公开(公告)号：US08867170B1

公开(公告)日：2014-10-21

申请号：US13942074

申请日：2013-07-15

申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Hironori Araki ,  Seiichiro Tomita ,  Ryuji Fujii

发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Hironori Araki ,  Seiichiro Tomita ,  Ryuji Fujii

IPC分类号： G11B5/147

CPC分类号： G11B5/6088 ,  G11B5/314 ,  G11B2005/0021

摘要： A plasmon generator has a front end face located in a medium facing surface of a magnetic head. The plasmon generator includes a metal portion and a multilayer film portion. The metal portion has a bottom surface, a top surface, and an end face facing toward the front end face. The multilayer film portion includes a first metal layer, a second metal layer and an intermediate layer, and covers the top surface and the end face of the metal portion. The intermediate layer is formed of a material that is higher in Vickers hardness than the metal material used to form the metal portion, the metal material used to form the first metal layer and the metal material used to form the second metal layer.

摘要翻译： 等离子体发生器具有位于磁头的介质面向表面中的前端面。 等离子体发生器包括金属部分和多层膜部分。 金属部分具有底表面，顶表面和面向前端面的端面。 多层膜部分包括第一金属层，第二金属层和中间层，并且覆盖金属部分的顶表面和端面。 中间层由维氏硬度高于用于形成金属部分的金属材料，用于形成第一金属层的金属材料和用于形成第二金属层的金属材料形成。

公开(公告)号：US08830799B1

公开(公告)日：2014-09-09

申请号：US13846337

申请日：2013-03-18

申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Hironori Araki ,  Seiichiro Tomita ,  Ryuji Fujii

发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Hironori Araki ,  Seiichiro Tomita ,  Ryuji Fujii

IPC分类号： G11B11/00 ,  G02B5/00 ,  G11B13/08 ,  G02B27/56

CPC分类号： G02B5/008 ,  G11B5/314 ,  G11B2005/0021

摘要： A near-field light generator includes a multilayer structure having a front end face. The multilayer structure includes a first dielectric layer, a second dielectric layer, a third dielectric layer, a first metal layer, and a second metal layer. The first metal layer is interposed between the first dielectric layer and the second dielectric layer. The second metal layer is interposed between the second dielectric layer and the third dielectric layer. Each of the first to third dielectric layers and the first and second metal layers has an end located in the front end face. The dielectric material used to form the first dielectric layer, the dielectric material used to form the second dielectric layer, and the dielectric material used to form the third dielectric layer have the same permittivity.

摘要翻译： 近场光发生器包括具有前端面的多层结构。 多层结构包括第一介电层，第二介电层，第三介电层，第一金属层和第二金属层。 第一金属层介于第一介电层和第二电介质层之间。 第二金属层介于第二电介质层和第三电介质层之间。 第一至第三电介质层和第一和第二金属层中的每一个具有位于前端面中的端部。 用于形成第一电介质层的电介质材料，用于形成第二电介质层的电介质材料以及用于形成第三电介质层的电介质材料具有相同的介电常数。

公开(公告)号：US08711663B1

公开(公告)日：2014-04-29

申请号：US13777488

申请日：2013-02-26

申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Hironori Araki ,  Seiichiro Tomita ,  Ryuji Fujii

发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Hironori Araki ,  Seiichiro Tomita ,  Ryuji Fujii

IPC分类号： G11B11/00

CPC分类号： G11B5/314 ,  G11B5/6088 ,  G11B2005/0021

摘要： A plasmon generator has a front end face located in a medium facing surface of a magnetic head. The plasmon generator includes a first layer formed of a first metal material, a second layer formed of a second metal material, and a third layer formed of a third metal material. Each of the second and third layers has an end portion constituting part of the front end face. The first layer does not have any portion constituting part of the front end face. The first and second metal materials are higher in electrical conductivity than the third metal material. The third metal material is higher in Vickers hardness than the first and second metal materials. The first layer has a plasmon exciting part.

摘要翻译： 等离子体发生器具有位于磁头的介质面向表面中的前端面。 等离子体发生器包括由第一金属材料形成的第一层，由第二金属材料形成的第二层和由第三金属材料形成的第三层。 第二层和第三层中的每一层具有构成前端面的一部分的端部。 第一层没有构成前端面的一部分的任何部分。 第一和第二金属材料的电导率高于第三金属材料。 第三种金属材料的维氏硬度高于第一和第二种金属材料。 第一层具有等离子体激元部分。

公开(公告)号：US08861138B2

公开(公告)日：2014-10-14

申请号：US13846278

申请日：2013-03-18

申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Hironori Araki ,  Seiichiro Tomita ,  Ryuji Fujii

发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Hironori Araki ,  Seiichiro Tomita ,  Ryuji Fujii

IPC分类号： G11B5/02 ,  B23K10/00 ,  G11B13/04

CPC分类号： B23K10/00 ,  G02B6/1226 ,  G11B5/3133 ,  G11B5/314 ,  G11B5/6088 ,  G11B2005/0021

摘要： A plasmon generator has a front end face, a first metal layer, a second meta-field light based on a surface plasmon. The intermediate layer is interposed between the first metal layer and the second metal layer. Each of the first metal layer, the second metal layer and the intermediate layer has an end located in the front end face. Each of the first and second metal layers is formed of a metal material. The intermediate layer is formed of a material higher in Vickers hardness than the metal material used to form the first metal layer and the metal material used to form the second metal layer.

