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公开(公告)号：US11858091B2
公开(公告)日：2024-01-02
申请号：US16723547
申请日：2019-12-20
Applicant: Mega Fluid Systems, Inc.
Inventor： Robert Eiseler , Koh Murai , Michael Perkins, II
CPC classification number: B24B57/02 , B01F23/59 , B01F25/51 , B01F35/2113 , B01F35/21112 , B01F2025/931 , B01F2101/58
Abstract: An apparatus for recirculating fluids in semiconductor systems. The apparatus including a base portion, an inlet portion coupled to a first end of the base portion, and a nozzle coupled to a second end of the base portion. The nozzle including a helical groove extending from a position near a nozzle base portion to a position near a tip of the nozzle portion. The helical groove extending from an exterior surface through the nozzle portion to an interior surface of the nozzle portion. Methods of using the apparatus in a semiconductor recirculation system are also disclosed.
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公开(公告)号：US20100307602A1
公开(公告)日：2010-12-09
申请号：US12857828
申请日：2010-08-17
Applicant: DAVID KANDIYELI , Todd Graves , Rhey Yang
Inventor： DAVID KANDIYELI , Todd Graves , Rhey Yang
IPC: B67D7/72
CPC classification number: B24B57/00 , Y10T137/0391 , Y10T137/2931
Abstract: Systems and methods for processing high purity materials are disclosed. A unit operation processes a material stream, an operational parameter of the unit operation is monitored, and a standby unit is charged with pressurized gas to achieve system pressure. The material stream is diverted to the standby unit in response to the operational parameter of the unit operation registering a threshold value. Flow exiting the standby unit is first vented via an outlet, and then directed toward a point of use after the pressurized gas has been purged. The unit operation may then be serviced and subsequently brought back online. A second unit operation may process a second material stream simultaneously, and the second material stream may be periodically diverted to the standby unit in like manner, thus reducing line pressure variation. The disclosed method may be performed manually or implemented automatically through use of a controller.
Abstract translation: 公开了用于处理高纯度材料的系统和方法。 单元操作处理材料流，监测单元操作的操作参数，并且备用单元用加压气体充电以实现系统压力。 响应于注册阈值的单元操作的操作参数，物料流被转移到备用单元。 离开待机单元的流量首先通过出口排出，然后在加压气体被清除之后指向使用点。 然后可以对单元操作进行维护并随后恢复在线。 第二单元操作可以同时处理第二材料流，并且第二材料流可以以类似的方式周期地转移到备用单元，从而减少管线压力变化。 所公开的方法可以手动执行或通过使用控制器自动实现。
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公开(公告)号：US20100265788A1
公开(公告)日：2010-10-21
申请号：US12764086
申请日：2010-04-20
Applicant: DAVID D. KANDIYELI , Quay Issac Gene Williams , Barry Kennedy Cavinaw , Charles Richard Boley, JR.
Inventor： DAVID D. KANDIYELI , Quay Issac Gene Williams , Barry Kennedy Cavinaw , Charles Richard Boley, JR.
IPC: B01F5/06
CPC classification number: B01F15/0227 , B01F3/1271 , B01F5/0057 , B01F5/248
Abstract: An improved method and apparatus for blending process materials. Preferred embodiments of the present invention are directed to a process material contacting system to increase wetted surface area for liquid contact as well as increase forced convective mixing efficiency of the liquid mixture. Use of a novel process material contacting apparatus allows one solid feeding element to serve multiple process material tanks, thus reducing overall system costs and decreasing set-up time/process variability while increasing operational efficiency. According to a preferred embodiment of the present invention, rather than adding a process material to a volume of liquid held in a blending tank, the added process material is remotely blended with the liquid outside the process material tank.
