公开(公告)号：US20120279838A1

公开(公告)日：2012-11-08

申请号：US13160742

申请日：2011-06-15

申请人： You-Liang LAI ,  Ying-Zong JUANG ,  Hann-Huei TSAI ,  Sheng-Hsiang TSENG ,  Chin-Fong CHIU

发明人： You-Liang LAI ,  Ying-Zong JUANG ,  Hann-Huei TSAI ,  Sheng-Hsiang TSENG ,  Chin-Fong CHIU

IPC分类号： H01H59/00

CPC分类号： H01H1/0036 ,  H01H1/20 ,  H01H2001/0052 ,  H01H2001/0057 ,  H01H2001/0078 ,  H01H2061/006 ,  H01L27/0617

摘要： A CMOS-MEMS switch structure is disclosed. The CMOS-MEMS switch structure includes a first substrate, a second substrate, a first cantilever beam, and a second cantilever beam. The first and second substrates are positioned opposite each other. The first cantilever beam is provided on the first substrate, extends from the first substrate toward the second substrate, and bends downward. Likewise, the second cantilever beam is provided on the second substrate, extends from the second substrate toward the first substrate, and bends downward. The first and second substrates are movable toward each other to connect a first top surface of the first cantilever beam and a second top surface of the second cantilever beam, and away from each other so that the first top surface of the first cantilever beam and the second top surface of the second cantilever beam are disconnected, thereby closing or opening the CMOS-MEMS switch structure.

摘要翻译： 公开了一种CMOS-MEMS开关结构。 CMOS-MEMS开关结构包括第一基板，第二基板，第一悬臂梁和第二悬臂梁。 第一和第二基板彼此相对定位。 第一悬臂梁设置在第一基板上，从第一基板朝向第二基板延伸，并向下弯曲。 类似地，第二悬臂梁设置在第二基板上，从第二基板朝向第一基板延伸并向下弯曲。 第一和第二基板可彼此移动以将第一悬臂梁的第一顶表面和第二悬臂梁的第二顶表面彼此远离，以使第一悬臂梁的第一顶表面和 第二悬臂梁的第二顶表面被断开，从而关闭或打开CMOS-MEMS开关结构。