公开(公告)号：US20040212329A1

公开(公告)日：2004-10-28

申请号：US10847438

申请日：2004-05-18

Inventor： Igor A. Krichtafovitch ,  Vladimir L. Gorobets

IPC: H01J023/00

CPC classification number: B03C3/017 ,  B03C3/08 ,  B03C3/12 ,  B03C3/368 ,  B03C3/41 ,  B03C3/68 ,  B03C2201/04 ,  B03C2201/14 ,  H05H1/48 ,  H05H5/00 ,  H05H2001/481

Abstract: An electrostatic fluid acceleration and method of operation thereof includes at least two synchronously powered stages with final or rear-most electrodes of one stage maintained at substantially the same instantaneous voltage as the immediately adjacent initial or forward-most electrodes of a next stage in an airflow direction. A single power supply or synchronized and phase controlled power supplies provide high voltage power to each of the stages such that both the phase and amplitude of the electric power applied to the corresponding electrodes are aligned in time. The frequency and phase control allows neighboring stages to be closely spaced at a distance of from 1 to 2 times an inter-electrode distance within a stage, and, in any case, minimizing or avoiding production of a back corona current from a corona discharge electrode of one stage to an electrode of a neighboring stage. Corona discharge electrodes of neighboring stages may be horizontally aligned, complementary collector electrodes of all stages being similarly horizontally aligned between and horizontally offset from the corona discharge electrodes.

Abstract translation: 静电流体加速及其操作方法包括至少两个同步动力的级，其中一级的最终或最后电极保持在与气流中的下一级的紧邻的初始或最前端的电极基本相同的瞬时电压 方向。 单个电源或同步和相位控制的电源为每个级提供高电压功率，使得施加到相应电极的电功率的相位和幅度都及时对准。 频率和相位控制允许相邻级在一级内的电极间距离的1至2倍的距离内紧密间隔，并且在任何情况下，最小化或避免从电晕放电电极产生后电晕电流 一级到相邻级的电极。 相邻级的电晕放电电极可以水平对准，所有级的互补的集电极电极类似地在电晕放电电极之间水平对准并且水平偏移。

公开(公告)号：US20030001528A1

公开(公告)日：2003-01-02

申请号：US10164612

申请日：2002-06-10

Inventor： Young-Byeong Joo

IPC: H01J023/00

CPC classification number: H01J37/18 ,  H01J2237/1825 ,  H01J2237/184 ,  H01J2237/31701 ,  Y10S417/901

Abstract: An ion implanting system including an ion implanting chamber for implanting an ion into a semiconductor wafer, a load lock chamber for loading the semiconductor wafer into the ion implanting chamber, a turbo pump for creating a high vacuum atmosphere in the load lock chamber, a low vacuum pump for creating a low vacuum atmosphere in the turbo pump, a cryo pump controller for generating a control signal to control a pumping operation of the turbo pump, a control voltage generator for generating a control voltage in response to the control signal generated from the cryo pump controlle, an interface for generating a starting signal in response to the control voltage, and a turbo pump controller for applying a voltage to operate the turbo pump and the low vacuum pump in response to the starting signal output from the interface.

Abstract translation: 一种离子植入系统，包括用于将离子注入半导体晶片的离子注入室，用于将半导体晶片装载到离子注入室中的负载锁定室，用于在负载锁定室中产生高真空气氛的涡轮泵，低 用于在涡轮泵中产生低真空气氛的真空泵，用于产生控制信号以控制涡轮泵的泵送操作的冷冻泵控制器，控制电压发生器，用于响应于从所述涡轮泵产生的控制信号产生控制电压 低温泵控制器，用于响应于控制电压产生启动信号的接口，以及涡轮泵控制器，用于响应于从接口输出的启动信号，施加电压来操作涡轮泵和低真空泵。

公开(公告)号：US20030214262A1

公开(公告)日：2003-11-20

申请号：US10406081

申请日：2003-04-02

Inventor： Hendrik J. Monkhorst ,  Norman Rostoker

IPC: H01J023/00

CPC classification number: H05H1/12 ,  G21B1/00 ,  G21B1/052 ,  G21B1/11 ,  G21D7/00 ,  H05H1/14 ,  Y02E30/122 ,  Y02E30/126

Abstract: A system and apparatus for controlled fusion in a field reversed configuration (FRC) magnetic topology and conversion of fusion product energies directly to electric power. Preferably, plasma ions are magnetically confined in the FRC while plasma electrons are electrostatically confined in a deep energy well, created by tuning an externally applied magnetic field. In this configuration, ions and electrons may have adequate density and temperature so that upon collisions they are fused together by the nuclear force, thus forming fusion products that emerge in the form of an annular beam. Energy is removed from the fusion product ions as they spiral past electrodes of an inverse cyclotron converter. Advantageously, the fusion fuel plasmas that can be used with the present confinement and energy conversion system include advanced (aneutronic) fuels.

