公开(公告)号：US4700071A

公开(公告)日：1987-10-13

申请号：US818663

申请日：1986-01-14

申请人： Nobufumi Mori ,  Yuichi Hosoi ,  Kenji Takahashi ,  Junji Miyahara

发明人： Nobufumi Mori ,  Yuichi Hosoi ,  Kenji Takahashi ,  Junji Miyahara

IPC分类号： H01J37/26 ,  G01Q30/02 ,  G01Q30/04 ,  G01T1/29 ,  H01J37/22 ,  H04N1/407 ,  G01N23/04 ,  H01J37/24

CPC分类号： H01J37/224 ,  G01T1/2014 ,  H04N1/4076

摘要： A two-dimensional image sensor such as a stimulable phosphor sheet is exposed under vacuum to an electron beam that has passed through a specimen to cause the two-dimensional image sensor to store the energy of the electron beam, then stimulating energy is applied to the two-dimensional image sensor for discharging light therefrom which represents the stored energy of the electron beam, and the light discharged from the two-dimensional image sensor is photoelectrically detected to produce an image signal. A reference image signal is also produced in a similar manner by exposing the two-dimensional image sensor to an electron beam that has not passed through the specimen. One of the first-mentioned image signal and the reference image signal is subtracted from the other per pixel to generate a difference signal, from which an electron microscope image of the specimen is reproduced.

摘要翻译： 诸如可刺激的荧光体片的二维图像传感器在真空下暴露于已经通过样本的电子束，以使二维图像传感器存储电子束的能量，然后将刺激能量施加到 二维图像传感器用于从其中排出表示电子束的存储能量的光，并且从二维图像传感器放出的光被光电检测以产生图像信号。 通过将二维图像传感器暴露于未通过样本的电子束，也以类似的方式产生参考图像信号。 从每个像素的另一个中减去首先提到的图像信号和参考图像信号之一，以产生差分信号，再现样本的电子显微镜图像。

公开(公告)号：US4694171A

公开(公告)日：1987-09-15

申请号：US801819

申请日：1985-11-26

申请人： Yuichi Hosoi ,  Nobufumi Mori ,  Kenji Takahashi ,  Junji Miyahara

发明人： Yuichi Hosoi ,  Nobufumi Mori ,  Kenji Takahashi ,  Junji Miyahara

IPC分类号： H01J37/26 ,  H01J37/22 ,  H01J37/21

CPC分类号： H01J37/224

摘要： A two-dimensional image sensor is exposed under vacuum to an electron beam having passed through a specimen, and instantaneous light emitted from the image sensor upon exposure to the electron beam is detected with an image intensifier to reproduce an image observed to attain a desired focused condition and/or a desired field. After the image has been focused by the operator while observing the image, the image sensor is exposed under vacuum to an electron beam having been transmitted through the specimen to store the energy of the electron beam representative of the image of the specimen on the image sensor. Then, stimulating energy is applied to the image sensor for discharging light therefrom which represents the stored energy of the electron beam. The light discharged from the image sensor is photoelectrically detected to reproduce the transmitted electron-beam image of the specimen as a final output image thereof under the desired focused condition and/or with said desired field.

摘要翻译： 将二维图像传感器在真空下暴露于已经通过样本的电子束，并且用图像增强器检测在暴露于电子束时从图像传感器发射的瞬时光，以再现观察到的图像以获得期望的聚焦 条件和/或期望的领域。 在观察图像之后，操作者对图像进行聚焦之后，图像传感器在真空下暴露于已经透过样本的电子束，以将代表样本图像的电子束的能量存储在图像传感器上 。 然后，刺激能量被施加到图像传感器，用于从其中排出代表电子束存储的能量的光。 从图像传感器放出的光被光电检测，以在期望的聚焦条件和/或所需的场下再现作为其最终输出图像的样本的透射电子束图像。

