公开(公告)号：US20070243076A1

公开(公告)日：2007-10-18

申请号：US11784344

申请日：2007-04-06

申请人： Yoshiyuki Kume ,  Toru Watanuki ,  Daisuke Morisawa

发明人： Yoshiyuki Kume ,  Toru Watanuki ,  Daisuke Morisawa

IPC分类号： F04B1/26

CPC分类号： F04B27/1804 ,  F04B2027/1827 ,  F04B2027/1854 ,  F04B2027/1859

摘要： The control valve comprises a valve rod having a valve body part; a valve main body provided with a valve chamber having a valve port to/from which the valve body part contacts/separates, a discharge pressure refrigerant inlet for introducing the refrigerant from a compressor, and a refrigerant outlet communicating with a crank chamber of the compressor; an electromagnetic actuator having a plunger for moving the valve rod in the valve closing direction; a pressure sensing chamber in which suction pressure is introduced from the compressor; and a pressure sensitive response member for pressing the valve rod in the valve opening direction corresponding to the pressure in the pressure sensing chamber, wherein the valve rod is fitted to the plunger having a predetermined diametrical directional clearance so as not to be influenced from the lateral deviation and inclination of the plunger.

摘要翻译： 控制阀包括具有阀体部分的阀杆; 阀主体，其具有阀室，阀体具有阀体部分接触/分离的阀口，用于从压缩机引入制冷剂的排出压力制冷剂入口和与压缩机的曲轴室连通的制冷剂出口 ; 电磁致动器，具有用于沿阀关闭方向移动阀杆的柱塞; 压力检测室，其中从压缩机引入吸入压力; 以及压力敏感响应构件，用于按照与压力感测室中的压力相对应的阀打开方向按压阀杆，其中，阀杆装配到具有预定直径方向间隙的柱塞上，以便不受横向 柱塞的偏差和倾斜度。

公开(公告)号：US07690898B2

公开(公告)日：2010-04-06

申请号：US11784344

申请日：2007-04-06

申请人： Yoskiyuki Kume ,  Toru Watanuki ,  Daisuke Morisawa

发明人： Yoskiyuki Kume ,  Toru Watanuki ,  Daisuke Morisawa

IPC分类号： F04B1/26

CPC分类号： F04B27/1804 ,  F04B2027/1827 ,  F04B2027/1854 ,  F04B2027/1859

摘要： The control valve comprises a valve rod having a valve body part; a valve main body provided with a valve chamber having a valve port to/from which the valve body part contacts/separates, a discharge pressure refrigerant inlet for introducing the refrigerant from a compressor, and a refrigerant outlet communicating with a crank chamber of the compressor; an electromagnetic actuator having a plunger for moving the valve rod in the valve closing direction; a pressure sensing chamber in which suction pressure is introduced from the compressor; and a pressure sensitive response member for pressing the valve rod in the valve opening direction corresponding to the pressure in the pressure sensing chamber, wherein the valve rod is fitted to the plunger having a predetermined diametrical directional clearance so as not to be influenced from the lateral deviation and inclination of the plunger.

摘要翻译： 控制阀包括具有阀体部分的阀杆; 阀主体，其具有阀室，阀体具有阀体部分接触/分离的阀口，用于从压缩机引入制冷剂的排出压力制冷剂入口和与压缩机的曲轴室连通的制冷剂出口 ; 电磁致动器，具有用于沿阀关闭方向移动阀杆的柱塞; 压力检测室，其中从压缩机引入吸入压力; 以及压力敏感响应构件，用于按照与压力感测室中的压力相对应的阀打开方向按压阀杆，其中，阀杆装配到具有预定直径方向间隙的柱塞上，以便不受横向 柱塞的偏差和倾斜度。