公开(公告)号：US20030173914A1

公开(公告)日：2003-09-18

申请号：US10357398

申请日：2003-02-04

Applicant: NISSIN ELECTRIC CO., LTD

Inventor： Takatoshi Yamashita

IPC: H01J023/00

CPC classification number: H01J37/3171 ,  H01J2237/04735

Abstract: This electrostatic acceleration column has first to fifth electrodes arranged in a traveling direction of ions, which are a kind of charged particles. Then, the second electrode divided into two electrode members, which are opposed to each other across a path of the ions, and to which different electric potentials are applied to deflect the ions. Further, the electrodes arranged on a downstream side from the electrode are arranged along an orbit of ions deflected by the electrode and having specific energy.

Abstract translation: 该静电加速柱具有沿着作为一种带电粒子的离子的行进方向排列的第一至第五电极。 然后，第二电极被分成两个电极构件，两个电极构件彼此跨越离子的路径并且施加不同的电位以使离子偏转。 此外，布置在电极的下游侧的电极沿着由电极偏转并具有比能量的离子的轨道布置。

公开(公告)号：US20040100214A1

公开(公告)日：2004-05-27

申请号：US10438258

申请日：2003-05-13

Inventor： Karl Erdman

IPC: H01J023/00

CPC classification number: H05H6/00 ,  G21G1/10

Abstract: The present invention provides systems and methods for the nullin-targetnull reactions of radioisotopes with various reactants in order to form desired reaction products in useful states. One embodiment of the invention provides a target-holding assembly for use with a gas target and a particle accelerator configured to provide a high-energy beam along a beam axis. The target-holding assembly has a mounting portion attachable with the particle accelerator in alignment with the beam axis. A gas target holder is connected to the mounting portion and has a thermally conductive holder body with a target cavity therein configured to be in axial alignment with the beam axis. The target cavity is shaped and sized to fully contain the gas target therein for bombardment by the high-energy beam. The target body has an inlet port in fluid connection with the target cavity. The target body has a cooling channel formed therein adjacent to and isolated from the target cavity, and the cooling channel has an inlet coupleable to a cooling fluid source.

Abstract translation: 本发明提供了放射性同位素与各种反应物的“靶内”反应的系统和方法，以便在有用状态下形成所需的反应产物。 本发明的一个实施例提供了一种用于与气体靶和粒子加速器一起使用的目标保持组件，其构造成沿着光束轴线提供高能量光束。 目标保持组件具有可与粒子加速器相连的安装部分，其与束轴对准。 气体靶保持器连接到安装部分并且具有导热保持器本体，其中构造为与梁轴线轴向对准的目标空腔。 目标空腔的形状和尺寸设计成完全容纳其中的气体目标，以通过高能束轰击。 目标体具有与目标空腔流体连接的入口。 目标体具有形成在其中的与目标空腔相邻并与其隔离的冷却通道，并且冷却通道具有可连接到冷却流体源的入口。

公开(公告)号：US20030030390A1

公开(公告)日：2003-02-13

申请号：US10142702

申请日：2002-05-08

Applicant: Northrop Grumman Corporation

Inventor： Alan J. Theiss

IPC: H01J023/00

CPC classification number: H01J23/22 ,  H01J23/24 ,  H01J25/11 ,  H01J25/42 ,  H01J2225/38

Abstract: A coupled cavity circuit for a microwave electron tube comprises at least two resonant cavities adjacent to each other. An electron beam tunnel passes through the coupled cavity circuit to allow a beam of electrons to pass through and interact with the electromagnetic energy in the cavities. An iris connecting the adjacent cavities allows electromagnetic energy to flow from one cavity to the next. The iris is shaped to cause the iris mode passband to be lower in frequency than the cavity mode passband while still providing broadband frequency response. In addition, the present coupled cavity circuit operates on an electron beam to interact with the third space harmonic of the second passband (the cavity passband) of the electromagnetic signal. Preferably, this interaction occurs on the second passband as this operational design provides output with higher frequencies without decreasing the cavity size. Furthermore, this operational design provides more frequencies with no increase to the iris size. This results in allowing higher power to be provided to the circuit without thermal degradation of the circuit. Also, because the interaction occurs on the third space harmonic of the second passband, the present operational design results in providing flatter frequency responses.

