公开(公告)号：US5828500A

公开(公告)日：1998-10-27

申请号：US728182

申请日：1996-10-09

申请人： Atsushi Kida ,  Masato Hara ,  Masayuki Sugiura ,  Toshihiro Nakayama

发明人： Atsushi Kida ,  Masato Hara ,  Masayuki Sugiura ,  Toshihiro Nakayama

IPC分类号： G01M11/02 ,  G01N21/23 ,  G01N21/958 ,  G02B7/02 ,  G01J21/00

CPC分类号： G01M11/02 ,  G01N21/23 ,  G01N21/958

摘要： An optical element inspecting apparatus for inspecting optical elements for defects. The optical element inspecting apparatus includes an illuminating unit, an image capturing unit, two polarizers, a rotation device, a controller, and a means for composing a plurality of image data captured by the image capturing unit. The optical element to be inspected is placed between the polarizers and is illuminated by the illuminating unit. The light that passes through the polarizers and the optical element is captured by the image capturing unit and stored in memory. The controller controls the rotation device such that the polarizers are rotated by a predetermined amount and a subsequent image data is captured. In this way, a number of image data are captured and all image data are composed to make a composite image data. The optical element is examined to detect flaws therein by using the composite image data.

摘要翻译： 一种光学元件检查装置，用于检查光学元件的缺陷。 光学元件检查装置包括照明单元，图像捕获单元，两个偏振器，旋转装置，控制器和用于构成由图像捕获单元捕获的多个图像数据的装置。 要检查的光学元件放置在偏振器之间并由照明单元照亮。 通过偏振器和光学元件的光由图像捕获单元捕获并存储在存储器中。 控制器控制旋转装置，使得偏振器旋转预定量并捕获后续图像数据。 以这种方式，捕获多个图像数据，并且构成所有图像数据以形成合成图像数据。 通过使用合成图像数据来检查光学元件以检测其中的缺陷。

公开(公告)号：US5926266A

公开(公告)日：1999-07-20

申请号：US710805

申请日：1996-09-23

申请人： Alan D. Dorundo ,  Michael Gerard Lisanke ,  Huizong Lu ,  Richard J. McCormick ,  Lanphuong Thi Pena ,  Eric V. Schnetzer ,  Ali Reza Taheri

发明人： Alan D. Dorundo ,  Michael Gerard Lisanke ,  Huizong Lu ,  Richard J. McCormick ,  Lanphuong Thi Pena ,  Eric V. Schnetzer ,  Ali Reza Taheri

IPC分类号： G01B9/02 ,  G01B11/06 ,  G01B11/30 ,  G01N21/95 ,  G01J21/00

CPC分类号： G01B11/0608 ,  G01B9/02019 ,  G01B9/02048 ,  G01B9/02068 ,  G01N21/9506 ,  G01B2290/70

摘要： Apparatus for inspecting the surface of a sample includes a wide scanning interferometer, which is used to locate defects, or anomalies in the surface, and a narrow scanning interferometer, which is used to develop profiles of individual defects found by the narrow scanning interferometer. The sample may be driven in rotation about an axis, while the interferometers are independently moved radially to the axis.

摘要翻译： 用于检查样品表面的装置包括用于定位缺陷或表面异常的宽扫描干涉仪和用于形成由窄扫描干涉仪发现的各个缺陷的轮廓的窄扫描干涉仪。 样品可以围绕轴线旋转驱动，而干涉仪独立地径向移动到轴线。