公开(公告)号：US20220244168A1

公开(公告)日：2022-08-04

申请号：US17617750

申请日：2020-07-09

Applicant: ams AG

Inventor： Jochen Kraft ,  Rainer Minixhofer ,  Victor Sidorov ,  Anderson Singulani ,  Martin Sagmeister ,  Fernando Castano

IPC: G01N21/17 ,  G01N33/00

Abstract: An apparatus includes an integrated waveguide structure, and a first light source operable to produce a probe beam having a first wavelength, wherein the probe beam is coupled into a first end of the waveguide structure. A second light source is operable to produce an excitation beam with having a second wavelength to excite gas molecules in close proximity to a path of the probe beam. A light detector is coupled to a second end of the integrated waveguide structure and is operable to detect the probe beam after it passes through the waveguide structure. The apparatus is operable such that excitation of the gas molecules results in a temperature increase of the gas molecules that induces a change in the probe beam that is measurable by the light detector.