公开(公告)号：US20040263974A1

公开(公告)日：2004-12-30

申请号：US10609307

申请日：2003-06-26

Applicant: Optical Coating Laboratory Inc., a JDS Unipahse Company and a corporation of the State of Delware

Inventor： Jay McDonough ,  Markus Duelli ,  Anthony D. McGettigan

IPC: G02B005/30 ,  G02B027/28

CPC classification number: G02B5/3083 ,  G02B5/3016 ,  G02B27/285

Abstract: A polarization conversion system uses patterned half-wave retarder material and a polarizing beam splitter. The retarder material is applied to a surface of the polarizing beam splitter or other substrate before patterning. Patterning is accomplished by exposing the retarder material to oriented light, and may be done using an optical mask, or may be done through the polarization beam splitter. Selected areas of the patterned retarder layer produce no net rotation of light from the polarizing beam splitter, while other areas rotate light ninety degrees, thus providing polarization conversion.

Abstract translation: 偏振转换系统使用图案化的半波延迟材料和偏振分束器。 在图案化之前，将延迟器材料施加到偏振分束器或其它基板的表面。 图案化是通过将延迟器材料暴露于定向光来实现的，并且可以使用光学掩模进行，或者可以通过偏振分束器来完成。 图案化延迟器层的选定区域不产生来自偏振分束器的光的净旋转，而其他区域旋转90度的光，从而提供偏振转换。

公开(公告)号：US20040240073A1

公开(公告)日：2004-12-02

申请号：US10883849

申请日：2004-07-06

Applicant: CARL ZEISS SMT AG

Inventor： Michael Gerhard

IPC: G03B027/42 ,  G02B005/30 ,  G02B027/28 ,  G02B027/10 ,  G02B003/00 ,  G02B009/00

CPC classification number: G03F7/70566 ,  G02B13/143 ,  G02B27/286 ,  G03B27/72 ,  G03F7/70241 ,  G03F7/70966

Abstract: A polarization rotator and crystalline quartz plate for use with an optical imaging system. The system has several imaging optical components (L1-L16) sequentially arranged along an optical axis (16), a means for creating radially polarized light arranged at a given location in that region extending up to the last of said imaging optical components, and a crystalline-quartz plate employable in such a system. A polarization rotator (14) for rotating the planes of polarization of radially polarized light and transforming same into tangentially polarized light, particularly in the form of a crystalline-quartz plate as noted above, is provided at a given location within a region commencing where those imaging optical components that follow said means for creating radially polarized light in the optical train are arranged. The optical imaging system is particularly advantageous when embodied as a microlithographic projection exposure system.

Abstract translation: 用于光学成像系统的偏振旋转器和结晶石英板。 该系统具有沿着光轴（16）顺序布置的多个成像光学部件（L1-L16），用于产生布置在该直至最后的所述成像光学部件的区域中的给定位置的径向偏振光的装置，以及 结晶石英板可用于这种系统。 用于旋转径向偏振光的偏振平面并将其变换为切向偏振光的偏振旋转器（14），特别是如上所述的结晶 - 石英板形式，提供在一个区域内的给定位置， 布置遵循用于在光学列中产生径向偏振光的所述装置的成像光学部件。 当被实现为微光刻投影曝光系统时，光学成像系统是特别有利的。

公开(公告)号：US20040240059A1

公开(公告)日：2004-12-02

申请号：US10885124

申请日：2004-07-07

Applicant: Cogent Light Technologies, Inc.

Inventor： Kenneth K. Li

IPC: G02B005/30 ,  G02B027/28

CPC classification number: H04N9/3167 ,  G02B6/4298 ,  G02B27/1033 ,  G02B27/145 ,  G02B27/149 ,  G02B27/283 ,  G02B27/285 ,  G02B27/286 ,  H04N5/7441 ,  H04N9/3102 ,  H04N9/3152

Abstract: A waveguide polarization recovery system both polarizes the input light energy for use with an LCD imager and converts the polarity of unusable light energy to add to the illumination of the LCD imager. The compact polarization recovery waveguide system generally includes: (1) an input waveguide that provides non-polarized light energy into the system; (2) an output waveguide that receives polarized light energy from the system; (3) a polarized beam splitter that received the light energy from the input waveguide and transmits lights energy of a first polarization type and reflects light energy of a second polarization type, and (4) a wave plate that modifies the polarization of either the transmitted or reflected light energy. The polarization recovery system also generally includes one or more mirrors that are positioned as need to direct the transmitted and the reflected light energy to the output waveguide. The input and output waveguides may be shaped as needed by the projection system. For example, either one or both of the input and output waveguides may be tapered as needed to produce a desired image. In the waveguide polarization recovery system, the input and output waveguides are configured to have either an either a substantially parallel or a substantially perpendicular orientation. In another embodiment, the waveguide polarization recovery system further includes has one or more nullgapsnull of optically clear material positioned between the optical components to encourage the occurrence of total internal reflection that minimizes the loss of the optical energy by the system.

