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公开(公告)号：US07160746B2
公开(公告)日：2007-01-09
申请号：US09917438
申请日：2001-07-27
申请人： Fan Zhong , Michael Lennon
发明人： Fan Zhong , Michael Lennon
CPC分类号： C23C16/401 , G02B6/122 , G02B2006/121
摘要： A method of depositing a top clad layer for an optical waveguide of a planar lightwave circuit. A GeBPSG top clad layer for an optical waveguide structure of a planar lightwave circuit is fabricated such that the top clad layer comprises doped silica glass, wherein the dopant includes Ge (Germanium), P (Phosphorus), and B (Boron). In depositing a top clad layer for the optical waveguide, three separate doping gasses (e.g., GeH4, PH3, and B2H6) are added during the PECVD (plasma enhanced chemical vapor deposition) process to make Ge, P and B doped silica glass (GeBPSG). The ratio of the Ge, P, and B dopants is configured to reduce the formation of crystallization areas within the top clad layer and maintain a constant refractive index within the top clad layer across an anneal temperature range. A thermal anneal process for the top clad layer can be a temperature within a range of 950C to 1050C. The GeBPSG top clad layer reduces the insertion loss of passive arrayed waveguide grating devices and active planar lightwave circuit devices.
摘要翻译： 一种沉积用于平面光波电路的光波导的顶包层的方法。 制造用于平面光波电路的光波导结构的GeBPSG顶包层，使得顶包层包括掺杂的石英玻璃，其中掺杂剂包括Ge（锗），P（磷）和B（硼）。 在沉积用于光波导的顶部包覆层时，三个单独的掺杂气体（例如，GeH 4，PH 3 3和B 2 H） 在PECVD（等离子体增强化学气相沉积）工艺中添加制备Ge，P和B掺杂的石英玻璃（GeBPSG）的工艺。 Ge，P和B掺杂剂的比例被配置为减少顶部包层内的结晶区域的形成，并且在整个退火温度范围内在顶部包覆层内保持恒定的折射率。 用于顶部包层的热退火方法可以是在950℃至1050℃的范围内的温度。 GeBPSG顶层减少了无源阵列波导光栅器件和有源平面光波电路器件的插入损耗。
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2.发明授权Athermal AWG and AWG with low power consumption using groove of changeable width 有权Athermal AWG和AWG，功耗低，槽宽可变公开(公告)号：US07062127B2
公开(公告)日：2006-06-13
申请号：US10844778
申请日：2004-05-13
CPC分类号： G02B6/12011 , G02B6/12014 , G02B6/1203
摘要： Optical integrated circuits are disclosed having a gap traversing the lens or the waveguide grating and an actuator that controllably positions the optical integrated circuit on each side of the gap. As a result, the thermal sensitivity of the optical integrated circuits, for example, arrayed waveguide gratings, is mitigated. Also disclosed are methods for fabricating optical integrated circuits employing the gap and actuator.
摘要翻译： 公开了具有穿过透镜或波导光栅的间隙的光学集成电路和可控地将光学集成电路定位在间隙的每一侧上的致动器。 结果，减轻了光集成电路，例如阵列波导光栅的热敏感性。 还公开了用于制造采用间隙和致动器的光学集成电路的方法。
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3.发明授权公开(公告)号：US06895133B1
公开(公告)日：2005-05-17
申请号：US09885627
申请日：2001-06-20
申请人： Chris P. Calkins , Robert Cole
发明人： Chris P. Calkins , Robert Cole
CPC分类号： G02B6/13
摘要： One aspect of the present invention relates to a method of dicing a substrate containing a plurality of non-rectangular shaped optical integrated circuits, involving forming stop cracks in the wafer, each stop crack adjacent and substantially parallel one of the non-rectangular shaped optical integrated circuits, and cutting the substrate in a curvilinear manner substantially parallel to a stop crack. Another aspect of the present invention relates to an optical structure containing a substrate; a plurality of non-rectangular shaped optical integrated circuits on the substrate, each non-rectangular shaped optical integrated circuit having an active region; and at least one stop crack positioned adjacent each non-rectangular shaped optical integrated circuit.
摘要翻译： 本发明的一个方面涉及一种切割含有多个非矩形形状的光学集成电路的衬底的方法，包括在晶片中形成停止裂纹，每个停止与非矩形形状的光学集成 电路，并以基本上平行于停止裂纹的曲线方式切割基板。 本发明的另一方面涉及一种含有基底的光学结构; 在所述基板上的多个非矩形的光集成电路，每个非矩形的光集成电路具有有源区; 以及邻近每个非矩形形状的光学集成电路定位的至少一个止动裂纹。
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公开(公告)号：US06853769B2
公开(公告)日：2005-02-08
申请号：US09870876
申请日：2001-05-30
申请人： Kenneth McGreer
发明人： Kenneth McGreer
CPC分类号： G02B6/12011 , G02B6/105 , G02B6/12023
摘要： The present invention provides an arrayed waveguide such that each waveguide of the grating has a substantially uniform width, but the width of any single waveguide in the grating is selected based on a predetermined birefringence required for the waveguide. Generally, the narrowest grating waveguide has the longest overall length and the widest grating waveguide has the shortest overall length. The remaining intermediate waveguides have widths that are interpolated between the narrowest and widest waveguide gratings. With an appropriate width for each waveguide, an arrayed waveguide grating is provided that has low polarization dependent wavelength.
