公开(公告)号：US20060280868A1

公开(公告)日：2006-12-14

申请号：US11452247

申请日：2006-06-14

申请人： Yoshitake Kato ,  Teruo Iwata

发明人： Yoshitake Kato ,  Teruo Iwata

IPC分类号： C23C16/00 ,  G06F19/00 ,  B05C11/00

CPC分类号： C23C16/4404 ,  C23C16/52

摘要： A method for treating a vapor deposition apparatus, a method for depositing a thin film, a vapor deposition apparatus and a computer program product are disclosed for providing a reduced cleaning frequency. Accumulated material is deposited on an interior wall of a chamber of a vapor deposition unit during deposition of a thin film. While the deposition of the thin film is repeated, a gas is emitted from the accumulated material to deteriorate an uniformity in the film thickness of the thin film. The method involves depositing an amorphous film to cover the accumulated material before any influence of the accumulated material deposited on the interior wall of the chamber on the thickness of the thin film is evident. Gas emission from the accumulated material can be prevented by covering the accumulated material with the amorphous film. This configuration provides a thin film having an improved uniformity of thickness.

摘要翻译： 公开了一种用于处理蒸镀装置的方法，沉积薄膜的方法，蒸镀装置和计算机程序产品，用于提供降低的清洗频率。 在沉积薄膜期间，积聚的材料沉积在气相沉积单元的室的内壁上。 当重复沉积薄膜时，从积聚的材料发出气体，从而使薄膜的膜厚均匀化。 在沉积在室内壁上的累积材料对薄膜厚度的任何影响是明显的之前，该方法包括沉积非晶膜以覆盖积聚的材料。 可以通过用非晶膜覆盖积累的材料来防止来自积聚的材料的气体排放。 这种构造提供了具有改善的厚度均匀性的薄膜。

公开(公告)号：US06284595B1

公开(公告)日：2001-09-04

申请号：US09559412

申请日：2000-04-26

申请人： Yoshitake Kato

发明人： Yoshitake Kato

IPC分类号： H01L218242

CPC分类号： H01L28/92 ,  H01L27/10852

摘要： A stacked capacitor includes a top electrode, a capacitor insulator film made of BST, and a bottom electrode having a hollow cylindrical shape and connected through a contact plug to a diffused region of a silicon substrate. The bottom electrode includes a barrier layer, a first electrode layer and a second electrode layer, wherein the first and the second electrode layers are deposited on the barrier layer, followed by patterning of the second electrode layer for forming a hollow therein. The contact resistance between the bottom electrode and the contact plug is low due to excellent crystalline orientation alignment of the first electrode layer and thus prevention of oxidation of the contact plug during deposition of the BST film.

摘要翻译： 叠层电容器包括顶电极，由BST制成的电容绝缘膜，以及具有中空圆柱形状的底电极，并通过接触插塞连接到硅衬底的扩散区域。 底部电极包括阻挡层，第一电极层和第二电极层，其中第一和第二电极层沉积在阻挡层上，随后构图第二电极层以在其中形成中空。 底部电极和接触插塞之间的接触电阻由于第一电极层的优异的晶体取向取向而降低，因此在沉积BST膜期间防止了接触塞的氧化。

公开(公告)号：US5537389A

公开(公告)日：1996-07-16

申请号：US154408

申请日：1993-11-19

申请人： Tadahiro Kuwa ,  Makoto Miura ,  Tamotsu Iida ,  Yoshitane Tsuburaya ,  Yoshitake Kato ,  Masanori Uematsu ,  Masayuki Yukawa ,  Junji Takamoto ,  Masahiko Ota

发明人： Tadahiro Kuwa ,  Makoto Miura ,  Tamotsu Iida ,  Yoshitane Tsuburaya ,  Yoshitake Kato ,  Masanori Uematsu ,  Masayuki Yukawa ,  Junji Takamoto ,  Masahiko Ota

IPC分类号： G11B17/04 ,  G11B23/03

CPC分类号： G11B17/0436 ,  G11B23/0317

摘要： Scratches on the recording disk caused by sliding of a disk cartridge shutter is prevented by slidably inserting first and second shutters between a tray and a case on the opposite side to a recording disk accommodating portion of the tray. The first shutter simultaneously opens and closes a case side driving shaft insert hole, a case side head insert hole, a tray side driving shaft insert hole, and a tray side head insert hole. The second shutter opens and closes a terminal hole. The second shutter is opened independently of the first shutter and is held in a position so that the case side driving shaft insert hole, the case side head insert hole, the tray side driving shaft insert hole, and the tray side head insert hole are not closed. Closing the first shutter, however, causes the second shutter to also close.

