公开(公告)号：US08221636B2

公开(公告)日：2012-07-17

申请号：US12149987

申请日：2008-05-12

申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

IPC分类号： B44C1/22

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116

摘要： A magnetic head includes a pole layer, and an encasing layer having a groove that accommodates the pole layer. A manufacturing method for the magnetic head includes the steps of forming a nonmagnetic layer that will later undergo formation of the groove therein and will thereby become the encasing layer; forming the groove in the nonmagnetic layer so that the nonmagnetic layer becomes the encasing layer; and forming the pole layer such that the pole layer is accommodated in the groove of the encasing layer. The nonmagnetic layer is formed of Al2O3. The step of forming the groove in the nonmagnetic layer includes the step of taper-etching the nonmagnetic layer by reactive ion etching with an etching gas containing at least BCl3 and N2 among BCl3, Cl2 and N2.

摘要翻译： 磁头包括极层和具有容纳极层的凹槽的封装层。 磁头的制造方法包括以下步骤：形成将在其中形成凹槽的非磁性层，从而成为包层; 在非磁性层中形成凹槽，使得非磁性层成为包层; 以及形成所述极层，使得所述极层容纳在所述封装层的槽中。 非磁性层由Al2O3形成。 在非磁性层中形成槽的步骤包括通过在BCl 3，Cl 2和N 2中至少含有BCl 3和N 2的蚀刻气体的反应离子蚀刻来对非磁性层进行锥蚀刻的步骤。

公开(公告)号：US08176623B2

公开(公告)日：2012-05-15

申请号：US12003347

申请日：2007-12-21

申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Shigeki Tanemura ,  Hironori Araki ,  Kazuo Ishizaki ,  Takehiro Horinaka

发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Shigeki Tanemura ,  Hironori Araki ,  Kazuo Ishizaki ,  Takehiro Horinaka

IPC分类号： G11B5/187 ,  G11B5/17

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3123 ,  G11B5/313 ,  G11B5/3163 ,  H01L21/67069 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/4906 ,  Y10T29/49066 ,  Y10T428/115

摘要： A method of manufacturing the magnetic head includes the steps of: forming the pole-layer-encasing layer; forming an initial nonmagnetic layer in the groove of the pole-layer-encasing layer by physical vapor deposition, the initial nonmagnetic layer being intended to become the nonmagnetic layer later by undergoing etching of a surface thereof; etching the surface of the initial nonmagnetic layer by dry etching so that the initial nonmagnetic layer becomes the nonmagnetic layer; and forming the pole layer in the pole-layer-encasing section formed by the nonmagnetic layer.

摘要翻译： 制造磁头的方法包括以下步骤：形成极层包裹层; 通过物理气相沉积在磁极层封装层的沟槽中形成初始非磁性层，最初的非磁性层随后经历其表面蚀刻而成为非磁性层; 通过干蚀刻蚀刻初始非磁性层的表面，使初始非磁性层成为非磁性层; 以及在由非磁性层形成的极层包裹部中形成极层。

公开(公告)号：US20090162699A1

公开(公告)日：2009-06-25

申请号：US12003347

申请日：2007-12-21

申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Shigeki Tanemura ,  Hironori Araki ,  Kazuo Ishizaki ,  Takehiro Horinaka

发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Shigeki Tanemura ,  Hironori Araki ,  Kazuo Ishizaki ,  Takehiro Horinaka

IPC分类号： G11B5/33 ,  B05D5/12

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3123 ,  G11B5/313 ,  G11B5/3163 ,  H01L21/67069 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/4906 ,  Y10T29/49066 ,  Y10T428/115

摘要： A magnetic head includes: a pole layer; a pole-layer-encasing layer made of a nonmagnetic material and having a top surface and a groove that opens at the top surface; and a nonmagnetic layer that is made of a nonmagnetic metal material, disposed in the groove and forms a pole-layer-encasing section that accommodates the pole layer. A method of manufacturing the magnetic head includes the steps of: forming the pole-layer-encasing layer; forming an initial nonmagnetic layer in the groove of the pole-layer-encasing layer by physical vapor deposition, the initial nonmagnetic layer being intended to become the nonmagnetic layer later by undergoing etching of a surface thereof, etching the surface of the initial nonmagnetic layer by dry etching so that the initial nonmagnetic layer becomes the nonmagnetic layer; and forming the pole layer in the pole-layer-encasing section formed by the nonmagnetic layer.