摘要翻译： 本发明提供一种阵列波导，使得光栅的每个波导具有基本均匀的宽度，但是基于波导所需的预定的双折射来选择光栅中的任何单个波导的宽度。 通常，最窄的光栅波导具有最长的总长度，最宽的光栅波导具有最短的总长度。 剩余的中间波导具有在最窄和最宽波导光栅之间内插的宽度。 对于每个波导具有适当的宽度，提供具有低偏振相关波长的阵列波导光栅。
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公开(公告)号：US5970186A
公开(公告)日：1999-10-19
申请号：US816124
申请日：1997-03-11
申请人： John T. Kenney , Richard D. Sherman
发明人： John T. Kenney , Richard D. Sherman
CPC分类号： G02F1/3132
摘要： A hybrid digital electro-optic switch has core and/or cladding areas that contain at least two different materials which undergo a change in their refractive index when an electric field is applied. One of the two different materials used in core regions, for example, has a change in refractive index that is less than the change in refractive index for the other material when the materials are exposed to the same electric field. A hybrid digital electro-optic switch functions by modulating the propagation constants of the eigenmodes of the switch with a voltage-induced refractive-index change, so that the propagation constants of the two materials are equal either in the presence or absence of the electric field. These electro-optic modulations change the evanescent coupling between the waveguides of the waveguide regions of the switch and transfer an optical signal that was input into one of the waveguides to a coupled waveguide. Compared to earlier digital electro-optic switch designs, the new switch has lower switching voltage, smaller device size, a sharper optical signal transfer, and wider manufacturing and use tolerances, and the switch can use a wide array of materials in its construction. The new switch can also be integrated with both the microstrip and coplanar traveling wave electrodes for very high speed photonic switching applications.
摘要翻译： 混合数字电光开关具有包含至少两种不同材料的芯和/或包层区域，当施加电场时，它们的折射率发生变化。 例如，在芯区域中使用的两种不同材料中的一种，当材料暴露于相同的电场时，折射率的变化小于其它材料的折射率变化。 混合数字电光开关通过用电压引起的折射率变化来调制开关的本征模的传播常数来实现，使得两种材料的传播常数在存在或不存在电场时相等 。 这些电光调制改变了开关的波导区域的波导之间的消逝耦合，并将输入到波导中的一个的光信号传送到耦合波导。 与先前的数字电光开关设计相比，新开关具有较低的开关电压，更小的器件尺寸，更清晰的光信号传输，更宽的制造和使用公差，并且开关可以在其结构中使用各种各样的材料。 新开关也可以与微带线和共面行波电极集成，用于非常高速的光子开关应用。
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6.发明授权公开(公告)号：US07421156B1
公开(公告)日：2008-09-02
申请号：US11351031
申请日：2006-02-09
申请人： Alice Liu , Pamela Shiell Trammel
发明人： Alice Liu , Pamela Shiell Trammel
CPC分类号： G02B6/105 , G02B6/12007 , G02B6/12023 , G02B6/1203 , G02B6/2793
摘要： Polarization dependent loss may be reduced by providing at least one dummy waveguide or at least one dummy metal structure. Polarization dependent loss may also be reduced by imposing a mechanical force on the OIC to exert mechanical stress thereby changing at least one of the birefringence and the optical axes of at least one waveguide. And polarization dependent loss may be reduced by forming a metal heater using a first set of metal deposition parameters; forming a conductive metal structure contacting the metal heater using a second set of metal deposition parameters; and selecting the first set of metal deposition parameters and the second set of metal deposition parameters to reduce stress.
摘要翻译： 可以通过提供至少一个虚拟波导或至少一个虚拟金属结构来减少偏振相关损耗。 通过在OIC上施加机械力以施加机械应力从而改变至少一个波导的双折射和光轴中的至少一个也可以减少极化依赖损耗。 并且可以通过使用第一组金属沉积参数形成金属加热器来减小偏振相关损耗; 使用第二组金属沉积参数形成与所述金属加热器接触的导电金属结构; 并选择第一组金属沉积参数和第二组金属沉积参数以减少应力。
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公开(公告)号：US07058249B2
公开(公告)日：2006-06-06
申请号：US10897507
申请日：2004-07-23
申请人： Ken Purchase , Martin McKenzie , Lili Huang , Stephen Z. D. Cheng , Frank W. Harris , Jason J. Ge , Dong Zhang
发明人： Ken Purchase , Martin McKenzie , Lili Huang , Stephen Z. D. Cheng , Frank W. Harris , Jason J. Ge , Dong Zhang
IPC分类号： G02B6/12
CPC分类号： G02B6/12011 , C09K19/3809 , C09K2219/03 , G02B1/046 , G02B5/3016 , G02B6/12023 , G02B6/126 , G02B6/138 , G02B2006/12069 , G02B2006/12116
摘要： Waveplate, planar lightwave circuit incorporating the waveplate, and method of making an optical device. The waveplate is formed of a mesogen-containing polymer film having a backbone and sidechains containing mesogen groups. The waveplate may be formed by producing a mesogen-containing polymer film having a nonzero birefringence of suitable dimensions for insertion into a planar lightwave circuit. The waveplate may be so inserted into an optical circuit of a planar lightwave circuit so that an optical signal traversing the waveplate is changed, for instance, to have two polarization states.