公开(公告)号：US20090032750A1

公开(公告)日：2009-02-05

申请号：US12219813

申请日：2008-07-29

申请人： Daisuke Morisawa ,  Yoshiyuki Kume

发明人： Daisuke Morisawa ,  Yoshiyuki Kume

IPC分类号： F16K31/06

CPC分类号： F04B27/1804 ,  F04B2027/1827 ,  F04B2027/1854 ,  F04B2027/1859

摘要： A control valve for a variable capacity compressor, which makes it possible to increase the full open flow rate so as to make it applicable to even a compressor of large capacity without inviting any substantial increase in size and weight, and to minimize the quantity of leakage of cooling medium from the valve chamber into the suction pressure cooling medium-introducing chamber to thereby make it possible to enhance the accuracy of control and to suppress the occurrence of operational failure including the clogging due to foreign substances, the locking of valve rod, etc. The valve rod is provided, at a lower portion thereof, with a lower valve body portion (16A) and an upper valve body portion (16B), and the valve chamber is provided with a lower valve seat (22a) and an upper valve seat (22b) in such a manner that the lower valve body portion (16A) and the upper valve body portion (16B) are concurrently enabled to detachably contact with their respective valve seats, and a lower cooling medium outlet chamber (26A) and an upper cooling medium outlet chamber (26B) are disposed on the downstream sides of the lower valve seat (22a) and of the upper valve seat (22b), respectively.

摘要翻译： 一种用于可变容量压缩机的控制阀，其可以提高全开流量，从而使其甚至可以适用于大容量的压缩机，而不会大幅度地增加尺寸和重量，并且使泄漏量最小化 冷却介质从阀室进入吸入压力冷却介质引入室，从而可以提高控制精度，并且抑制包括异物堵塞，阀杆锁定等的操作故障的发生 阀杆在其下部设有下阀体部分（16A）和上阀体部分（16B），阀室设有下阀座（22a）和上阀 座（22b），使得下阀体部分（16A）和上阀体部分（16B）同时能够与其各自的阀座可拆卸地接触，并且下部阀 （26A）和上部冷却介质出口室（26B）分别设置在下部阀座（22a）和上部阀座（22b）的下游侧。

公开(公告)号：US20050211939A1

公开(公告)日：2005-09-29

申请号：US11086883

申请日：2005-03-22

申请人： Daisuke Morisawa ,  Toshiki Okii

发明人： Daisuke Morisawa ,  Toshiki Okii

IPC分类号： F04B49/00 ,  F04B27/14 ,  F04B27/18 ,  F16K31/02 ,  F16K31/06

CPC分类号： F16K31/0606 ,  F04B27/1804 ,  F04B2027/1813 ,  F04B2027/1827 ,  F04B2027/1831 ,  F04B2027/1854 ,  F04B2027/1859 ,  F16K31/0634 ,  F16K31/0675

摘要： The present invention provides a control valve which is capable of providing the quantification of the maximum flow rate on the occasion of opening the extraction valve and a predetermined small flow rate on the occasion of closing the extraction valve. This control valve comprises a main valve body provided with a discharge duct-communicating port, with a crank chamber-communicating port, with a crank chamber-communicating port, with an intake duct-communicating port, with a feed valve hole interposed between the discharge duct-communicating port and the crank chamber-communicating port, and with an extraction valve hole interposed between the inflow side crank chamber-communicating port and the intake duct-communicating port; a feed valve body which is capable of opening and closing the feed valve hole to a full or certain extent; an extraction valve body which is capable of opening and closing the extraction valve hole; and a solenoid magnetization portion which is capable of actuating the opening and closing of the feed valve body and of the extraction valve body. In a first status, a minimum flow rate is secured at the extraction valve body with the feed valve body being fully opened. In a second status, the feed valve body is fully closed and the extraction valve body is fully opened. In an intermediate status between the first status and the second status, the feed valve body is moved from a nearly closed state to a fully closed state depending on the value of control current. At the extraction valve body, a predetermined flow rate is effectuated irrespective of the opening degree thereof.

摘要翻译： 本发明提供了一种控制阀，其能够在关闭抽取阀的情况下提供打开抽吸阀时的最大流量的量化和预定的小流量。 该控制阀包括主阀体，其具有排气管连通口，具有曲柄室连通口，曲柄室连通口和进气管连通口，进气阀孔插在排气口 管道连通口和曲柄室连通口，以及插入在流入侧曲柄室连通口和进气管连通口之间的抽吸阀孔; 供给阀体，其能够充分或一定程度地打开和关闭供给阀孔; 能够打开和关闭抽取阀孔的抽取阀体; 以及能够致动进给阀体和抽气阀体的打开和关闭的螺线管磁化部分。 在第一状态下，在进料阀体完全打开的情况下，在抽出阀体处确保最小流量。 在第二状态下，供给阀体完全关闭，抽气阀体完全打开。 在第一状态和第二状态之间的中间状态下，根据控制电流的值，供给阀体从近闭状态移动到完全关闭状态。 在抽出阀体上，无论其开度如何，都能实现预定的流量。

