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1.
公开(公告)号:US20240254000A1
公开(公告)日:2024-08-01
申请号:US18634542
申请日:2024-04-12
Applicant: Shin-Etsu Chemical Co., Ltd.
Inventor: Yasushi Takai , Noriaki Hamaya
IPC: C01F17/259 , C01F17/218 , C01F17/265 , C23C4/10 , C23C4/134
CPC classification number: C01F17/259 , C01F17/218 , C01F17/265 , C23C4/10 , C23C4/134 , C01P2004/61
Abstract: Provided is a slurry for suspension plasma spraying, which is a spray material used for suspension plasma spraying in an atmosphere including an oxygen-containing gas, contains 5-40 mass % of rare earth fluoride particles having a maximum particle diameter (D100) of 12 μm or less, and contains one or more types of solvent selected from among water and organic solvents. A rare earth acid fluoride-containing sprayed film, in which process shift and particle generation hardly occur, can be stably formed on a base material by carrying out suspension plasma spraying in an atmosphere including an oxygen-containing gas. A spraying member provided with this sprayed film exhibits excellent corrosion resistance to halogen-based gas plasma.
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公开(公告)号:US12018385B2
公开(公告)日:2024-06-25
申请号:US18339282
申请日:2023-06-22
Applicant: KoMiCo Ltd.
Inventor: Ki Won Hong , Dong Hun Jeong , Seong Sik Bang
IPC: C23C4/11 , C01F17/218 , C01F17/259 , C01F17/265 , C04B35/505 , C04B35/515 , C04B35/553 , C23C4/134
CPC classification number: C23C4/134 , C01F17/218 , C01F17/259 , C01F17/265 , C04B35/505 , C04B35/5156 , C04B35/553 , C23C4/11
Abstract: Disclosed are a material for spray for plasma spray coating having high plasma resistance and a method for producing the same. The material for plasma spray comprises an yttrium compound, and the numbers of moles of Y (yttrium), O (oxygen), and F (fluorine) in the yttrium compound satisfy 1.5
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公开(公告)号:US20230100603A1
公开(公告)日:2023-03-30
申请号:US18075586
申请日:2022-12-06
Applicant: Shin-Etsu Chemical Co., Ltd.
Inventor: Yuji Kimura , Yasushi Takai , Shigeyuki Nakamura
IPC: C23C24/02 , C01F17/259
Abstract: A film-forming powder containing a rare earth oxyfluoride has an average particle size D50 of 0.6-15 μm, a total volume of 10 μm pores of 0.51-1.5 cm3/g as measured by mercury porosimetry, and a BET surface area of 3-50 m2/g is suitable for forming a dense film in high yields or deposition rates and high productivity. The film-forming powder having a greater pore volume can be prepared by forming a rare earth ammonium fluoride complex salt on surfaces of rare earth oxide particles to provide precursor particles, and heat treating the precursor particles at a temperature of 350 to 700° C.
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公开(公告)号:US11560319B1
公开(公告)日:2023-01-24
申请号:US17849365
申请日:2022-06-24
Applicant: KOMICO LTD.
Inventor: Ki Won Hong , Seong Sik Bang , Dong Hun Jeong
IPC: C01F17/259 , C23C4/134 , C23C4/04 , H05H1/34
Abstract: Proposed is a method for manufacturing a spherical YOF-based powder. Specifically, proposed is a method for manufacturing a spherical YOF-based powder. The YOF-based powder injected into the plasma jet and melted into the refrigerant in a droplet state is sprayed and quenched, thereby improving density and controlling the component ratio through particle spheroidization.
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公开(公告)号:US20210277509A1
公开(公告)日:2021-09-09
申请号:US16316158
申请日:2017-07-10
Applicant: Shin-Etsu Chemical Co., Ltd.
Inventor: Yasushi Takai , Noriaki Hamaya
IPC: C23C4/10 , C23C4/134 , C01F17/265 , C01F17/259
Abstract: Provided is a slurry for suspension plasma spraying, which is a spray material used for suspension plasma spraying in an atmosphere including an oxygen-containing gas, contains 5-40 mass % of rare earth fluoride particles having a maximum particle diameter (D100) of 12 μm or less, and contains one or more types of solvent selected from among water and organic solvents. A rare earth acid fluoride-containing sprayed film, in which process shift and particle generation hardly occur, can be stably formed on a base material by carrying out suspension plasma spraying in an atmosphere including an oxygen-containing gas. A spraying member provided with this sprayed film exhibits excellent corrosion resistance to halogen-based gas plasma.
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公开(公告)号:US20240051839A1
公开(公告)日:2024-02-15
申请号:US18384076
申请日:2023-10-26
Applicant: Shin-Etsu Chemical Co., Ltd.
