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公开(公告)号:US5932281A
公开(公告)日:1999-08-03
申请号:US854173
申请日:1997-05-09
申请人: Yukoh Hochido, deceased , Hidekimi Kadokura , Masamichi Matsumoto , Koji Arita , Masamichi Azuma , Tatsuo Otsuki
发明人: Yukoh Hochido, deceased , Hidekimi Kadokura , Masamichi Matsumoto , Koji Arita , Masamichi Azuma , Tatsuo Otsuki
IPC分类号: C23C16/40 , C23C18/12 , H01L21/02 , H01L21/314 , H01L21/316 , B05D5/12 , B05D3/12 , C23C16/00
CPC分类号: H01L21/31691 , C23C16/40 , C23C18/1216 , C23C18/1279 , H01L28/56 , H01L28/55
摘要: A method of forming a Bi-layered ferroelectric thin film on a substrate with good reproducibility, using a mixed composition of a Bi-containing organic compound and a metal polyalkoxide compound by at least one technique selected from the group consisting of molecular deposition such as CVD, and spincoat-sintering.
摘要翻译: 通过选自以下的至少一种技术,使用含Bi有机化合物和金属聚烷氧化物化合物的混合组合物,在复合性基板上形成双层铁电薄膜的方法, ,和旋涂烧结。