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    Manipulator and method of controlling manipulator
    3.
    发明授权
    Manipulator and method of controlling manipulator 有权
    操纵器和控制机械手的方法

    公开(公告)号：US08019473B2

    公开(公告)日：2011-09-13

    申请号：US12423289

    申请日：2009-04-14

    申请人： Yoshitaka Umemoto ,  Kazuhiko Takahashi

    发明人： Yoshitaka Umemoto ,  Kazuhiko Takahashi

    IPC分类号： G05B19/04 ,  G05B19/18 ,  G05B19/418 ,  G05B19/408 ,  B25J15/02

    CPC分类号： B25J9/1674 ,  A61B1/0051 ,  A61B5/065 ,  G05B19/4062 ,  G05B2219/37175 ,  G05B2219/37514 ,  G05B2219/37522 ,  G05B2219/42291 ,  G05B2219/42306 ,  G05B2219/42329 ,  G05B2219/45118

    摘要： A manipulator includes: a drive section which electrically drives a joint; an instruction input section which executes instruction input; a control section which generates a driving signal in response to the instruction input; a sensor which detects an operation status of the joint or the drive section in time series; a setting section which sets an allowable operation range of the drive section; a determination section which determines whether an operation status signal including a detection signal is within the allowable operation range; and a replacement section which, in a case when the operation status signal is determined as deviating from the allowable operation range, replaces the detection signal with a previous detection signal acquired just before the determination of deviance in order to generate a driving signal.

    摘要翻译： 机械手包括：电驱动接头的驱动部分; 执行指令输入的指令输入部; 控制部分，其响应于所述指令输入产生驱动信号; 传感器，其以时间序列检测接头或驱动部的动作状态; 设定部，其设定所述驱动部的允许动作范围; 确定部分，其确定包括检测信号的操作状态信号是否在允许的操作范围内; 以及替换部分，在操作状态信号被确定为偏离可允许操作范围的情况下，用刚刚在偏离确定之前获取的先前检测信号代替检测信号，以产生驱动信号。

    Monitoring a single-wafer processing system
    5.
    发明授权
    Monitoring a single-wafer processing system 有权
    监控单晶圆处理系统

    公开(公告)号：US07340377B2

    公开(公告)日：2008-03-04

    申请号：US11456020

    申请日：2006-07-06

    申请人： Sanjeev Kaushal ,  Pradeep Pandey ,  Kenji Sugishima

    发明人： Sanjeev Kaushal ,  Pradeep Pandey ,  Kenji Sugishima

    IPC分类号： G06F11/30

    CPC分类号： G05B19/41875 ,  C23C16/52 ,  G05B23/0254 ,  G05B2219/37514 ,  G05B2219/37533 ,  G05B2219/45031 ,  Y02P90/22 ,  Y02P90/26

    摘要： A method of monitoring a single-wafer processing system in real-time using low-pressure based modeling techniques that include processing a wafer in a processing chamber; determining a measured dynamic process response for a rate of change for a process parameter; executing a real-time dynamic model to generate a predicted dynamic process response; determining a dynamic estimation error using a difference between the predicted dynamic process response and the expected process response; and comparing the dynamic estimation error to operational limits.

    摘要翻译： 一种使用基于低压的建模技术来实时监测单晶片处理系统的方法，其包括在处理室中处理晶片; 确定针对过程参数的变化率的测量的动态过程响应; 执行实时动态模型以产生预测的动态过程响应; 使用预测的动态过程响应和预期过程响应之间的差来确定动态估计误差; 并将动态估计误差与运算极限进行比较。

    MONITORING A SYSTEM DURING LOW-PRESSURE PROCESSES
    6.
    发明申请
    MONITORING A SYSTEM DURING LOW-PRESSURE PROCESSES 有权
    在低压过程中监测系统

    公开(公告)号：US20070239375A1

    公开(公告)日：2007-10-11

    申请号：US11278379

    申请日：2006-03-31

    申请人： Sanjeev Kaushal ,  Pradeep Pandey ,  Kenji Sugishima

    发明人： Sanjeev Kaushal ,  Pradeep Pandey ,  Kenji Sugishima

    IPC分类号： G06F19/00

    CPC分类号： G05B19/41875 ,  C23C16/52 ,  G05B23/0254 ,  G05B2219/37514 ,  G05B2219/37533 ,  G05B2219/45031 ,  Y02P90/22 ,  Y02P90/26

    摘要： A method of monitoring a processing system in real-time using low-pressure based modeling techniques that include processing one or more of wafers in a processing chamber; determining a measured dynamic process response for a rate of change for a process parameter; executing a real-time dynamic model to generate a predicted dynamic process response; determining a dynamic estimation error using a difference between the predicted dynamic process response and the expected process response; and comparing the dynamic estimation error to operational limits.

