Wafer holding apparatus
    1.
    发明授权
    Wafer holding apparatus 有权
    晶圆保持装置

    公开(公告)号:US06811040B2

    公开(公告)日:2004-11-02

    申请号:US10191192

    申请日:2002-07-09

    IPC分类号: A47G1908

    摘要: A wafer holding apparatus composed of a plurality of rods joined at opposite ends by endplates. Each rod at each end is secured to the endplates by a mechanical dovetail joint. The dovetail joint secures the rods to the endplates without the need for sealing or coating agents. Also, auxiliary mechanical components such as nuts and bolts to secure the joint components need not be employed to secure the joint. Each rod has multiple grooves or slits for placing multiple semiconductor wafers that are to be processed in processing chambers. The wafer holding apparatus is oxidation resistant, chemical resistant and thermal shock resistant.

    摘要翻译: 一种晶片保持装置,由多个由端板在相对端连接的杆构成。 每个端部的每个杆通过机械燕尾接头固定到端板。 燕尾接头将杆固定到端板上,而不需要密封或涂层剂。 此外,不需要使用用于固定接头部件的辅助机械部件,例如螺母和螺栓来固定接头。 每个杆具有用于放置要在处理室中处理的多个半导体晶片的多个凹槽或狭缝。 晶片保持装置抗氧化,耐化学腐蚀和耐热冲击。

    Glass pane handling assembly
    2.
    发明授权
    Glass pane handling assembly 失效
    玻璃板处理组件

    公开(公告)号:US06783010B1

    公开(公告)日:2004-08-31

    申请号:US10264955

    申请日:2002-10-04

    申请人: Monte R. Berger

    发明人: Monte R. Berger

    IPC分类号: A47G1908

    CPC分类号: B65G49/062

    摘要: A glass pane handling assembly consisting of a base frame having left and right roller tracks; a lock bar having a helical bolt receiving slot, the lock bar extending parallel to the left and right sides of the base frame; ball bearings interconnecting ends of the lock bar with the base frame; a glass carrying frame having upwardly extending glass pane supporting arms; rollers extending leftwardly and rightwardly from the glass carrying frame, the rollers interconnecting the base and glass carrying frames; a helical bolt extending into the lock bar's bolt receiving slot, the helical bolt being rigidly attached to the glass carrying frame; and an electric motor and pulley assembly operatively connected to the lock bar and adapted for alternately rotating and counter-rotating the lock bar.

    摘要翻译: 一种玻璃板处理组件,包括具有左和右辊道的基架; 锁杆,具有螺旋形螺栓接收槽,所述锁杆平行于所述基架的左侧和右侧延伸; 将所述锁杆的端部与所述底座相互连接的滚珠轴承; 具有向上延伸的玻璃板支撑臂的玻璃承载框架; 辊子从玻璃承载框架向左和向右延伸,滚子将基座和玻璃承载框架相互连接; 螺旋螺栓延伸到锁杆的螺栓接收槽中,螺旋螺栓刚性地附接到玻璃承载框架; 以及电动马达和皮带轮组件,其可操作地连接到所述锁定杆并且适于交替地旋转和相对旋转所述锁定杆。

    Semiconductor wafer cassette
    3.
    发明授权
    Semiconductor wafer cassette 有权
    半导体晶片盒

    公开(公告)号:US06691876B2

    公开(公告)日:2004-02-17

    申请号:US10056357

    申请日:2002-01-25

    IPC分类号: A47G1908

    CPC分类号: H01L21/6732 H01L21/67326

    摘要: A semiconductor wafer cassette has a first side wall, a second side wall opposite the first side wall, a front surface, and a back surface opposite the front surface. A body defines an internal bay portion with slots for vertically receiving wafers, each slot of the internal bay portion having one support slab. The body also includes two parallel legs for supporting the cassette and a handle for handling the cassette.

