道形成基板，设置有多个压力发生室，该压力产生室与相关联的喷嘴孔连通，其一个表面结合到喷嘴形成 多个压电元件，设置在通道形成基板的与形成在喷嘴形成基板上的表面相对的表面上，用于在相关的压力发生室中发生压力变化;以及储存器形成部件， 在其上设置有压电元件的通道形成基板上，储存器形成构件具有形成与用于向其供应墨水的压力发生室连通的储存器的至少一部分的储存部分，以及用于限定空间的压电元件保持部分 面对压电元件的面积如此大 在密封空间的同时展现各压电元件的n个。
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公开(公告)号：US06336717B1
公开(公告)日：2002-01-08
申请号：US09326699
申请日：1999-06-07
IPC分类号： B41J2045
CPC分类号： B41J2/1629 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1631 , B41J2/1632 , B41J2/1645 , B41J2/1646 , B41J2002/14419 , B41J2002/14491 , B41J2202/03 , B41J2202/11
摘要： An ink jet recording head comprises a pressure generating chamber communicating with a nozzle opening, and a piezoelectric element a lower electrode provided on an area facing the pressure generating chamber via an insulating layer, a piezoelectric layer provided on the lower electrode, and an upper electrode provided on the piezoelectric layer. At least both ends of the lower electrode in a width direction thereof are positioned within the area facing the pressure generating chamber, and the piezoelectric layer covers sides of both ends of the lower electrode in the width direction thereof.
摘要翻译： 喷墨记录头包括与喷嘴开口连通的压力产生室，以及压电元件，经由绝缘层设置在面向压力发生室的区域上的下电极，设置在下电极上的压电层和上电极 设置在压电层上。 下电极的宽度方向的至少两端位于面向压力发生室的区域内，压电层覆盖下电极的宽度方向的两端侧。
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公开(公告)号：US06113225A
公开(公告)日：2000-09-05
申请号：US12598
申请日：1998-01-23
申请人： Yoshinao Miyata , Shinri Sakai , Tsutomu Hashizume
发明人： Yoshinao Miyata , Shinri Sakai , Tsutomu Hashizume
CPC分类号： B41J2/1629 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1631 , B41J2/1632 , B41J2002/14387 , B41J2002/14419 , B41J2002/14491 , B41J2202/03 , B41J2202/11
摘要： An ink jet type recording head is capable of preventing the occurrence of cracks in a portion close to the circumferential wall of the pressure generating chamber of the piezoelectric active section so as to enhance the durability of the recording head.The ink jet type recording head includes a piezoelectric vibrator having a vibrating plate composing a portion of a pressure generating chamber communicated with a nozzle opening, the upper surface of the vibrating plate functioning as a lower electrode, the piezoelectric vibrator also having a piezoelectric active section composed of a piezoelectric layer formed on the surface of the vibrating plate and also composed of an upper electrode formed on the surface of the piezoelectric layer, the piezoelectric active section being formed in a region opposed to the pressure generating chamber, wherein the vibration regulating section is composed of a wide width section in which the piezoelectric layer is wider than the primary portion of the piezoelectric active section, and the wide width section is extended to a side wall and arranged on one end side of the pressure generating chamber in the longitudinal direction.
摘要翻译： 喷墨式记录头能够防止在压电有源部分的压力产生室的靠近周壁的部分中出现裂纹，从而提高记录头的耐久性。 喷墨式记录头包括压电振动器，该压电振动器具有构成与喷嘴开口连通的压力发生室的一部分的振动板，振动板的上表面用作下电极，压电振动器还具有压电有源部分 由压电层构成，该压电层形成在振动板的表面上并且还包括形成在压电层表面上的上电极，压电有源部分形成在与压力发生室相对的区域中，其中振动调节部分 由压电层比压电有源部分的主要部分宽的宽宽部分构成，并且宽宽度部分延伸到侧壁并且设置在压力发生室的纵向方向的一端侧 。
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公开(公告)号：US06315400B1
公开(公告)日：2001-11-13
申请号：US09242964
申请日：1999-06-16
IPC分类号： B41J2045
CPC分类号： B41J2/1629 , B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1646 , B41J2002/14387 , B41J2002/14419 , B41J2002/14491 , B41J2202/03 , B41J2202/11
摘要： The present invention relates to an ink-jet recording head and an ink-jet recording device wherein peeling, a crack etc. at the end of a piezoelectric active part can be prevented. In an ink-jet recording head provided with a diaphragm constituting a part of a pressure generating chamber communicating with a nozzle aperture and a piezoelectric element formed on the diaphragm and provided with the piezoelectric active part of the piezoelectric element in an area opposite to the pressure generating chamber, a vibration regulating part for partially regulating vibration at least in a part of the diaphragm in the vicinity of a boundary with the peripheral wall of the pressure generating chamber is provided.