摘要翻译： 通过将第一和第二快门可滑动地插入托盘和与托盘的记录盘容纳部分相反的一侧的壳体之间来防止由盘盒快门的滑动引起的记录盘上的划痕。 第一快门同时打开和关闭壳体侧驱动轴插入孔，壳体侧头插入孔，托盘侧驱动轴插入孔和托盘侧头插入孔。 第二个挡板打开和关闭端子孔。 第二挡板独立于第一挡板打开，并且被保持在使得壳体侧驱动轴插入孔，壳体侧头插入孔，托盘侧驱动轴插入孔和托盘侧头插入孔不是 关闭。 然而，关闭第一个快门会导致第二个快门也关闭。

公开(公告)号：US5006948A

公开(公告)日：1991-04-09

申请号：US243688

申请日：1988-09-13

申请人： Kazuya Fukunaga ,  Yoshitake Kato ,  Hiroyuki Yoshimura

发明人： Kazuya Fukunaga ,  Yoshitake Kato ,  Hiroyuki Yoshimura

IPC分类号： G11B23/033 ,  G11B23/50

CPC分类号： G11B23/0332 ,  G11B23/505

摘要： A disk cartridge comprises a cartridge case including an upper case, a lower case and a head insertion aperture at a predetermined position, a pair of cleaning sheets respectively secured to inner surfaces of the upper and lower cases, a disk disposed rotatably between the cleaning sheets, and a resilient member disposed between at least one of the cases and associated cleaning sheet, the resilient member being adapted to press a part of the cleaning sheet against a disk surface, wherein the resilient member is disposed in the vicinity of the head insertion aperture and upstream of the head inserting port in the rotational direction of the disk, thereby enhancing the effect of cleaning of the disk surfaces to be read/written by the magnetic head.

公开(公告)号：US4918559A

公开(公告)日：1990-04-17

申请号：US387434

申请日：1989-07-31

申请人： Hiroshi Maruyama ,  Yoshitake Kato ,  Minoru Fujita

发明人： Hiroshi Maruyama ,  Yoshitake Kato ,  Minoru Fujita

IPC分类号： G11B23/033 ,  G11B25/04

CPC分类号： G11B23/0332 ,  G11B25/043

摘要： A disc cartridge comprising a cartridge case for rotatably accommodating a disc and a shutter for opening and closing at least one head accessing opening defined on the cartridge case, wherein the shutter comprises at least one plate member for opening and closing the head accessing opening and a connecting plate connected with one end of the plate member facing to one end face of the cartridge case, a first engaging member formed on the connecting plate toward the one end surface of the cartridge case and a second engaging member formed on the one end face of the cartridge case for engagement with the first engaging member to slidably mount the shutter on the cartridge case.

摘要翻译： 一种盘盒，包括用于可旋转地容纳盘的盒壳体和用于打开和关闭限定在盒壳体上的至少一个头部存取开口的快门，其中该挡板包括用于打开和关闭头部存取开口的至少一个板构件和 所述连接板与所述板部件的与所述盒壳体的一个端面相对的一端连接，所述连接板朝向所述盒壳体的一个端面形成的第一接合部件和形成在所述盒壳体的一个端面上的第二接合部件 所述盒壳体用于与所述第一接合构件接合以将所述快门可滑动地安装在所述盒壳体上。

公开(公告)号：US4908726A

公开(公告)日：1990-03-13

申请号：US356877

申请日：1989-05-25

申请人： Yoshitake Kato

发明人： Yoshitake Kato

IPC分类号： G11B23/03 ,  G11B23/033

CPC分类号： G11B23/0332 ,  G11B23/0308

摘要： A shutter for a disk cartridge comprises a pair of upper and lower side plates of substantially same shape, juxtaposed to each other, and an end plate connected to the upper and lower side plates at one end, and integrally molded from a compound plastic containing a filler and a lubricant having a melt index of 30 to 60. The upper and lower side plates each have a thickness of not more than 1.0 mm and a ratio of the thickness to the surface area of the upper and lower side plates each of 1/5,000 to 1/500. The shutter can be molded at a low cost with a good moldability, and has high mechanical strength, heat resistance and slidability.

公开(公告)号：US4630728A

公开(公告)日：1986-12-23

申请号：US647524

申请日：1984-09-05

申请人： Fujio Matsumoto ,  Yoshitake Kato

发明人： Fujio Matsumoto ,  Yoshitake Kato

IPC分类号： G11B23/033 ,  B65D85/57

CPC分类号： G11B23/0332

摘要： In a disc cartridge comprising a disc case (1) having drive shaft insertion holes (3) on the central portion of the disc case (1) and head insertion holes (4), a disc (2) is rotatably mounted in the disc case (1) and liners (12) laid on the respective inner surfaces of each of the halves of the disc case (1) so as to slidably contact with both surfaces of the disc (2), there are formed ribs (15) on said inner surfaces of the disc case so as generally to surround the part of the drive shaft insertion holes (3).

