公开(公告)号：US20050211004A1

公开(公告)日：2005-09-29

申请号：US10806400

申请日：2004-03-23

Applicant: Steven Fink

Inventor： Steven Fink

IPC: G01B3/00 ,  G01B3/50 ,  G01M99/00 ,  G01M19/00

CPC classification number: G01B3/50

Abstract: A go no-go gauge and method for verifying whether a process kit part used within a plasma chamber of a plasma processing tool has accumulated excessive wear or deposits. The gauge includes a component for verifying whether a dimension of a process kit part feature violates a prescribed size tolerance, the violation indicating that the process kit part has accumulated excessive wear or deposits.

Abstract translation: 用于验证等离子体处理工具的等离子体室内使用的处理组件部件是否累积了过多的磨损或沉积物的脱模仪和方法。 仪表包括用于验证过程套件零件特征的尺寸是否违反规定的尺寸公差的部件，表示处理套件部件累积过多磨损或沉积的违规。

公开(公告)号：US20040200084A1

公开(公告)日：2004-10-14

申请号：US10412342

申请日：2003-04-14

Inventor： Wen-Cheng Wang

IPC: G01B003/50

CPC classification number: G01B3/50 ,  G01B3/30

Abstract: A filler gauge with flexible measurement is disclosed in the invention. The invention provides a filler gauge that is easy to be manufactured and able to lower cost as well as increase scope of measurement. In addition, each single unit of the filler gauge is made of plastic material that is flexible, bendable, and able to be trimmed so that various objects to be measured can be measured by suitable single units. Moreover, a ruler area and an angle-measuring area are further provided on each single unit so that a filler gauge capable of doing thickness, depth, and angle measurements is completed.

Abstract translation: 本发明公开了一种具有灵活测量的填充计。 本发明提供了一种易于制造并能够降低成本以及增加测量范围的填料计。 此外，填料计的每个单一单元由塑料材料制成，该材料是柔性的，可弯曲的并且能够被修整，使得可以通过合适的单个单元测量待测量的各种物体。 此外，在每个单个单元上还设置有标尺区域和角度测量区域，使得能够进行厚度，深度和角度测量的填充计量器完成。

公开(公告)号：US2495789A

公开(公告)日：1950-01-31

申请号：US51176843

申请日：1943-11-26

Applicant: ROBERT TWELLS

Inventor： ROBERT TWELLS

IPC: G01B3/50

CPC classification number: G01B3/50

公开(公告)号：US2423094A

公开(公告)日：1947-07-01

申请号：US54887744

申请日：1944-08-10

Applicant: GARDNER IRVINE C

Inventor： GARDNER IRVINE C

IPC: G01B3/50

CPC classification number: G01B3/50 ,  Y10S33/11

公开(公告)号：US20150020395A1

公开(公告)日：2015-01-22

申请号：US14377226

申请日：2013-02-07

Applicant: IHI Corporation

Inventor： Michiko Baba ,  Kouzou Hasegawa ,  Norimasa Taga

IPC: G01B3/50

CPC classification number: G01B3/50 ,  G01B5/12 ,  G01B11/12 ,  G01B21/14

Abstract: An inner diameter measuring device (4) for measuring an inner diameter by inserting an inner diameter measuring unit into an inside of a hollow member to be measured, comprises a supporting shaft (18) having the inner diameter measuring unit supported at a forward end, and a supporting mechanism unit (30) for cantilever-supporting the supporting shaft, wherein the supporting mechanism unit has a frame (31), a spherical bearing (33) and a deflection adjusting unit (35), wherein the shaft is supported by the frame via the spherical bearing, an end portion (32) of the supporting shaft is passed through the spherical bearing and is extended, and a position of an end of the end portion in vertical direction is adjusted by the deflection adjusting unit.

Abstract translation: 用于通过将内径测量单元插入待测量的中空构件的内部来测量内径的内径测量装置（4）包括：支撑轴（18），其具有在前端支撑的内径测量单元， 以及用于支撑支撑轴的支撑机构单元（30），其中支撑机构单元具有框架（31），球面轴承（33）和偏转调节单元（35），其中轴由 框架通过球面轴承，支撑轴的端部（32）穿过球形轴承并延伸，并且端部的垂直方向的端部的位置由偏转调节单元调节。

公开(公告)号：US08919004B2

公开(公告)日：2014-12-30

申请号：US13731929

申请日：2012-12-31

Applicant: General Electric Company

Inventor： Juntao Wu ,  Robert William Tait ,  Cheryl (Chun) Zhan ,  John Brandon Laflen ,  Steven William Wik ,  John Herbold ,  S. M. Shajedul Hasan

IPC: G01B7/14 ,  G01B5/06 ,  G01B21/08 ,  G01B21/16 ,  G01B3/50

CPC classification number: G01B5/06 ,  G01B3/50 ,  G01B21/08 ,  G01B21/16 ,  G01B2210/58

Abstract: The present application provides for feeler gauges. The feeler gauges include a plurality of elongate measuring leaves rotatably coupled on a common axis of rotation with an elongate housing. The leaves may be manually, selectively rotatable between a “home” position wherein the leaves are substantially aligned with the housing and an “extended” position wherein the leaves are spaced from the housing. The leaves may be relatively flexible and substantially flat such that they define a substantially constant thickness. One or more extended leaves may be used to measure the thickness of a clearance or gap. The gauges may be configured to detect, determine or measure the thickness of the leaves that are in the “home” position and/or the “extended” position, and thereby determine the total thickness of a clearance or gap measured by the extended leaves.