摘要翻译： 本发明涉及喷墨记录头和喷墨记录装置，其中可以防止在压电有源部分的末端处剥离，裂纹等。 在设置有构成与喷嘴孔连通的压力发生室的一部分的膜片的喷墨记录头和形成在膜片上的压电元件，并且在与压力相反的区域中设置压电元件的压电有源部分 提供了一种用于在与压力发生室的周壁的边界附近至少在隔膜的一部分中部分调节振动的振动调节部件。
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公开(公告)号：US06502928B1
公开(公告)日：2003-01-07
申请号：US09361982
申请日：1999-07-28
申请人： Masato Shimada , Shinri Sakai , Yoshinao Miyata , Souichi Moriya
发明人： Masato Shimada , Shinri Sakai , Yoshinao Miyata , Souichi Moriya
IPC分类号： B41J2045
CPC分类号： B41J2/1629 , B41J2/14233 , B41J2/161 , B41J2/1631 , B41J2/1632 , B41J2/1645 , B41J2/1646 , B41J2002/14419 , B41J2002/14491 , B41J2202/03 , B41J2202/11
摘要： An ink jet recording head includes pressure generating chambers communicating with associated nozzle orifices and piezoelectric elements provided in a one-to-one correspondence with the pressure generating chambers. Each of the piezoelectric elements includes a lower electrode provided in an area corresponding to the pressure generating chamber via an insulating layer, a piezoelectric layer provided on the lower electrode, and an upper electrode provided on a surface of the piezoelectric layer. Each of the piezoelectric elements includes an active part provided in an area facing the pressure generating chamber to be driven substantially, and an inactive part not to be driven even having the piezoelectric layer continued from the active part.
摘要翻译： 喷墨记录头包括与相关联的喷嘴孔和与压力发生室一一对应地设置的压电元件连通的压力产生室。 每个压电元件包括经由绝缘层设置在与压力发生室对应的区域中的下电极，设置在下电极上的压电层和设置在压电层表面上的上电极。 每个压电元件包括设置在面向压力发生室的区域中的有源部分，以基本上被驱动，并且即使压电层从有源部分继续而不被驱动的非活动部分。
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公开(公告)号：US6109738A
公开(公告)日：2000-08-29
申请号：US122655
申请日：1998-07-27
申请人： Yoshinao Miyata , Shinri Sakai
发明人： Yoshinao Miyata , Shinri Sakai
CPC分类号： B41J2/1628 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1645 , B41J2/1646 , B41J2002/14379 , B41J2002/14387 , B41J2002/14419 , B41J2002/14491
摘要： An ink jet print head includes a plural number of piezoelectric vibrators each consisting of a lower electrode film, a piezoelectric film and an upper electrode film. The piezoelectric film and the upper electrode film of each piezoelectric vibrator are formed within the region facing each pressure generating chamber. The lower electrode films interconnect portions of the regions facing the pressure generating chambers and are electrically continuous to a wiring pattern connected to an external circuit, and in each of the portions of the regions facing the pressure generating chambers, each portion not having the piezoelectric vibrator is removed except a part thereof. Such a structure secures a satisfactory function of the lower electrode layer as a common electrode, increases a quantity of displacement of the piezoelectric vibrator while keeping a low compliance, increases an ink discharging speed, and reduces a drive voltage.