    摘要翻译: 半导体晶片盒具有第一侧壁,与第一侧壁相对的第二侧壁,前表面和与前表面相对的后表面。 主体限定具有用于垂直接收晶片的槽的内部间隔部分,内部间隔部分的每个槽具有一个支撑板。 该主体还包括用于支撑盒的两个平行腿和用于处理盒的手柄。

    Support device for boards, in particular for printed circuit boards
    4.
    发明授权
    Support device for boards, in particular for printed circuit boards 失效
    板的支撑装置,特别是印刷电路板

    公开(公告)号:US06547082B1

    公开(公告)日:2003-04-15

    申请号:US10030934

    申请日:2002-04-04

    申请人: Ezio Babini

    发明人: Ezio Babini

    IPC分类号: A47G1908

    CPC分类号: H05K7/1408 H05K7/1405

    摘要: In a support device for printed circuit broads with a support structure, equipped with at least one board guiding groove, a locking group has the task of locking detachably the boards. The support structure has at least one transversal cutting which crosses the groove and cooperates with the locking group. The locking group includes a guiding element which slides inside a relative guiding seat. One end of the guiding element is connected to a plate provided with at least one locking element which is introduced inside the transversal cutting for locking the board.

    摘要翻译: 在具有支撑结构的印刷电路板的支撑装置中,配备有至少一个板引导槽,锁定组具有可拆卸地锁定板的任务。 支撑结构具有穿过凹槽并与锁定组配合的至少一个横向切割。 锁定组包括在相对引导座内滑动的引导元件。 引导元件的一端连接到设置有至少一个锁定元件的板,该至少一个锁定元件被引入到用于锁定板的横向切割器内。

    Device for drying objects
    5.
    发明授权
    Device for drying objects 失效
    干燥物品的设备

    公开(公告)号:US06516956B2

    公开(公告)日:2003-02-11

    申请号:US10090307

    申请日:2002-03-04

    IPC分类号: A47G1908

    CPC分类号: A47L19/04

    摘要: A device for supporting objects for drying. This device contains a catch basin, for receiving fluid that drips off of these drying objects. Attached to the catch basin is a multi-part rack, wherein each part has a front end and a back end. The back end of each part of the multi-part rack is rotatably supported within the catch basin. In addition, there is also a complementary rack. This complementary rack is rotatably attached to the catch basin and extends in a substantially upright or vertical position. Both the multi-part rack and the complementary rack are comprised of a series of parallel extending slats that are spaced apart from each other to receive a plate between these parallel extending slats. These parallel extending slats are also designed to support a series of pots on either the multi-part rack or the complementary rack wherein these parallel extending slats allow water to drip down through the slats and into the catch basin.

    摘要翻译: 用于支撑物体进行干燥的装置。 该装置包含一个捕获池,用于接收从这些干燥物体滴下的流体。 附着在渔盆上的是多部分的机架,其中每个部分都有一个前端和一个后端。 多部分机架的每个部分的后端可旋转地支撑在收集盆内。 另外还有一个互补的机架。 这个互补的齿条可旋转地安装在卡盘盆上,并以基本直立或垂直的方式延伸。 多部分齿条和互补齿条均由一系列平行延伸的板条构成,彼此间隔开以在这些平行的延伸板条之间接纳板。 这些平行延伸的板条还被设计成支撑多部分机架或互补齿条上的一系列罐,其中这些平行延伸的板条允许水通过板条滴落并进入捕集池。

    Silicon fixtures for supporting wafers during thermal processing
    6.
    发明授权
    Silicon fixtures for supporting wafers during thermal processing 有权
    用于在热处理期间支撑晶片的硅夹具

    公开(公告)号:US06450346B1

    公开(公告)日:2002-09-17

    申请号:US09608557

    申请日:2000-06-30

    IPC分类号: A47G1908

    CPC分类号: H01L21/67303 H01L21/67306

    摘要: A silicon tower or boat for removably supporting a plurality of silicon wafers during thermal processing. A preferred embodiment of the tower includes four legs secured on their ends to two bases. A plurality of slots are cut in the legs allowing slidable insertion of the wafers and support for them. The legs preferably have a rounded wedge shape with a curved front surface of small radius cut with the slots and a back surface that is either flat or curved with a substantially larger radius. Preferably, the legs are machined from virgin polysilicon formed by chemical vapor deposition from silane. The bases may be either virgin poly or monocrystalline silicon and be either integral or composed of multiple parts. Virgin polysilicon is preferably annealed to above 1025° C. before machining. Silicon parts may be joined by applying a spin-on glass between the parts and annealing the assembly. After assembly, the surface of a tower is subjected to sub-surface working.