Abstract translation: 用于微波电子管的耦合空腔电路包括彼此相邻的至少两个谐振腔。 电子束隧道通过耦合的空腔电路，以允许电子束通过并与空腔中的电磁能相互作用。 连接相邻腔的虹膜允许电磁能量从一个空腔流到下一个空腔。 虹膜被成形为使得虹膜模式通带在频率上低于腔模式通带，同时仍然提供宽带频率响应。 此外，本耦合腔电路对电子束进行操作，以与电磁信号的第二通带（空腔通带）的第三空间谐波相互作用。 优选地，这种相互作用发生在第二通带上，因为该操作设计提供具有更高频率的输出而不减小腔体尺寸。 此外，该操作设计提供更多的频率，而不增加虹膜尺寸。 这导致允许向电路提供更高的功率而不会导致电路的热降解。 此外，由于相互作用发生在第二通带的第三空间谐波上，所以当前的操作设计导致提供较平坦的频率响应。

公开(公告)号：US20020180385A1

公开(公告)日：2002-12-05

申请号：US10168041

申请日：2002-06-13

Inventor： Frederic Ferrieu

IPC: H01J023/00

CPC classification number: G01J4/00 ,  G01N21/211

Abstract: A spectroscopic ellipsometer comprising a light source (1) emitting a light beam, a polarizer (2) placed on the path of the light beam emitted by the light source, a sample support (9) receiving the light beam output from the polarizer, a polarization analyzer (3) for passing the beam reflected by the sample to be analyzed, a detection assembly which receives the beam from the analyzer and which comprises a monochromator (5) and a photodetector (4), and signal processor means (6) for processing the signal output from said detection assembly, and including counting electronics (13). Cooling means (12) keep the detection assembly at a temperature below ambient temperature, thereby minimizing detector noise so as to remain permanently under minimum photon noise conditions. It is shown that the optimum condition for ellipsometric measurement is obtained by minimizing all of the sources of noise (lamps, detection, ambient).

Abstract translation: 一种分光椭偏仪，包括发射光束的光源（1），放置在由光源发射的光束的路径上的偏振器（2），接收从偏振器输出的光束的样品支撑体（9） 偏振分析器（3），用于使待分析样品反射的光束通过;检测组件，其接收来自分析仪的光束，其包括单色仪（5）和光电检测器（4）;以及信号处理器装置 处理从所述检测组件输出的信号，并且包括计数电子装置（13）。 冷却装置（12）将检测组件保持在低于环境温度的温度，从而使检测器噪声最小化，以保持永久在最小光子噪声条件下。 显示椭圆测量的最佳条件是通过最小化所有噪声源（灯，检测，环境）获得。

公开(公告)号：US20020008450A1

公开(公告)日：2002-01-24

申请号：US09801046

申请日：2001-03-08

Inventor： Hirofumi Tanaka

IPC: H01K001/00 ,  H01J001/00 ,  H05H007/00 ,  H01J023/00 ,  H01J023/34 ,  H01J025/00

CPC classification number: H05H9/00 ,  H01J2223/10

Abstract: A continuous wave electron-beam accelerator that accelerates a continuous wave electron beam having a large average current includes an electron beam generator 11, an electron-beam accelerating unit 13 using a radio-frequency electric field having a frequency of approximately 500 MHz to accelerate an continuous wave electron beam, and electron-beam bending units 14, 15, 16 that are provided across the electron-beam accelerating unit and that bend the continuous wave electron beam a number of times. Each electron-beam bending unit includes divided magnets 15,16 having identical-polarity magnetic fields, and controls the continuous wave electron beam to pass through the electron-beam acceleration unit 13 a number of times on almost the same path.

Abstract translation: 加速具有大平均电流的连续波电子束的连续波电子束加速器包括电子束发生器11，使用具有大约500MHz的频率的射频电场的电子束加速单元13，以加速 连续波电子束和电子束弯曲单元14,15,16，其设置在电子束加速单元两端并使连续波电子束弯曲多次。 每个电子束弯曲单元包括具有相同极性磁场的分割磁体15,16，并且控制连续波电子束在几乎相同的路径上多次通过电子束加速单元13。