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公开(公告)号：US07505873B2
公开(公告)日：2009-03-17
申请号：US11231995
申请日：2005-09-22
CPC分类号： G05B19/41875 , G05B2219/31205 , G05B2219/31444 , G05B2219/31457 , G05B2219/32234 , Y02P90/22
摘要： A method is provided for centrally monitoring machines running at remote customer sites and providing customers with adequate support. The method includes collecting machine operating data, including data for each process stage, at the customer sites, and analyzing, at a central location, the collected machine operating data for each machine. Subsequently, a solution based upon the analysis is proposed to the customer for each of the machines, and the solution is then implemented. The method also includes continuously collecting data to check effectiveness of the installed machines and to verify the solution works.
摘要翻译： 提供了一种集中监控运行在远程客户现场的机器并为客户提供足够支持的方法。 该方法包括在客户现场收集机器操作数据，包括每个处理阶段的数据，并在中心位置分析每个机器的收集的机器操作数据。 随后，为每个机器的客户提出了基于分析的解决方案，然后实现该解决方案。 该方法还包括连续收集数据以检查已安装机器的有效性并验证解决方案是否有效。
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2.发明授权Systems and methods for offline and/or online batch monitoring using decomposition and signal approximation approaches 有权使用分解和信号近似方法进行离线和/或在线批量监控的系统和方法公开(公告)号：US08078434B2
公开(公告)日：2011-12-13
申请号：US12174955
申请日：2008-07-17
CPC分类号： G05B19/41885 , G05B19/41875 , G05B2219/31444 , G05B2219/32201
摘要： A method (300, 400, 500, 1200) for offline/online monitoring of batch processes. The method involves (312) decomposing a time domain of a batch process run (BPR) into several blocks and (334) building multivariate statistical models (MSMs) for each of them using archived data for a batch process (ABPD). ABPD comprises stored data obtained during BPRs. The method also involves (506, 1204) retrieving recently stored data (RSD) for a recent fully performed BPR run (FPRNEW) or current BPR run. The method further involves (520, 1210) building a feature vector matrix (FVM) using RSD. FVM contains feature vectors representing statistical measures of wavelet coefficients determined for variables (v0, . . . , vJ). A projection (1100, 1150, 1190) is formed by projecting feature vectors onto at least one MSM or a combined multivariate statistical model (CMSM). CMSM is a weighted average of at least two MSMs. Subsequently, at least one estimate is generated for FPRNEW or current BPR run using information provided by the projection (528, 1220).
摘要翻译： 一种用于批处理过程的脱机/在线监测的方法（300,400,500,100）。 该方法涉及（312）将批处理运行（BPR）的时域分解为若干块，并且（334）使用用于批处理（ABPD）的归档数据为其中的每一个构建多变量统计模型（MSM）。 ABPD包括在BPR期间获得的存储数据。 该方法还涉及（506,1204）检索用于最近完全执行的BPR运行（FPRNEW）或当前BPR运行的最近存储的数据（RSD）。 该方法还涉及（520,1012）使用RSD构建特征向量矩阵（FVM）。 FVM包含表示为变量（v0，...，vJ）确定的小波系数的统计度量的特征向量。 通过将特征向量投影到至少一个MSM或组合多变量统计模型（CMSM）上来形成投影（1100,1150,1190）。 CMSM是至少两个MSM的加权平均数。 随后，使用由投影（528,1220）提供的信息，为FPRNEW或当前BPR运行生成至少一个估计。
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3.发明申请SYSTEMS AND METHODS FOR OFFLINE AND/OR ONLINE BATCH MONITORING USING DECOMPOSITION AND SIGNAL APPROXIMATION APPROACHES 有权使用分解和信号近似方法进行离线和/或在线批量监测的系统和方法公开(公告)号：US20100017008A1
公开(公告)日：2010-01-21
申请号：US12174955
申请日：2008-07-17
IPC分类号： G06F19/00
CPC分类号： G05B19/41885 , G05B19/41875 , G05B2219/31444 , G05B2219/32201
摘要： A method (300, 400, 500, 1200) for offline/online monitoring of batch processes. The method involves (312) decomposing a time domain of a batch process run (BPR) into several blocks and (334) building multivariate statistical models (MSMs) for each of them using archived data for a batch process (ABPD). ABPD comprises stored data obtained during BPRs. The method also involves (506, 1204) retrieving recently stored data (RSD) for a recent fully performed BPR run (FPRNEW) or current BPR run. The method further involves (520, 1210) building a feature vector matrix (FVM) using RSD. FVM contains feature vectors representing statistical measures of wavelet coefficients determined for variables (v0, . . . , vJ). A projection (1100, 1150, 1190) is formed by projecting feature vectors onto at least one MSM or a combined multivariate statistical model (CMSM). CMSM is a weighted average of at least two MSMs. Subsequently, at least one estimate is generated for FPRNEW or current BPR run using information provided by the projection (528, 1220).
