Abstract:
The present invention relates to a method of manufacturing a probe comprising a cantilever with a conduit. According to the invention, an etchant window is provided in a layer covering an elongated sacrificial conduit core that is to form the conduit. This allows for an etching process where the elongated sacrificial conduit core is etched away before all material of a substrate is etched away, the remaining material of the substrate material making the probe stronger without being in the way during use of the probe.
Abstract:
The present invention relates to a method of manufacturing a probe comprising a cantilever with a conduit. According to the invention, an etchant window is provided in a layer covering an elongated sacrificial conduit core that is to form the conduit. This allows for an etching process where the elongated sacrificial conduit core is etched away before all material of a substrate is etched away, the remaining material of the substrate material making the probe stronger without being in the way during use of the probe.
Abstract:
The invention relates to a method of preserving a sensor in a container, said sensor comprising a sensing area of metallic or a semi-conducting material covered with molecules having a MW>100 Dalton, said molecules being bound to the material wherein at least the sensing area of the layer is kept submerged in a storage solution, said storage solution having a composition that consists for at least 80% by volume of at least one compound chosen from water, ethanol, triethylene glycol and isopropanol, with the provisios that if the concentration of ethanol is at least 80 vol. % of the storage solution ethanol is present in a concentration of no more than 93% by volume of the storage solution; if water is present, it is present in a concentration of less than 80% by volume of the storage solution. The invention also relates to a container containing a sensor and a storage solution.
Abstract:
A method of manufacturing a plurality of through-holes in a layer of first material by subjecting part of the layer of said first material to ion beam milling.For batch-wise production, the method comprises after a step of providing the layer of first material and before the step of ion beam milling, providing a second layer of a second material on the layer of first material, providing the second layer of the second material with a plurality of holes, the holes being provided at central locations of pits in the first layer, and subjecting the second layer of the second material to said step of ion beam milling at an angle using said second layer of the second material as a shadow mask.