摘要:
A stripping liquor composition consisting essentially of (A) at least one compound selected from among sulfonic acids, acid esters of sulfuric acid, and acid esters of phosphoric acid, (B) hydrogen peroxide, and (C) at least one of organic solvents, with or without the addition of (D) at least one of polyhydric alcohols.
摘要:
A photosensitive resin composition comprising (I) a copolymer containing (A) 10 to 95 mol % of a conjugated diolefinic hydrocarbon, (B) 5 to 90 mol % of an .alpha.,.beta.-ethylenically unsaturated carboxylic acid and (C) 0 to 85 mol % of a monoolefinically unsaturated compound, (II) a photosensitizer and/or a photosensitive crosslinking agent, and, if necessary, (III) a photopolymerizable unsaturated monomer. Said copolymer may have been reacted with an inorganic alkali, an alkali salt or an amine compound in a proportion of 0.05 to 1.0 equivalent per equivalent of the carboxyl group of the .alpha.,.beta.-ethylenically unsaturated carboxylic acid in said copolymer. This photosensitive resin composition is excellent in storage stability, quick in photosetting upon exposure to actinic light rays including ultraviolet rays, that is, high in sensitivity, capable of development with water or a dilute aqueous alkaline solution and possesses satisfactory rubber elasticity, and a printing plate formed from the composition is excellent in water resistance though the composition is developable with an aqueous developing solution, so that the composition can be used for a flexographic printing plate, to which an aqueous flexographic printing ink can be applied. Said composition can also be used for a pohote-resist which is high in sensitivity, developable with water or a dilute alkaline solution and excellent in resolving power.
摘要:
A photoresist composition comprising a cyclized product obtained by contacting a conjugated diene polymer or copolymer having unsaturations in the main chain or side chains with a fluorine-containing substituted sulfonic acid compound represented by the formula:CF.sub.n H.sub.3-n SO.sub.3 R or CF.sub.n H.sub.3-n SO.sub.2 Xwherein R is hydrogen, alkyl or CF.sub.n H.sub.3-n SO.sub.2, X is halogen, and n is 1, 2 or 3, in an inert solvent, and a photosensitive crosslinking agent soluble in an organic solvent. The resist pattern obtained from said composition has excellent heat resistance. Also, when a silicon oxide film having said resist pattern is etched, the number of pinholes formed is very small.
摘要翻译:一种光致抗蚀剂组合物,其包含通过使主链或侧链中具有不饱和键的共轭二烯聚合物或共聚物与式CFRH 3-nSO 3 R或CF n H 3-n SO 2 X表示的含氟取代磺酸化合物接触而获得的环化产物,其中R为氢 ,烷基或CF n H 3-n SO 2,X为卤素,n为1,2或3,以及可溶于有机溶剂的光敏交联剂。 由所述组合物获得的抗蚀剂图案具有优异的耐热性。 此外,当蚀刻具有所述抗蚀剂图案的氧化硅膜时,形成的针孔的数量非常小。
摘要:
By adding a compound represented by the following general formulas: ##STR1## to a conventional photoresist composition comprising a cyclized product of conjugated diene polymer or copolymer and a photo-crosslinking agent soluble in an organic solvent, an image having a high degree of resolution and only a small number of pinholes can be obtained even when a base board having a surface of a high reflectance is used.
摘要:
An ionizing radiation sensitive resist consisting essentially of a polymer having a recurring unit represented by the following formula: ##STR1## wherein X is a hydrogen atom, a methyl group, or a halogen atom and R.sup.1, R.sup.2, R.sup.3, R.sup.4 and R.sup.5, which may be identical or different, are hydrogen atoms, halogen atoms, alkyl groups having 1 to 3 carbon atoms, alkoxy groups having 1 to 3 carbon atoms, haloalkyl groups having 1 to 3 carbon atoms or haloalkoxy groups having 1 to 3 carbon atoms, at least a part of the X groups present in said polymer being a halogen atom, at least a part of the Y.sup.1 and Y.sup.2 group present in said polymer being a halogen atom, and at least a part of the R.sup.1, R.sup.2, R.sup.3, R.sup.4 and R.sup.5 groups present in said polymer being a haloalkyl or haloalkoxy group having 1 to 3 carbon atoms. Said ionizing radiation sensitive resist is suitable as a negative type resist. This resist is used in the form of an organic solvent solution to form a coating film on a substrate and the desired parts of this coating film are irradiated with an ionizing radiation, whereby patterns are formed.
