公开(公告)号：US20090113988A1

公开(公告)日：2009-05-07

申请号：US11983128

申请日：2007-11-06

申请人： Serguei Koulikov

发明人： Serguei Koulikov

IPC分类号： G01N9/00

CPC分类号： G01N1/405 ,  G01N7/02 ,  G01N2001/2264 ,  G01N2001/387

摘要： The gas absorption/adsorption memory effect in gas analysis can be reduced by controlling gas flow conditions such that the partial pressure of the analyte of interest is held constant, if the measured analyte concentration is within a predetermined range. Keeping the analyte partial pressure constant is helpful for mitigating the memory effect because changes in analyte absorption/adsorption rates tend to be driven by changes in analyte partial pressure. The memory effect can also be mitigated by performing concentration measurements at two or more different gas flow conditions, and employing a mathematical model to estimate true concentration and “memory effect” contributions to measured concentrations at one or more of the flow conditions. The mathematical model can be based on an assumption that the true analyte concentration is independent of flow rate or pressure, while the “memory effect” contribution to measured concentration is inversely proportional to flow rate or pressure.

摘要翻译： 如果测量的分析物浓度在预定范围内，则气体分析中的气体吸收/吸附记忆效应可以通过控制气体流动条件来降低，使得目标分析物的分压保持恒定。 保持分析物分压恒定有助于减轻记忆效应，因为分析物吸收/吸附速率的变化倾向于由分析物分压的变化驱动。 还可以通过在两种或多种不同气体流动条件下进行浓度测量来减轻记忆效应，并采用数学模型来估计在一个或多个流动条件下的测量浓度的真实浓度和“记忆效应”贡献。 数学模型可以基于真实分析物浓度与流量或压力无关的假设，而“记忆效应”对测量浓度的贡献与流速或压力成反比。

公开(公告)号：US5452618A

公开(公告)日：1995-09-26

申请号：US311077

申请日：1994-09-23

申请人： Martin Bulow ,  Andre Micke

发明人： Martin Bulow ,  Andre Micke

IPC分类号： G01N7/02 ,  G01N1/10 ,  G01N1/16

CPC分类号： G01N7/02

摘要： A mechanism used in connection with determining a time resolved interaction between a target substance, for instance, an adsorbent and at least one agent, for instance, an adsorbate capable of interacting with the target substance. In accordance with the method the target substance and agent(s) are introduced into a sample vessel. At the same time, the target substance is oscillated within the sample vessel without changing the volume of the sample vessel. A concentration of one or more components associated with the time resolved interaction as a function of time is measured by measuring chamber pressure and simultaneously performing a mass spectroscopical analysis of chamber content at discrete time intervals. The target substance is oscillated by a mechanical movement which oscillates a sample holder configured to hold the target substance. The movement has a finger-like member, preferably formed by welded steel bellows and a curved member rotating within the finger-like member so that motion of the finger-like member does not change chamber volume and therefore effect the pressure measurements that are to be made in accordance with the method.

摘要翻译： 用于确定目标物质例如吸附剂和至少一种试剂（例如能够与目标物质相互作用的被吸附物质）之间的时间分辨相互作用的机制。 根据该方法，将目标物质和试剂引入样品容器中。 同时，目标物质在样品容器内振荡而不改变样品容器的体积。 通过测量室压力并且以离散的时间间隔同时对腔室内容进行质谱分析来测量与作为时间的函数的时间分辨相互作用相关联的一个或多个组分的浓度。 目标物质通过振荡被配置成保持目标物质的样品架的机械运动而振荡。 运动具有手指状构件，优选地由焊接钢波纹管形成，并且在指状构件内旋转的弯曲构件，使得指状构件的运动不改变室容积，并因此影响将要进行的压力测量 按照该方法制作。

公开(公告)号：US3796090A

公开(公告)日：1974-03-12

申请号：US3796090D

申请日：1971-07-14

申请人： FUJI PHOTO FILM CO LTD

发明人： NAKAJIMA Y ,  OHTANI K

IPC分类号： G01N7/02 ,  G01N19/00

CPC分类号： G01N7/02

摘要： A cam operated cyclically shifted holder moves a weight toward and away from an underlying material to measure the degree of swelling of liquid absorbed by the material by means of a device which measures the pressure acting on the material due to the oscillating weight.

