APPARATUS AND METHOD OF OPERATING A GAS PUMP

    公开(公告)号:US20230358221A1

    公开(公告)日:2023-11-09

    申请号:US18218881

    申请日:2023-07-06

    申请人: TORRAMICS INC.

    IPC分类号: F04F9/00 H10N10/10 H10N19/00

    CPC分类号: F04F9/00 H10N10/10 H10N19/00

    摘要: A nano gas pump for generating gas flow, gas compression and gas rarefication is disclosed, which provides up to several orders of magnitude pressure difference, operates over a wide range of pressure from several millitorr to several atmospheres, and with pumping speeds from several nano liters to several liters per minute. The nano gas pump does not require any moving parts and generate gas flow using steep temperature gradients of more than 100 milli Kelvin over a mean free path of the local gas in the direction of the gas flow. Temperature gradients are created and restricted mostly to the gas doing the work, through an arrangement of PNP, NPN, PP, NN thermoelectric segments together with conductive interconnects. Contact resistance which drastically reduces the efficiency of a nanoscale thermoelectric heat pump is mitigated by overlapping thermoelectric segments and electric connections. Several exemplary embodiments are described based on linear (straight) and non-linear (turn) gas flow paths. Various staging configurations are also described.

    Monolithic high vacuum housing with vapor baffle and cooling fins
    4.
    发明授权
    Monolithic high vacuum housing with vapor baffle and cooling fins 失效
    具有蒸汽挡板和散热片的单片高真空壳体

    公开(公告)号:US5879135A

    公开(公告)日:1999-03-09

    申请号:US645543

    申请日:1996-05-10

    申请人: Ned R. Kuypers

    发明人: Ned R. Kuypers

    IPC分类号: F04F9/00

    CPC分类号: F04F9/00

    摘要: A housing that defines a high vacuum work environment includes a monolithic member that has one side having a baffle region and a wall region. The baffle region includes at least one angularly contoured evacuation opening that forms a zig-zag flow path from the high vacuum work environment. In the preferred embodiment, each evacuation opening has a chevron-shaped cross section having an outer channel portion that is defined by baffle fins that are parallel or substantially parallel to each other, but at an acute angle relative to the side of the monolithic member. The wall region includes convection cooling fins that are aligned with the baffle fins.

    摘要翻译: 限定高真空工作环境的壳体包括具有一侧具有挡板区域和壁区域的整体构件。 挡板区域包括至少一个成角度的抽空开口,其从高真空工作环境形成Z字形流动路径。 在优选实施例中,每个排气开口具有人字形横截面,其具有由彼此平行或基本平行但相对于整体构件侧面成锐角的挡板所限定的外部通道部分。 壁区域包括与挡板对准的对流冷却片。

    Hydrogen pump
    5.
    发明授权
    Hydrogen pump 失效
    氢泵

    公开(公告)号:US4886048A

    公开(公告)日:1989-12-12

    申请号:US173189

    申请日:1988-03-23

    IPC分类号: F24J2/04 F04F9/00 F24J2/24

    CPC分类号: F24J2/055 F04F9/00 Y02E10/44

    摘要: The invention provides a hydrogen pump for vacuum insulation jackets for a vessel or a pipe which holds or through which flows a hydrogen-containing medium at temperatures such that hydrogen permeates into the jacket, comprising a palladium or palladium alloy membrane exposed on one side to an oxidizing atmosphere and on its other side to the evacuated space within the jacket, wherein the membrane enables the flow of the hydrogen from the evacuated space through the membrane into the oxidizing atmosphere.

    Counterflow leak detector with high and low sensitivity operating modes
    6.
    发明授权
    Counterflow leak detector with high and low sensitivity operating modes 失效
    具有高和低灵敏度工作模式的逆流泄漏检测器

    公开(公告)号:US4845360A

    公开(公告)日:1989-07-04

    申请号:US131412

    申请日:1987-12-10

    CPC分类号: G01M3/202 F04F9/00

    摘要: A counterflow helium mass spectrometer leak detector in which a helium sample passes in a reverse direction through a diffusion pump to a mass spectrometer for measurement. The diffusion pump includes a conventional foreline and a second foreline provided with an ejector stage. A test sample is coupled from a test port through a bypass valve to the conventional foreline in a high sensitivity mode and is coupled to the second foreline in a low sensitivity mode. In the low sensitivity mode, the bypass valve is closed. An apertured control plate in the diffusion pump controls the relative reverse rates of duffusion from each foreline to the diffusion pump inlet by controlling the rates of vapor flow an annular pumping stages and to the ejector stage. The ejector stage includes a nozzle for directing a stream of vapor into the second foreline so as to inhibit flow of helium into the diffusion pump and establish a lower reverse diffusion rate at the second foreline. The disclosed configuration permits measurement of a large range of leak rates.