    摘要翻译： 一种使用基于低压的建模技术实时监控处理系统的方法，所述技术包括处理处理室中的一个或多个晶片; 确定针对过程参数的变化率的测量的动态过程响应; 执行实时动态模型以产生预测的动态过程响应; 使用预测的动态过程响应和预期过程响应之间的差来确定动态估计误差; 并将动态估计误差与运算极限进行比较。

    MANIPULATOR AND METHOD OF CONTROLLING MANIPULATOR
    7.
    发明申请
    MANIPULATOR AND METHOD OF CONTROLLING MANIPULATOR 有权
    操纵器和控制操纵器的方法

    公开(公告)号：US20090259340A1

    公开(公告)日：2009-10-15

    申请号：US12423289

    申请日：2009-04-14

    申请人： Yoshitaka UMEMOTO ,  Kazuhiko TAKAHASHI

    发明人： Yoshitaka UMEMOTO ,  Kazuhiko TAKAHASHI

    IPC分类号： B25J9/04

    CPC分类号： B25J9/1674 ,  A61B1/0051 ,  A61B5/065 ,  G05B19/4062 ,  G05B2219/37175 ,  G05B2219/37514 ,  G05B2219/37522 ,  G05B2219/42291 ,  G05B2219/42306 ,  G05B2219/42329 ,  G05B2219/45118

    摘要： A manipulator includes: a drive section which electrically drives a joint; an instruction input section which executes instruction input; a control section which generates a driving signal in response to the instruction input; a sensor which detects an operation status of the joint or the drive section in time series; a setting section which sets an allowable operation range of the drive section; a determination section which determines whether an operation status signal including a detection signal is within the allowable operation range; and a replacement section which, in a case when the operation status signal is determined as deviating from the allowable operation range, replaces the detection signal with a previous detection signal acquired just before the determination of deviance in order to generate a driving signal.

    摘要翻译： 机械手包括：电驱动接头的驱动部分; 执行指令输入的指令输入部; 控制部分，其响应于所述指令输入产生驱动信号; 传感器，其以时间序列检测接头或驱动部的动作状态; 设定部，其设定所述驱动部的允许动作范围; 确定部分，其确定包括检测信号的操作状态信号是否在允许的操作范围内; 以及替换部分，在操作状态信号被确定为偏离可允许操作范围的情况下，用刚刚在偏离确定之前获取的先前检测信号代替检测信号，以产生驱动信号。

    SELECTIVELY PRESENTING TIMESTAMPED TIME-SERIES DATA VALUES FOR RETRIEVED SUPERVISORY CONTROL AND MANUFACTURING/PRODUCTION PARAMETERS
    8.
    发明申请
    SELECTIVELY PRESENTING TIMESTAMPED TIME-SERIES DATA VALUES FOR RETRIEVED SUPERVISORY CONTROL AND MANUFACTURING/PRODUCTION PARAMETERS 有权
    选择性提出用于检索监控和制造/生产参数的时间序列数据值

    公开(公告)号：US20080027683A1

    公开(公告)日：2008-01-31

    申请号：US11460176

    申请日：2006-07-26

    申请人： Elliott S. Middleton ,  Shripathi Kamath

    发明人： Elliott S. Middleton ,  Shripathi Kamath

    IPC分类号： G06F17/40 ,  G06F19/00

    CPC分类号： G05B23/0272 ,  G05B2219/34477 ,  G05B2219/37514

    摘要： A process control and manufacturing information database client application is disclosed for rendering and displaying a filtered set of received time-series data. A client application, such as a trending client that graphically displays a series of data point values for a particular observed parameter of a manufacturing process receives, via a data acquisition interface, a set of timestamped time-series data values for an observed parameter from a process control and manufacturing information database. Thereafter, the client application invokes a time-series data filter that includes/supports at least one filtering operation that is applied to the set of timestamped time-series data values to render a filtered data set for plotting/drawing on the graphical display interface. The filtered data set is thereafter rendered by a display function as a series of plotted points on a time-line graph.