公开(公告)号：US07128304B2

公开(公告)日：2006-10-31

申请号：US11086883

申请日：2005-03-22

申请人： Daisuke Morisawa ,  Toshikio Okii

发明人： Daisuke Morisawa ,  Toshikio Okii

IPC分类号： F16K31/02

CPC分类号： F16K31/0606 ,  F04B27/1804 ,  F04B2027/1813 ,  F04B2027/1827 ,  F04B2027/1831 ,  F04B2027/1854 ,  F04B2027/1859 ,  F16K31/0634 ,  F16K31/0675

摘要： A control valve for a compressor with a discharge port, a chamber port, a side chamber port, an intake port, a feed hole between the discharge port and the chamber port, an extraction hole between the side chamber port and the intake port; a feed valve controls the feed hole; an extraction valve controls the extraction hole; and a solenoid is capable of actuating the feed and extraction valves. In a first status, a minimum flow rate is secured at the extraction valve with the feed valve being fully opened. In a second status, the feed valve is fully closed and the extraction valve is fully opened. In an intermediate status, the feed valve is moved from a nearly closed state to a fully closed state depending on the value of control current. At the extraction valve, a predetermined flow rate is effectuated irrespective of its opening degree.

摘要翻译： 一种用于压缩机的控制阀，其具有排出口，腔室口，侧室口，进气口，排出口与腔室口之间的进料口，侧室口与进气口之间的抽取孔; 进料阀控制进料孔; 提取阀控制提取孔; 并且螺线管能够致动进给和提取阀。 在第一状态下，在进料阀完全打开的情况下，在抽出阀处确保最小流量。 在第二个状态下，进给阀完全关闭，抽气阀完全打开。 在中间状态下，进给阀根据控制电流的值从几乎闭合状态移动到完全关闭状态。 在抽取阀处，无论其开度如何，都能实现预定流量。

公开(公告)号：US07987012B2

公开(公告)日：2011-07-26

申请号：US12187956

申请日：2008-08-07

申请人： Daisuke Morisawa ,  Masayuki Hirose

发明人： Daisuke Morisawa ,  Masayuki Hirose

IPC分类号： G06F19/00 ,  G06F7/00 ,  H01L21/66 ,  H01L21/00

CPC分类号： C23C16/52 ,  G05B19/41835 ,  G05B2219/45031 ,  H01L21/67248 ,  Y02P90/12 ,  Y02P90/20

摘要： A control device is provided that flexibly controls a substrate processing apparatus for each product process. Four process recipes PM 1 to PM 4 are stored in a first storage unit 255a. Corresponding to each of the process recipes, a high temperature, a medium temperature, and a low temperature pre-recipe are stored in a second storage unit 255b. A process recipe determination unit 260 determines, in response to a recipe specified by the operator, a process recipe corresponding to the specified recipe from the first storage unit 255a. A stage temperature acquisition unit 265 acquires, from the determined process recipe, a stage temperature. A pre-recipe selection unit 270 selects, from the three types of pre-recipes stored in the second storage unit 255b, one pre-recipe corresponding to the stage temperature. Before the wafer W is deposition-processed, therefore, the PM may be well-conditioned according to the selected pre-recipe.

摘要翻译： 提供了一种控制装置，其灵活地控制每个产品处理的基板处理装置。 四个处理配方PM 1至PM 4存储在第一存储单元255a中。 对应于每个工艺配方，高温，中等温度和低温预处理存储在第二存储单元255b中。 处理配方确定单元260响应于操作者指定的食谱，确定来自第一存储单元255a的与指定食谱对应的处理食谱。 台阶温度获取单元265从确定的处理配方中获取阶段温度。 预处理选择单元270从存储在第二存储单元255b中的三种类型的预配制中选择与舞台温度相对应的一个预处理。 因此，在晶片W进行沉积处理之前，PM可以根据所选择的预配方式进行调节。

公开(公告)号：US07266418B2

公开(公告)日：2007-09-04

申请号：US11283825

申请日：2005-11-22

申请人： Youichi Nakayama ,  Daisuke Morisawa

发明人： Youichi Nakayama ,  Daisuke Morisawa

IPC分类号： G06F19/00

CPC分类号： H01L21/67201 ,  H01L21/67207 ,  H01L21/67276

摘要： A substrate processing apparatus, which includes a plurality of process chambers for processing a substrate and a transfer part for carrying in and carrying out the substrate to and from the plurality of process chambers, includes a transfer history recording part, a process history recording part, and an alarm history recording part. The transfer history recording part relates history information concerning a transfer of the substrate by the transfer part to each substrate, and records the history information as first history information. The process history recording part relates history information concerning a process state of the substrate in each of the plurality of process chambers to each substrate subject to be processed, and records the history information as second history information. The alarm history recording part relates history information concerning an alarm occurred in at least one of the transfer part and the process chambers to each substrate, and records the history information as third history information.