摘要:
By adding a compound represented by the following general formulas: ##STR1## to a conventional photoresist composition comprising a cyclized product of conjugated diene homopolymer or copolymer and a photo-crosslinking agent soluble in an organic solvent, an image having a high degree of resolution can be obtained even when a base board having a surface of a high reflectance is used, with a high reproducibility and without being affected by prebaking conditions.
摘要:
A photosensitive resin composition comprising a 1,2-quanonediazide compound and a copolymer consisting essentially of (A) a conjugated diolefinic compound, (B) a monoolefinically unsaturated compound and (C) an .alpha.,.beta.-ethylenically unsaturated carboxylic acid. Said composition can provide a positive type resist which is difficult to break and excellent in adhesion to a substrate.
摘要:
A positive type photosensitive resin composition comprising an alkali-soluble novolac resin and (A) a compound represented by the following general formula (I) and a compound represented by the following general formula (II) or (B) a compound represented by the following general formula (III) and a compound represented by the following general formula (IV), wherein the molar ratio of the compound represented by the general formula (I) to the compound represented by the general formula (II) is 6/4-9/1 or the molar ratio of the compound represented by the general formula (III) to the compound represented by the general formula (IV) is 1/9-9/1 and the total amount of the component (A) or (B) is 5-100 parts by weight per 100 parts by weight of the alkali-soluble novolac resin: ##STR1## wherein R.sub.1, R.sub.5, R.sub.8 and R.sub.10, which may be identical or different, represent alkyl groups, aryl groups or aralkyl groups; and R.sub.2, R.sub.3, R.sub.4, R.sub.6, R.sub.7, R.sub.9, R.sub.11 and R.sub.12, which may be identical or different, represent 1,2-naphthoquinonediazide-4-sulfonyl groups, 1,2-naphthoquinonediazide-5-sulfonyl groups or 1,2-benzoquinonediazide-4-sulfonyl groups. Said positive type photosensitive resin composition is excellent in both sensitivity and yield of residual film thickness.
摘要:
A photosensitive resin film consisting of a monolayer film of a composition comprising (a) a cyclized product of butadiene polymer, (b) at least one member selected from the group consisting of a photo-crosslinking agent, a photo-sensitizer and a photo-polymerization initiator, and (c) a storage stabilizer, and if necessary, a dye and/or a pigment, or a laminate structure photosensitive resin film prepared by laminating to the above photosensitive resin film a composition comprising (d) 100 parts by weight of a polymer or copolymer of monoolefinically unsaturated compound, (e) 5 to 100 parts by weight of a polyfunctional, photo-polymerizable, unsaturated compound having at least two photo-polymerizable double bonds in the molecule, (f) at least one member selected from the group consisting of a photo-crosslinking agent, a photo-sensitizer and a photo-polymerization initiator, and (g) a storage stabilizer, and if necessary, a dye and/or a pigment. Said photosensitive resin film can be intimately contacted with a negative film, and therefore, a sharp image can be obtained by exposing the resulting laminate to light through the negative film and then developing it. Said photo-sensitive resin film can also be laminated to a solid surface without entrapping any air even if the solid surface has irregularities. When the film has been exposed to light and developed, there is obtained a film excellent in heat resistance.
摘要:
In a sheet metal member having a boss which is obtained by the method of the present invention, a cylindrical portion is formed at an outer peripheral edge, thereby allowing the member to be used as a pulley for a flat belt, a V belt or a poly-V belt. According to the present invention, when the boss is to be formed, the positional accuracies of portions other than the boss with respect to the boss are improved. The present invention includes: a boring step of opening a circular hole in a circular blank; a curving step of shaping the circular blank into a projected shape; and a bending step of restricting a radially outward spread of an outer peripheral edge portion of the circular blank which has undergone the curving step, and bending an inclined portion between the outer peripheral edge portion of the circular blank and the circular hole into a recessed shape, thereby forming the case-like boss. After the boring step and the curving step are conducted in an arbitrary order or the boring and curving steps are simultaneously conducted, the bending step is conducted while the circular hole is positioned to a reference position by a projection of a mold.