公开(公告)号：US4651220A

公开(公告)日：1987-03-17

申请号：US786080

申请日：1985-10-10

申请人： Yuichi Hosoi ,  Junji Miyahara ,  Nobufumi Mori ,  Kenji Takahashi

发明人： Yuichi Hosoi ,  Junji Miyahara ,  Nobufumi Mori ,  Kenji Takahashi

IPC分类号： G01Q30/02 ,  G01Q30/04 ,  G01T1/29 ,  H01J37/22 ,  H04N1/10

CPC分类号： H01J37/224 ,  G01T1/2012

摘要： A stimulable phosphor sheet is exposed to an electron beam having passed through a specimen in an electron microscope to record a first magnified image of the specimen on the sheet. A stimulating energy is applied to the sheet for discharging light therefrom which represents the first magnified image. The light discharged from the image sensor is photoelectrically detected to reproduce the first magnified image which can be observed to attain a desired focused condition and/or a desired field on the electron microscope. Then, the same or another stimulable phosphor sheet is exposed to the electron beam to record a second magnified image of the specimen on the sheet, and the second magnified image is reproduced as a final image under the desired focused condition and/or with the desired field.

摘要翻译： 将可刺激的荧光体片暴露于通过电子显微镜中的样品的电子束，以将样品的第一放大图像记录在片材上。 刺激能量被施加到片材上，用于从其中排出代表第一放大图像的光。 从图像传感器排出的光被光电检测，以再现可以观察到的第一放大图像，以获得期望的聚焦条件和/或电子显微镜上所需的场。 然后，将相同或另一种可刺激的荧光粉片暴露于电子束，以将样品的第二放大图像记录在片材上，并且将第二放大图像作为最终图像在期望的聚焦条件和/或期望的条件下再现 领域。

公开(公告)号：US4695725A

公开(公告)日：1987-09-22

申请号：US806466

申请日：1985-12-09

申请人： Nobufumi Mori ,  Yuichi Hosoi ,  Kenji Takahashi ,  Junji Miyahara

发明人： Nobufumi Mori ,  Yuichi Hosoi ,  Kenji Takahashi ,  Junji Miyahara

IPC分类号： G01Q30/02 ,  G01Q30/16 ,  H01J37/153 ,  H01J37/22 ,  H01J37/26 ,  H01J37/21

CPC分类号： H01J37/224 ,  H01J37/153 ,  H01J37/265

摘要： A two-dimensional image sensor is exposed under vacuum to an electron beam having passed through a specimen in an electron microscope to enable the image sensor to store the energy of the electron beam. Then, stimulating energy is applied to the image sensor to discharge the stored energy as light. The light discharged from the image sensor is photoelectrically detected to produce an image signal. A defocus value of the image is detected on the basis of the image signal. The image signal is also subject electrically to the Fourier transform to produce a converted image signal indicative of a ring pattern. The degree of one ring, the length of minor and major axes of the ring, and the angle of inclination of the major axis are computed from the converted image signal for computing currents to be fed to a stigmeter of the electron microscope to eliminate astigmatism.

摘要翻译： 将二维图像传感器在真空下暴露于通过电子显微镜中的样本的电子束，以使图像传感器能够存储电子束的能量。 然后，将刺激能量施加到图像传感器以将存储的能量作为光放电。 从图像传感器排出的光被光电检测以产生图像信号。 基于图像信号检测图像的散焦值。 图像信号也经电子对付傅立叶变换以产生表示环形图案的转换图像信号。 从转换的图像信号计算一个环的程度，环的小轴和长轴的长度以及长轴的倾斜角，以计算要供给到电子显微镜的测针的电流以消除散光。

公开(公告)号：US4922098A

公开(公告)日：1990-05-01

申请号：US259427

申请日：1988-10-11

申请人： Nobufumi Mori ,  Yuichi Hosoi ,  Junji Miyahara

发明人： Nobufumi Mori ,  Yuichi Hosoi ,  Junji Miyahara

IPC分类号： H01J37/22 ,  H01J37/26

CPC分类号： H01J37/224 ,  H01J37/26

摘要： An electron microscope has a two-dimensional sensor located at the image-formation plane. The two-dimensional sensor stores electron beam energy and emits light upon exposure to light or heat. The filament is located at a position displaced from the principal optical axis of the electron beam so that the image of the filament may not be recorded on the two-dimensional sensor. The two-dimensional sensor is, for example, made of stimulable phosphor.