摘要翻译： 一种用于批处理过程的脱机/在线监测的方法（300,400,500,100）。 该方法涉及（312）将批处理运行（BPR）的时域分解为若干块，并且（334）使用用于批处理（ABPD）的归档数据为其中的每一个构建多变量统计模型（MSM）。 ABPD包括在BPR期间获得的存储数据。 该方法还涉及（506,1204）检索用于最近完全执行的BPR运行（FPRNEW）或当前BPR运行的最近存储的数据（RSD）。 该方法还涉及（520,1012）使用RSD构建特征向量矩阵（FVM）。 FVM包含表示为变量（v0，...，vJ）确定的小波系数的统计度量的特征向量。 通过将特征向量投影到至少一个MSM或组合多变量统计模型（CMSM）上来形成投影（1100,1150,1190）。 CMSM是至少两个MSM的加权平均数。 随后，使用由投影（528,1220）提供的信息，为FPRNEW或当前BPR运行生成至少一个估计。
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公开(公告)号：US07561988B2
公开(公告)日：2009-07-14
申请号：US10936498
申请日：2004-09-09
CPC分类号： G05B19/41875 , G05B2219/31205 , G05B2219/31444 , G05B2219/31457 , G05B2219/32234 , Y02P90/22
摘要： A method is provided for centrally monitoring machines running at remote customer sites and providing customers with adequate support. The method includes collecting machine operating data, including data for each process stage, at the customer sites, and analyzing, at a central location, the collected machine operating data for each machine. Subsequently, a solution based upon the analysis is proposed to the customer for each of the machines, and the solution is then implemented. The method also includes continuously collecting data to check effectiveness of the installed machines and to verify the solution works.
摘要翻译： 提供了一种集中监控运行在远程客户现场的机器并为客户提供足够支持的方法。 该方法包括在客户现场收集机器操作数据，包括每个处理阶段的数据，并在中心位置分析每个机器的收集的机器操作数据。 随后，为每个机器的客户提出了基于分析的解决方案，然后实现该解决方案。 该方法还包括连续收集数据以检查已安装机器的有效性并验证解决方案是否有效。
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公开(公告)号：US20060074603A1
公开(公告)日：2006-04-06
申请号：US11231995
申请日：2005-09-22
IPC分类号： G06F15/00
CPC分类号： G05B19/41875 , G05B2219/31205 , G05B2219/31444 , G05B2219/31457 , G05B2219/32234 , Y02P90/22
摘要： A method is provided for centrally monitoring machines running at remote customer sites and providing customers with adequate support. The method includes collecting machine operating data, including data for each process stage, at the customer sites, and analyzing, at a central location, the collected machine operating data for each machine. Subsequently, a solution based upon the analysis is proposed to the customer for each of the machines, and the solution is then implemented. The method also includes continuously collecting data to check effectiveness of the installed machines and to verify the solution works.
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公开(公告)号：US20060053023A1
公开(公告)日：2006-03-09
申请号：US10936498
申请日：2004-09-09
IPC分类号： G06Q99/00
CPC分类号： G05B19/41875 , G05B2219/31205 , G05B2219/31444 , G05B2219/31457 , G05B2219/32234 , Y02P90/22
摘要： A method is provided for centrally monitoring machines running at remote customer sites and providing customers with adequate support. The method includes collecting machine operating data, including data for each process stage, at the customer sites, and analyzing, at a central location, the collected machine operating data for each machine. Subsequently, a solution based upon the analysis is proposed to the customer for each of the machines, and the solution is then implemented. The method also includes continuously collecting data to check effectiveness of the installed machines and to verify the solution works.
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公开(公告)号：US20030002032A1
公开(公告)日：2003-01-02
申请号：US09895333
申请日：2001-07-02
发明人： Ofer Du-Nour
IPC分类号： G01N021/41
CPC分类号： G01N21/55 , G01B11/0625 , G01B11/0683 , G05B19/4184 , G05B2219/31442 , G05B2219/31444 , G05B2219/32197 , G05B2219/32243 , G05B2219/37224 , H01L21/67253 , H01L22/12 , H01L22/20 , Y02P90/14 , Y02P90/22
摘要： The use of an intensity spectrum as a fingerprint to determine the layer structure of a semiconductor wafer product or partial product, thereby to determine the routing history of the product through a production line and prevent routing errors. Also, a production line having a plurality of successive stages for construction of a product such as a semiconductor wafer, and routers for transferring partly constructed product between the stages such that each stage receives a respective predefined partly constructed product as its input. The production line comprises: a predetermined intensity spectrum for at least one stage representing the respective part construction for the stage, an intensity spectrum deriver located at said at least one stage operable to obtain intensity spectra of incoming partly constructed product, and a comparator, for comparing said obtained intensity spectra with said predetermined intensity spectrum, to determine whether said incoming partly constructed products correspond with said respective predefined part construction for the stage.
