公开(公告)号：US20020129768A1

公开(公告)日：2002-09-19

申请号：US09810387

申请日：2001-03-15

发明人： Craig M. Carpenter ,  Ross S. Dando ,  Philip H. Campbell ,  Allen P. Mardian ,  Jeff N. Fuss ,  Randy W. Mercil

IPC分类号： C23C016/00 ,  C30B029/00

CPC分类号： C23C16/45544 ,  C30B25/08

摘要： A chemical vapor deposition (CVD) apparatus includes a deposition chamber defined partly by a chamber wall. The chamber wall has an innermost surface inside the chamber and an outermost surface outside the chamber. The apparatus further includes a valve body having a seat between the innermost and outermost surfaces of the chamber wall. The chamber wall can be a lid and the valve can include a portion of the lid as at least a part of the seat. The valve body can include at least a part of a valve housing between the innermost and outermost surfaces of the chamber wall. Such a valve body can even include a portion of the chamber wall as at least part of the valve housing. The deposition apparatus can further include at least a part of a process chemical inlet to the valve body between the innermost and outermost surfaces of the chamber wall. In one example, the chamber wall can form at least a part of the chemical inlet. A deposition method includes temporarily isolating a process chemical supply line from a deposition chamber at a chamber wall of the deposition chamber. While isolated at the chamber wall, the supply line can be filled to a first pressure with chemical through a supply valve upstream from the chamber wall. The chemical can be released from the supply line into the deposition chamber at the chamber wall. The supply line can be again temporarily isolated from the deposition chamber at the chamber wall.

摘要翻译： 化学气相沉积（CVD）装置包括由室壁部分地限定的沉积室。 室壁具有在腔室内的最内表面和室外的最外表面。 该装置还包括阀体，其具有在室壁的最内表面和最外表面之间的座。 室壁可以是盖子，并且阀门可以包括作为座椅的至少一部分的盖子的一部分。 阀体可以包括在室壁的最内表面和最外表面之间的阀壳的至少一部分。 这种阀体甚至可以包括作为阀壳体的至少一部分的室壁的一部分。 沉积设备还可以包括在室壁的最内表面和最外表面之间的阀体的至少一部分过程化学品入口。 在一个示例中，室壁可以形成化学品入口的至少一部分。 沉积方法包括将沉积室的沉积室临时隔离工艺化学品供应管线。 虽然在室壁处隔离，但是供应管线可以通过来自室壁上游的供应阀将化学物质填充到第一压力。 化学品可以从供应管线释放到室壁处的沉积室中。 供应管线可以再次临时从室壁处的沉积室隔离。

公开(公告)号：US20040083946A1

公开(公告)日：2004-05-06

申请号：US10284067

申请日：2002-10-30

申请人： Evergreen Solar Inc.

发明人： Richard Lee Wallace JR.

IPC分类号： C30B015/00 ,  C30B021/06 ,  C30B027/02 ,  C30B028/10 ,  C30B030/04 ,  C30B013/00 ,  C30B021/04 ,  C30B028/08 ,  C30B029/00 ,  C30B029/64

CPC分类号： C30B15/34 ,  C30B15/005 ,  C30B15/007 ,  C30B15/24 ,  C30B29/06 ,  Y10T117/1036 ,  Y10T117/1044 ,  Y10T117/1052

摘要： Methods and apparatus for concurrent growth of multiple crystalline ribbons from a single crucible employ meniscus shapers to facilitate continuous growth of discrete and substantially flat crystalline ribbons having controlled width.

公开(公告)号：US20020029735A1

公开(公告)日：2002-03-14

申请号：US09946518

申请日：2001-09-06

发明人： Kenji Terao ,  Hideyuki Isozaki ,  Taro Takahashi ,  Motohiro Niijima

IPC分类号： C30B015/00 ,  C30B021/06 ,  C30B027/02 ,  C30B028/10 ,  C30B030/04 ,  C30B029/00 ,  C30B029/64

CPC分类号： C30B29/06 ,  C30B15/26 ,  Y10T117/1044 ,  Y10T117/1048

摘要： A seed crystal is lowered toward a melt, and a contact between the seed crystal and the melt is detected using an image captured by an imaging device. The temperature of the melt is adjusted to keep a meniscus of the melt in contact with the seed crystal. The temperature of the melt is then lowered to create a wingout extending from the seed crystal. The length and symmetry of the wingout is detected with an image captured by the imaging device, and a ribbon of crystal following the wingout starts to be lifted from the melt.

摘要翻译： 将晶种朝向熔体降低，并且使用由成像装置捕获的图像来检测晶种和熔体之间的接触。 调节熔体的温度以保持熔体的弯液面与晶种接触。 然后降低熔体的温度以产生从晶种延伸的翼板。 用成像装置拍摄的图像检测翼板的长度和对称性，并且在翼缘之后的结晶带开始从熔体提升。

公开(公告)号：US20010011058A1

公开(公告)日：2001-08-02

申请号：US09766318

申请日：2001-01-19

发明人： Shinichi Tamura

IPC分类号： C30B029/00 ,  B32B009/00

CPC分类号： C03C25/66 ,  C03C13/00 ,  Y10T428/2913 ,  Y10T428/2933 ,  Y10T428/2964

摘要： Provided are a heat-resistant glass fiber which has excellent heat resistance, which is also easy to spin and less expensive and which is suitable as an acoustic material for use in an automobile muffler, and a process for the production thereof. The heat-resistant glass fiber has a composition comprising, substantially by weight %, 56 to 58.5% of SiO2, 12 to 17% of Al2O3, 16 to 27% of CaO, 1 to 9% of MgO, 0 to 1% of Na2O and 0 to 1% of K2O as the entirety of the fiber and containing neither B2O3 nor F2, and has a surface layer portion made of a silicic glass having an SiO2 content of at least 90% by weight. The process comprises treating the surface of the above fiber having the above composition with a mineral acid, to produce the heat-resistant glass fiber.

摘要翻译： 本发明提供耐热性优异的耐热玻璃纤维，其易于纺丝且成本较低，适用于汽车消音器中使用的声学材料及其制造方法。 该耐热性玻璃纤维的组成为：以SiO2为基准计，56〜58.5％，Al2O3 12〜17％，CaO：16〜27％，MgO：1〜9％，Na2O：0〜1％ 和作为整个纤维的0〜1％的K 2 O，不含有B 2 O 3和F 2，并且具有SiO 2含量为90重量％以上的硅玻璃制成的表层部。 该方法包括用无机酸处理具有上述组成的上述纤维的表面，以产生耐热玻璃纤维。