摘要翻译： 电子显微镜具有位于图像形成平面处的二维传感器。 二维传感器存储电子束能量并在暴露于光或热时发光。 灯丝位于从电子束的主光轴偏移的位置，使得灯丝的图像可能不被记录在二维传感器上。 二维传感器例如由可激发的荧光体制成。

公开(公告)号：US4851676A

公开(公告)日：1989-07-25

申请号：US293573

申请日：1989-01-03

申请人： Nobufumi Mori ,  Yuichi Hosoi ,  Kenji Takahashi

发明人： Nobufumi Mori ,  Yuichi Hosoi ,  Kenji Takahashi

IPC分类号： G01Q30/04 ,  H01J37/22

CPC分类号： H01J37/224

摘要： A method for recording and reproducing an electron beam image information comprising:recording an electron beam image transmitted through reflected from the sample as an electron beam energy latent image on a stimulable phosphor sheet comprising a stimulable phosphor layer having a thickness in the range of 10 to 150 .mu.m or an exposed stimulable phosphor layer with no protective layer;irradiating said stimulable phosphor sheet with an electromagnetic wave to release at least a portion of electron beam energy stored in said stimulable phosphor sheet as stimulated emission;detecting the stimulated emission; andphotoelectrically processing the detected stimulated emission to obtain an electron beam image information of the sample.

摘要翻译： 一种用于记录和再现电子束图像信息的方法，包括：将从样品反射的透射的电子束图像作为电子束能量潜像记录在可刺激的荧光体片上，该可刺激的磷光体片包括厚度在10至 150μm或不具有保护层的曝光可刺激的荧光体层; 用电磁波照射所述可刺激的荧光体片材以释放存储在所述可刺激的荧光体片材中的电子束能量的至少一部分作为受激发射; 检测受激发射; 并对所检测的受激发射进行光电处理，以获得样品的电子束图像信息。

公开(公告)号：US4942300A

公开(公告)日：1990-07-17

申请号：US799261

申请日：1985-11-18

申请人： Nobufumi Mori ,  Yuichi Hosoi ,  Kenji Takahashi

发明人： Nobufumi Mori ,  Yuichi Hosoi ,  Kenji Takahashi

IPC分类号： G01Q30/04 ,  H01J37/22

CPC分类号： H01J37/224

摘要： A method for recording and reproducing an electron beam image information comprising:recording an electron beam image transmitted through a sample or reflected from the sample as an electron beam energy latent image on a stimulable phosphor sheet comprising, according to the present invention, a stimulable phosphor layer having a thickness in the range of 10 to 150 .mu.m and/or an exposed stimulable phosphor layer with no protective layer, or a protective layer, the thickness of which is preferably less than the thickness of a stimulable phosphor layer of a generally employed stimulable phosphor sheet;irradiating said stimulable phosphor sheet with an electromagnetic wave to release at least a portion of the electron beam energy stored in said stimulable phosphor sheet as stimulated emission;detecting the stimulated emission;andphotoelectrically processing the detected stimulated emission to obtain an electron beam image information of the sample.

公开(公告)号：US4866274A

公开(公告)日：1989-09-12

申请号：US267736

申请日：1988-11-03

申请人： Yuichi Hosoi ,  Kenji Takahashi ,  Nobufumi Mori ,  Masaru Noguchi

发明人： Yuichi Hosoi ,  Kenji Takahashi ,  Nobufumi Mori ,  Masaru Noguchi

IPC分类号： H01J37/22

CPC分类号： H01J37/224

摘要： An apparatus for recording and reproducing an image of a specimen produced by an electron microscope includes a two-dimensional image sensor for storing the energy of an electron beam having passed through the specimen, a stimulating system for scanning the two-dimensional image sensor with stimulating energy to discharge the stored electron beam energy as light from the two-dimensional image sensor, a photoelectric transducer for photoelectrically detecting the light discharged from the two-dimensional image sensor, and an erasing system for applying erasing energy to the two-dimensional image sensor to discharge energy remaining thereon after the light has been photoelectrically detected.