Inventor: Yasushi Takai , Noriaki Hamaya
IPC: C01F17/259 , C01F17/218 , C23C4/134 , C01F17/265 , C23C4/10
CPC classification number: C01F17/259 , C01F17/218 , C23C4/134 , C01F17/265 , C23C4/10 , C01P2004/61
Abstract: A sprayed article is disclosed including a substrate and a sprayed coating deposited thereon and containing a rare earth oxyfluoride as main phase. Provided is a slurry for suspension plasma spraying, which is a spray material used for suspension plasma spraying in an atmosphere including an oxygen-containing gas, contains 5-40 mass % of rare earth fluoride particles having a maximum particle diameter (D100) of 12 μm or less, and contains one or more types of solvent selected from among water and organic solvents. A rare earth acid fluoride-containing sprayed film, in which process shift and particle generation hardly occur, can be stably formed on a base material by carrying out suspension plasma spraying in an atmosphere including an oxygen-containing gas. A spraying member provided with this sprayed film exhibits excellent corrosion resistance to halogen-based gas plasma.
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公开(公告)号:US11827526B2
公开(公告)日:2023-11-28
申请号:US17732782
申请日:2022-04-29
Inventor: Shingo Ota , Ryuta Sugiura , Timothy S. Arthur , Nikhilendra Singh
IPC: C01G49/10 , C01G49/00 , H01M10/0562 , H01M4/62 , C01F7/786 , C01F17/259
CPC classification number: C01G49/0018 , H01M10/0562 , C01F7/786 , C01F17/259 , C01G49/10 , H01M4/62 , H01M2300/0008
Abstract: An inorganic compound for a Li-ion conductor includes an oxyhalide compound with a chemical composition of MOX where M is at least one of Al, Sc, La, and Y, and X is at least one of F, Cl, Br, and I. Also, the oxyhalide compound has a thermal decomposition start temperature of the oxyhalide compound is greater than a thermal decomposition start temperature of FeOCl and a conductivity that is general equal to or greater than a conductivity of the FeOCl.
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公开(公告)号:US11549185B2
公开(公告)日:2023-01-10
申请号:US16511283
申请日:2019-07-15
Applicant: Shin-Etsu Chemical Co., Ltd.
Inventor: Yuji Kimura , Yasushi Takai , Shigeyuki Nakamura
IPC: C23C24/02 , C01F17/259
Abstract: A film-forming powder containing a rare earth oxyfluoride has an average particle size D50 of 0.6-15 μm, a total volume of ≤10 μm pores of 0.51-1.5 cm3/g as measured by mercury porosimetry, and a BET surface area of 3-50 m2/g is suitable for forming a dense film in high yields or deposition rates and high productivity. The film-forming powder having a greater pore volume can be prepared by forming a rare earth ammonium fluoride complex salt on surfaces of rare earth oxide particles to provide precursor particles, and heat treating the precursor particles at a temperature of 350 to 700° C.
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公开(公告)号:US11414325B2
公开(公告)日:2022-08-16
申请号:US16343945
申请日:2017-08-07
Applicant: NIPPON YTTRIUM CO., LTD.
Inventor: Naoki Fukagawa , Ryuichi Sato
Abstract: A coating material containing an oxyfluoride of yttrium and having a Fisher diameter of 1.0 to 10 μm and a tap density TD to apparent density AD ratio, TD/AD, of 1.6 to 3.5. The coating material preferably has a pore volume of pores with a diameter of 100 μm or smaller of 1.0 cm3/g or less as measured by mercury intrusion porosimetry. A coating containing an oxyfluoride of yttrium and having a Vickers hardness of 200 HV0.01 or higher. The coating preferably has a fracture toughness of 1.0×102 Pa·m1/2 or higher.
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10.
公开(公告)号:US20240102142A1
公开(公告)日:2024-03-28
申请号:US18517251
申请日:2023-11-22
Applicant: Shin-Etsu Chemical Co., Ltd.
Inventor: Noriaki Hamaya , Ichiro Uehara
IPC: C23C4/11 , B32B9/00 , C01F17/259 , C01F17/265 , C04B35/50 , C04B35/515 , C09D1/00 , C09D5/03 , C23C4/134
CPC classification number: C23C4/11 , B32B9/005 , C01F17/259 , C01F17/265 , C04B35/50 , C04B35/5156 , C09D1/00 , C09D5/03 , C23C4/134 , C04B2237/34 , C04B2237/36
Abstract: A spray coating containing a rare earth fluoride and/or a rare earth acid fluoride contains carbon at 0.01-2% by mass or titanium or molybdenum at 1-1000 ppm. When an acid fluoride is not contained, the spray coating is gray to black in which, in terms of the L*a*b* chromaticity, L* is 25-64, a* is −3.0 to +5.0, and b* is −4.0 to +8.0. When an acid fluoride is contained, the spray coating is white or gray to black in which, in terms of the L*a*b* chromaticity, L* is equal to or greater than 25 and less than 91, a* is −3.0 to +5.0, and b* is −6.0 to +8.0. By forming this coating on a plasma resistant member, a partial color change is reduced, thus, a member that is capable of reliably realizing the original longevity is obtained.
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