摘要翻译： 使用强度谱作为指纹来确定半导体晶片产品或部分产品的层结构，从而通过生产线确定产品的路由历史，并防止路由错误。 此外，具有用于构造诸如半导体晶片的产品的多个连续阶段的生产线以及用于在阶段之间转移部分构造的产品的路由器，使得每个阶段接收相应的预定义的部分构造的产品作为其输入。 生产线包括：用于至少一个阶段的预定强度谱，表示该阶段的相应部分结构，位于所述至少一个阶段的强度谱图，其可操作以获得进入的部分构造的产物的强度谱;以及比较器，用于 将所述获得的强度光谱与所述预定强度光谱进行比较，以确定所述进入的部分构造的产物是否与所述阶段的所述各个预定义部分结构相对应。
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公开(公告)号：US20230367296A1
公开(公告)日：2023-11-16
申请号：US18245557
申请日：2020-11-02
申请人： Hitachi, Ltd.
IPC分类号： G05B19/418
CPC分类号： G05B19/4184 , G05B19/41885 , G05B2219/31444 , G05B2219/32019
摘要： This industrial system is characterized by being provided with: a storage unit that stores design data used when constructing an industrial line; a simulation execution unit that executes a simulation of movement of the industrial line, based on the design data; and a detection unit that compares a result of the simulation with the movement of the industrial line during operation and detects an abnormality in components of the industrial line. With such a configuration and movement, the present invention can be utilized for line operation support and high-resolution abnormality detection.
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9.发明申请SYSTEM AND METHOD FOR QUANTIFYING AN IMPROVEMENT IN AN ADVANCED PROCESS CONTROL STRATEGY 审中-公开用于在先进过程控制策略中量化改进的系统和方法公开(公告)号：US20080243271A1
公开(公告)日：2008-10-02
申请号：US11694874
申请日：2007-03-30
申请人： Ram Gandikota , Dario Nappa
发明人： Ram Gandikota , Dario Nappa
IPC分类号： G05B13/02
CPC分类号： G05B19/41875 , G05B2219/31444 , G05B2219/32201 , Y02P90/22
摘要： An analysis application utilizes several quantitative metrics that characterize a controller's performance with respect to: specification limits, extreme values, and target and trend versus time. The application utilizes the metrics to provide statistical p-values.
摘要翻译： 分析应用程序使用几个定量度量，其表征控制器在以下方面的性能：规格限制，极值，目标和趋势与时间。 该应用程序利用度量来提供统计的p值。
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公开(公告)号：US06762838B2
公开(公告)日：2004-07-13
申请号：US09895333
申请日：2001-07-02
申请人： Ofer Du-Nour
发明人： Ofer Du-Nour
IPC分类号： G01B1106
CPC分类号： G01N21/55 , G01B11/0625 , G01B11/0683 , G05B19/4184 , G05B2219/31442 , G05B2219/31444 , G05B2219/32197 , G05B2219/32243 , G05B2219/37224 , H01L21/67253 , H01L22/12 , H01L22/20 , Y02P90/14 , Y02P90/22
摘要： The use of an intensity spectrum as a fingerprint to determine the layer structure of a semiconductor wafer product or partial product, thereby to determine the routing history of the product through a production line and prevent routing errors. Also, a production line having a plurality of successive stages for construction of a product such as a semiconductor wafer, and routers for transferring partly constructed product between the stages such that each stage receives a respective predefined partly constructed product as its input. The production line comprises: a predetermined intensity spectrum for at least one stage representing the respective part construction for the stage, an intensity spectrum deriver located at said at least one stage operable to obtain intensity spectra of incoming partly constructed product, and a comparator, for comparing said obtained intensity spectra with said predetermined intensity spectrum, to determine whether said incoming partly constructed products correspond with said respective predefined part construction for the stage.
摘要翻译： 使用强度谱作为指纹来确定半导体晶片产品或部分产品的层结构，从而通过生产线确定产品的路由历史，并防止路由错误。 此外，具有用于构造诸如半导体晶片的产品的多个连续阶段的生产线以及用于在阶段之间转移部分构造的产品的路由器，使得每个阶段接收相应的预定义的部分构造的产品作为其输入。 生产线包括：用于至少一个阶段的预定强度谱，表示该阶段的相应部分结构，位于所述至少一个阶段的强度谱图，其可操作以获得进入的部分构造的产物的强度谱;以及比较器，用于 将所述获得的强度光谱与所述预定强度光谱进行比较，以确定所述进入的部分构造的产物是否与所述阶段的所述各个预定义部分结构相对应。
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