公开(公告)号：US4851677A

公开(公告)日：1989-07-25

申请号：US804775

申请日：1985-12-05

申请人： Yuichi Hosoi ,  Kenji Takahashi ,  Nobufumi Mori

发明人： Yuichi Hosoi ,  Kenji Takahashi ,  Nobufumi Mori

IPC分类号： H01J37/22

CPC分类号： H01J37/224

摘要： An apparatus for recording and reproducing an image of a specimen produced by an electron microscope includes a two-dimensional image sensor for storing the energy of an electron beam having passed through the specimen, a stimulating system for scanning the two-dimensional image sensor with stimulating energy to discharge the stored electron beam energy as light from the two-dimensional image sensor, a photoelectric transducer for photoelectrically detecting the light discharged from the two-dimensional image sensor, and an erasing system for applying erasing energy to the two-dimensional image sensor to discharge energy remaining thereon after the light has been photoelectrically detected. The apparatus further includes an optical filter for cutting off light which has a wavelength in the wavelength region of the stimulating energy. The stimulating system includes a deflecting element for deflecting the stimulating energy towards the two-dimensional sensor.

摘要翻译： 用于记录和再现由电子显微镜制造的样本的图像的设备包括：二维图像传感器，用于存储通过样本的电子束的能量;用于通过刺激扫描二维图像传感器的刺激系统 从二维图像传感器的光中放出存储的电子束能量的能量，用于光电检测从二维图像传感器放出的光的光电转换器，以及用于向二维图像传感器施加擦除能量的擦除系统 以在光被光电检测之后释放剩余的能量。 该装置还包括用于切断具有在刺激能量的波长范围内的波长的光的滤光器。 刺激系统包括用于将刺激能量朝向二维传感器偏转的偏转元件。

公开(公告)号：US4835386A

公开(公告)日：1989-05-30

申请号：US919689

申请日：1986-10-16

申请人： Kazuo Shimura ,  Nobufumi Mori ,  Shigeru Saotome ,  Ryoichi Yoshimura ,  Hideo Watanabe ,  Yuichi Hosoi

发明人： Kazuo Shimura ,  Nobufumi Mori ,  Shigeru Saotome ,  Ryoichi Yoshimura ,  Hideo Watanabe ,  Yuichi Hosoi

IPC分类号： G01T1/29 ,  G03B42/02

CPC分类号： G03B42/02 ,  G01T1/2012

摘要： A radiation image recording and read-out apparatus comprises a case housing a stimulable phosphor sheet and having an opening, a light shielding cover housed in the case for projection therefrom through the opening, a recording section for exposing the stimulable phosphor sheet disposed at an exposure position in the light shielding cover projected out of the case to radiation, and a read-out section having a sub-scanning system for moving the stimulable phosphor sheet between the exposure position and a position in the case. Or, the apparatus comprises a case having an opening for passing the stimulable phosphor sheet therethrough, a recording section for exposing the stimulable phosphor sheet disposed at the exposure position in the case to radiation, and a read-out section having a sub-scanning system for moving the stimulable phosphor sheet between the exposure position and a position projected out of the case. Alternatively, the apparatus comprises a sheet feed system for reciprocating a strip-like flexible stimulable phosphor sheet between first and second wind-up shafts, and a recording section for exposing the stimulable phosphor sheet disposed between the first and second wind-up shafts to radiation.

摘要翻译： 放射线图像记录和读出装置包括容纳可刺激的荧光体片并具有开口的壳体，容纳在壳体中的遮光盖，用于通过该开口从其突出;记录部分，用于暴露以曝光设置的可激发荧光粉片 并且具有副扫描系统的读出部，该辅助扫描系统用于在曝光位置和外壳中的位置之间移动可刺激的荧光体片。 或者，该装置包括具有用于使可刺激的荧光体片通过的开口的壳体，用于将设置在外壳中的曝光位置处的可刺激的荧光体片曝光的记录部分，以及具有副扫描系统的读出部分 用于将可刺激的荧光体片材在曝光位置和从外壳伸出的位置之间移动。 或者，该装置包括用于使第一和第二卷绕轴之间的条状柔性可刺激磷光体片往复运动的片材进给系统和用于将设置在第一和第二卷绕轴之间的可刺激磷光体片暴露于辐射的记录部分 。