摘要翻译： 在包括在盘盒（1）的中心部分上具有驱动轴插入孔（3）和头插入孔（4）的盘盒（1）的盘盒中，盘（2）可旋转地安装在盘盒 （1）和衬垫（12），其布置在盘盒（1）的每个半部的相应内表面上，以与盘（2）的两个表面滑动接触，在所述盘 盘盒的内表面通常围绕驱动轴插入孔（3）的一部分。

公开(公告)号：US4583144A

公开(公告)日：1986-04-15

申请号：US465251

申请日：1983-02-09

申请人： Yoshitake Kato

发明人： Yoshitake Kato

IPC分类号： G11B17/03 ,  G11B23/00 ,  G11B23/033 ,  G11B23/03

CPC分类号： G11B23/0035 ,  G11B17/03 ,  G11B23/033

摘要： In a magnetic recording disc cartridge, a hub assembly composed of an upper hub member and a lower hub member inseparably connected with each other clamps the peripheral portion of a central hole defined in a magnetic recording sheet between inner stepped portions of surfaces of the hub members with a portion of the magnetic recording sheet opposed to outer portions of the hub members remaining unclamped.

摘要翻译： 在磁记录盘盒中，由不可分离地连接的上轮毂构件和下轮毂构件构成的轮毂组件将限定在磁记录片材中的中心孔的周边部分夹在轮毂构件的表面的内阶梯部分之间 磁记录片的与轮毂构件的外部部分相对的部分保持松开。

公开(公告)号：US20130011994A1

公开(公告)日：2013-01-10

申请号：US13543750

申请日：2012-07-06

申请人： Misato Sakamoto ,  Youichi Yamamoto ,  Masayuki Tachikawa ,  Yoshitake Kato

发明人： Misato Sakamoto ,  Youichi Yamamoto ,  Masayuki Tachikawa ,  Yoshitake Kato

IPC分类号： H01L21/02

CPC分类号： H01L28/91 ,  H01L28/40 ,  H01L28/60

摘要： A manufacturing method of a semiconductor device includes the following steps. Firstly, a lower electrode is formed over a substrate (semiconductor substrate). Successively, the lower electrode is primarily crystallized. Successively, a capacitance dielectric layer is formed over the lower electrode after primarily crystallized. Successively, the capacitance dielectric layer is secondarily crystallized. Then, an upper electrode is formed over the capacitance dielectric layer.

摘要翻译： 半导体器件的制造方法包括以下步骤。 首先，在基板（半导体基板）上形成下电极。 接下来，下电极主要结晶。 接下来，在主要结晶之后，在下电极上形成电容电介质层。 接着，电容电介质层二次结晶。 然后，在电容电介质层上形成上电极。

公开(公告)号：US07608502B2

公开(公告)日：2009-10-27

申请号：US11206777

申请日：2005-08-19

申请人： Tomohisa Iino ,  Naomi Fukumaki ,  Yoshitake Kato ,  Tomoe Yamamoto

发明人： Tomohisa Iino ,  Naomi Fukumaki ,  Yoshitake Kato ,  Tomoe Yamamoto

IPC分类号： H01L21/8242

CPC分类号： H01L21/0228 ,  H01L21/02175 ,  H01L21/02205 ,  H01L21/3141 ,  H01L21/31604 ,  H01L21/31641 ,  H01L21/31645 ,  H01L27/10852 ,  H01L28/90

摘要： In the process for manufacturing a semiconductor device of the present invention, a capacitor dielectric film is deposited via an atomic layer deposition employing an organic source material containing one or more metallic element(s) selected from the group consisting of Zr, Hf, La and Y as a deposition gas. The process for manufacturing a capacitor of the present invention includes obtaining a boundary temperature T (degree C.), at which an increase in a deposition rate for depositing the capacitor dielectric film as increasing the temperature is detected, on the basis of a correlation data of a deposition temperature in the atomic layer deposition employing the deposition gas with a deposition rate for depositing the capacitor dielectric film at the deposition temperature (S100 and S102); and depositing the capacitor dielectric film via the atomic layer deposition employing the deposition gas at a temperature within a range of from (T−20) (degree C.) to (T+20) (degree C.) (S104 to S112).

摘要翻译： 在本发明的半导体装置的制造方法中，通过使用含有选自Zr，Hf，La中的一种或多种金属元素的有机源材料的原子层沉积来沉积电容器电介质膜，以及 Y作为沉积气体。 本发明的电容器的制造方法包括获得边界温度T（℃），在该温度下，根据相关数据，检测出升高温度时沉积电容器电介质膜的沉积速率的增加 使用沉积气体的原子层沉积中的沉积温度为沉积温度时沉积电容器电介质膜的沉积速率（S100和S102）; 在（T-20）（℃）〜（T + 20）（℃）（℃）（S104〜S112）的范围内的温度下，通过使用沉积气体的原子层沉积来沉积电容器电介质膜。