DEVICE HAVING ELEMENT ELECTRODE CONNECTED TO PENETRATING WIRE, AND METHOD FOR MANUFACTURING THE SAME
    6.
    发明申请
    DEVICE HAVING ELEMENT ELECTRODE CONNECTED TO PENETRATING WIRE, AND METHOD FOR MANUFACTURING THE SAME 审中-公开
    具有连接到穿透线的元件电极的装置及其制造方法

    公开(公告)号:US20150263647A1

    公开(公告)日:2015-09-17

    申请号:US14640287

    申请日:2015-03-06

    Abstract: According to a method for manufacturing a device in which an electrode of an element is electrically connected to a penetrating wire in a substrate, a structure is prepared in which the element is arranged on the first substrate having a through hole formed therein: and a second substrate is prepared which has an electroconductive seed layer formed thereon. Then, a wall part is formed on the first substrate; a seed layer is joined to a face on an element side of the structure through a bonding layer; the bonding layer is removed; and the seed layer is exposed in the inside of the opening. The inside of the wall part and the through hole is filled with a conductor, with the use of the seed layer through electrolytic plating.

    Abstract translation: 根据其中元件的电极与衬底中的穿透电线电连接的器件的制造方法,制备其中元件布置在其上形成有通孔的第一衬底上的结构:第二 制备其上形成有导电种子层的基底。 然后,在第一基板上形成壁部; 种子层通过接合层与结构的元件侧的面接合; 去除粘合层; 并且种子层在开口的内部暴露。 壁部分和通孔的内部填充有导体,使用种子层通过电解电镀。

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