    摘要翻译: 一种用于在热处理期间可移除地支撑多个硅晶片的硅塔或船。 塔的优选实施例包括在其端部固定到两个基座的四个腿。 在腿中切割多个槽,允许可滑动地插入晶片并为它们提供支撑。 腿部优选具有圆形的楔形形状,其具有小的半径的弯曲的前表面,其具有狭槽,并且后表面具有基本上较大的半径的平坦或弯曲。 优选地,腿由通过来自硅烷的化学气相沉积形成的原始多晶硅加工而成。 碱可以是原始的多晶硅或单晶硅,并且是整体的或由多个部分组成。 维氏多晶硅优选在加工前退火至高于1025℃。 可以通过在部件之间施加旋涂玻璃并退火组件来连接硅部件。 组装后,塔的表面经受亚表面加工。

    Vertical type wafer supporting jig
    7.
    发明授权
    Vertical type wafer supporting jig 失效
    垂直型晶片支撑夹具

    公开(公告)号:US06796439B2

    公开(公告)日:2004-09-28

    申请号:US10140764

    申请日:2002-05-08

    申请人: Itsuo Araki

    发明人: Itsuo Araki

    IPC分类号: A47G1908

    摘要: In a vertical type wafer supporting jig, a ring-like support plate is fixed to support pillars by a simple structure without conventional welding and without risk of the ring-like support plate falling off. The vertical type wafer supporting jig is configured for mounting many wafers onto many support plates stacked in a vertical direction and fixed to support pillars with a predetermined wafer mounting interval between the support plates. Support groove portions into which the support plates are inserted and supported are formed in the support pillars with a predetermined interval in the vertical direction between them. A fixing rod is provided adjoining at least one of the support pillars. A peripheral part of the support plate has at least one receiving groove corresponding to the fixing rod, and the support plate is fixed to and supported by the support pillars by inserting the support plate into the support groove part, in which it is supported, and fitting the fixing rod into the receiving groove of the support plate.

    摘要翻译: 在垂直型晶片支撑夹具中,环状支撑板通过简单的结构被固定成支撑柱,而不需要常规的焊接,并且没有环状支撑板脱落的风险。 垂直型晶片支撑夹具被配置为将许多晶片安装到沿垂直方向堆叠的许多支撑板上,并且在支撑板之间以预定的晶片安装间隔固定到支撑柱。 在支撑柱中,支撑板被插入和支撑在其中的支撑槽部分以它们之间的垂直方向上的预定间隔形成在支撑柱中。 设置有邻接至少一个支撑柱的固定杆。 支撑板的周边部分具有至少一个对应于固定杆的接收槽,并且支撑板通过将支撑板插入其支撑的支撑槽部分中而固定到支撑柱并由其支撑,并且 将固定杆装配到支撑板的接收槽中。

    Frame structure for housing panel plates
    8.
    发明授权
    Frame structure for housing panel plates 失效
    外壳面板的框架结构

    公开(公告)号:US06749072B2

    公开(公告)日:2004-06-15

    申请号:US10166388

    申请日:2002-06-11

    IPC分类号: A47G1908

    CPC分类号: A47B45/00 H05K7/1424

    摘要: A frame structure includes a pair of sideboards facing each other, each sideboard having an inner surface provided with a plurality of support grooves for receiving and supporting panel plates, a first joint for fixing one of the pair of sideboards to a base and a second joint for fixing the other of the pair of sideboards to the base and provided with a movement-effecting mechanism. The first and second joints have formed on the facing inner surfaces thereof at substantially the same height steps for contacting side surfaces of the panel plates and supporting the panel plates. At least one of the steps has a surface for contacting at one side surface of one of the panel plates prior to panel plates being received in the plurality of support grooves in order to set a distance between end surfaces of opposed ones of the plurality of support grooves equal to a sum of the width of the panel plates received in and supported by the plurality of support grooves and a predetermined clearance. The at least one surface of the steps projects inward by the predetermined clearance from the end surfaces of the support grooves of one of the pair of sideboards.