摘要翻译： 等离子体激元发生器具有前端面，第一金属层，基于表面等离子体激元的第二元场光。 中间层介于第一金属层和第二金属层之间。 第一金属层，第二金属层和中间层中的每一个具有位于前端面中的端部。 第一和第二金属层中的每一个由金属材料形成。 中间层由维氏硬度比用于形成第一金属层的金属材料和用于形成第二金属层的金属材料的材料形成。

公开(公告)号：US08848494B2

公开(公告)日：2014-09-30

申请号：US13783933

申请日：2013-03-04

申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Hironori Araki ,  Seiichiro Tomita ,  Ryuji Fujii

发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Hironori Araki ,  Seiichiro Tomita ,  Ryuji Fujii

IPC分类号： G11B11/00 ,  G11B13/08

CPC分类号： G11B13/08 ,  G11B5/314 ,  G11B5/6088 ,  G11B2005/0021

摘要： A plasmon generator has a front end face located in a medium facing surface of a magnetic head. The plasmon generator includes a first portion formed of a first metal material and a second portion formed of a second metal material. The first portion has an inclined surface facing toward the front end face. The second portion is located between the inclined surface and the front end face, and includes a first end face located in the front end face and a second end face in contact with the inclined surface. The second metal material is higher in Vickers hardness than the first metal material. The first portion has a plasmon exciting part. The front end face generates near-field light.

摘要翻译： 等离子体发生器具有位于磁头的介质面向表面中的前端面。 等离子体发生器包括由第一金属材料形成的第一部分和由第二金属材料形成的第二部分。 第一部分具有面向前端面的倾斜表面。 第二部分位于倾斜表面和前端面之间，并且包括位于前端面中的第一端面和与倾斜表面接触的第二端面。 第二种金属材料的维氏硬度高于第一种金属材料。 第一部分具有等离子体激元部分。 前端面产生近场光。

公开(公告)号：US08760809B1

公开(公告)日：2014-06-24

申请号：US13892858

申请日：2013-05-13

申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Hironori Araki ,  Seiichiro Tomita ,  Ryuji Fujii

发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Hironori Araki ,  Seiichiro Tomita ,  Ryuji Fujii

IPC分类号： G11B5/127 ,  G11B11/00

CPC分类号： G11B5/6088 ,  G11B5/314 ,  G11B2005/0021

摘要： A thermally-assisted magnetic recording head includes a main pole, a waveguide, and a plasmon generator. The waveguide includes a core and a cladding. The plasmon generator is configured to excite a surface plasmon based on light propagating through the core. The plasmon generator has a front end face located in a medium facing surface, and a first inclined surface connected to the front end face and facing toward the medium facing surface. The main pole includes an interposition part interposed between the first inclined surface and the medium facing surface. The interposition part has a second inclined surface that is opposed to the first inclined surface with an insulating film interposed therebetween.

摘要翻译： 热辅助磁记录头包括主极，波导和等离子体发生器。 波导包括芯和包层。 等离子体激元产生器被配置为基于通过芯传播的光来激发表面等离子体激元。 所述等离子体发生器具有位于介质相对表面中的前端面，以及连接到所述前端面并面向所述介质面向表面的第一倾斜面。 主极包括插入在第一倾斜表面和介质面对表面之间的插入部分。 插入部分具有与第一倾斜表面相对的第二倾斜表面，其间插入绝缘膜。

公开(公告)号：US10062402B1

公开(公告)日：2018-08-28

申请号：US15830818

申请日：2017-12-04

申请人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Seiichiro Tomita ,  Masakazu Okada

发明人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Seiichiro Tomita ,  Masakazu Okada

IPC分类号： G11B7/135 ,  G11B5/60 ,  G11B5/31 ,  H01P3/16 ,  G11B5/127 ,  H01P1/17 ,  G11B5/00

CPC分类号： G11B5/6088 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/314 ,  G11B2005/0021 ,  H01P1/174 ,  H01P3/16

摘要： A manufacturing method for a waveguide includes forming a core including a first layer and a second layer. The first layer has a top surface including a first region with which a bottom surface of the second layer is in contact, and a second region with which the bottom surface of the second layer is not in contact. Forming the core includes the steps of: forming an initial first layer; forming an etching stopper layer on the second region of the initial first layer; forming an initial second layer on the initial first layer and the etching stopper layer; etching the initial second layer and the initial first layer so as to make the initial first layer into the first layer; and etching the initial second layer until the etching stopper layer is exposed, so as to make the initial second layer into the second layer.