摘要翻译： 凸轮操作的周期性移动的保持器使重量朝向和远离下层材料移动，以通过测量由于振动重量作用在材料上的压力的装置来测量被材料吸收的液体的膨胀程度。

公开(公告)号：US3045665A

公开(公告)日：1962-07-24

申请号：US68334157

申请日：1957-09-11

申请人： HARTMANN & BRAUN AG

发明人： PETER MOYAT

IPC分类号： G01N7/00 ,  G01N7/02 ,  G01N33/00 ,  G01N33/497 ,  G05D16/20

CPC分类号： G05D16/2066 ,  G01N7/00 ,  G01N7/02 ,  G01N33/497

公开(公告)号：US2613082A

公开(公告)日：1952-10-07

申请号：US8151649

申请日：1949-03-15

申请人： GUILD LLOYD V

发明人： GUILD LLOYD V

IPC分类号： F16K7/16 ,  F16L41/02 ,  G01N7/02

CPC分类号： F16K7/16 ,  F16L41/02 ,  G01N7/02 ,  Y10T137/87877

公开(公告)号：US07810376B2

公开(公告)日：2010-10-12

申请号：US11983128

申请日：2007-11-06

申请人： Serguei Koulikov

发明人： Serguei Koulikov

IPC分类号： G01N7/02

CPC分类号： G01N1/405 ,  G01N7/02 ,  G01N2001/2264 ,  G01N2001/387

摘要： The gas absorption/adsorption memory effect in gas analysis can be reduced by controlling gas flow conditions such that the partial pressure of the analyte of interest is held constant, if the measured analyte concentration is within a predetermined range. Keeping the analyte partial pressure constant is helpful for mitigating the memory effect because changes in analyte absorption/adsorption rates tend to be driven by changes in analyte partial pressure. The memory effect can also be mitigated by performing concentration measurements at two or more different gas flow conditions, and employing a mathematical model to estimate true concentration and “memory effect” contributions to measured concentrations at one or more of the flow conditions. The mathematical model can be based on an assumption that the true analyte concentration is independent of flow rate or pressure, while the “memory effect” contribution to measured concentration is inversely proportional to flow rate or pressure.

摘要翻译： 如果测量的分析物浓度在预定范围内，则气体分析中的气体吸收/吸附记忆效应可以通过控制气体流动条件来降低，使得目标分析物的分压保持恒定。 保持分析物分压恒定有助于减轻记忆效应，因为分析物吸收/吸附速率的变化倾向于由分析物分压的变化驱动。 还可以通过在两种或多种不同气体流动条件下进行浓度测量来减轻记忆效应，并采用数学模型来估计在一个或多个流动条件下的测量浓度的真实浓度和“记忆效应”贡献。 数学模型可以基于真实分析物浓度与流量或压力无关的假设，而“记忆效应”对测量浓度的贡献与流速或压力成反比。

公开(公告)号：US20020148307A1

公开(公告)日：2002-10-17

申请号：US10099870

申请日：2002-03-14

发明人： Otto Cornelis Jonkers

IPC分类号： G01N019/00

CPC分类号： H01L21/67253 ,  G01N7/02

摘要： The invention relates to an inspection system for process equipment for treating substrates, such as, for instance, semiconductor wafers or flat panel displays. The system is provided with a wireless sensor with which the interior of the process device can be inspected. The sensor is provided with a transmitter to transfer a signal, during inspection of the interior of the process device, to a receiver disposed outside the process device. The wireless sensor is arranged on a support having substantially the same dimensions as the substrates to be treated.

摘要翻译： 本发明涉及用于处理诸如半导体晶片或平板显示器的基板的工艺设备的检查系统。 该系统设有无线传感器，通过该无线传感器可以检查过程装置的内部。 该传感器设置有发射器，用于在检查过程装置的内部期间将信号传送到设置在处理装置外部的接收器。 无线传感器布置在具有与要处理的基板基本相同的尺寸的支撑件上。

公开(公告)号：US5767383A

公开(公告)日：1998-06-16

申请号：US799754

申请日：1997-02-11

申请人： Gary D. Keil ,  Ronald G. Morgan ,  Sheryl A. Tipton ,  Wayne A. Supak

发明人： Gary D. Keil ,  Ronald G. Morgan ,  Sheryl A. Tipton ,  Wayne A. Supak

IPC分类号： G01N31/00 ,  G01N1/00 ,  G01N7/02 ,  G01N33/00 ,  G01N7/00

CPC分类号： G01N7/02 ,  G01N33/0054

摘要： A process for automated measurement of ammonia in a gas mixture containing ammonia gas and one or more water-insoluble gases includes providing a water reservoir adapted for supplying water therefrom through a first solenoid valve and providing a measurement vessel adapted for receiving water. The vessel is adapted for draining the water therefrom through a second solenoid valve. The vessel is also adapted for receiving the gas mixture through a third solenoid valve and purging the gas mixture from the vessel through a fourth solenoid valve. The vessel is adapted for maintaining the gas in the vessel and receiving water thereinto in an amount sufficient to dissolve the ammonia gas contained in the gas mixture, into the water, and allowing a differential pressure between the gas mixture and the water containing dissolved ammonia to be measured. The process also includes providing a measurement vessel adapted for allowing height of water within the vessel to be measured, providing means for measuring height of water within measurement vessel, and providing recording means for converting the measured height signal to an ammonia concentration value.