    摘要翻译: 框架结构包括一对面对面的侧板,每个侧板具有设置有用于接收和支撑面板的多个支撑槽的内表面,用于将一对侧板中的一个固定到基座的第一接头和第二接头 用于将一对侧板中的另一侧固定到基座并设置有运动实施机构。 第一和第二关节在其相对的内表面上形成有大致相同的高度台阶,用于接触面板的侧表面并支撑面板。 所述台阶中的至少一个具有用于在将面板接纳在所述多个支撑槽中之前的一个所述面板的一个侧表面处接触的表面,以便设置所述多个支撑件中相对的支撑件的端表面之间的距离 凹槽等于容纳在多个支撑槽中并由多个支撑槽支撑的面板的宽度和预定间隙的总和。 台阶的至少一个表面从一对侧板之一的支撑槽的端面向内突出预定的间隙。

    Fixing device for attaching an auxiliary card in a personal computer
    9.
    发明授权
    Fixing device for attaching an auxiliary card in a personal computer 有权
    用于将辅助卡附接到个人计算机中的固定装置

    公开(公告)号:US06681939B2

    公开(公告)日:2004-01-27

    申请号:US10063078

    申请日:2002-03-17

    IPC分类号: A47G1908

    CPC分类号: H05K7/1429

    摘要: A fixing device for attaching an auxiliary card in a personal computer. The fixing device includes a hole formed at each end of a securing module and a main body. The main body includes an elastic portion at a top end of the main body, two arms located at the two ends of the main body, and two engaging portions, one located on each arm. The engaging portions are inserted into the holes at the ends of the securing module, coupling the main body and the securing module, while allowing the main body to partially rotate around the securing module. The elastic portion is used to elastically clamp the auxiliary card in place.

    摘要翻译: 一种用于将辅助卡附接到个人计算机中的固定装置。 定影装置包括形成在固定模块和主体的每个端部处的孔。 主体包括在主体的顶端的弹性部分,位于主体两端的两个臂和位于每个臂上的两个接合部分。 接合部分插入到固定模块的端部处的孔中,连接主体和固定模块,同时允许主体围绕固定模块部分旋转。 弹性部分用于将辅助卡弹性夹紧就位。

    Dishwasher rack with pivotable fences
    10.
    发明授权
    Dishwasher rack with pivotable fences 有权
    洗碗机架与可枢转的栅栏

    公开(公告)号:US06571965B1

    公开(公告)日:2003-06-03

    申请号:US09548094

    申请日:2000-04-12

    IPC分类号: A47G1908

    CPC分类号: A47L15/503

    摘要: A dishwasher rack which includes a basket supporting a plurality of fences rotatably about a common axis. The basket has a plurality of wires forming a bottom wall, a pair of side walls and a front and back wall. The bottom wall has a plurality of upwardly oriented tines connected to and extending from the bottom wall in a first area and further has an open area without upwardly oriented tines. A first fence is provided having an axle wire and a plurality of support wires. The axle wire is rotatably supported adjacent the bottom wall such that the first fence may be rotated between a front position and a back position. A second fence is provided having a connection wire and a plurality of support wires. The connection wire is rotatably connected to axle wire such that the second fence may rotate about the axle wire between a front position and a back position. The first fence and second fence may be rotated to the first position such that the support wires of the first fence and the support wires of the second fence form an upstanding array for supporting dishes. Alternatively, one or both of the first fence and second fence may be rotated to the back position.

    摘要翻译: 一种洗碗机架,其包括围绕公共轴线可旋转地支撑多个栅栏的篮。 筐具有形成底壁,一对侧壁和前后壁的多根线。 底壁具有多个向上定向的齿,其在第一区域中与底壁连接并从底壁延伸,并且还具有没有向上定向的齿的敞开区域。 提供具有轴线和多个支撑线的第一挡板。 轴线可靠地邻近底壁被支撑,使得第一挡板可以在前部位置和后部位置之间旋转。 提供具有连接线和多个支撑线的第二围栏。 连接线可旋转地连接到车轴线,使得第二挡板可以围绕车轴线在前部位置和后部位置之间旋转。 第一篱笆和第二篱笆可以旋转到第一位置,使得第一篱笆的支撑线和第二篱笆的支撑线形成用于支撑盘的直立阵列。 或者,第一挡板和第二挡板中的一个或两个可以旋转到后部位置。