OPTICAL SENSOR ARRANGEMENT AND METHOD FOR MANUFACTURING AN OPTICAL SENSOR ARRANGEMENT

    公开(公告)号:US20190146069A1

    公开(公告)日:2019-05-16

    申请号:US16306949

    申请日:2017-06-02

    Applicant: ams AG

    Abstract: An optical sensor arrangement for time-of-flight comprises a first and a second cavity separated by an optical barrier and covered by a cover arrangement. An optical emitter is arranged in the first cavity, a measurement and a reference photodetector are arranged in the second cavity. The cover arrangement comprises a plate and layers of material arranged on an inner main surface thereof. The layers comprise an opaque coating with a first and second aperture above the first cavity, and with a third and fourth aperture above the second cavity. The measurement photodetector is configured to detect light entering the second cavity through the fourth aperture. The second and the third aperture establish a reference path for light from the emitter to the reference photodetector.

    Optical sensor arrangement and method for manufacturing an optical sensor arrangement

    公开(公告)号:US11448730B2

    公开(公告)日:2022-09-20

    申请号:US16306949

    申请日:2017-06-02

    Applicant: ams AG

    Abstract: An optical sensor arrangement for time-of-flight comprises a first and a second cavity separated by an optical barrier and covered by a cover arrangement. An optical emitter is arranged in the first cavity, a measurement and a reference photodetector are arranged in the second cavity. The cover arrangement comprises a plate and layers of material arranged on an inner main surface thereof. The layers comprise an opaque coating with a first and second aperture above the first cavity, and with a third and fourth aperture above the second cavity. The measurement photodetector is configured to detect light entering the second cavity through the fourth aperture. The second and the third aperture establish a reference path for light from the emitter to the reference photodetector.

    PHOTOTHERMAL GAS DETECTOR INCLUDING AN INTEGRATED ON-CHIP OPTICAL WAVEGUIDE

    公开(公告)号:US20220244168A1

    公开(公告)日:2022-08-04

    申请号:US17617750

    申请日:2020-07-09

    Applicant: ams AG

    Abstract: An apparatus includes an integrated waveguide structure, and a first light source operable to produce a probe beam having a first wavelength, wherein the probe beam is coupled into a first end of the waveguide structure. A second light source is operable to produce an excitation beam with having a second wavelength to excite gas molecules in close proximity to a path of the probe beam. A light detector is coupled to a second end of the integrated waveguide structure and is operable to detect the probe beam after it passes through the waveguide structure. The apparatus is operable such that excitation of the gas molecules results in a temperature increase of the gas molecules that induces a change in the probe beam that is measurable by the light detector.

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