    摘要翻译: 氦气样品通过扩散泵反向通过质谱仪进行测量的逆流氦质谱检漏仪。 扩散泵包括常规的前级管线和设置有喷射器级的第二前级管线。 测试样品通过旁路阀从测试端口以高灵敏度模式耦合到常规的前级管线,并以低灵敏度模式耦合到第二前级管线。 在低灵敏度模式下,旁路阀关闭。 扩散泵中的有孔控制板通过控制环形泵送级和喷射器级的蒸汽流速来控制从前级管线到扩散泵入口的相对反向速率。 喷射器台包括用于将蒸汽流引导到第二前级管线中的喷嘴,以便抑制氦流入扩散泵中并在第二前级管线处建立较低的反向扩散速率。 所公开的配置允许测量大范围的泄漏率。

    Low cost, thermally efficient diffusion pump
    7.
    发明授权
    Low cost, thermally efficient diffusion pump 失效
    低成本,高效热扩散泵

    公开(公告)号:US4108576A

    公开(公告)日:1978-08-22

    申请号:US702653

    申请日:1976-07-06

    IPC分类号: F04F9/00

    CPC分类号: F04F9/00

    摘要: A vacuum diffusion pump includes a body assembly fabricated from a single piece of deep drawn sheet metal whereby a cylindrical wall of the body assembly, a flange for connecting the diffusion pump to a vacuum chamber, and a floor for a pool of diffusion pump fluid are all formed from the single piece of sheet metal. A boiler for heating the fluid to a vapor includes a cylindrical heating surface centrally located in the pool and extending axially from the bottom surface of the pool. The heating surface is surrounded by a separator tube having openings close to the bottom of the pool so that liquid in the pool enters an annular space between the separator and heating surface close to the bottom of the pool and rises in the annular space while being heated to vaporization. A solid heat insulator is located in another annular space between a cup and the exterior of a segment of the body wall that confines the pool and the exterior of the floor. A cooling coil is wrapped with an uneven pitch around the exterior of a cool wall portion of the body assembly so that the coil is in contact with the hottest parts of the wall portion and cooler parts of the wall portion are not in contact with the coil. A flange clamping plate surrounds the flange to clamp it against the chamber being evacuated. A baffle plate, positioned between a first stage of the pump and the flange, is mechanically connected to the cool wall portion through a path having a high thermal conductivity so that the baffle is cool enough to condense vapor of the diffusion pump fluid that impinges on it.

    摘要翻译: 真空扩散泵包括由单片深冲金属板制成的主体组件,由此主体组件的圆柱形壁,用于将扩散泵连接到真空室的凸缘和用于扩散泵流体池的底板 全部由单片金属片形成。 用于将流体加热到蒸汽的锅炉包括中央位于池中的圆柱形加热表面,并且从池底部轴向延伸。 加热表面由具有靠近池底部的开口的分隔管围绕,使得池中的液体进入分离器和接近池底部的加热表面之间的环形空间,同时在加热的同时在环形空间中上升 蒸发。 固体绝热体位于杯体与体壁部分的外部之间的另一个环形空间中,限定了池和地板的外部。 冷却盘管围绕主体组件的冷壁部分的外部以不均匀的间距包裹,使得线圈与壁部分的最热部分接触,并且壁部分的较冷部分不与线圈接触 。 法兰夹紧板围绕法兰夹紧以抵靠被抽空的室。 定位在泵的第一级与凸缘之间的挡板通过具有高导热性的路径机械地连接到冷壁部分,使得挡板足够冷却以使会影响的扩散泵流体的蒸气冷凝 它。

    Combined vacuum baffle and valve for diffusion pump
    8.
    发明授权
    Combined vacuum baffle and valve for diffusion pump 失效
    组合真空挡板和扩散泵阀

    公开(公告)号:US4081222A

    公开(公告)日:1978-03-28

    申请号:US664002

    申请日:1976-03-04

    CPC分类号: F04F9/04 F16K51/02

    摘要: In a vacuum system a baffle-valve acts first as a baffle to reduce the backstreaming of a diffusion pump fluid into the main vacuum chamber being evacuated and secondly it can be used as a valve to provide complete isolation between the diffusion pump and the vacuum chamber. This enables the chamber to be open for service work while the diffusion pump is kept operating for rapid pump down. The foregoing dual use of the baffle/valve increases pumping efficiency because of higher conductance.

    摘要翻译: 在真空系统中,挡板阀首先作为挡板起作用,以减少扩散泵流体进入被抽真空的主真空室的回流,其次,它可以用作阀,以在扩散泵和真空室之间提供完全隔离 。 这使得腔室能够在扩散泵保持运行以便快速泵送时打开以进行维修工作。 上述双重用途的挡板/阀门由于较高的电导性而提高了泵送效率。