公开(公告)号：US06774692B2

公开(公告)日：2004-08-10

申请号：US10124023

申请日：2002-04-17

申请人： Young-hwan Kim ,  Chung Choo Chung ,  Haiwon Lee

发明人： Young-hwan Kim ,  Chung Choo Chung ,  Haiwon Lee

IPC分类号： H03K3017

CPC分类号： G01Q60/34 ,  H03K5/02 ,  H03K5/05 ,  Y10S977/85

摘要： An apparatus and method for providing an input signal having a desired pulse width and amplitude to atomic force miscoscopes (AFMs) for use in nano-lithography are provided. An input signal providing apparatus for a contact type AFM includes: a pulse width adjusting unit which adjusts the width of a positive pulse of an input square wave to a predetermined pulse width; and an amplitude adjusting unit which adjusts the amplitude of the positive pulse of the square wave to a predetermined voltage. An input signal providing method for the contact type AFM uses the apparatus having this structure. An input signal providing apparatus for a non-contact type AFM further includes a square pulse generating unit which generates a square pulse having a predetermined phase in synchronization with an input resonance signal, and an input signal providing method for the non-contact type AFM further involves generating the square pulse having a predetermined phase in synchronization with the input resonance signal. As a result, more precise nano-lithography can be achieved using an AFM to which the apparatus and method described above are applied.

摘要翻译： 提供了一种用于提供具有期望的脉冲宽度和幅度的输入信号的装置和方法，用于在纳米光刻中使用的原子力测量仪（AFM）。 用于接触型AFM的输入信号提供装置包括：脉冲宽度调整单元，其将输入方波的正脉冲的宽度调整到预定的脉冲宽度; 以及幅度调整单元，其将所述方波的正脉冲的幅度调整到预定电压。 用于接触型AFM的输入信号提供方法使用具有这种结构的装置。 用于非接触型AFM的输入信号提供装置还包括平方脉冲产生单元，其产生与输入谐振信号同步的具有预定相位的方波脉冲，以及用于非接触型AFM的输入信号提供方法 包括与输入的谐振信号同步地产生具有预定相位的平方脉冲。 因此，可以使用应用上述装置和方法的AFM来实现更精确的纳米光刻。

公开(公告)号：US07891016B2

公开(公告)日：2011-02-15

申请号：US12225404

申请日：2008-05-29

申请人： Haiwon Lee ,  Chung Choo Chung ,  Cheolsu Han

发明人： Haiwon Lee ,  Chung Choo Chung ,  Cheolsu Han

IPC分类号： G01Q10/06 ,  G01Q20/04 ,  G01B11/08 ,  G01B9/02

CPC分类号： G01Q10/065 ,  G01Q10/06 ,  G01Q20/02

摘要： Disclosed herein are an automatic landing method for a scanning probe microscope and an automatic landing apparatus using the same. The method comprises irradiating light to a cantilever using a light source; collecting interference fringes generated by the light being diffracted from the edge of the cantilever and then being incident to a surface of the sample; driving the tip in the sample direction until the pattern of the interference fringes reaches a predetermined pattern region (first driving); and driving the tip in the sample direction after the interference fringe pattern reached the predetermined pattern region (second driving). The method in accordance with the present invention is very effective particularly for samples having a large surface area, because it enables automatic landing of a tip according to recognition and selection of an optimal time point for individual landing steps, irrespective of adverse changes in landing conditions, such as surface irregularities of samples. Further, the present invention enables a very inexpensive and effective application of a scanning probe microscope (SPM), because it is possible to achieve rapid and reliable driving of a tip to within an approximate distance of a sample.

摘要翻译： 这里公开了扫描探针显微镜和使用该自动着陆装置的自动着陆装置的自动着陆方法。 该方法包括使用光源将光照射到悬臂; 收集由悬臂的边缘衍射的光然后入射到样品的表面产生的干涉条纹; 在样品方向上驱动尖端，直到干涉条纹的图案到达预定图案区域（第一驱动）; 并且在干涉条纹图案到达预定图案区域（第二驱动）之后沿样品方向驱动尖端。 根据本发明的方法对于具有大的表面积的样品是非常有效的，因为它可以根据识别和选择各个着陆步骤的最佳时间点而自动着地，而不管着陆条件的不利变化如何 ，如样品的表面不规则。 此外，本发明能够实现扫描探针显微镜（SPM）的非常便宜和有效的应用，因为可以实现将尖端快速可靠地驱动到样品的近似距离内。