    摘要翻译： 公开了一种过程控制和制造信息数据库客户端应用程序，用于呈现和显示经过滤的一组接收到的时间序列数据。 客户端应用程序，例如以图形方式显示制造过程的特定观察参数的一系列数据点值的趋势客户端，经由数据获取接口从一个或多个数据接收器接收观测参数的一组时间戳的时间序列数据值 过程控制和制造信息数据库。 此后，客户端应用程序调用时间序列数据过滤器，该时间序列数据过滤器包括/支持至少一个应用于时间戳时间序列数据值集合的过滤操作，以呈现用于在图形显示界面上绘制/绘制的过滤数据集。 滤波后的数据集随后由显示功能呈现为时间线图上的一系列绘图点。

    MONITORING A SINGLE-WAFER PROCESSING SYSTEM
    9.
    发明申请
    MONITORING A SINGLE-WAFER PROCESSING SYSTEM 有权
    监测单波加工系统

    公开(公告)号：US20070233427A1

    公开(公告)日：2007-10-04

    申请号：US11456020

    申请日：2006-07-06

    申请人： Sanjeev Kaushal ,  Pradeep Pandey ,  Kenji Sugishima

    发明人： Sanjeev Kaushal ,  Pradeep Pandey ,  Kenji Sugishima

    IPC分类号： G06F19/00 ,  B05C11/00 ,  G21C17/00 ,  H01L21/306

    CPC分类号： G05B19/41875 ,  C23C16/52 ,  G05B23/0254 ,  G05B2219/37514 ,  G05B2219/37533 ,  G05B2219/45031 ,  Y02P90/22 ,  Y02P90/26

    摘要： A method of monitoring a single-wafer processing system in real-time using low-pressure based modeling techniques that include processing a wafer in a processing chamber; determining a measured dynamic process response for a rate of change for a process parameter; executing a real-time dynamic model to generate a predicted dynamic process response; determining a dynamic estimation error using a difference between the predicted dynamic process response and the expected process response; and comparing the dynamic estimation error to operational limits.

    摘要翻译： 一种使用基于低压的建模技术来实时监测单晶片处理系统的方法，其包括在处理室中处理晶片; 确定针对过程参数的变化率的测量的动态过程响应; 执行实时动态模型以产生预测的动态过程响应; 使用预测的动态过程响应和预期过程响应之间的差来确定动态估计误差; 并将动态估计误差与运算极限进行比较。

    SELECTIVELY PRESENTING TIMESTAMPED TIME-SERIES DATA VALUES FOR RETRIEVED SUPERVISORY CONTROL AND MANUFACTURING/PRODUCTION PARAMETERS
    10.
    发明申请
    SELECTIVELY PRESENTING TIMESTAMPED TIME-SERIES DATA VALUES FOR RETRIEVED SUPERVISORY CONTROL AND MANUFACTURING/PRODUCTION PARAMETERS 审中-公开
    选择性提出用于检索监控和制造/生产参数的时间序列数据值

    公开(公告)号：US20110219327A1

    公开(公告)日：2011-09-08

    申请号：US13013520

    申请日：2011-01-25

    申请人： Elliott S. Middleton, JR. ,  Shripathi Kamath

    发明人： Elliott S. Middleton, JR. ,  Shripathi Kamath

    IPC分类号： G06F3/048

    CPC分类号： G05B23/0272 ,  G05B2219/34477 ,  G05B2219/37514

    摘要： A process control and manufacturing information database client application is disclosed for rendering and displaying a filtered set of received time-series data. A client application, such as a trending client that graphically displays a series of data point values for a particular observed parameter of a manufacturing process receives, via a data acquisition interface, a set of timestamped time-series data values for an observed parameter from a process control and manufacturing information database. Thereafter, the client application invokes a time-series data filter that includes/supports at least one filtering operation that is applied to the set of timestamped time-series data values to render a filtered data set for plotting/drawing on the graphical display interface. The filtered data set is thereafter rendered by a display function as a series of plotted points on a time-line graph.

    摘要翻译： 公开了一种过程控制和制造信息数据库客户端应用程序，用于呈现和显示经过滤的一组接收到的时间序列数据。 客户端应用程序，例如以图形方式显示制造过程的特定观察参数的一系列数据点值的趋势客户端，经由数据获取接口从一个或多个数据接收器接收观测参数的一组时间戳的时间序列数据值 过程控制和制造信息数据库。 此后，客户端应用程序调用时间序列数据过滤器，该时间序列数据过滤器包括/支持至少一个应用于时间戳时间序列数据值集合的过滤操作，以呈现用于在图形显示界面上绘制/绘制的过滤数据集。 滤波后的数据集随后由显示功能呈现为时间线图上的一系列绘图点。