Abstract translation: 一种用于混合工艺材料的改进方法和装置。 本发明的优选实施方案涉及一种加工材料接触体系，以增加用于液体接触的润湿表面积以及增加液体混合物的强制对流混合效率。 使用新型工艺材料接触装置允许一个固体进料元件用于多个工艺材料罐，从而降低总体系统成本并减少设置时间/工艺变化性，同时提高操作效率。 根据本发明的优选实施方案，不是将加工材料添加到保持在混合罐中的液体体积中，所加入的加工材料与处理材料罐外部的液体远程混合。
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公开(公告)号：US09459619B2
公开(公告)日：2016-10-04
申请号：US13537943
申请日：2012-06-29
Applicant: Bryan Henry Fletcher , James Andrew Graves , Quay Isaac Gene Williams , David Peter Allen
CPC classification number: G05B23/0291 , G05B9/02
Abstract: Continuous equipment operation is facilitated despite disablement of an automation controller for controlling the equipment. A safe state in which equipment is to be maintained upon disablement of the automation controller is determined. Safe state data is provided for configuring an I/O module, through which the automation controller controls the equipment, with the safe state data to facilitate maintaining the equipment in the safe state during disablement of the automation controller. In one embodiment, upon subsequent enablement of the automation controller, a current state of the I/O module is evaluated and an automatic control state into which the equipment is to be transitioned is determined. The equipment is then transitioned to the determined automatic control state.
Abstract translation: 即使禁用用于控制设备的自动化控制器，也能够实现连续的设备操作。 确定在自动化控制器被禁用时要保持设备的安全状态。 提供了安全状态数据，用于配置I / O模块，自动化控制器通过该模块控制设备和安全状态数据，以便在自动化控制器禁用期间将设备维护在安全状态。 在一个实施例中，在随后实现自动化控制器时，评估I / O模块的当前状态，并确定设备要转换到的自动控制状态。 然后将设备转换到确定的自动控制状态。
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公开(公告)号：US20140098628A1
公开(公告)日：2014-04-10
申请号：US14104818
申请日：2013-12-12
Applicant: MEGA FLUID SYSTEMS, Inc.
Inventor： David D. KANDIYELI , Quay Issac Gene WILLIAMS , Barry K. CAVINAW , Charles R. BOLEY
CPC classification number: B01F15/0227 , B01F3/1271 , B01F5/0057 , B01F5/248
Abstract: An improved method and apparatus for blending process materials. Preferred embodiments of the present invention are directed to a process material contacting system to increase wetted surface area for liquid contact as well as increase forced convective mixing efficiency of the liquid mixture. Use of a novel process material contacting apparatus allows one solid feeding element to serve multiple process material tanks, thus reducing overall system costs and decreasing set-up time/process variability while increasing operational efficiency. According to a preferred embodiment of the present invention, rather than adding a process material to a volume of liquid held in a blending tank, the added process material is remotely blended with the liquid outside the process material tank.
Abstract translation: 一种用于混合工艺材料的改进方法和装置。 本发明的优选实施方案涉及一种加工材料接触体系，以增加用于液体接触的润湿表面积以及增加液体混合物的强制对流混合效率。 使用新型工艺材料接触装置允许一个固体进料元件用于多个工艺材料罐，从而降低总体系统成本并减少设置时间/工艺变化性，同时提高操作效率。 根据本发明的优选实施方案，不是将加工材料添加到保持在混合罐中的液体体积中，所加入的加工材料与处理材料罐外部的液体远程混合。
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Patent Agency Ranking
公开(公告)号：US07905653B2
公开(公告)日：2011-03-15
申请号：US10343360
申请日：2001-07-31
Applicant: Jeffrey Alexander Wilmer , Daniel Kase Mackenzie , John Michael Lull , Eric A. Zadai , Michael Loren Walker
Inventor： Jeffrey Alexander Wilmer , Daniel Kase Mackenzie , John Michael Lull , Eric A. Zadai , Michael Loren Walker
CPC classification number: B01F5/0451 , B01F3/08 , B01F3/0803 , B01F3/0861 , B01F3/088 , B01F5/061 , B01F5/0646 , B01F5/0652 , B01F15/0022 , B01F15/00233 , B01F15/0408 , B01F2005/0621 , B01F2005/0638 , B01F2215/0045 , B01F2215/0096
Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.
Abstract translation: 一种混合和提供工艺材料的方法和装置。 该方法和装置特别适用于混合超高纯度化学品，研磨浆料与其他用于研磨半导体晶片的化学品的混合以及化学品的高精度混合。 该装置可以包括分配子系统，其将处理材料提供给混合子系统，在混合子系统中它们与静态混合器混合。 该方法可以包括向处理材料提供分配子系统，并将处理材料混合在静态混合器中。
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公开(公告)号：US20210332924A1
公开(公告)日：2021-10-28
申请号：US17366805
申请日：2021-07-02
Applicant: MEGA FLUID SYSTEMS, INC.