摘要翻译： 一种用于在含有氨气和一种或多种不溶于水的气体的气体混合物中自动测量氨的方法包括提供适于通过第一电磁阀从其中供水以及提供适于接收水的测量容器的储水器。 容器适于通过第二电磁阀将水从其排出。 容器还适于通过第三电磁阀接收气体混合物，并通过第四电磁阀从容器中清除气体混合物。 容器用于将气体保持在容器中并以足以将包含在气体混合物中的氨气溶解到水中的量接收水，并且允许气体混合物和含有溶解氨的水之间的压差 被测量。 该方法还包括提供适于允许测量容器内的水的高度的测量容器，提供用于测量测量容器内的水的高度的装置，以及提供用于将测量的高度信号转换为氨浓度值的记录装置。

公开(公告)号：US5157960A

公开(公告)日：1992-10-27

申请号：US475659

申请日：1990-02-06

申请人： Timothy R. Brehm ,  Leon R. Glicksman

发明人： Timothy R. Brehm ,  Leon R. Glicksman

IPC分类号： G01N7/02 ,  G01N15/08

CPC分类号： G01N15/08 ,  G01N7/02

摘要： Method and apparatus are provided for accurately and more rapidly measuring the permeability of various test gases in cellular polymeric materials with very low permeation rates, comprising a constant volume test chamber sealed with indium gaskets, said chamber being connected to a gas inlet valve and test gas reservoir with pressure gauge, gas outlet valve and oil check valve, an absolute pressure transducer to track the change in pressure in the test chamber, and said chamber being submerged in a water bath for strict temperature control. A thinly cut foam sample is placed in the test chamber surrounded by the test gas, where the gas inside the sample is first allowed to reach equilibrium with the surrounding gas; the pressure of the surrounding gas is then raised or lowered, and the rate at which the sample takes up or gives off the test gas is recorded over time as a change in pressure of the test gas around the foam. From this pressure variation the desired permeability coefficient may be measured, and achieved more quickly due to the reduced thickness of the sample. Unlike standard prior art transmission-method devices, this new sorption method and apparatus also allows for separate determination of the diffusion and solubility coefficients; it further allows for the use of much thinner foam samples than can be reliably used in prior art methods, resulting in a substantial reduction in testing time. The effective diffusion coefficient is used as an input to a computational model which predicts the rate of aging in a foam insulation panel. The effective solubility coefficient is used primarily to understand the behavior of the blowing agent in the foam system.

摘要翻译： 提供了用于以非常低的渗透速率准确地并且更快速地测量多孔聚合材料中的各种测试气体的渗透性的方法和装置，其包括用铟垫片密封的恒定体积的测试室，所述室连接到气体入口阀和测试气体 具有压力表的储存器，气体出口阀和止油阀，用于跟踪测试室中的压力变化的绝对压力传感器，并且所述室被浸没在严格温度控制的水浴中。 将薄切的泡沫样品放置在由测试气体包围的测试室中，其中样品中的气体首先被允许与周围气体达到平衡; 然后周围气体的压力升高或降低，随着时间的推移，记录样品吸收或释放测试气体的速率随着泡沫周围的测试气体的压力变化而被记录。 从该压力变化可以测量期望的渗透系数，并且由于样品的厚度减小而更快地实现。 与标准现有技术的传输方法装置不同，这种新的吸附方法和装置还允许单独测定扩散和溶解度系数; 它进一步允许使用比现有技术方法中可靠地使用的更薄的泡沫样品，导致测试时间的显着降低。 有效扩散系数被用作预测泡沫隔热板中的老化速率的计算模型的输入。 有效的溶解度系数主要用于了解发泡剂在泡沫体系中的作用。

公开(公告)号：US4016065A

公开(公告)日：1977-04-05

申请号：US622991

申请日：1975-10-16

申请人： Sidney Marion Beck ,  Campbell Moore Gilmour

发明人： Sidney Marion Beck ,  Campbell Moore Gilmour

IPC分类号： C25B1/02 ,  G01N7/02 ,  G01N33/18 ,  C25B1/04

CPC分类号： G01N33/1806 ,  C25B1/02 ,  G01N7/02

摘要： The disclosed electrolytic field respirometer consists of a sample vessel in which oxygen is utilized by a biological sample. Oxygen is provided on demand from an electrolytic cell which is turned on when the electrolyte level in a contact tube rises because of decreased pressure in the sample vessel due to oxygen consumption. A compensating vessel is operatively connected to the electrolytic cell to balance pressure fluctuations due to changes in the environmental pressure or temperature to which the respirometer is subjected.

摘要翻译： 所公开的电场式呼吸计量仪由其中生物样品使用氧气的样品容器组成。 当由于氧消耗导致样品容器中的压力降低时，当接触管中的电解质水平升高时，电解池中的氧被提供。 补偿容器可操作地连接到电解池，以平衡由于呼吸计受到的环境压力或温度的变化引起的压力波动。