Angular velocity sensor
    1.
    发明授权
    Angular velocity sensor 失效
    角速度传感器

    公开(公告)号:US07188525B2

    公开(公告)日:2007-03-13

    申请号:US10126750

    申请日:2002-04-22

    IPC分类号: G01P9/04

    CPC分类号: G01C19/5607

    摘要: An angular velocity sensor is provided that includes a frame, an oscillator and torsion bars that connect the oscillator to the frame. The frame, the oscillator and the torsion bar are formed integral with each other by etching a material substrate in the thickness direction of the substrate. The oscillator, configured in the form of an H, includes a support, two first arms and two second arms. These arms extend from the support in an arm-extending direction perpendicular to the thickness direction of the substrate. The oscillator includes a mounting surface that is provided with a piezoelectric driver for generating in-plane oscillation of the oscillator, and with a piezoelectric detector for detecting out-of-plane oscillation of the oscillator.

    摘要翻译: 提供了一种角速度传感器,其包括将振荡器连接到框架的框架,振荡器和扭杆。 通过在基板的厚度方向上蚀刻材料基板,将框架,振荡器和扭杆形成为一体。 以H形式构成的振荡器包括支撑件,两个第一臂和两个第二臂。 这些臂从支撑件沿与基板的厚度方向垂直的臂延伸方向延伸。 振荡器包括安装表面,该安装表面设置有用于产生振荡器的平面内振荡的压电驱动器,以及用于检测振荡器的平面外振荡的压电检测器。

    Touch panel device
    2.
    发明授权
    Touch panel device 有权
    触摸屏设备

    公开(公告)号:US06762753B2

    公开(公告)日:2004-07-13

    申请号:US09842227

    申请日:2001-04-26

    IPC分类号: G09G500

    CPC分类号: G06F3/0436

    摘要: A touch panel device includes a plurality of input IDTs for exciting surface acoustic waves and a plurality of output IDTs for receiving the surface acoustic waves, corresponding to a plurality of tracks on a non-piezoelectric substrate, and each input IDT has a wideband electrode structure and each output IDT has a matched filter structure for outputting a large output upon receipt of a specific binary signal sequence. A signal obtained by arranging a plurality of specific signal sequences in time series is applied to each input IDT.

    摘要翻译: 触摸面板装置包括用于激发表面声波的多个输入IDT和用于接收表面声波的多个输出IDT,对应于非压电基板上的多个轨道,并且每个输入IDT具有宽带电极结构 并且每个输出IDT具有用于在接收到特定二进制信号序列时输出大输出的匹配滤波器结构。 通过将多个特定信号序列以时间序列排列而获得的信号被应用于每个输入IDT。

    Film bulk acoustic resonator and method of making the same
    3.
    发明授权
    Film bulk acoustic resonator and method of making the same 有权
    薄膜体声波谐振器及其制造方法

    公开(公告)号:US06732415B2

    公开(公告)日:2004-05-11

    申请号:US09984418

    申请日:2001-10-30

    IPC分类号: H01L4108

    摘要: A film bulk acoustic resonator is fabricated in the following manner. First, a base layer is formed on an insulating substrate. Then, a resonator assembly is formed on the base layer. The resonator assembly includes a first electrode held in contact with the base layer, a second electrode, and a piezoelectric layer held between the first and the second electrodes. Then, a resist layer is formed to cover the resonator assembly and the base layer. Then, a through-hole is formed in the resist layer so that the base layer is exposed via the through-hole. Then, etchant is supplied via the through-hole to make a space in the base layer under the resonator assembly. Finally, the resist layer is removed.

    摘要翻译: 以下列方式制造膜体声波谐振器。 首先,在绝缘基板上形成基层。 然后,在基底层上形成谐振器组件。 谐振器组件包括与基极层保持接触的第一电极,第二电极和保持在第一和第二电极之间的压电层。 然后,形成抗蚀剂层以覆盖谐振器组件和基底层。 然后,在抗蚀剂层中形成通孔,使得基底层通过通孔露出。 然后,通过通孔提供蚀刻剂,以在谐振器组件下面的基底层中形成空间。 最后,去除抗蚀剂层。

    Surface acoustic wave device and process for manufacturing the same
    6.
    发明授权
    Surface acoustic wave device and process for manufacturing the same 失效
    表面声波装置及其制造方法

    公开(公告)号:US06388361B1

    公开(公告)日:2002-05-14

    申请号:US09639099

    申请日:2000-08-16

    IPC分类号: H03H925

    摘要: A surface acoustic wave device includes a substrate at least a surface of which has a piezoelectric function, and an electrode formed on the substrate, wherein the electrode is composed of a first film of Al containing Cu at or over a solid solubility limit of Cu to Al and one or more unit(s) of a second film of Al containing Mg at or over a Solid solubility limit of Mg to Al and a third film of Al containing Cu at or over the solid solubility limit of Cu to Al formed on the first film in this order, and the first film and the third film contain Mg diffused from the second film.

    摘要翻译: 表面声波装置包括至少其表面具有压电功能的基板和形成在基板上的电极,其中,所述电极由包含Cu的第一膜Al包含Cu或更多的Cu的固溶度极限 Al和一个或多个含有Mg的第一Al的单元,其含有Mg至Al的固溶度极限或超过Cu的Al的固溶度极限以上的含有Cu的Al的第三膜的Al 第一膜,第一膜和第三膜含有从第二膜扩散的Mg。

    Tuning fork type vibration gyro
    8.
    发明授权
    Tuning fork type vibration gyro 失效
    调音叉式振动陀螺仪

    公开(公告)号:US06327908B1

    公开(公告)日:2001-12-11

    申请号:US09413243

    申请日:1999-10-07

    IPC分类号: G01P904

    CPC分类号: G01C19/5607

    摘要: The shape of drive electrodes and/or the shape of detection electrodes of a tuning fork type vibration gyro are made asymmetrical between the inside and outside of the arm, and between the surface and reverse face of the arm, to reduce the abnormal vibration and leaking output. The drive electrodes to be provided on the inside parts of the surface and reverse face of the first arm are formed smaller than the drive electrodes to be provided on the outside parts of the surface and reverse face thereof. The length of the detection electrode to be provided on the outside lateral face of the second arm is formed short. The drive electrodes to be provided on the surface and reverse face of the first arm are extended to the base side from the boundary position between the first arm and the base, and the detection electrodes to be provided on the surface and reverse face of the second arm are extended to the base side from the boundary position between the second arm and the base.

    摘要翻译: 音叉型振动陀螺仪的驱动电极形状和/或检测电极的形状在臂的内部和外部以及臂的表面和反面之间形成不对称,以减少异常振动和泄漏 输出。 设置在第一臂的表面和反面的内侧部分上的驱动电极形成为比设置在其表面和反面的外侧部分上的驱动电极小。 设置在第二臂的外侧面上的检测电极的长度短。 设置在第一臂的表面和反面上的驱动电极从第一臂和基座之间的边界位置延伸到基底侧,并且将检测电极设置在第二臂的第二面的表面和反面上 臂从第二臂和基座之间的边界位置延伸到基部侧。