Abstract translation: 本申请提供了测距仪。 探测器包括多个细长测量叶片，其可旋转地联接在具有细长壳体的公共旋转轴线上。 叶片可以手动地选择性地在“家”位置之间旋转，其中叶片基本上与壳体对齐，并且“延伸”位置，其中叶片与壳体间隔开。 叶片可以是相对柔性的并且基本上是平坦的，使得它们限定基本恒定的厚度。 可以使用一个或多个延长的叶片来测量间隙或间隙的厚度。 测量器可以被配置为检测，确定或测量处于“主”位置和/或“延伸”位置的叶片的厚度，从而确定由延伸叶片测量的间隙或间隙的总厚度。

公开(公告)号：US07040032B2

公开(公告)日：2006-05-09

申请号：US10806400

申请日：2004-03-23

Applicant: Steven T. Fink

Inventor： Steven T. Fink

IPC: G01B3/50 ,  G01B3/00

CPC classification number: G01B3/50

Abstract: A go no-go gauge and method for verifying whether a process kit part used within a plasma chamber of a plasma processing tool has accumulated excessive wear or deposits. The gauge includes a component for verifying whether a dimension of a process kit part feature violates a prescribed size tolerance, the violation indicating that the process kit part has accumulated excessive wear or deposits.

Abstract translation: 用于验证等离子体处理工具的等离子体室内使用的处理组件部件是否累积了过多的磨损或沉积物的脱模仪和方法。 仪表包括用于验证过程套件零件特征的尺寸是否违反规定的尺寸公差的部件，表示处理套件部件累积过多磨损或沉积的违规。

公开(公告)号：US06845566B1

公开(公告)日：2005-01-25

申请号：US10672963

申请日：2003-09-29

Applicant: Marvin W. Clements ,  Paul E. Moody

Inventor： Marvin W. Clements ,  Paul E. Moody

IPC: G01B3/50 ,  G01M13/00 ,  G01B3/20

CPC classification number: G01B3/50 ,  G01M13/005

Abstract: A feeler gage including a pin member having a first end and an opposing end with a gage connected to the opposing end of the pin member. The gage has a first end connected to the pin and a free end projecting past a peripheral dimension of the pin. An indicator is formed on the first end of the pin member in alignment with a longitudinal axis of the gage for determining a position of the gage upon rotation of the pin member. The gage is of a predetermined thickness and is aligned with the indicator formed at the first end of the pin member. Rotation of the pin member correspondingly rotates the gage of the pin member. If the gage rotates freely, then a gap is determined to be present in the area where the gage is rotated through. If the gage does not rotate freely, then no gap exists.

Abstract translation: 一种探测器，包括具有第一端和相对端的销构件，其具有连接到销构件的相对端的量具。 量具具有连接到销的第一端和突出穿过销的外围尺寸的自由端。 在销构件的第一端上形成一个指示器，其与量规的纵向轴线对齐，用于在销构件旋转时确定量具的位置。 量具具有预定的厚度并且与形成在销构件的第一端处的指示器对准。 销构件的旋转相应地使销构件的规范旋转。 如果量具自由旋转，则确定存在于计量器旋转通过的区域中的间隙。 如果量规不能自由旋转，则不存在间隙。

公开(公告)号：US06813842B2

公开(公告)日：2004-11-09

申请号：US10412342

申请日：2003-04-14

Applicant: Wen-Cheng Wang

Inventor： Wen-Cheng Wang

IPC: G01B350

CPC classification number: G01B3/50 ,  G01B3/30

Abstract: A filler gauge with flexible measurement is disclosed in the invention. The invention provides a filler gauge that is easy to be manufactured and able to lower cost as well as increase scope of measurement. In addition, each single unit of the filler gauge is made of plastic material that is flexible, bendable, and able to be trimmed so that various objects to be measured can be measured by suitable single units. Moreover, a ruler area and an angle-measuring area are further provided on each single unit so that a filler gauge capable of doing thickness, depth, and angle measurements is completed.

Abstract translation: 本发明公开了一种具有灵活测量的填充计。 本发明提供了一种易于制造并能够降低成本以及增加测量范围的填料计。 此外，填料计的每个单一单元由塑料材料制成，该材料是柔性的，可弯曲的并且能够被修整，使得可以通过合适的单个单元测量待测量的各种物体。 此外，在每个单个单元上还设置有标尺区域和角度测量区域，使得能够进行厚度，深度和角度测量的填充计量器完成。

公开(公告)号：US20040083618A1

公开(公告)日：2004-05-06

申请号：US10284979

申请日：2002-10-31

Inventor： Michael W. Kelly

IPC: G01B003/00

CPC classification number: G01B3/50 ,  G01B3/004 ,  G01B3/30

Abstract: A taper gauge comprising an elongated body having a tapered length with a generally flat face. A slide element is slidingly carried on the body and has a portion which overlies the face. A plurality of measurement markings are provided on the face. The face and the measurement markings are provided in contrasting colors to one another to enhance a visibility of the markings

Abstract translation: 一种锥度计，包括具有大致平坦表面的锥形长度的细长主体。 滑动元件滑动地承载在主体上并具有覆盖在脸部上的部分。 在面上设置多个测量标记。 面部和测量标记以彼此对比的颜色提供，以增强标记的可视性