公开(公告)号：US20090293160A1

公开(公告)日：2009-11-26

申请号：US12225404

申请日：2008-05-29

申请人： Haiwon Lee ,  Chung Choo Chung ,  Cheolsu Han

发明人： Haiwon Lee ,  Chung Choo Chung ,  Cheolsu Han

IPC分类号： G01N13/10

CPC分类号： G01Q10/065 ,  G01Q10/06 ,  G01Q20/02

摘要： Disclosed herein are an automatic landing method for a scanning probe microscope and an automatic landing apparatus using the same. The method comprises irradiating light to a cantilever using a light source; collecting interference fringes generated by the light being diffracted from the edge of the cantilever and then being incident to a surface of the sample; driving the tip in the sample direction until the pattern of the interference fringes reaches a predetermined pattern region (first driving); and driving the tip in the sample direction after the interference fringe pattern reached the predetermined pattern region (second driving). The method in accordance with the present invention is very effective particularly for samples having a large surface area, because it enables automatic landing of a tip according to recognition and selection of an optimal time point for individual landing steps, irrespective of adverse changes in landing conditions, such as surface irregularities of samples. Further, the present invention enables a very inexpensive and effective application of a scanning probe microscope (SPM), because it is possible to achieve rapid and reliable driving of a tip to within an approximate distance of a sample.

摘要翻译： 这里公开了扫描探针显微镜和使用该自动着陆装置的自动着陆装置的自动着陆方法。 该方法包括使用光源将光照射到悬臂; 收集由悬臂的边缘衍射的光然后入射到样品的表面产生的干涉条纹; 在样品方向上驱动尖端，直到干涉条纹的图案到达预定图案区域（第一驱动）; 并且在干涉条纹图案到达预定图案区域（第二驱动）之后沿样品方向驱动尖端。 根据本发明的方法对于具有大的表面积的样品是非常有效的，因为它可以根据识别和选择各个着陆步骤的最佳时间点而自动着地，而不管着陆条件的不利变化如何 ，如样品的表面不规则。 此外，本发明能够实现扫描探针显微镜（SPM）的非常便宜和有效的应用，因为可以实现将尖端快速可靠地驱动到样品的近似距离内。

公开(公告)号：US08059518B2

公开(公告)日：2011-11-15

申请号：US12042148

申请日：2008-03-04

申请人： Choong Woo Lee ,  Young Sik Kim ,  Jun Moon ,  Ji Young Jeong ,  Chung Choo Chung

发明人： Choong Woo Lee ,  Young Sik Kim ,  Jun Moon ,  Ji Young Jeong ,  Chung Choo Chung

IPC分类号： G11B5/596

CPC分类号： G11B9/1481 ,  B82Y10/00 ,  Y10S977/947

摘要： Disclosed are a data storage apparatus, an assembling method thereof and an apparatus for generating a tracking position error signal capable of storing data using recording media formed with patterns for generating tracking position error signals to obviate errors that may be generated amidst storage of the data, wherein the patterns are formed for generating tracking position error signals on recording media before the recording media and storage are assembled to reduce the manufacturing cost and manufacturing process time.

摘要翻译： 公开了一种数据存储装置，其组装方法和用于产生跟踪位置误差信号的装置，该跟踪位置误差信号能够使用形成有用于产生跟踪位置误差信号的模式的记录介质来存储数据，以避免在数据存储期间可能产生的错误， 其中所述图案被形成用于在记录介质和存储器组装之前在记录介质上产生跟踪位置误差信号，以降低制造成本和制造处理时间。

公开(公告)号：US20080218897A1

公开(公告)日：2008-09-11

申请号：US12042148

申请日：2008-03-04

申请人： Choong Woo Lee ,  Young Sik Kim ,  Jun Moon ,  Ji Young Jeong ,  Chung Choo Chung

发明人： Choong Woo Lee ,  Young Sik Kim ,  Jun Moon ,  Ji Young Jeong ,  Chung Choo Chung

IPC分类号： G11B5/596

CPC分类号： G11B9/1481 ,  B82Y10/00 ,  Y10S977/947

摘要： Disclosed are a data storage apparatus, an assembling method thereof and an apparatus for generating a tracking position error signal capable of storing data using recording media formed with patterns for generating tracking position error signals to obviate errors that may be generated amidst storage of the data, wherein the patterns are formed for generating tracking position error signals on recording media before the recording media and storage are assembled to reduce the manufacturing cost and manufacturing process time.

摘要翻译： 公开了一种数据存储装置，其组装方法和用于产生跟踪位置误差信号的装置，该跟踪位置误差信号能够使用形成有用于产生跟踪位置误差信号的模式的记录介质来存储数据，以避免在数据存储期间可能产生的错误， 其中所述图案被形成用于在记录介质和存储器组装之前在记录介质上产生跟踪位置误差信号，以降低制造成本和制造处理时间。