Inventor： Todd GRAVES , Kevin CRAIN , David KANDIYELI
IPC: F16L37/44 , F16L37/14 , F16L19/025
Abstract: Insertion fitting/coupler devices for coupling to a flowpath, and methods of using such insertion fitting/coupler devices, are disclosed. The insertion fitting/coupler devices include a coupler that includes a through hole and a stem portion. The insertion fitting/coupler devices also include a nut that includes a through hole, a rim and a body portion. The insertion fitting/coupler devices further include a body member that includes a through hole and an outer flange. The body member extends into the through hole of the coupler such that an end of the stem portion of the coupler engages the outer flange of the body member. An inner side of the body portion of the nut engages with an outer surface of the stem portion of the coupler such that the flange is secured between the rim of the coupler and the end of the stem portion of the coupler.
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公开(公告)号：US20200171622A1
公开(公告)日：2020-06-04
申请号：US16723547
申请日：2019-12-20
Applicant: Mega Fluid Systems, Inc.
Inventor： Robert EISELER , Koh MURAI , Michael PERKINS, II
Abstract: An apparatus for recirculating fluids in semiconductor systems. The apparatus including a base portion, an inlet portion coupled to a first end of the base portion, and a nozzle coupled to a second end of the base portion. The nozzle including a helical groove extending from a position near a nozzle base portion to a position near a tip of the nozzle portion. The helical groove extending from an exterior surface through the nozzle portion to an interior surface of the nozzle portion. Methods of using the apparatus in a semiconductor recirculation system are also disclosed.
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公开(公告)号：US08992070B2
公开(公告)日：2015-03-31
申请号：US14104818
申请日：2013-12-12
Applicant: Mega Fluid Systems, Inc.
Inventor： David D. Kandiyeli , Quay Issac Gene Williams , Barry K. Cavinaw , Charles R. Boley
CPC classification number: B01F15/0227 , B01F3/1271 , B01F5/0057 , B01F5/248
Abstract: An improved method and apparatus for blending process materials. Preferred embodiments of the present invention are directed to a process material contacting system to increase wetted surface area for liquid contact as well as increase forced convective mixing efficiency of the liquid mixture. Use of a novel process material contacting apparatus allows one solid feeding element to serve multiple process material tanks, thus reducing overall system costs and decreasing set-up time/process variability while increasing operational efficiency. According to a preferred embodiment of the present invention, rather than adding a process material to a volume of liquid held in a blending tank, the added process material is remotely blended with the liquid outside the process material tank.
Abstract translation: 一种用于混合工艺材料的改进方法和装置。 本发明的优选实施方案涉及一种加工材料接触体系，以增加用于液体接触的润湿表面积以及增加液体混合物的强制对流混合效率。 使用新型工艺材料接触装置允许一个固体进料元件用于多个工艺材料罐，从而降低总体系统成本并减少设置时间/工艺变化性，同时提高操作效率。 根据本发明的优选实施方案，不是将加工材料添加到保持在混合罐中的液体体积中，所加入的加工材料与处理材料罐外部的液体远程混合。
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公开(公告)号：US20130006393A1
公开(公告)日：2013-01-03
申请号：US13537943
申请日：2012-06-29
Applicant: Bryan Henry FLETCHER , James Andrew GRAVES , Quay Isaac Gene WILLIAMS , David Peter ALLEN
IPC: G05B11/01
CPC classification number: G05B23/0291 , G05B9/02
Abstract: Continuous equipment operation is facilitated despite disablement of an automation controller for controlling the equipment. A safe state in which equipment is to be maintained upon disablement of the automation controller is determined. Safe state data is provided for configuring an I/O module, through which the automation controller controls the equipment, with the safe state data to facilitate maintaining the equipment in the safe state during disablement of the automation controller. In one embodiment, upon subsequent enablement of the automation controller, a current state of the I/O module is evaluated and an automatic control state into which the equipment is to be transitioned is determined. The equipment is then transitioned to the determined automatic control state.
Abstract translation: 即使禁用用于控制设备的自动化控制器，也能够持续地进行设备操作。 确定在自动化控制器被禁用时要保持设备的安全状态。 提供了安全状态数据，用于配置I / O模块，自动化控制器通过该模块控制设备和安全状态数据，以便在自动化控制器禁用期间将设备维护在安全状态。 在一个实施例中，在随后实现自动化控制器时，评估I / O模块的当前状态，并确定设备要转换到的自动控制状态。 然后将设备转换到确定的自动控制状态。
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