摘要翻译： 包括波片的波片，平面光波电路和制造光学器件的方法。 波片由具有主链和含有介晶基团的侧链的含介晶聚合物膜形成。 波片可以通过产生具有适当尺寸的非零双折射的含有介晶的聚合物膜来形成，以插入到平面光波电路中。 波片可以被插入到平面光波电路的光电路中，使得穿过波片的光信号被改变，例如具有两个偏振态。
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公开(公告)号：US06928215B1
公开(公告)日：2005-08-09
申请号：US09915155
申请日：2001-07-25
申请人： Wayne Wai Wing Lui , Alice Liu
发明人： Wayne Wai Wing Lui , Alice Liu
CPC分类号： G02B6/26 , G02B6/2821 , G02B2006/12147
摘要： Optical circuits are disclosed having a source waveguide, a first tap waveguide and a second tap waveguide. Optical power is transferred via evanescent coupling from the source waveguide to the first tap waveguide and from the first tap waveguide to the second tap waveguide such that power loss is minimized. Also disclosed are methods for fabricating optical integrated circuits.
摘要翻译： 公开了具有源极波导，第一抽头波导和第二抽头波导的光学电路。 光功率通过ev逝耦合从源波导传输到第一抽头波导，并且从第一抽头波导传输到第二抽头波导，使得功率损耗最小化。 还公开了用于制造光学集成电路的方法。
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9.发明授权公开(公告)号：US06857790B2
公开(公告)日：2005-02-22
申请号：US09904163
申请日：2001-07-11
CPC分类号： G02B6/4248
摘要： An apparatus and method to vertically route and physically pass multiple optical fibers through the walls of a package. One variation is a method to route an optical fiber ribbon through a wall of a package by routing and securing the width of the optical fiber ribbon perpendicularly to a component within the package. Another variation involves a package having an enclosure with an opening through which a group of optical fibers are arrayed in a rectangular cross-section with a width which is longer than a thickness. The package includes a component inside the enclosure, a group of optical fibers routed through the opening to the component where the width of the rectangular cross-section is perpendicularly oriented to the base of the enclosure, and a clamp to secure the width of the rectangular cross-section of the group of optical fibers perpendicularly to the base of the enclosure.
摘要翻译： 一种用于垂直地路由和物理地通过多个光纤通过封装的壁的装置和方法。 一种变型是通过将光纤带的宽度垂直于包装内的部件布置并固定而将光纤带穿过包装壁的方法。 另一变型涉及一种具有开口的外壳，其中一组光纤通过该开口排列成具有比厚度更长的宽度的矩形横截面。 该封装包括在外壳内部的一个部件，一组光纤通过开口被引导到部件，其中矩形横截面的宽度垂直地定向到外壳的底部，以及用于固定矩形的宽度的夹具 垂直于外壳底部的光纤组的横截面。
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公开(公告)号：US20030133684A1
公开(公告)日：2003-07-17
申请号：US10350579
申请日：2003-01-23
发明人： Jongik Won , Fan Zhong , Farnaz Parhami , Nizar S. Kheraj
IPC分类号： G02B006/10
CPC分类号： G02B6/136 , G02B6/126 , G02B6/132 , G02B2006/121 , G02B2006/12173
摘要： A method of making a polarization insensitive optical waveguide structure. An optical core layer is formed on a substrate, wherein the optical core layer has a higher refractive index than the substrate. A mask is formed over the optical core layer. The unmasked areas of the optical core layer are then over-etched to define the core, wherein the over-etching removes the unmasked area of the optical core layer and a portion of the substrate disposed beneath the unmasked area, and defines the optical core. The mask is subsequently removed from the optical core. A cladding layer is then formed over the optical core and the substrate, the cladding layer having a lower refractive index than the optical core, to form a polarization insensitive optical waveguide structure. The amount of over-etching can be controlled to control an amount of substrate disposed beneath the unmasked area of the optical core layer that is removed. The amount of substrate removed, in turn, controls the polarization sensitivity of the optical waveguide structure. The amount of the portion of the substrate removed during the over-etching can be determined to minimize the polarization dependent wavelength shift and the polarization dependent loss of the optical waveguide structure. The amount of the portion of the substrate removed during the over-etching can be determined in accordance with a blanket stress of the cladding layer. The over-etching can be within a range between 7.5 percent and 30 percent.
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