摘要:
An optical filter comprising a first substrate, a first mirror formed on the first substrate, a second substrate coupled to the first substrate, the second substrate including a concave portion, and a second mirror formed on the concave portion and facing the first mirror, wherein the first substrate includes a first portion located on the first mirror, a second portion located around the first portion, a third portion located around the second portion, and a fourth portion located around the third portion, wherein both a thickness of the second portion and a thickness of the fourth portion are equal to or smaller than a thickness of the first portion.
摘要:
A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.
摘要:
A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.
摘要:
A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.
摘要:
A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.
摘要:
An electro-optical device includes: an electro-optical panel having a first substrate, a second substrate, and an electro-optical substance interposed between the first and the second substrates; a third substrate arranged on the second substrate; a fourth substrate having a flexibility and arranged on the third substrate via a spacer; a position detector provided on the third substrate and detecting a pressed position on the fourth substrate based on changes in surface waves generated on the third substrate; and a resin film provided on the fourth substrate and opposed to the third substrate.
摘要:
A rectangular vibrating plate 10 in which a piezoelectric element and a reinforcing plate are stacked is supported on a main plate by a support member 11, and is urged toward the rotor 100 by an elastic force of the support member 11. This brings a projection 36 provided on the vibrating plate 10 into abutment with an outer peripheral surface of the rotor 100. In this construction, when the vibrating plate 10 vibrates in the horizontal direction in the figure by an applied voltage from a driving circuit (not shown), the rotor 100 is rotated in a clockwise direction in accordance with the displacement of the projection 36 due to the vibration.
摘要:
A touch panel device including: a substrate; a first sender element for sending surface acoustic wave, which is placed along a first direction on the substrate; a second sender element for sending surface acoustic wave, which is placed along a second direction, orthogonal to the first direction, on the substrate; a receiver element for receiving the surface acoustic wave from the second sender element, which is placed along the second direction on the substrate while facing the second sender element with an interval in between; and a reflector, which is placed on the substrate, for achieving the receiver element's reception of the surface acoustic wave from the first sender element by reflecting the surface acoustic wave from the first sender element, wherein a position of a contact body touching on a contact surface is detected by transmitting the surface acoustic wave that is sent from the sender element through the contact surface and receiving the surface acoustic wave on the receiver element.
摘要:
A rectangular vibrating plate 10 in which a piezoelectric element and a reinforcing plate are stacked is supported on a main plate by a support member 11, and is urged toward the rotor 100 by an elastic force of the support member 11. This brings a projection 36 provided on the vibrating plate 10 into abutment with an outer peripheral surface of the rotor 100. In this construction, when the vibrating plate 10 vibrates in the horizontal direction in the figure by an applied voltage from a driving circuit (not shown), the rotor 100 is rotated in a clockwise direction in accordance with the displacement of the projection 36 due to the vibration.
摘要:
A touch panel includes: a touch panel substrate having an input surface; a cover film arranged separately from the input surface, and facing to the input surface; spacers extending upright from the touch panel substrate toward the cover film; a transmitter causing surface acoustic waves to be propagated on the input surface; a receiver measuring the surface acoustic waves propagated on the input surface; a memory storing, as reference values, measurement values of the surface acoustic waves when the cover film is not being pressed; and a determination section detecting, as touch input positions, positions at which a difference between the measurement values of the surface acoustic waves when the touch panel is being used and the reference values is significant.