公开(公告)号：US20040218280A1

公开(公告)日：2004-11-04

申请号：US10864022

申请日：2004-06-08

Inventor： Elizabeth A. Nevis

IPC: G02B005/30 ,  G02B027/28 ,  G02B027/14

CPC classification number: G02B27/283

Abstract: An optical element such as a beam splitter for interferometer separates a heterodyne beam from the laser into separate beams having different the frequencies and orthogonal polarizations. Optical fibers can conduct the separate beams to a beam combiner for interferometer optics. The PBS and/or the beam combiner can use a coating to reflect one linear polarization and transmit an orthogonal linear polarization. To improve extinction ratios in the PBS or the beam combiner, a yaw angle for an input beam is non-zero and corresponds to a peak in the extinction ratio of a reflected beam.

公开(公告)号：US20040184154A1

公开(公告)日：2004-09-23

申请号：US10767263

申请日：2004-01-30

Applicant: FUJI PHOTO FILM CO., LTD.

Inventor： Yoji Ito

IPC: G02B005/30 ,  G02B027/28 ,  G02B005/02 ,  G02B013/20

CPC classification number: G02B5/0226 ,  G02B5/0278

Abstract: A diffusing film comprises a transparent resin in which scatterers are dispersed. The difference between the refractive index of the transparent resin and that of the scatterers is in the range of 0.04 to 1.5. The scatterers are flat particles having sizes of 0.1 to 50 nullm.

公开(公告)号：US20040179272A1

公开(公告)日：2004-09-16

申请号：US10740125

申请日：2003-12-17

Applicant: Carl Zeiss SMT AG

Inventor： Michael Gerhard ,  Daniel Krahmer

IPC: G02B005/30 ,  G02B027/28 ,  G02B003/00 ,  G02B009/00

CPC classification number: G02B1/08 ,  G02B1/02 ,  G02B5/3083 ,  G02B13/143 ,  G03F7/70241 ,  G03F7/70566 ,  G03F7/70966

Abstract: An objective (1), in particular for a microlithography projection apparatus, has lenses or lens parts falling into at least two groups. The first group (3) is made of a first crystalline material and the second group (5) is made of a second crystalline material. In the first group (3), an outermost aperture ray (15) is subject to a first optical path difference between two mutually orthogonal states of linear polarization; and the same outermost aperture ray is subject to a second optical path difference in the second group (5). The two different crystalline materials are selected so that the first and second optical path difference approximately compensate each other. A suitable selection consists of calcium fluoride for the first and barium fluoride for the second crystalline material.

Abstract translation: 特别是用于微光刻投影装置的目的（1）具有落入至少两组的透镜或透镜部件。 第一组（3）由第一结晶材料制成，第二组（5）由第二结晶材料制成。 在第一组（3）中，最外面的光阑（15）经历两个相互正交的线性极化状态之间的第一光程差; 并且在第二组（5）中相同的最外面的光圈受到第二光程差的影响。 选择两种不同的晶体材料，使得第一和第二光程差几乎相互补偿。 合适的选择包括用于第一晶体的氟化钙和用于第二结晶材料的氟化钡。

公开(公告)号：US20040179265A1

公开(公告)日：2004-09-16

申请号：US10387648

申请日：2003-03-13

Inventor： Zheng Wang ,  Qi Deng ,  Yonglin Huang ,  Frank Levinson

IPC: G02B005/30

CPC classification number: G02B27/286

Abstract: The present application teaches systems and techniques for reducing the polarization dependency of an optical component by combining the actions of a circulator and a polarization beam combiner to separate an optical signal into a plurality of orthogonally oriented polarization components; rotate at least one of the components so that the polarization orientation of the components are parallel; propagate the components through respective input ports of an optical component at substantially the same time; rotate at least one of a plurality of output components from the optical component so that the polarization orientation of the output components are orthogonal; and recombine the plurality of output components into an output optical signal.