摘要翻译： 喷墨打印头包括多个由下电极膜，压电膜和上电极膜组成的压电振动器。 每个压电振动器的压电膜和上电极膜形成在面对每个压力产生室的区域内。 下部电极膜将面对压力发生室的区域的部分互相连接，并且与连接到外部电路的布线图案电连接，在面向压力发生室的区域的每个部分中，每个部分不具有压电振动器 除了它的一部分被除去。 这样的结构确保作为公共电极的下电极层的令人满意的功能，同时保持低柔性，增加压电振动器的位移量，增加墨的排出速度，并降低驱动电压。
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8.发明授权Ink jet recording head having an ink reservoir comprising a plurality of grooves with increased strength and volume capacity and ink jet recording apparatus having the same 失效具有油墨储存器的喷墨记录头包括具有增加的强度和体积容量的多个凹槽和具有该凹槽的喷墨记录装置
公开(公告)号：US06137511A
公开(公告)日：2000-10-24
申请号：US832626
申请日：1997-04-04
申请人： Yutaka Furuhata , Yoshinao Miyata
发明人： Yutaka Furuhata , Yoshinao Miyata
CPC分类号： B41J2/1629 , B41J2/14233 , B41J2/161 , B41J2/1631 , B41J2/1645 , B41J2002/14387
摘要： An ink jet recording head which can compensate for shortage of mechanical strength of an ink reservoir by preventing the piezoelectric film on an ink reservoir from cracking or being broken due to the vibration of a piezoelectric film or flowing or mechanical vibration of ink. The ink reservoir has at least two plane orientations at its bottom and is given different depths.
摘要翻译： 一种喷墨记录头，其可以通过防止由于压电膜的振动或油墨的流动或机械振动而导致油墨储存器上的压电膜破裂或破裂，从而补偿油墨储存器的机械强度不足。 墨水储存器在其底部具有至少两个平面取向并且被赋予不同的深度。
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9.发明授权公开(公告)号：US06209994B1
公开(公告)日：2001-04-03
申请号：US09153034
申请日：1998-09-15
IPC分类号： B41J2045
CPC分类号： B41J2/1629 , B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1634 , B41J2/1635 , B41J2/1645 , B41J2/1646 , B41J2002/14387
摘要： In a micro device including a through hole for piercing a substrate and a fragile part provided around or across a part corresponding to a through hole of a multilayer film and relatively thinner than the other part, an opening can be formed in the multilayer film by cutting the multilayer film along or inside the fragile part and a through hole can be formed.
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公开(公告)号：US07153442B2
公开(公告)日：2006-12-26
申请号：US10915442
申请日：2004-08-11
申请人： Yutaka Furuhata , Yoshinao Miyata
发明人： Yutaka Furuhata , Yoshinao Miyata
CPC分类号： B41J2/1628 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1626 , B41J2/1629 , B41J2/1631 , B41J2002/14387 , Y10S29/001 , Y10T29/49346 , Y10T29/49401
摘要： A method of manufacturing an ink jet print head is provided. The method forms, on a silicon monocrystailine substrate, a first etching pattern for forming pressure generating chambers and a second etching pattern located opposite to the first etching pattern with respect to ink supply ports. The second etching pattern is narrower than the first etching pattern and is located within opposite lines defining the first etching pattern. The method also anisotropically etches the silicon monocrystailline from the surface thereof, on which the first and second etching patterns are formed, to the other surface thereof and anisotropically etches areas of the silicon monocrystalline substrate. Also, each of the areas is located between the first and second etching patterns, to a depth suitable for the ink supply ports.
摘要翻译： 提供一种制造喷墨打印头的方法。 该方法在硅单晶衬底上形成用于形成压力产生室的第一蚀刻图案和与第一蚀刻图案相对于供墨口相对的第二蚀刻图案。 第二蚀刻图案比第一蚀刻图案窄，并且位于限定第一蚀刻图案的相对线内。 该方法还从其表面上形成第一和第二蚀刻图案的表面向其另一个表面蚀刻硅单晶，并各向异性地蚀刻硅单晶衬底的面积。 此外，每个区域位于第一和第二蚀刻图案之间，达到适于供墨口的深度。
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