Method Of Manufacturing A Probe Comprising A Cantilever With A Conduit
    1.
    发明申请
    Method Of Manufacturing A Probe Comprising A Cantilever With A Conduit 有权
    制造包含导管的悬臂的探针的方法

    公开(公告)号:US20130305519A1

    公开(公告)日:2013-11-21

    申请号:US13978502

    申请日:2012-01-13

    Applicant: Edin Sarajlic

    Inventor: Edin Sarajlic

    Abstract: The present invention relates to a method of manufacturing a probe comprising a cantilever with a conduit. According to the invention, an etchant window is provided in a layer covering an elongated sacrificial conduit core that is to form the conduit. This allows for an etching process where the elongated sacrificial conduit core is etched away before all material of a substrate is etched away, the remaining material of the substrate material making the probe stronger without being in the way during use of the probe.

    Abstract translation: 本发明涉及一种制造探针的方法,该探针包括具有导管的悬臂。 根据本发明,在覆盖要形成导管的细长牺牲导管芯的层中提供蚀刻剂窗口。 这允许蚀刻工艺,其中在衬底的所有材料被蚀刻掉之前,细长的牺牲导管芯被蚀刻掉,使衬底材料的剩余材料在探针的使用期间不会妨碍探针而不会妨碍。

    Method of manufacturing a probe comprising a cantilever with a conduit
    2.
    发明授权
    Method of manufacturing a probe comprising a cantilever with a conduit 有权
    一种制造探针的方法,其包括具有导管的悬臂

    公开(公告)号:US09086431B2

    公开(公告)日:2015-07-21

    申请号:US13978502

    申请日:2012-01-13

    Applicant: Edin Sarajlic

    Inventor: Edin Sarajlic

    Abstract: The present invention relates to a method of manufacturing a probe comprising a cantilever with a conduit. According to the invention, an etchant window is provided in a layer covering an elongated sacrificial conduit core that is to form the conduit. This allows for an etching process where the elongated sacrificial conduit core is etched away before all material of a substrate is etched away, the remaining material of the substrate material making the probe stronger without being in the way during use of the probe.

    Abstract translation: 本发明涉及一种制造探针的方法,该探针包括具有导管的悬臂。 根据本发明,在覆盖要形成导管的细长牺牲导管芯的层中提供蚀刻剂窗口。 这允许蚀刻工艺,其中在衬底的所有材料被蚀刻掉之前,细长的牺牲导管芯被蚀刻掉,使衬底材料的剩余材料在探针的使用期间不会妨碍探针。

    Method of preserving a sensor in a container and a container containing a sensor and a storage solution
    3.
    发明授权
    Method of preserving a sensor in a container and a container containing a sensor and a storage solution 有权
    将容器中的传感器保持在容纳传感器和储存溶液的容器中的方法

    公开(公告)号:US08136658B2

    公开(公告)日:2012-03-20

    申请号:US12745447

    申请日:2008-02-18

    CPC classification number: G01Q70/00

    Abstract: The invention relates to a method of preserving a sensor in a container, said sensor comprising a sensing area of metallic or a semi-conducting material covered with molecules having a MW>100 Dalton, said molecules being bound to the material wherein at least the sensing area of the layer is kept submerged in a storage solution, said storage solution having a composition that consists for at least 80% by volume of at least one compound chosen from water, ethanol, triethylene glycol and isopropanol, with the provisios that if the concentration of ethanol is at least 80 vol. % of the storage solution ethanol is present in a concentration of no more than 93% by volume of the storage solution; if water is present, it is present in a concentration of less than 80% by volume of the storage solution. The invention also relates to a container containing a sensor and a storage solution.

    Abstract translation: 本发明涉及一种在容器中保存传感器的方法,所述传感器包括用MW> 100道尔顿分子覆盖的金属或半导体材料的感测区域,所述分子结合至材料,其中至少感测 该层的面积保持浸没在储存溶液中,所述储存溶液具有至少80体积%的选自水,乙醇,三甘醇和异丙醇的至少一种化合物的组成,条件是如果浓度 的乙醇为至少80体积%。 存储溶液乙醇的百分比以不超过储存溶液体积的93%的浓度存在; 如果存在水,则其存储浓度小于存储溶液的80体积%。 本发明还涉及一种容纳传感器和储存溶液的容器。

    Method of manufacturing a plurality of through-holes in a layer of first material

    公开(公告)号:US10207244B2

    公开(公告)日:2019-02-19

    申请号:US15444010

    申请日:2017-02-27

    Applicant: SMARTTIP BV

    Inventor: Edin Sarajlic

    Abstract: A method of manufacturing a plurality of through-holes in a layer of first material by subjecting part of the layer of said first material to ion beam milling.For batch-wise production, the method comprises after a step of providing the layer of first material and before the step of ion beam milling, providing a second layer of a second material on the layer of first material, providing the second layer of the second material with a plurality of holes, the holes being provided at central locations of pits in the first layer, and subjecting the second layer of the second material to said step of ion beam milling at an angle using said second layer of the second material as a shadow mask.

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