Abstract translation: 本申请教导了通过组合循环器和偏振光束组合器的动作来减少光学部件的偏振依赖性以将光信号分离成多个正交取向的偏振分量的系统和技术; 旋转部件中的至少一个，使得部件的极化取向平行; 基本上同时在光学部件的各个输入端口传播部件; 从所述光学部件旋转多个输出部件中的至少一个，使得所述输出部件的偏振取向正交; 并将所述多个输出分量重组为输出光信号。

公开(公告)号：US20040120041A1

公开(公告)日：2004-06-24

申请号：US10732069

申请日：2003-12-10

Inventor： Barry D. Silverstein ,  Andrew F. Kurtz ,  Xiang-Dong Mi

IPC: G02B005/30 ,  G02B027/28

CPC classification number: G02B5/3058 ,  G02F1/133528 ,  Y10S359/90

Abstract: A wire grid polarizer (100) for polarizing an incident light beam (130), comprising a substrate (505) having a first surface (410) and a second surface (510); and a first array of parallel, elongated wires disposed on the first surface (410). Each of the wires are spaced apart at a grid period less than a wavelength of the incident light; and a second array of parallel, elongated wires disposed on said second surface (420) where the second array of wires are oriented parallel to the first array of wires.

Abstract translation: 一种用于偏振入射光束（130）的线栅偏振器（100），包括具有第一表面（410）和第二表面（510）的基底（505） 以及布置在所述第一表面（410）上的平行的细长线的第一阵列。 每个电线在小于入射光的波长的格栅周期间隔开; 以及布置在所述第二表面（420）上的第二阵列的平行细长线，其中所述第二阵列阵列平行于所述第一阵列阵列定向。

公开(公告)号：US20040114242A1

公开(公告)日：2004-06-17

申请号：US10655858

申请日：2003-09-05

Inventor： Gary D. Sharp

IPC: G02C007/10 ,  G02B005/30 ,  G02B027/28

CPC classification number: G02B27/288 ,  G02B5/3041

Abstract: The selective filtering of light by polarization interference may be used to enhance vision and/or protect eyes from harmful light rays. For example, such filtering may be used in sunglasses, color corrective eyewear or protective eyewear. The selective filtering of incident light may provide any desired spectral transmission (including visible light and light not visible to the eye) and is performed by a pair of polarizing elements that sandwich a retarder stack. The filtering structure may be formed by multi-layer polarizing structures and may be formed by fabricating sheet laminates that are die cut to form inexpensive laminates. The laminates may be flat or curved in one (e.g., wrap-around) or more dimensions.

Abstract translation: 可以通过极化干扰对光的选择性过滤来增强视力和/或保护眼睛免受有害光线的影响。 例如，这种过滤可用于太阳镜，彩色矫正眼镜或防护眼镜。 入射光的选择性滤光可以提供任何期望的光谱透射（包括可见光和眼睛不可见的光），并且由一对夹着延迟器叠层的偏振元件执行。 过滤结构可以由多层偏振结构形成，并且可以通过制造被切割以形成廉价的层压体的片层压板来形成。 层压板可以是平坦的或弯曲的（例如，环绕）或更多的尺寸。

公开(公告)号：US20040114235A1

公开(公告)日：2004-06-17

申请号：US10718938

申请日：2003-11-21

Inventor： Steven R. Sedlmayr

IPC: G02B027/28 ,  G02F001/1335 ,  G02B005/30

CPC classification number: G02B26/02 ,  G02B27/1006 ,  G02B27/1046 ,  G02B27/1053 ,  G02B27/1073 ,  G02B27/142 ,  G02B27/143 ,  G02B27/144 ,  G02B27/145 ,  G02B27/149 ,  G02B27/283 ,  G03B33/06 ,  G03B35/26 ,  H04N5/7441 ,  H04N9/3105 ,  H04N9/3152 ,  H04N9/3167 ,  H04N9/317 ,  H04N13/239 ,  H04N13/334 ,  H04N13/337 ,  H04N13/341 ,  H04N13/361 ,  H04N13/363

Abstract: This invention relates to electromagnetic wave beam paths, formation of the beam, illumination of programmable electromagnetic wave field vector orientation rotating devices (nullPEMFVORDnull) with an electromagnetic beam, and the technique of projection of the modulated beam. This invention also relates to a unique light path and method of forming the light into a rectangular beam to be used for optical projection systems and, more particularly, in a color and/or black and white liquid crystal device (LCD) projectors that produce high resolution, high brightness and/or three-dimensional images. This invention further relates to a device capable of receiving and displaying two-dimensional and three dimensional images.