摘要翻译： 一种基板处理装置，包括用于处理基板的多个处理室和用于将多个处理室的基板搬入和移出基板的转印部件，包括转印历史记录部件，处理历史记录部件， 和报警历史记录部分。 传送历史记录部分将关于通过传送部分传送衬底的历史信息与每个衬底相关联，并将历史信息记录为第一历史信息。 处理历史记录部分将关于多个处理室中的每个处理室中的基板的处理状态的历史信息与被处理的每个基板相关联，并将历史信息记录为第二历史信息。 报警历史记录部分将关于传送部分和处理室中的至少一个中发生的报警的历史信息与每个基板相关联，并将历史信息记录为第三历史信息。

公开(公告)号：US20060224265A1

公开(公告)日：2006-10-05

申请号：US11283825

申请日：2005-11-22

申请人： Youichi Nakayama ,  Daisuke Morisawa

发明人： Youichi Nakayama ,  Daisuke Morisawa

IPC分类号： G06F19/00

CPC分类号： H01L21/67201 ,  H01L21/67207 ,  H01L21/67276

摘要： A substrate processing apparatus, which includes a plurality of process chambers for processing a substrate and a transfer part for carrying in and carrying out the substrate to and from the plurality of process chambers, includes a transfer history recording part, a process history recording part, and an alarm history recording part. The transfer history recording part relates history information concerning a transfer of the substrate by the transfer part to each substrate, and records the history information as first history information. The process history recording part relates history information concerning a process state of the substrate in each of the plurality of process chambers to each substrate subject to be processed, and records the history information as second history information. The alarm history recording part relates history information concerning an alarm occurred in at least one of the transfer part and the process chambers to each substrate, and records the history information as third history information.

摘要翻译： 一种基板处理装置，包括用于处理基板的多个处理室和用于将多个处理室的基板搬入和移出基板的转印部件，包括转印历史记录部件，处理历史记录部件， 和报警历史记录部分。 传送历史记录部分将关于通过传送部分传送衬底的历史信息与每个衬底相关联，并将历史信息记录为第一历史信息。 处理历史记录部分将关于多个处理室中的每个处理室中的基板的处理状态的历史信息与被处理的每个基板相关联，并将历史信息记录为第二历史信息。 报警历史记录部分将关于传送部分和处理室中的至少一个中发生的报警的历史信息与每个基板相关联，并将历史信息记录为第三历史信息。

公开(公告)号：US08255072B2

公开(公告)日：2012-08-28

申请号：US12364356

申请日：2009-02-02

申请人： Daisuke Morisawa

发明人： Daisuke Morisawa

IPC分类号： G06F19/00 ,  B05C11/00

CPC分类号： C23C16/54 ,  C23C16/4404 ,  C23C16/4405 ,  C23C16/52 ,  G05B19/41865 ,  G05B2219/45031 ,  H01L21/67276 ,  Y02P90/20

摘要： A control unit of a substrate processing apparatus controls a process to be performed in a chamber. The process includes a step of performing a preceding first process; a step of performing a subsequent second process after performing the first process; a step of determining whether to perform an inter-process conditioning, for arranging the environment in the chamber, during a period between the end of the first process and the start of the second process, based on information on the first process and information on the second process; and a step of performing the inter-process conditioning prior to the second process when it is determined in the determining step that the inter-process conditioning is to be performed.

摘要翻译： 基板处理装置的控制单元控制在室中进行的处理。 该过程包括执行前面的第一过程的步骤; 执行第一处理之后执行随后的第二处理的步骤; 基于关于第一处理的信息和关于第一处理的信息，在第一处理结束和第二处理开始之间的期间，确定是否执行用于在室中布置环境的进程间条件的步骤 第二个过程; 以及当在所述确定步骤中确定要执行所述处理间调节时，在所述第二处理之前执行所述处理间调理的步骤。