公开(公告)号：US09812156B2

公开(公告)日：2017-11-07

申请号：US14600460

申请日：2015-01-20

申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Hideo Mamiya ,  Hironori Araki ,  Seiichiro Tomita

发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Hideo Mamiya ,  Hironori Araki ,  Seiichiro Tomita

IPC分类号： G11B5/127 ,  G11B5/31 ,  G11B5/60 ,  G11B5/00 ,  G11B5/012

CPC分类号： G11B5/314 ,  G11B5/012 ,  G11B5/127 ,  G11B5/1272 ,  G11B5/6088 ,  G11B2005/0021

摘要： A thermally-assisted magnetic recording head includes a main pole and a plasmon generator. The main pole has a front end face located in the medium facing surface. The plasmon generator has a near-field light generating surface located in the medium facing surface. The front end face of the main pole includes a first end face portion and a second end face portion. The second end face portion is located farther from the near-field light generating surface than is the first end face portion, and is greater than the first end face portion in width in the track width direction. The first end face portion and the near-field light generating surface are equal in width.

公开(公告)号：US08691102B1

公开(公告)日：2014-04-08

申请号：US13731754

申请日：2012-12-31

申请人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Yukinori Ikegawa ,  Seiichiro Tomita ,  Shigeki Tanemura

发明人： Hironori Araki ,  Yoshitaka Sasaki ,  Hiroyuki Ito ,  Yukinori Ikegawa ,  Seiichiro Tomita ,  Shigeki Tanemura

IPC分类号： C03C15/00

CPC分类号： G11B5/314 ,  G11B5/3163 ,  G11B5/6088 ,  G11B2005/0021

摘要： A method of manufacturing a plasmon generator includes the steps of: forming an etching mask on a dielectric layer; forming an accommodation part by etching the dielectric layer using the etching mask; and forming the plasmon generator to be accommodated in the accommodation part. The step of forming the etching mask includes the steps of: forming a patterned layer on an etching mask material layer, the patterned layer having a first opening that has a sidewall; forming a structure by forming an adhesion film on the sidewall, the structure having a second opening smaller than the first opening; and etching a portion of the etching mask material layer exposed from the second opening.

摘要翻译： 一种制造等离子体发生器的方法包括以下步骤：在电介质层上形成蚀刻掩模; 通过使用蚀刻掩模蚀刻电介质层来形成容纳部分; 以及形成要容纳在容纳部分中的等离子体发生器。 形成蚀刻掩模的步骤包括以下步骤：在蚀刻掩模材料层上形成图案化层，所述图案化层具有具有侧壁的第一开口; 通过在侧壁上形成粘合膜来形成结构，该结构具有比第一开口小的第二开口; 并蚀刻从第二开口露出的蚀刻掩模材料层的一部分。

公开(公告)号：US09472230B1

公开(公告)日：2016-10-18

申请号：US14691127

申请日：2015-04-20

申请人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Hideo Mamiya ,  Hironori Araki ,  Seiichiro Tomita

发明人： Yoshitaka Sasaki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Hideo Mamiya ,  Hironori Araki ,  Seiichiro Tomita

IPC分类号： G11B11/00 ,  G11B7/1387 ,  G11B7/22 ,  G11B5/012 ,  G11B5/00 ,  G11B5/60 ,  G11B5/31 ,  G11B11/105

CPC分类号： G11B5/012 ,  G11B5/187 ,  G11B5/3116 ,  G11B5/314 ,  G11B5/6088 ,  G11B11/10532 ,  G11B11/10543 ,  G11B2005/0021

摘要： A plasmon generator includes a main body, and a front protrusion protruding from the main body. The front protrusion has a proximal portion which is a boundary with the main body, and a near-field light generating surface located in the medium facing surface of a magnetic head. The main body has a first inclined surface and a second inclined surface each facing toward the medium facing surface. The first inclined surface and the second inclined surface are at a distance from each other and aligned in the track width direction. The proximal portion of the front protrusion is located between the first inclined surface and the second inclined surface.

摘要翻译： 等离子体发生器包括主体和从主体突出的前突起。 前突起具有与主体边界的近侧部分和位于磁头的介质面向表面中的近场光产生表面。 主体具有第一倾斜表面和第二倾斜表面，每个倾斜表面面向介质相对表面。 第一倾斜面和第二倾斜面彼此间隔一定距离并且在轨道宽度方向上对齐。 前突起的近端部分位于第一倾斜表面和第二倾斜表面之间。