Method of manufacturing plasmon generator
    8.
    发明授权
    Method of manufacturing plasmon generator 有权
    等离子体发生器的制造方法

    公开(公告)号:US08691102B1

    公开(公告)日:2014-04-08

    申请号:US13731754

    申请日:2012-12-31

    IPC分类号: C03C15/00

    摘要: A method of manufacturing a plasmon generator includes the steps of: forming an etching mask on a dielectric layer; forming an accommodation part by etching the dielectric layer using the etching mask; and forming the plasmon generator to be accommodated in the accommodation part. The step of forming the etching mask includes the steps of: forming a patterned layer on an etching mask material layer, the patterned layer having a first opening that has a sidewall; forming a structure by forming an adhesion film on the sidewall, the structure having a second opening smaller than the first opening; and etching a portion of the etching mask material layer exposed from the second opening.

    摘要翻译: 一种制造等离子体发生器的方法包括以下步骤:在电介质层上形成蚀刻掩模; 通过使用蚀刻掩模蚀刻电介质层来形成容纳部分; 以及形成要容纳在容纳部分中的等离子体发生器。 形成蚀刻掩模的步骤包括以下步骤:在蚀刻掩模材料层上形成图案化层,所述图案化层具有具有侧壁的第一开口; 通过在侧壁上形成粘合膜来形成结构,该结构具有比第一开口小的第二开口; 并蚀刻从第二开口露出的蚀刻掩模材料层的一部分。

    Multilayer plasmon generator
    10.
    发明授权
    Multilayer plasmon generator 有权
    多层等离子体发生器

    公开(公告)号:US08867170B1

    公开(公告)日:2014-10-21

    申请号:US13942074

    申请日:2013-07-15

    IPC分类号: G11B5/147

    摘要: A plasmon generator has a front end face located in a medium facing surface of a magnetic head. The plasmon generator includes a metal portion and a multilayer film portion. The metal portion has a bottom surface, a top surface, and an end face facing toward the front end face. The multilayer film portion includes a first metal layer, a second metal layer and an intermediate layer, and covers the top surface and the end face of the metal portion. The intermediate layer is formed of a material that is higher in Vickers hardness than the metal material used to form the metal portion, the metal material used to form the first metal layer and the metal material used to form the second metal layer.

    摘要翻译: 等离子体发生器具有位于磁头的介质面向表面中的前端面。 等离子体发生器包括金属部分和多层膜部分。 金属部分具有底表面,顶表面和面向前端面的端面。 多层膜部分包括第一金属层,第二金属层和中间层,并且覆盖金属部分的顶表面和端面。 中间层由维氏硬度高于用于形成金属部分的金属材料,用于形成第一金属层的金属材料和用于形成第二金属层的金属材料形成。