摘要翻译： 磁头包括：极层; 由非磁性材料制成的具有顶表面和在顶表面上开口的凹槽的极层包裹层; 以及由非磁性金属材料制成的非磁性层，其设置在所述凹槽中并形成容纳所述极层的极层包封部分。 制造磁头的方法包括以下步骤：形成极层包裹层; 通过物理气相沉积在磁极层封装层的沟槽中形成初始非磁性层，初始非磁性层以后通过蚀刻其表面而成为非磁性层，通过以下方式蚀刻初始非磁性层的表面： 使得初始非磁性层成为非磁性层; 以及在由非磁性层形成的极层包裹部中形成极层。

公开(公告)号：US07551394B2

公开(公告)日：2009-06-23

申请号：US11484575

申请日：2006-07-12

申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Shigeki Tanemura ,  Hironori Araki ,  Dong-Hong Li ,  Tatsushi Shimizu ,  Tatsuya Shimizu

发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Shigeki Tanemura ,  Hironori Araki ,  Dong-Hong Li ,  Tatsushi Shimizu ,  Tatsuya Shimizu

IPC分类号： G11B5/187 ,  G11B5/39

CPC分类号： G11B5/1278

摘要： A magnetic head comprises a pole layer, a shield layer, a gap layer disposed between the pole layer and the shield layer, and a coil. The shield layer incorporates a first layer, a second layer, a third layer and a fourth layer that are disposed on the gap layer one by one. The first layer has an end face located in a medium facing surface. The second layer has: a first surface located in the medium facing surface; a second surface touching the first layer; and a third surface opposite to the second surface. The third layer touches the third surface of the second layer. An end face of each of the third and fourth layers closer to the medium facing surface is located at a distance from the medium facing surface.

摘要翻译： 磁头包括极层，屏蔽层，设置在极层和屏蔽层之间的间隙层和线圈。 屏蔽层包括一个一个地设置在间隙层上的第一层，第二层，第三层和第四层。 第一层具有位于面向介质的表面中的端面。 第二层具有：位于介质相对表面中的第一表面; 接触第一层的第二表面; 和与第二表面相对的第三表面。 第三层接触第二层的第三表面。 更靠近介质相对表面的第三层和第四层中的每一层的端面位于与介质相对表面一定距离处。

公开(公告)号：US20090059426A1

公开(公告)日：2009-03-05

申请号：US11896705

申请日：2007-09-05

申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

IPC分类号： G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49046

摘要： A top surface of a pole layer of a magnetic head includes: a first portion having a first edge located in a medium facing surface and a second edge opposite thereto; and a second portion located farther from the medium facing surface than the first portion and connected to the first portion at the second edge. The distance from a substrate to an arbitrary point on the first portion increases with increasing distance from the medium facing surface to the arbitrary point. The angle of inclination of the first portion taken at the arbitrary point with respect to a direction perpendicular to the medium facing surface increases stepwise or continuously with increasing distance from the medium facing surface to the arbitrary point. The angle of inclination taken at the first edge is greater than zero degree. The second portion extends in a direction substantially perpendicular to the medium facing surface.

摘要翻译： 磁头的极层的顶表面包括：第一部分，其具有位于介质相对表面中的第一边缘和与其相对的第二边缘; 以及位于比所述第一部分更远离所述介质面对表面并且在所述第二边缘处连接到所述第一部分的第二部分。 从基板到第一部分的任意点的距离随着从介质面向表面到任意点的距离的增加而增加。 相对于与面向介质的表面垂直的任意点处的第一部分的倾斜角度随着从介质面向表面到任意点的距离的增加而逐步或连续地增加。 在第一边缘处采取的倾斜角大于零度。 第二部分在基本上垂直于介质面向表面的方向上延伸。

公开(公告)号：US20080316653A1

公开(公告)日：2008-12-25

申请号：US11812757

申请日：2007-06-21

申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Lijie Guan ,  Takehiro Horinaka

发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Lijie Guan ,  Takehiro Horinaka

IPC分类号： G11B5/10

CPC分类号： G11B5/3116 ,  G11B5/1278

摘要： A magnetic head includes: a pole layer; a nonmagnetic layer disposed on part of the top surface of the pole layer; a gap layer disposed on the pole layer and the nonmagnetic layer; and a shield disposed on the gap layer. The top surface of the pole layer includes: a first portion having a first edge located in a medium facing surface and a second edge opposite thereto; and a second portion located farther from the medium facing surface than the first portion and connected to the first portion at the second edge. The first portion is inclined with respect to a direction orthogonal to the medium facing surface so that the distance from a substrate increases with increasing distance from the medium facing surface. The nonmagnetic layer has a bottom surface touching the second portion, and this bottom surface has an edge located at the second edge.

摘要翻译： 磁头包括：极层; 设置在所述极层的顶表面的一部分上的非磁性层; 设置在所述极层和所述非磁性层上的间隙层; 以及设置在间隙层上的屏蔽件。 极层的顶表面包括：第一部分，其具有位于介质相对表面中的第一边缘和与其相对的第二边缘; 以及位于比所述第一部分更远离所述介质面对表面并且在所述第二边缘处连接到所述第一部分的第二部分。 第一部分相对于与介质相对表面正交的方向倾斜，使得距衬底的距离随着距离介质面向表面的距离的增加而增加。 非磁性层具有接触第二部分的底面，该底面具有位于第二边缘的边缘。

公开(公告)号：US20080277376A1

公开(公告)日：2008-11-13

申请号：US12155734

申请日：2008-06-09

申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Shigeki Tanemura ,  Hironori Araki

发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Shigeki Tanemura ,  Hironori Araki

IPC分类号： B44C1/22

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3173 ,  Y10T29/49037 ,  Y10T29/49044

摘要： A method of manufacturing magnetic heads comprises the step of: fabricating a magnetic head substructure by forming a plurality of components of the magnetic heads on a single substrate, wherein a plurality of rows of pre-head portions that will be the respective magnetic heads later are aligned in the substructure; and fabricating the magnetic heads by separating the pre-head portions from one another through cutting the substructure. In the step of fabricating the substructure, a plurality of indicators are formed, each of the indicators serving as a reference for indicating the location of a region ABS in which the medium facing surfaces of the magnetic heads are to be formed.

摘要翻译： 制造磁头的方法包括以下步骤：通过在单个基板上形成磁头的多个部件来制造磁头子结构，其中稍后将成为相应磁头的多行预磁头部分是 在子结构中排列; 以及通过切割子结构将前头部彼此分开来制造磁头。 在制造子结构的步骤中，形成多个指示器，每个指示器用作用于指示要形成磁头的介质相对表面的区域ABS的位置的基准。

公开(公告)号：US07375925B2

公开(公告)日：2008-05-20

申请号：US11138968

申请日：2005-05-27

申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki

发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki

IPC分类号： G11B5/147

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3169

摘要： A pole layer incorporates: a first portion having an end face located in a medium facing surface; and a second portion having a thickness greater than that of the first portion. A surface of the first portion closer to a substrate is located farther from the substrate than a surface of the second portion closer to the substrate. A surface of the first portion farther from the substrate is located closer to the substrate than a surface of the second portion farther from the substrate. At least a portion of the pole layer is placed in an encasing groove formed in a region extending from a first encasing layer through a second encasing layer to a nonmagnetic metal layer.

摘要翻译： 极层包括：具有位于介质面对表面中的端面的第一部分; 以及第二部分，其厚度大于第一部分的厚度。 靠近基板的第一部分的表面比距离基板的第二部分的表面更靠近基板。 距离基板更远的第一部分的表面比离开基板的第二部分的表面更靠近基板。 极层的至少一部分被放置在形成在从第一包层穿过第二包装层延伸到非磁性金属层的区域中的包围槽中。

公开(公告)号：US20080013209A1

公开(公告)日：2008-01-17

申请号：US11484575

申请日：2006-07-12

申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Shigeki Tanemura ,  Hironori Araki ,  Dong-Hong Li ,  Tatsushi Shimizu ,  Tatsuya Shimizu

发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Shigeki Tanemura ,  Hironori Araki ,  Dong-Hong Li ,  Tatsushi Shimizu ,  Tatsuya Shimizu

IPC分类号： G11B5/127

CPC分类号： G11B5/1278

摘要： A magnetic head comprises a pole layer, a shield layer, a gap layer disposed between the pole layer and the shield layer, and a coil. The shield layer incorporates a first layer, a second layer, a third layer and a fourth layer that are disposed on the gap layer one by one. The first layer has an end face located in a medium facing surface. The second layer has: a first surface located in the medium facing surface; a second surface touching the first layer; and a third surface opposite to the second surface. The third layer touches the third surface of the second layer. An end face of each of the third and fourth layers closer to the medium facing surface is located at a distance from the medium facing surface.

摘要翻译： 磁头包括极层，屏蔽层，设置在极层和屏蔽层之间的间隙层和线圈。 屏蔽层包括一个一个地设置在间隙层上的第一层，第二层，第三层和第四层。 第一层具有位于面向介质的表面中的端面。 第二层具有：位于介质相对表面中的第一表面; 接触第一层的第二表面; 和与第二表面相对的第三表面。 第三层接触第二层的第三表面。 更靠近介质相对表面的第三层和第四层中的每一层的端面位于与介质相对表面一定距离处。

公开(公告)号：US07877860B2

公开(公告)日：2011-02-01

申请号：US12379423

申请日：2009-02-20

申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Shigeki Tanemura ,  Hironori Araki

发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Shigeki Tanemura ,  Hironori Araki

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/1278 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052 ,  Y10T29/4906 ,  Y10T29/49067

摘要： A method of manufacturing a magnetic head includes the steps of forming an underlying layer, forming a pole layer including a track width defining portion at least by plating, using the underlying layer as an electrode, such that the track width defining portion is disposed on the underlying layer, and removing the underlying layer except a portion below the pole layer by ion beam etching. The underlying layer is made of a conductive material whose etching rate of ion beam etching is higher than that of the magnetic alloy used to make the pole layer.

摘要翻译： 一种制造磁头的方法包括以下步骤：使用下面的层作为电极，形成至少通过电镀形成包括轨道宽度限定部分的磁极层的极层，使得轨道宽度限定部分位于 并且通过离子束蚀刻除去除了极层下方的部分之外的下层。 下层由导电材料制成，其离子束蚀刻的蚀刻速率高于用于制造极层的磁性合金的蚀刻速率。